Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 18-4017 | GaSonics | GaSonics | SCREW, SCH, 10-32 X 2 L, SST | New OEM | Contact Us |
| 18-4073 | GaSonics | GaSonics | SCREW, SET, 4-40 X 1/4 L, SS | New OEM | Contact Us |
| 18-4119 | GaSonics | GaSonics | SCREW, PH FLHD,10-32 X 1/4 L, SST | New OEM | Contact Us |
| 18-4130 | GaSonics | GaSonics | SCREW, SET, 6-32 X 3/16 L ,SST (Cup Point) | New OEM | Contact Us |
| 19-0431-40 | GaSonics | GaSonics | NUT, KEP, 4-40, SS. | New OEM | Contact Us |
| 19-0437-00 | GaSonics | GaSonics | WSHR,LOCK,SPLIT,#4,SST | New OEM | Contact Us |
| 19-0476-00 | GaSonics | GaSonics | WASHER, FLAT, #4,.125 ID X .312 X OD | New OEM | Contact Us |
| 19-0476-01 | GaSonics | GaSonics | WASHER, FLAT No. 4 X .250 OD, SST | New OEM | Contact Us |
| 19-0486-00 | GaSonics | GaSonics | WSHR,FLAT,#4,FIBER | New OEM | Contact Us |
| 19-0631-32 | GaSonics | GaSonics | NUT, HEX 6-32, KEP 5/16 | New OEM | Contact Us |
| 19-0636-00 | GaSonics | GaSonics | WASHER, #6 FLAT, SST | New OEM | Contact Us |
| 19-0637-00 | GaSonics | GaSonics | WASHER, #6, SPLIT LOCK, SST | New OEM | Contact Us |
| 19-0819-00 | GaSonics | GaSonics | WSHR,LOCK,EXT-STAR,8,SST | New OEM | Contact Us |
| 19-0830-32 | GaSonics | GaSonics | NUT, HEX 8-32, SS | New OEM | Contact Us |
| 19-0836-00 | GaSonics | GaSonics | WSHR,FLAT,#8,SS | New OEM | Contact Us |
| 19-0837-00 | GaSonics | GaSonics | WSHR, LOCK, SPLIT, #8, SST | New OEM | Contact Us |
| 19-1036-00 | GaSonics | GaSonics | WASHER, #10, FLAT,.062 THK, SST | New OEM | Contact Us |
| 19-1038-00 | GaSonics | GaSonics | WASHER, #10 EXT STAR SST | New OEM | Contact Us |
| 19-1099-00 | GaSonics | GaSonics | WSHR, LOCK, EXT-STAR, #10, BRONZE | New OEM | Contact Us |
| 19-170769-00 | Gasonics | Gasonics | MOD PULLEY ROTATION | New OEM | Contact Us |
| 19-173869-00 | GaSonics | GaSonics | MOD,CLAMP, MOTOR SHAFT, ELEVATOR | New OEM | Contact Us |
| 19-177242-00 | GaSonics | GaSonics | FTG,TUBE,UNION AL CONNECTOR, ULTRA TORR | New OEM | Contact Us |
| 19-2231-20 | GaSonics | GaSonics | NUT, 1/4-20, KEP SS | New OEM | Contact Us |
| 19-2236-00 | GaSonics | GaSonics | WSHR,1/4 FLAT,.265 ID X .500 OD X .063 THK,SST | New OEM | Contact Us |
| 19-2236-00-02 | GaSonics | GaSonics | WASHER, 1/4 I.D. X 11/16 O.D. FLAT, SST | CE! | New OEM | Contact Us |
| 19-2237-00 | GaSonics | GaSonics | WASHER, SPLIT LOCK 1/4 ID X 1/2 OD, SST | New OEM | Contact Us |
| 19-263635-00 | GaSonics | GaSonics | BELT,TIMING,.2,.375IN,172,MOD | New OEM | Contact Us |
| 19-2680 | GaSonics | GaSonics | NUT, HEX, 5/16-18 UNC, TITANIUM | New OEM | Contact Us |
| 19-2698 | GaSonics | GaSonics | NUT, 3/8-24, JAM | New OEM | Contact Us |
| 19-273862-00 | GaSonics | GaSonics | TUBE,.394IN,.200IN,SAPPHIRE,MOD | New OEM | Contact Us |
| 19-347020-00 | GaSonics | GaSonics | WSHR,BEARING,LOCK,WS-07,SST,MOD | New OEM | Contact Us |
| 19-4000 | GaSonics | GaSonics | WSHR,LOCK,EXT-STAR,#8,SS | New OEM | Contact Us |
| 19-4043 | GaSonics | GaSonics | NO.8 FLAT WASHER BRASS | New OEM | Contact Us |
| 20-0014-01 | GaSonics | GaSonics | FTG,CONNECTOR,MALE,1/8 X 1/8 | New OEM | Contact Us |
| 20-0023-01 | GaSonics | GaSonics | FITTING, ELBOW, UNION, 1/4 IN | New OEM | Contact Us |
| 20-0067-01 | GaSonics | GaSonics | FTG, CONNECTOR,PORT, 1/4 | New OEM | Contact Us |
| 20-0079 | GaSonics | GaSonics | FITTING KIT, DI WATER PUMP | New OEM | Contact Us |
| 20-0137 | GaSonics | GaSonics | FITTING, ELBOW, 1/8 NPT | New OEM | Contact Us |
| 20-0219-01 | GaSonics | GaSonics | GASKET, VCR, 1/2 IN, SST | New OEM | Contact Us |
| 20-0285-01 | GaSonics | GaSonics | FTG,ADAPTER,#10-32 TO 1/8 NPT | New OEM | Contact Us |
| 20-0352 | GaSonics | GaSonics | FTG,NIPPLE,LONG,HEX | New OEM | Contact Us |
| 20-0353 | GaSonics | GaSonics | FTG,COUPLING-HEX | New OEM | Contact Us |
| 20-1115 | GaSonics | GaSonics | FITTING, BULKHEAD, TUBE CONNECTION | New OEM | Contact Us |
| 20-1136 | GaSonics | GaSonics | FTG, ADAPTER, 1/4 HOSE X 1/4 TUBE | New OEM | Contact Us |
| 20-1198 | GaSonics | GaSonics | FITTING | New OEM | Contact Us |
| 20-1222 | GaSonics | GaSonics | BACK FERRULE, .12 NOMINAL | New OEM | Contact Us |
| 20-1242 | GaSonics | GaSonics | FITTING, FEMALE ELBOW, 4 MM TUBE,PUSH X M5 FPT | New OEM | Contact Us |
| 20-1245 | GaSonics | GaSonics | FITTING, ADAPTOR,(4 MM) 5/32 TUBE,PUSH X 10-32 UNF | New OEM | Contact Us |
| 20-1268 | GaSonics | GaSonics | POSITIONABLE MALE ELBOW 1/4 T X 3/8SAE | New OEM | Contact Us |
| 20-1283 | GaSonics | GaSonics | Fitting, adaptor, 1/4 Hose x 1/8 NPT | New OEM | Contact Us |
| 20-1290 | GaSonics | GaSonics | FILTER ELEMENT,(I-34S-A) | New OEM | Contact Us |
| 20-1292 | GaSonics | GaSonics | COUPLING, AIR TUBE,(STRAIGHT) | New OEM | Contact Us |
| 20-1293 | GaSonics | GaSonics | COUPLING, AIR TUBE (ELBOW) | New OEM | Contact Us |
| 20-1312 | GaSonics | GaSonics | FITTING, 1/4IN POSITIONABLE MALE ELBOW | New OEM | Contact Us |
| 20-1317 | GaSonics | GaSonics | FLANGE, SIDE MOUNTED RT ANGLE VCR | New OEM | Contact Us |
| 20-1319 | GaSonics | GaSonics | ELBOW, 1/8 NPT X 5/32 T | New OEM | Contact Us |
| 20-1335 | GaSonics | GaSonics | FILTER, GAS, MINI-GASKLEEN | CE! | New OEM | Contact Us |
| 20-1341 | GaSonics | GaSonics | MEMBRANE, TEFLON,142MM | New OEM | Contact Us |
| 20-170614-00 | GaSonics | GaSonics | BELT,POLYURETAN TIMING,BLADE | New OEM | Contact Us |
| 20-2303 | GaSonics | GaSonics | RING, CENTERING,O-RING AND SPACER, | New OEM | Contact Us |
| 20-2325 | GaSonics | GaSonics | TEE, BARBED, 3/16 IN | New OEM | Contact Us |
| 20-2333 | GaSonics | GaSonics | UNION, VCR, FEM 1/2 IN, SS | New OEM | Contact Us |
| 20-2349 | GaSonics | GaSonics | FITTING, 3/8 IN. QUICK DISCONN/STEM, BULK | New OEM | Contact Us |
| 20-2366 | GaSonics | GaSonics | FILTER,AIR,18.0X36.0X2.75 TO 3.062 HIGH | New OEM | Contact Us |
| 20-316914-00 | GaSonics | GaSonics | BELT,TIMING,9.2,.25IN,115,TEETH,LIFT | New OEM | Contact Us |
| 20-316918-00 | GaSonics | GaSonics | TIMIMG BELT-150 TEETH (ROTATE) | New OEM | Contact Us |
| 20-347143-00 | GaSonics | GaSonics | DUCT, WELDMENT, PROCESS VAPOR, RIGHT, WVDS | New OEM | Contact Us |
| 20-347144-00 | GaSonics | GaSonics | DUCT, WELDMENT, PROCESS VAPOR, MAIN, WVDS | New OEM | Contact Us |
| 20-8011-01 | GaSonics | GaSonics | 3/8 FILTER 7MICRON | New OEM | Contact Us |
| 20-8014-01 | GaSonics | GaSonics | FILTER, 1/4, VCR | New OEM | Contact Us |
| 20-9016 | GaSonics | GaSonics | CONN., 3/8 MNPT X 1/2 COMP, SS | New OEM | Contact Us |
| 21-0019-01 | GaSonics | GaSonics | REGULATOR,0-100 PSI | New OEM | Contact Us |
| 21-176891-00 | GaSonics | GaSonics | WSHR,FL,#10,LARGE OD,SST | New OEM | Contact Us |
| 21-2392 | GaSonics | GaSonics | SENSOR, WVDS PROXIMITY, NPN/NC24 | New OEM | Contact Us |
| 21-2393 | GaSonics | GaSonics | SENSOR, WVDS PROXIMITY, NPN/NO24 | New OEM | Contact Us |
| 21-2408 | GaSonics | GaSonics | SENSOR, RTD, 3/16 OD X 1 IN | New OEM | Contact Us |
| 21-2410 | GaSonics | GaSonics | CONTROLLER, FLOW,1/4 X 5/32 | New OEM | Contact Us |
| 21-2412 | GaSonics | GaSonics | SENSOR, MAGNETIC | New OEM | Contact Us |
| 21-2414 | GaSonics | GaSonics | ABSORBER, SHOCK | New OEM | Contact Us |
| 21-261356-00 | GaSonics | GaSonics | SCRW,SHLDR,.25 x 1IN,10-32,ALLOY STEEL,S | New OEM | Contact Us |
| 21-261359-00 | GaSonics | GaSonics | SCRW,SHLDR,.25 x 1.25IN,10-32,ALLOY STEE | New OEM | Contact Us |
| 22-0010-01 | GaSonics | GaSonics | VALVE, CHK, 100 PSI | New OEM | Contact Us |
| 22-00683-00 | GaSonics | GaSonics | TSEAL, 15/16 ID CHEMTEMP | New OEM | Contact Us |
| 22-0125-02 | GaSonics | GaSonics | VALVE,BELLOWS,HB,1/4 SWL,2 WAY | New OEM | Contact Us |
| 22-0138 | GaSonics | GaSonics | VALVE,VACUUM,NW50,W/O SOLENOID | New OEM | Contact Us |
| 22-0145 | GaSonics | GaSonics | VALVE,VAC INLINE,1 1/2, SST | New OEM | Contact Us |
| 22-0146 | GaSonics | GaSonics | VALVE, VACUUM,NW50, W/O SOLENOID | New OEM | Contact Us |
| 22-0156 | GaSonics | GaSonics | CYLINDER, W/CLEVIS,AIR | New OEM | Contact Us |
| 22-0201-02 | GaSonics | GaSonics | VALVE,THROTTLE,35MM,2-WAY | New OEM | Contact Us |
| 22-0303-03 | GaSonics | GaSonics | VALVE,SOLENOID,3-WAY,1/16 ORIFICE | New OEM | Contact Us |
| 22-0318-02 | GaSonics | GaSonics | VALVE, SOLONOID 24 VDC | New OEM | Contact Us |
| 22-033422-00 | GaSonics | GaSonics | O-RING,2-010,KALREZ 4079 | New OEM | Contact Us |
| 22-034192-00 | GaSonics | GaSonics | RESTRICTOR,FLOW,200 SCCM,N2 | CE! | New OEM | Contact Us |
| 22-1003 | GaSonics | GaSonics | VALVE, BELLOWS SEALED MANUAL 1/2 VCR, NU | New OEM | Contact Us |
| 22-1004 | GaSonics | GaSonics | VALVE, CHECK, 1/8 NPTF, 1 PSI, CRACKING P | New OEM | Contact Us |
| 22-10326-00 | GaSonics | GaSonics | O-RING,2-226,VITON | New OEM | Contact Us |
| 22-154908-00 | GaSonics | GaSonics | O-RING,2-225,8575KALREZ | New OEM | Contact Us |
| 22-164901-00 | GaSonics | GaSonics | FLTR,UHP, 1/2 VCR MALE TO MALE | CE! | New OEM | Contact Us |
| 22-170618-00 | GaSonics | GaSonics | PULLEY,MOTOR, BLADE | New OEM | Contact Us |
| 22-170628-00 | GaSonics | GaSonics | PULLEY,BOTTOM, BLADE | New OEM | Contact Us |