Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 73-0001-010 | Concept One | Novellus | LAMP, HALOGEN, 120V, 1000W | New OEM | Contact Us |
| 73-00234-01 | Concept One | Novellus | BOOK,C1-D,SIG6,OPER/MNT,REG | New OEM | Contact Us |
| 734-006776-001 | Concept One | Novellus | O-RING 5/32 ID X 1/16 C/S | New OEM | Contact Us |
| 734-218747-001 | Concept One | Novellus | O-RING, 31.12#ID X .275#W | New OEM | Contact Us |
| 73495-01 | Concept One | Novellus | RECTIFIER, SCR AC SW-4 | New OEM | Contact Us |
| 739-009401-001 | Concept One | Novellus | STATIC SEAL .625ID LOW/MED PR | New OEM | Contact Us |
| 742-218766-001 | Concept One | Novellus | GSKT, DOOR SEAL, LEFT LL | New OEM | Contact Us |
| 766-158146-001 | Concept One | Novellus | VLV,ISLN,1.5"ID,PNEU,DBL ACT,ISO-KF40 | New OEM | Contact Us |
| 79-00111-00 | Concept One | Novellus | TAG,OUTLET | New OEM | Contact Us |
| 79-110893-00 | Concept One | Novellus | LABEL,WARNING,RF,VOLT HAZ | New OEM | Contact Us |
| 796-093356-007 | Concept One | Novellus | ADPTR,RDCR,1/2FEM X 3/8MALE | New OEM | Contact Us |
| 797-309293-001 | Concept One | Novellus | MFC,C2F6,2SLM,1/4VCR,9PIN,D-SUB | New OEM | Contact Us |
| 797-309293-002 | Concept One | Novellus | MFC,5%PH3/N2,2SLM,1/4VCR,9PIN,D-SUB | New OEM | Contact Us |
| 839-007158-001 | Concept One | Novellus | WLDMNT,GS FD LN,FLX 1/4VCR-1/4 | New OEM | Contact Us |
| 856-286516-001 | Concept One | Novellus | KIT,RTRFT,RF GEN 3K,C2 ALTUS | New OEM | Contact Us |
| 857-160930-001 | Concept One | Novellus | KIT,CA,AC POWER, HF GEN, PARAMOUNT 6KW | New OEM | Contact Us |
| 857-175969-001 | Concept One | Novellus | KIT,REPLACEMENT,DI REG,MV200 | New OEM | Contact Us |
| 857-179784-001 | Concept One | Novellus | KIT,MNMTR,100TORR,CONN ADPTR & GSKT | New OEM | Contact Us |
| 857-207631-002 | Concept One | Novellus | KIT,POWER SUPPLY,24V | New OEM | Contact Us |
| 857-221014-001 | Concept One | Novellus | KIT,PM, REACTOR CHAMB | New OEM | Contact Us |
| 857-221017-001 | Concept One | Novellus | KIT,C2 WCVD/DCVD,CHAMBER SEALS | New OEM | Contact Us |
| 857-254807-001 | Concept One | Novellus | KIT, PWR SPLY, 15V | New OEM | Contact Us |
| 857-290413-101 | Concept One | Novellus | KIT,ASSY,LWR SPINDLE | New OEM | Contact Us |
| 857-293892-001 | Concept One | Novellus | KIT,SLOW SPINDLE,C2SEQ-X | New OEM | Contact Us |
| 99-056030-00 | Concept One | Novellus | GREASE, PUMP, 80G, BELLOWS TUBE | New OEM | Contact Us |
| A01-128-01 | Concept One | Novellus | PLUG, CHAMBER EOP | New OEM | Contact Us |
| A06-010-01 | Concept One | Novellus | TUBE,PLASMA,QUARTZ | New OEM | Contact Us |
| CPS01-19-00154-01 | Concept One | Novellus | HEATER BLK, C1 SEQUEL, 150MM PINNED, STA 1 | New OEM | Contact Us |
| CPS01-19-032015-01 | Concept One | Novellus | HEATER BLK,150MM, PINNED, Scribed slot | New OEM | Contact Us |
| CPS-03-00031 | Concept One | Novellus | ASSY,EXT PLTFRM,LOWER PCB | New OEM | Contact Us |
| CPS-04-000006 | Concept One | Novellus | KIT_RETRO_C1-D VIEW PORT W/COOL STATION | New OEM | Contact Us |
| CPS-04-00011 | Concept One | Novellus | KIT, PM, RPC, VAT ISOLATION VLV | New OEM | Contact Us |
| CPS-04-10021 | Concept One | Novellus | KIT D2000I LFC, 5ML, S6 TEOS UNDOPED | New OEM | Contact Us |
| CPS-04-10022 | Concept One | Novellus | KIT,RTRFT,C1 WATER FLOW SW | New OEM | Contact Us |
| CPS-04-10023 | Concept One | Novellus | KIT, C1D-200 RPC UPGRADE | New OEM | Contact Us |
| CPS-04-10028 | Concept One | Novellus | RETROFIT, C1 486 TO PENTIUM COMPUTER UPGRADE/ NO DIGIBOARD | New OEM | Contact Us |
| CPS-04-10035 | Concept One | Novellus | TEOS, UNDOPED, C1-200 | New OEM | Contact Us |
| CPS-04-10037 | Concept One | Novellus | KIT, MFC, 5SLM, N2, AERA FC7800CU, CEDG | New OEM | Contact Us |
| CPS-04-10046 | Concept One | Novellus | KIT, FIXTURE, GAP, SHOWER HEAD | New OEM | Contact Us |
| CPS-04-10047 | Concept One | Novellus | KIT, REPLACE 27-029889-00, PS, MEGAPAC 2, 7 OUTLET, 90V | New OEM | Contact Us |
| CPS-04-10049 | Concept One | Novellus | KIT, SPINDLE MOTOR REPLACEMENT, 150MM | New OEM | Contact Us |
| CPS-04-10050/B | Concept One | Novellus | KIT, SPINDLE MOTOR REPLACEMENT, 200MM | New OEM | Contact Us |
| CPS-04-10052 | Concept One | Novellus | KIT, FIXTURE, GAP, SHOWER HEAD,150MM | New OEM | Contact Us |
| CPS-04-10056 | Concept One | Novellus | KIT, SPACER TOOL, QUARTERLY PM, C1, INF | New OEM | Contact Us |
| CPS-04-10057 | Concept One | Novellus | KIT, NITRIDE TOOL, QUARTERLY PM, C1, INF | New OEM | Contact Us |
| CPS-04-10058 | Concept One | Novellus | KIT, SPACER TOOL, SEMI ANNUAL, C1, INF | New OEM | Contact Us |
| CPS-04-10059 | Concept One | Novellus | KIT, NITRIDE TOOL, SEMI ANNUAL, C1, INF | New OEM | Contact Us |
| CPS-04-10060 | Concept One | Novellus | KIT, ANNUAL PM, C1, INF | New OEM | Contact Us |
| CPS-04-10061 | Concept One | Novellus | KIT, 1 FILTER, PM, C1, INF | New OEM | Contact Us |
| CPS-04-10062 | Concept One | Novellus | KIT, 2 FILTER, PM, C1, INF | New OEM | Contact Us |
| CPS-04-10063 | Concept One | Novellus | KIT, HEATER GROUND, PM, C1, INF | New OEM | Contact Us |
| CPS-04-10064 | Concept One | Novellus | KIT, HEATER STRAP, PM, C1, INF | New OEM | Contact Us |
| CPS-04-10065 | Concept One | Novellus | KIT, RF STRAP, PM, C1, INF | New OEM | Contact Us |
| CPS-04-10066 | Concept One | Novellus | KIT, T-SEAL, PM, C1, INF | New OEM | Contact Us |
| CPS-04-10069 | Concept One | Novellus | KIT, DUO TOUCH SAFETY SWITCH, PEDESTAL MOUNT, C1 | New OEM | Contact Us |
| CPS-04-10070 | Concept One | Novellus | Kit, DUO TOUCH SAFETY SWITCH, WALL MOUNT, C1 | New OEM | Contact Us |
| CPS-04-10071 | Concept One | Novellus | KIT, VALVE STACK, C1, INF | New OEM | Contact Us |
| CPS-04-10072 | Concept One | Novellus | KIT, DIGITAL FLOW SWITCH, C1 | New OEM | Contact Us |
| CPS-04-10073 | Concept One | Novellus | KIT, C1 PENTIUM CPU WITH DIGI BOARD, 4.4331 SOFTWARE | New OEM | Contact Us |
| CPS-04-10078 | Concept One | Novellus | KIT, C1 SPECIALTY TOOLS | New OEM | Contact Us |
| CPS-04-10079 | Concept One | Novellus | KIT, PCA,TERM PNL,C1, WITH PACKAGING | New OEM | Contact Us |
| CPS-04-10080 | Concept One | Novellus | KIT, CONVERSION 4” & 6” NESTED CASSETTE | New OEM | Contact Us |
| CPS-04-10084 | Concept One | Novellus | KIT,CASSETTE DOOR CYLINDERS, C1 | New OEM | Contact Us |
| CPS-04-10102 | Concept One | Novellus | KIT,RETROFIT, RF GEN 3K, C1-150 | New OEM | Contact Us |
| CPS-04-10105 | Concept One | Novellus | KIT,RF GEN,PARAMOUNT,FIRST TIME BUY | New OEM | Contact Us |
| CPS-04-10109 | Concept One | Novellus | KIT, PRESSURE SWITCH, REPLACEMENT, C1 | New OEM | Contact Us |
| CPS-04-10112 | Concept One | Novellus | MFC, 20SLM, N2, UNIT 8100 | New OEM | Contact Us |
| CPS-04-10117 | Concept One | Novellus | KIT,RETROFIT,C1 POWER PCB AND 5V SENSE | New OEM | Contact Us |
| CPS-04-10119 | Concept One | Novellus | RETROKIT,UPGRADE,STEC SLOW START SA-H | New OEM | Contact Us |
| CPS-04-10122 | Concept One | Novellus | KIT, CONVERSION 4” & 6” NESTED CASSETTE 26 SLOT | New OEM | Contact Us |
| CPS-05-110416-01 | Concept One | Novellus | KIT,WINDOW,SAPPHIRE SINGLE EP | New OEM | Contact Us |
| CPS-05-110416-02 | Concept One | Novellus | KIT,WINDOW,SAPPHIRE DUAL EP | New OEM | Contact Us |
| CPS-10-30011 | Concept One | Novellus | TUBE ASSY, FILTER INLET, D2000i | New OEM | Contact Us |
| CPS-10-30012 | Concept One | Novellus | TUBE ASSY, OUT, DOPED, D2000i, STRAIGHT | New OEM | Contact Us |
| CPS-10-30013 | Concept One | Novellus | TUBE ASSY, D2000i, OUTLET, UNDOPED | New OEM | Contact Us |
| CPS-10-30014 | Concept One | Novellus | TUBE ASSY, OUTLET, D2000i, DOPED | New OEM | Contact Us |
| CPS-15-00050 | Concept One | Novellus | PADDLE, DIMPLE, CERAMIC, 150MM | New OEM | Contact Us |
| CPS-15-00052 | Concept One | Novellus | PLATE, PNL MTG, ADPTR | New OEM | Contact Us |
| CPS-15-00053 | Concept One | Novellus | FORK, CERAMIC, C1 | New OEM | Contact Us |
| CPS-15-00059 | Concept One | Novellus | MOUNT, MOTOR, 200MM | New OEM | Contact Us |
| CPS-15-00067 | Concept One | Novellus | PADDLE, DIMPLE 100/150MM OPTICAL PIN SEARCH | New OEM | Contact Us |
| CPS-15-00069 | Concept One | Novellus | TOOL, SHOWERHEAD FEEDTHRU, C1 & C2 | New OEM | Contact Us |
| CPS-15-00098 | Concept One | Novellus | PLATE,BOTTOM,CERAMIC,150MM,C1D | New OEM | Contact Us |
| CPS-15-00100 | Concept One | Novellus | FORK,CERAMIC,C1-150MM,FLAT | New OEM | Contact Us |
| CPS-17-20016 | Concept One | Novellus | PLATE, MTG, DC DIST, HINGED | New OEM | Contact Us |
| CPS-17-20017 | Concept One | Novellus | BRKT, MTG, D2000i LFC, RETRO | New OEM | Contact Us |
| CPS-19-00155-00/A | Concept One | Novellus | HTR BLK, NO SLOT, CONTINUOUS WELD | New OEM | Contact Us |
| CPS-19-00155-01 | Concept One | Novellus | HTR BLK, SLOTTED, CONTINUOUS WELD | New OEM | Contact Us |
| CPS-19-00155-03 | Concept One | Novellus | HTR BLK, SLOTTED, PINS ALL STA, 100MM, CONTINUOUS WELD | New OEM | Contact Us |
| CPS-19-00155-04 | Concept One | Novellus | HTR BLK, SLOTTED, PINS ALL STA, CONTINUOUS WELD | New OEM | Contact Us |
| CPS-19-00155-07 | Concept One | Novellus | HEATER ASSY, 150MM, C1D, MOD, CONTINUOUS WELD | New OEM | Contact Us |
| CPS-20048 | Concept One | Novellus | BONDED GAE INSERT W/ KALRAZ 9100 FOR PEND GATE VALVE | New OEM | Contact Us |
| CPS-20049 | Concept One | Novellus | KIT, SEALS PEND GATE VALVE W/ 9100 BONDED INSERT | New OEM | Contact Us |
| CPS-20076 | Concept One | Novellus | GAUGE,475 CONTROLLER, RoHS | New OEM | Contact Us |
| CPS-20095 | Concept One | Novellus | CONDITIONER, LINE POWER | New OEM | Contact Us |
| CPS-20104 | Concept One | Novellus | MFC,20SLM,N2,FC-R7710CD,ROHS with Cardedge Adaptor. | New OEM | Contact Us |
| CPS-20139 | Concept One | Novellus | 26 SLOT METAL CASSETTES 200MM | New OEM | Contact Us |
| CPS-20161 | Concept One | Novellus | ASSY, PS, MEGAPAC 2, 90V, 7 OUT | New OEM | Contact Us |
| CPS-20162 | Concept One | Novellus | MODULE,PS, 5V/20AT | New OEM | Contact Us |
| CPS-20163 | Concept One | Novellus | MODULE,PS, 5V/30AT | New OEM | Contact Us |