Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 01-4765 | GaSonics | GaSonics | Clamp Lift Ring | New OEM | Contact Us |
| 01-4780 | GaSonics | GaSonics | LOCATOR,WAFER,CERAMIC | New OEM | Contact Us |
| 01-4781 | GaSonics | GaSonics | SUPPORT, SPOOL, PEP PLUS | New OEM | Contact Us |
| 01-4812 | GaSonics | GaSonics | RETAINER, WINDOW,LAMP TRAY, IRIDIA-DL | New OEM | Contact Us |
| 01-4867 | GaSonics | GaSonics | CLAMP, HEATER PLATEN, PEP PLUS | New OEM | Contact Us |
| 01-4873 | GaSonics | GaSonics | RING, LIFT, PEP PLUS | New OEM | Contact Us |
| 01-4926 | Gasonics | Gasonics | COVER, SEAL LL | New OEM | Contact Us |
| 01-4928 | Gasonics | Gasonics | SEAL, FIRST, LL | New OEM | Contact Us |
| 01-4929 | Gasonics | Gasonics | SEAL, SECOND, LL | New OEM | Contact Us |
| 01-4938 | Gasonics | Gasonics | INSERT, CERAMIC, RF | New OEM | Contact Us |
| 01-4951 | GaSonics | GaSonics | HOUSING, IDLER,BLADE | New OEM | Contact Us |
| 01-4953 | GaSonics | GaSonics | SHAFT, DRIVER, LL | CE! | New OEM | Contact Us |
| 01-4957 | GaSonics | GaSonics | SHAFT, IDLER, LL | CE! | New OEM | Contact Us |
| 01-4966 | GaSonics | GaSonics | PLATE, IDLER | New OEM | Contact Us |
| 01-4978 | GaSonics | GaSonics | SHAFT, ENCODER, ATM ROBOT | New OEM | Contact Us |
| 01-4986 | GaSonics | GaSonics | DISC, ALUMINIUM, RO | New OEM | Contact Us |
| 01-4989 | GaSonics | GaSonics | GAS INLET, RF | New OEM | Contact Us |
| 01-4990 | GaSonics | GaSonics | STANDOFF, HEATER STAGE | New OEM | Contact Us |
| 01-4991 | GaSonics | GaSonics | COMPRESSOR, RF | New OEM | Contact Us |
| 01-4992 | GaSonics | GaSonics | CLAMP, PIN, RO | New OEM | Contact Us |
| 01-4993 | GaSonics | GaSonics | PLUG, RF | New OEM | Contact Us |
| 01-4997 | GaSonics | GaSonics | BAR, TENSIONER BLADE, ATM ROBOT | New OEM | Contact Us |
| 01-4999 | GaSonics | GaSonics | PIN,OUTER,RIGHT,ROTATION | New OEM | Contact Us |
| 01-5006 | GaSonics | GaSonics | PIN,OUTER,LEFT,ROTATION | New OEM | Contact Us |
| 01-5179 | GaSonics | GaSonics | STEM, BLADE MTG.,BLADE | New OEM | Contact Us |
| 01-5184 | GaSonics | GaSonics | CTR, PAD C | New OEM | Contact Us |
| 01-5191 | GaSonics | GaSonics | SHAFT, MAIN RO | New OEM | Contact Us |
| 01-5226 | GaSonics | GaSonics | LOCKER RO | New OEM | Contact Us |
| 01-5323 | GaSonics | GaSonics | CTR, PAD A | New OEM | Contact Us |
| 01-5346 | GaSonics | GaSonics | CTR, PAD, B | New OEM | Contact Us |
| 01-5356 | GaSonics | GaSonics | CLAMP, UPPER BLADE | New OEM | Contact Us |
| 01-5359 | GaSonics | GaSonics | HOLDER, BLOCK | New OEM | Contact Us |
| 01-5361 | GaSonics | GaSonics | PLATE,COOLING STATION,PEP | New OEM | Contact Us |
| 01-5362 | GaSonics | GaSonics | HOLDER, TUBE, RF | New OEM | Contact Us |
| 01-5369 | GaSonics | GaSonics | CASTING, IDLER,BLADE | New OEM | Contact Us |
| 01-5376 | GaSonics | GaSonics | TENSIONER, BLADE | New OEM | Contact Us |
| 01-5392 | GaSonics | GaSonics | STEM, ATM ROBOT | New OEM | Contact Us |
| 01-5393 | GaSonics | GaSonics | BLADE, BASE, ATM ROBOT | New OEM | Contact Us |
| 01-5394 | GaSonics | GaSonics | ROD, INDEX, ATM ROBOT | New OEM | Contact Us |
| 01-5396 | Gasonics | Gasonics | SHOWER HEAD, GDP 200MM, | New OEM | Contact Us |
| 01-5399 | GaSonics | GaSonics | VACUUM CUP,TITLE#2, ATM ROBOT | New OEM | Contact Us |
| 01-5405 | GaSonics | GaSonics | BAR, HOLDING, ATM ROBOT | New OEM | Contact Us |
| 01-5407 | GaSonics | GaSonics | PLATE, TOP, ATM ROBOT | New OEM | Contact Us |
| 01-5417 | GaSonics | GaSonics | SHOWER HEAD | New OEM | Contact Us |
| 01-5418 | GaSonics | GaSonics | BASE, SLIDER, ATM ROBOT | New OEM | Contact Us |
| 01-5426 | GaSonics | GaSonics | ARM CAM | New OEM | Contact Us |
| 01-5430 | GaSonics | GaSonics | BASE, MOTOR CENTERING | New OEM | Contact Us |
| 01-5431 | GaSonics | GaSonics | CASE, LIP, SEAL | New OEM | Contact Us |
| 01-5432 | GaSonics | GaSonics | PULLEY, I | New OEM | Contact Us |
| 01-5435 | GaSonics | GaSonics | CLAMP, CENTERING | New OEM | Contact Us |
| 01-5436 | GaSonics | GaSonics | PLATE, MOTOR | New OEM | Contact Us |
| 01-5438 | GaSonics | GaSonics | HOLDER, LIP SEAL | New OEM | Contact Us |
| 01-5441 | GaSonics | GaSonics | CUP, LIP SEAL | New OEM | Contact Us |
| 01-5451 | Gasonics | Gasonics | FLEXURE | New OEM | Contact Us |
| 01-5458 | GaSonics | GaSonics | FLAG, CASSETTE,SENSING | New OEM | Contact Us |
| 01-5470 | GaSonics | GaSonics | SHAFT, MAIN CENTERING | New OEM | Contact Us |
| 01-5477 | GaSonics | GaSonics | BAR, LEFT,CENTERING | New OEM | Contact Us |
| 01-5553 | GaSonics | GaSonics | SET SCREW, M4X.25,ALUMINUM | New OEM | Contact Us |
| 01-5813 | GaSonics | GaSonics | HOLDER, LIFT PIN,IRIDIA-DL | New OEM | Contact Us |
| 01-5821 | GaSonics | GaSonics | WINDOW, V-PORT,TOP, TRANSFER CHAMBER, GAMMA 2100 | New OEM | Contact Us |
| 01-5978 | GaSonics | GaSonics | SPACER, RING, SCOPE,IRIDIA-DL | New OEM | Contact Us |
| 01-5986 | GaSonics | GaSonics | RING LIFT, PIN 200MM, IRIDIA-DL | New OEM | Contact Us |
| 01-5988 | GaSonics | GaSonics | RETAINER, LIFT PIN,IRIDIA-DL | New OEM | Contact Us |
| 02-1257 | GaSonics | GaSonics | PANEL TOP | New OEM | Contact Us |
| 02-1485 | GaSonics | GaSonics | COVER, PC BOARD, LAMP FAILURE DETECTION | New OEM | Contact Us |
| 02-1543 | GaSonics | GaSonics | FLANGE, LEFT | New OEM | Contact Us |
| 02-1548 | GaSonics | GaSonics | BRACKET,LAMP HEATER,LAMP FAILURE DETECTI | New OEM | Contact Us |
| 02-1618 | GaSonics | GaSonics | BRKT,PIN STANDOFF, PASSIVE BACKPLANE | New OEM | Contact Us |
| 02-1627 | GaSonics | GaSonics | BRKT,HV CAP SUPPORT,A1000 | New OEM | Contact Us |
| 02-168036-00 | Gasonics | Gasonics | ASSY, AC POWER CONTROL, CLUSTER,JAPAN | New OEM | Contact Us |
| 02-1681 | GaSonics | GaSonics | ENCLOSURE,PLASMA,RIGHT,REACTOR CENTER | New OEM | Contact Us |
| 02-171654-00 | GaSonics | GaSonics | KEY,LANYARD, SAFETY,SWITCH, D | New OEM | Contact Us |
| 02-174313-00 | GaSonics | GaSonics | ASSY,WAFER-HANDLING,YASKAWA R | New OEM | Contact Us |
| 02-177007-00 | GaSonics | GaSonics | ASSY,RF MATCH BOX,MWH5,IRIDIA | New OEM | Contact Us |
| 02-2288 | GaSonics | GaSonics | ENCLOSURE, PLASMA,LEFT REACTOR CENTER | New OEM | Contact Us |
| 02-2585 | GaSonics | GaSonics | PLATE, COVER, DOCKING PANEL | New OEM | Contact Us |
| 02-260589-00/RW | GaSonics | GaSonics | ASSY, LAMP CONTROLLER | New OEM | Contact Us |
| 02-263840-00 | GaSonics | GaSonics | ASSY, STAGE, SINGLE HEATER, 200MM | New OEM | Contact Us |
| 02-2649 | Gasonics | Gasonics | PIN LIFT, SENSOR FLAG | New OEM | Contact Us |
| 02-265145-00 | GaSonics | GaSonics | ASSY,STAGE DOUBLE HEATER, 200MM | New OEM | Contact Us |
| 02-269278-00 | GaSonics | GaSonics | ASSY,UNIFIED PLASMA TUBE | New OEM | Contact Us |
| 02-2698 | GaSonics | GaSonics | SUPPORT, SPOOL,LEFT PLASMA ENCLOSURE | New OEM | Contact Us |
| 02-2708 | GaSonics | GaSonics | BRACKET, LIFT SENSOR, 6 IN PLATEN | New OEM | Contact Us |
| 02-283482-00 | GaSonics | GaSonics | ASSY,HARD DISK WITH OS/2,PEP | New OEM | Contact Us |
| 02-2872 | GaSonics | GaSonics | PANEL, ACCESS,UPPER-PROCESSOR FRAME | New OEM | Contact Us |
| 02-2873 | GaSonics | GaSonics | PNL ACCESS LOWER PROCESSOR | New OEM | Contact Us |
| 02-2880 | GaSonics | GaSonics | PANEL,ACCESS DOOR | New OEM | Contact Us |
| 02-2902 | GaSonics | GaSonics | SPACER, SCREW | New OEM | Contact Us |
| 02-2963 | GaSonics | GaSonics | BRACKET, FRONT PANEL ASSY | New OEM | Contact Us |
| 02-2972 | GaSonics | GaSonics | BRACKET, SPRT, WATER-LINE, 3510A | New OEM | Contact Us |
| 02-297366-00 | GaSonics | GaSonics | ASSY,TOP CAP, CLTC | New OEM | Contact Us |
| 02-297394-00 | GaSonics | GaSonics | ASSY,CLTC,IRIDIA | New OEM | Contact Us |
| 02-3019 | GaSonics | GaSonics | PANEL LEFT BRUSHED | New OEM | Contact Us |
| 02-3036 | GaSonics | GaSonics | COVER, PRESSURE RELIEF, PROCESS CHAMBER | New OEM | Contact Us |
| 02-3037 | GaSonics | GaSonics | DIAPHRAM, PRESSURE RELIEF, PROCESS CHAMBER | New OEM | Contact Us |
| 02-3102 | GaSonics | GaSonics | SHIELD, REAR LEFT BRUSHED #4 | New OEM | Contact Us |
| 02-323520-00 | GaSonics | GaSonics | ASSY,WAFER NEST, PROCESS CHAMBER, 8" | New OEM | Contact Us |
| 02-3244 | GaSonics | GaSonics | REFLECTOR, LAMP TRAY - GOLD PLATED | New OEM | Contact Us |
| 02-3311 | GaSonics | GaSonics | BRACKET, HEATER HOLDER | New OEM | Contact Us |
| 02-352037-00 | GaSonics | GaSonics | ASSY,TC MODULE,TYPE K,200MM | New OEM | Contact Us |