Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 61-168900-00 | GaSonics | GaSonics | CNTRLR,PROCESS GAS VALVE | New OEM | Contact Us |
| 61-2307 | GaSonics | GaSonics | POWER SUPPLY, 115VAC-24VDC | New OEM | Contact Us |
| 61-2308 | GaSonics | GaSonics | POWER SUPPLY, 115VAC-, +5, -15, +15VDC | New OEM | Contact Us |
| 61-2311 | GaSonics | GaSonics | POWER SPLY, 250 VAC INP, 12V OUT,SWITCHI | New OEM | Contact Us |
| 61-2313 | GaSonics | GaSonics | POWER SUPPLY, 110 VAC-24 VDC, 4.6 AMPS | New OEM | Contact Us |
| 61-2318-01 | GaSonics | GaSonics | PWR SPLY, 40W, 50/60 HZ, UNIV INPUT +5V, | New OEM | Contact Us |
| 61-2318-02 | GaSonics | GaSonics | POWER SUPPLY, + 24V, 40 W,50/60HZ, UNIVERSAL IN | New OEM | Contact Us |
| 61-2337/RW | GaSonics | GaSonics | RF POWER SUPPLY | New OEM | Contact Us |
| 61-2344 | GaSonics | GaSonics | BATTERY, ROBOT BR9401882-A | New OEM | Contact Us |
| 61-2345 | GaSonics | GaSonics | BATTERY, CONTROLLER (ER6VC3) | New OEM | Contact Us |
| 61-2348 | GaSonics | GaSonics | POWER SUPPLY,300W,5V,24,15,-15 | New OEM | Contact Us |
| 61-2351 | GaSonics | GaSonics | DC Power Supply (DC5V 6A) | New OEM | Contact Us |
| 61-2354 | GaSonics | GaSonics | POWER SUPPLY, UV LAMP | New OEM | Contact Us |
| 61-2390 | GaSonics | GaSonics | POWER SUPPLY,COMPUTER, GAMMA 300MM | New OEM | Contact Us |
| 61-324167-00 | GaSonics | GaSonics | OEM SPARE, CPU BOARD WITH MEMORY | New OEM | Contact Us |
| 61-344670-00 | GaSonics | GaSonics | OEM SPARE,E/R MOTOR ASSEMBLY | New OEM | Contact Us |
| 61-344671-00 | GaSonics | GaSonics | OEM SPARE,Z AXIS MOTOR ASSEMBLY | New OEM | Contact Us |
| 61-344672-00 | GaSonics | GaSonics | OEM SPARE,THETA AXIS MOTOR ASSEMBLY | New OEM | Contact Us |
| 61-344673-00 | GaSonics | GaSonics | OEM SPARE,BELT MXL 0.080" THETA B | New OEM | Contact Us |
| 61-344674-00 | GaSonics | GaSonics | OEM SPARE,BELT MXL 0.080" ZBOT 2 THETA A | New OEM | Contact Us |
| 61-346858-00 | GaSonics | GaSonics | OEM SPARE,BELT MXL 0.080" THETA A | New OEM | Contact Us |
| 61-346859-00 | GaSonics | GaSonics | OEM SPARE,BELT MXL 0.080 Z-AXIS | New OEM | Contact Us |
| 61-346860-00 | GaSonics | GaSonics | OEM SPARE,BELT MXL 0.080" E/R | New OEM | Contact Us |
| 61-356145-00 | GaSonics | GaSonics | OEM SPARE,BELT MXL 0.080,1/8 WIDTH,E/R | New OEM | Contact Us |
| 61-449836-00 | GaSonics | GaSonics | LEAD SCREW,ACME SCREW REPLACEMENT,XY TAB | New OEM | Contact Us |
| 63-2128 | GaSonics | GaSonics | BRAID, EXPANDABLE,1.75 INCH DIA. | New OEM | Contact Us |
| 63-268605-00 | GaSonics | GaSonics | KIT,BRACKET, AUTO SWITCH | New OEM | Contact Us |
| 63-275132-00 | GaSonics | GaSonics | OEM SPARE,4-PORT CABLE/DSL ROUTER,PEP,NETGEAR,10/100 MBPS | New OEM | Contact Us |
| 63-277487-00 | GaSonics | GaSonics | OEM SPARE,SAPPHIRE TUBE, 0.090 THK,APPLI | New OEM | Contact Us |
| 63-344575-00 | GaSonics | GaSonics | OEM SPARE,ROBOT,Z-BOT 2 PLUS,L3510/A3010 | New OEM | Contact Us |
| 63-344575-00/RW | GaSonics | GaSonics | OEM SPARE,ROBOT,Z-BOT 2 PLUS,L3510/A3010 | New OEM | Contact Us |
| 63-358938-00 | GaSonics | GaSonics | OEM SPARE,SLIDE,3 SECTION,100-125 LBS | New OEM | Contact Us |
| 63-8014-03 | GaSonics | GaSonics | OUTLET, AC, DUPLEX (WAS 71483-03) | New OEM | Contact Us |
| 63-8041 | GaSonics | GaSonics | ADAPTER,D9(FEMALE) TO D25(MALE) SERIAL | New OEM | Contact Us |
| 68-2264 | GaSonics | GaSonics | PWA, ANALOG OUTPUT | New OEM | Contact Us |
| 68-2279 | GaSonics | GaSonics | CONTROLLER, TEMPERATURE,100-240VAC, 50/ | New OEM | Contact Us |
| 685-158382-001 | GaSonics | GaSonics | MDL,ELEC,COMP,IRIDIA CLSTR & PCM CONT | New OEM | Contact Us |
| 70000-27 | GaSonics | GaSonics | RESISTOR CARBON 1/4W5% 120 OHM | New OEM | Contact Us |
| 70058-02 | GaSonics | GaSonics | CAP TUBULAR 50PF 7.5KVDC | New OEM | Contact Us |
| 70109-03 | GaSonics | GaSonics | DIODE MR510 MOTOROLA | New OEM | Contact Us |
| 70-2008 | GaSonics | GaSonics | THERMOCOUPLE PROBE,304SS TYPE K,.020DIA | New OEM | Contact Us |
| 70-2015 | GaSonics | GaSonics | THERMOCOUPLE, TYPE K 15 FT TEFLON LEADS | New OEM | Contact Us |
| 70-2020 | GaSonics | GaSonics | WAFER, THERMOCOUPLE,200MM, 3 LOCATIONS | New OEM | Contact Us |
| 70-2028 | GaSonics | GaSonics | THERMOCOUPLE, K-TYPE | New OEM | Contact Us |
| 70953-02 | GaSonics | GaSonics | RELAY,S/S PWR-5VDC-25A/240 VAC | New OEM | Contact Us |
| 70963-04 | GaSonics | GaSonics | RELAY DPDT 12VAC | New OEM | Contact Us |
| 70963-06 | GaSonics | GaSonics | RELAY 24VDC 3PDT P&B | New OEM | Contact Us |
| 70963-07 | Gasonics | Gasonics | RELAY,GP-DPDT,24VAC,10AMPS | New OEM | Contact Us |
| 70964-03 | GaSonics | GaSonics | RELAY, GP-DPDT,24VDC, 10AMP | New OEM | Contact Us |
| 70980-01 | GaSonics | GaSonics | CIRCUIT BRKR,30A-2P,120/240V | New OEM | Contact Us |
| 70989-20 | Gasonics | Gasonics | SPACER ALUM #6-32X.375LG | New OEM | Contact Us |
| 71002-05 | GaSonics | GaSonics | O-RING, 2-005, .101 ID X .070 W, VITON | New OEM | Contact Us |
| 71002-12 | GaSonics | GaSonics | O-RING, 2-012, .364 ID X .070 W, VITON | New OEM | Contact Us |
| 71003-13 | GaSonics | GaSonics | O-RING, 2-114, .612 ID X .103 W, VITON | New OEM | Contact Us |
| 71003-15 | GaSonics | GaSonics | O-RING, 2-116, .737 ID X .103 W, VITON | New OEM | Contact Us |
| 71003-19 | GaSonics | GaSonics | O-RING, 2-120, .987 ID X .103 W, VITON | New OEM | Contact Us |
| 71003-20 | GaSonics | GaSonics | O-RING, 2-121, 1.049 ID X .103 W, VITON | New OEM | Contact Us |
| 71004-16 | GaSonics | GaSonics | (METRO) O RING 1-1/8 ID PARKER 2-216 | New OEM | Contact Us |
| 71004-17 | GaSonics | GaSonics | O-RING, 2-217, 1.178 ID X .139 W, VITON | New OEM | Contact Us |
| 71004-19 | GaSonics | GaSonics | O-RING, 2-219, 1.296 ID X .139 W, VITON | New OEM | Contact Us |
| 71004-60 | GaSonics | GaSonics | O-RING, 2-260, 6.484 ID X .139 W, VITON | New OEM | Contact Us |
| 71004-61 | GaSonics | GaSonics | O-RING, 2-261, 6.734 ID X .139 W, VITON | New OEM | Contact Us |
| 71004-76 | GaSonics | GaSonics | O-RING, 2-276,10.984 ID X .139 W,VITON, | New OEM | Contact Us |
| 71005-10 | GaSonics | GaSonics | O-RING, 2-318, .975 ID X .210 W, VITON | New OEM | Contact Us |
| 71005-68 | GaSonics | GaSonics | O-RING, 2-376, 9.725 ID X .210, VITON V8 | New OEM | Contact Us |
| 71005-70 | GaSonics | GaSonics | O-RING, 2-378, 10.475 ID X .210 W,VITON, V 884 | New OEM | Contact Us |
| 71008-16 | GaSonics | GaSonics | O-RING 2-117, .799 ID X .103 W, SILICON | New OEM | Contact Us |
| 71023-05 | GaSonics | GaSonics | BEARING,RADIAL 1/4 IN IDX3/4 IN OD | New OEM | Contact Us |
| 71047-04 | GaSonics | GaSonics | BEARING,BRNZ 1/4 IN IDX1/2 FT L | New OEM | Contact Us |
| 71209-01 | GaSonics | GaSonics | SOCKET, RELAY, 8 PIN | New OEM | Contact Us |
| 71244-02 | GaSonics | GaSonics | TRANSFORMER PWR 115-230 | New OEM | Contact Us |
| 71-269778-00 | GaSonics | GaSonics | TOOL,GRIPWRENCH, 2 PC. | New OEM | Contact Us |
| 71275-02 | GaSonics | GaSonics | FAN 220V 760-120VZ-281-11220 | New OEM | Contact Us |
| 71311-01 | GaSonics | GaSonics | LAMP TI 3/4 SUBMINI 28V | New OEM | Contact Us |
| 71325-22 | GaSonics | GaSonics | FUSE,3AG,250V | New OEM | Contact Us |
| 71326-25 | GaSonics | GaSonics | FUSE 30AMP 600V | New OEM | Contact Us |
| 71353-02 | GaSonics | GaSonics | ALARM, AUDIBLE SC-110 MALLORY | New OEM | Contact Us |
| 71357-01 | GaSonics | GaSonics | TUBE OSCILLATOR RCA 6JT6A | New OEM | Contact Us |
| 71414-01 | GaSonics | GaSonics | CONN, PLUG, 2 POS, M-N-L, AMP | CE! | New OEM | Contact Us |
| 71417-01 | GaSonics | GaSonics | CONN, PLUG 3 POS,INLINE | New OEM | Contact Us |
| 71417-02 | GaSonics | GaSonics | 3 Pin Pin Black Micro Plug and 4 Pin Red Micro Plug | New OEM | Contact Us |
| 71423-01 | GaSonics | GaSonics | CONT, F, 24-18 AWG,CRP, MNL AMP | New OEM | Contact Us |
| 71438-02 | GaSonics | GaSonics | CONN, F, PNL MT, 19 POS, 16 AWG | New OEM | Contact Us |
| 71479-02 | GaSonics | GaSonics | OUTLET 3WIRE GRND 20A 250VOLTS | New OEM | Contact Us |
| 71480-03 | GaSonics | GaSonics | FLANGED,INLET,MALE-LKNS,L5-2OP | New OEM | Contact Us |
| 71652-02 | GaSonics | GaSonics | I.C., INTERFACE, PRPHL, PROGRAMMABLE | New OEM | Contact Us |
| 71662-08 | GaSonics | GaSonics | SCREW, SCH CAP, 4-40 X 1/2 L, SST, VEN | New OEM | Contact Us |
| 71747-01 | GaSonics | GaSonics | DISC SPRING 283ID X .551OD | New OEM | Contact Us |
| 71747-03 | GaSonics | GaSonics | WASHER, SPRING, .317X.625 | New OEM | Contact Us |
| 71752-10 | GaSonics | GaSonics | WASHER,NYLON-FLT,.31 IDX.50D | New OEM | Contact Us |
| 71755-13 | GaSonics | GaSonics | GROMMET, 3/8 ID, X 1/16 GR, RUBBER | New OEM | Contact Us |
| 71805-01 | GaSonics | GaSonics | WINDOW QTZ 1.25 DIA S 1/8 IN | New OEM | Contact Us |
| 71835-04 | GaSonics | GaSonics | SHAFT,PREC GND SST-.2497DX1.75 | New OEM | Contact Us |
| 71835-16 | GaSonics | GaSonics | SHAFT,PREC GND SST-.2497DX4.75 | New OEM | Contact Us |
| 71835-23 | GaSonics | GaSonics | SHAFT,PREC.GND SST1/4 IN DX7.75LG | New OEM | Contact Us |
| 71858-05 | GaSonics | GaSonics | RETAINER,RING .023THKX.223ID | New OEM | Contact Us |
| 71961-03 | GaSonics | GaSonics | CLAMP, WING NUT (NW40) | CE! | New OEM | Contact Us |
| 71964-05 | GaSonics | GaSonics | CLAMP, HOSE GRIP RANGE 1 1/16 TO 2 INCH | New OEM | Contact Us |
| 71964-11 | GaSonics | GaSonics | CLAMP, HOSE GRIP RANGE 2 9/16 TO 3 1/2 I | New OEM | Contact Us |
| 71965-03 | GaSonics | GaSonics | CLAMP,HOSE MINI SST-1/2-29/32IN | New OEM | Contact Us |