Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 27-029570-00 | Concept One | Novellus | DETECTOR, DUAL ENDPOINT | New OEM | Contact Us |
| 27-029573-00 | Concept One | Novellus | HEAD,FIBER OPTIC,30 DEG | New OEM | Contact Us |
| 27-029575-00 | Concept One | Novellus | HEAD,FIBER OPTIC, 45 DEG | New OEM | Contact Us |
| 27-032653-00 | Concept One | Novellus | TRAZAR MATCH 5KW W/ARC SENSOR | New OEM | Contact Us |
| 27-048040-00 | Concept One | Novellus | METER,PRESS SW,TMPR-PRF | New OEM | Contact Us |
| 27-08382-00 | Concept One | Novellus | TC, TYPE"E", 1/8DIA x 12 | New OEM | Contact Us |
| 27-100450-00 | Concept One | Novellus | ASSY,RADIAL AXIS SNSR PCB,BRKS | New OEM | Contact Us |
| 27-10114-00 | Concept One | Novellus | FEEDTHRU,HEATER SHORT,TEFLON | New OEM | Contact Us |
| 27-10127-00 | Concept One | Novellus | GATE,VAT 1.21 W/PERFL-E | New OEM | Contact Us |
| 27-10138-00 | Concept One | Novellus | METER,DC,DIGITAL, 4 1/2 | New OEM | Contact Us |
| 27-10324-00 | Concept One | Novellus | VALVE, 4WAY, SOL | New OEM | Contact Us |
| 27-10325-00 | Concept One | Novellus | VALVE,3WAY,SOL,SNGL SOL | New OEM | Contact Us |
| 27-10340-00 | Concept One | Novellus | CAP MANOMETER,HEATED 100 TORR | New OEM | Contact Us |
| 27-10343-00 | Concept One | Novellus | CAP MANOMETER,HEATED 10 TOR | New OEM | Contact Us |
| 27-10348-00 | Concept One | Novellus | VALVE,4WAY,SOL,SNGL SOL | New OEM | Contact Us |
| 27-103728-00 | Concept One | Novellus | PWR SPLY,+5V,+24V,100W | New OEM | Contact Us |
| 27-103729-00 | Concept One | Novellus | PWR SPLY,+/-15V,50W | New OEM | Contact Us |
| 27-104339-00 | Concept One | Novellus | DETECTOR,EP DUAL | New OEM | Contact Us |
| 27-115666-00 | Concept One | Novellus | CNTRLR,LL PRESS,651CD2S1B | New OEM | Contact Us |
| 27-118072-00 | Concept One | Novellus | MATCH FIXED REGEN SPEED | New OEM | Contact Us |
| 27-119976-00 | Concept One | Novellus | GAUGE, PHOTOHELIC, .5", TAMPERPRF | New OEM | Contact Us |
| 27-121645-00 | Concept One | Novellus | MATCH,TRAZAR,SEQ,IMP COOLING | New OEM | Contact Us |
| 27-124735-00 | Concept One | Novellus | PS/AC/DC, 5V, +/-15V, 65W | New OEM | Contact Us |
| 27-126062-00 | Concept One | Novellus | MANO,10 TORR,DSUB,1/2 VCR | New OEM | Contact Us |
| 27-126441-00 | Concept One | Novellus | PWR SPLY,5/8,12/2.5,-12/0.5,V/ | New OEM | Contact Us |
| 27-126667-00 | Concept One | Novellus | MAN,1000TORR,MKS,W/15PIN DSUB | CE! | New OEM | Contact Us |
| 27-126669-00 | Concept One | Novellus | VALVE,THROT,CNTRL,MKS | New OEM | Contact Us |
| 27-132651-00 | Concept One | Novellus | MATCH,FIXED DOME,REGEN,SPEED-S | New OEM | Contact Us |
| 27-146797-00 | Concept One | Novellus | DISPLAY,LOCAL,SETRA W.CONN | New OEM | Contact Us |
| 27-149449-00 | Concept One | Novellus | LFC,P2000I,5ML/MIN,TEOS | New OEM | Contact Us |
| 27-149451-00 | Concept One | Novellus | LFC,P2000I,0.02ML/MIN,TMP | New OEM | Contact Us |
| 27-149452-00 | Concept One | Novellus | LFC, P2000I, 0.5ML/MIN TMB | New OEM | Contact Us |
| 27-150594-00 | Concept One | Novellus | WATLOW CONTROLLER | New OEM | Contact Us |
| 27-151731-00 | Concept One | Novellus | PWR SPLY, PFC500 24V/20A | New OEM | Contact Us |
| 27-152454-00 | Concept One | Novellus | CARD,INTEL8086,SBX-351 OPT | New OEM | Contact Us |
| 27-152739-00 | Concept One | Novellus | CARD,INTEL8086,SBX-351,TEOS OP | New OEM | Contact Us |
| 27-152740-00 | Concept One | Novellus | CARD,INTEL8086,SBX-354,C1W | New OEM | Contact Us |
| 27-153922-00 | Concept One | Novellus | FILTER,RFI | New OEM | Contact Us |
| 27-153945-01 | Concept One | Novellus | DRIVE,EXT/ROT,C1 ROBOT,OEM750 | New OEM | Contact Us |
| 27-153945-02 | Concept One | Novellus | DRIVE,LIFT,C1 ROBOT,OEM750 | New OEM | Contact Us |
| 27-156754-00 | Concept One | Novellus | GEN,RF,HIGH,AE,RFG5500,STPNTRK | New OEM | Contact Us |
| 27-157149-00 | Concept One | Novellus | PS, DC MEGAPAC, 6 OUT W/70VF, C1 | New OEM | Contact Us |
| 27-160272-00 | Concept One | Novellus | PWR SPLY,SINGLE PAC, VICOR, 70V | New OEM | Contact Us |
| 27-255873-00 | Concept One | Novellus | RF MATCH,13.56MHZ,MERCURY 3013 | New OEM | Contact Us |
| 27-260374-00 | Concept One | Novellus | PWR SPLY,75V,4A,OEM300,PARKER | New OEM | Contact Us |
| 27-271749-00 | Concept One | Novellus | PWR SPLY,24V,2.9A,72W | CE! | New OEM | Contact Us |
| 27-277312-00 | Concept One | Novellus | CNTRLR,LIMIT CONTROL,OVERTEMP,J-TYPE | New OEM | Contact Us |
| 27-289169-00 | Concept One | Novellus | PWR SPLY, 90-132, 185-264, 300W, 3U, ATX | New OEM | Contact Us |
| 27-307499-00 | Concept One | Novellus | PWR SPLY, 24V, 8A, 192W, C1D, C1W | New OEM | Contact Us |
| 27-307500-00 | Concept One | Novellus | PWR SPLY,90V,2.5A,225W,C1D,C1W | New OEM | Contact Us |
| 27-307501-00 | Concept One | Novellus | QUAD POWER SUPPLY, DIRECT REPLACEMENT FOR P/N 27-00029-00 | New OEM | Contact Us |
| 27-313385-00 | Concept One | Novellus | CNTRLR,LATCHING OUTPUT,OVERTEMP,E-TYPE | New OEM | Contact Us |
| 27-317033-00 | Concept One | Novellus | ELO Touch Flat Panel | New OEM | Contact Us |
| 27-323535-00 | Concept One | Novellus | LFC,TMP 0.2 ML/MIN,1/8" M VCR,D2000I,DIGITAL | New OEM | Contact Us |
| 27-323538-00 | Concept One | Novellus | LFC,TMB 0.5 ML/MIN,1/8" M VCR,D2000I,DIGITAL | New OEM | Contact Us |
| 27-347289-00 | Concept One | Novellus | CNTRLR,PM7 PENDULUM VAT,FOR C1,C2 ONLY | New OEM | Contact Us |
| 27-360889-00 | Concept One | Novellus | OEM SPARE,ANALOG INPUT BOARD C1 MULTIBUS | New OEM | Contact Us |
| 27-360890-00 | Concept One | Novellus | OEM SPARE,RAM BOARD C1 MULTIBUS | New OEM | Contact Us |
| 27-367678-00 | Concept One | Novellus | LFC,5ML/MIN,TEOS,1/8MVCR,DIGITAL,D200I | New OEM | Contact Us |
| 27-370743-00 | Concept One | Novellus | MANOMETER,DIFF CAPACITANCE,1 TORR,226A,4VCR-F | New OEM | Contact Us |
| 27-370756-00 | Concept One | Novellus | MANOMETER,DIFF CAPACITANCE,10 TORR,226A,4VCR-F | New OEM | Contact Us |
| 27-397596-00 | Concept One | Novellus | 1247L 12-inch Open-Frame Touchmonitor | New OEM | Contact Us |
| 27-430524-00 | Concept One | Novellus | PWR SPLY,24VDC,14A,336W,C2DLCM | New OEM | Contact Us |
| 27-450285-00 | Concept One | Novellus | DETECTOR,INFRARED GAS,SIF4,1M TORR,24VDC,2A,50M SECOND | New OEM | Contact Us |
| 27-455547-00 | Concept One | Novellus | MANOMETER,CAP,BARATRON,100MMHG,15PIN D-S | New OEM | Contact Us |
| 27-999795-00 | Concept One | Novellus | CYLINDER, AIR | New OEM | Contact Us |
| 28-00084-00 | Concept One | Novellus | RES POT,10K,1/2W,10%,TOP,ADJ | New OEM | Contact Us |
| 2810-738369 | Concept One | Novellus | CBL ASSY, PL14 TO MTR1 | New OEM | Contact Us |
| 29-00014-00 | Concept One | Novellus | CAP,1000PF,6KV,MICA,5%,STYLE 2 | New OEM | Contact Us |
| 29-00015-00 | Concept One | Novellus | CAP,VAR,1400PPF | New OEM | Contact Us |
| 29-00016-00 | Concept One | Novellus | CAP,1.0uF,600VDC,POLYESTER,20% | New OEM | Contact Us |
| 29-00018-00 | Concept One | Novellus | CAP,0.01UF,1000VDC,CER,10%,DIS | New OEM | Contact Us |
| 29-00029-00 | Concept One | Novellus | CAP,0.22uF,FOIL POLYESTER,10%, | New OEM | Contact Us |
| 29-00030-00 | Concept One | Novellus | CAP,47uF,35V,AL,20%,RAD | New OEM | Contact Us |
| 29-00052-00 | Concept One | Novellus | CAP,0.01UF,250VAC,CER,DISC | New OEM | Contact Us |
| 29-053216-00 | Concept One | Novellus | CDM 0.0027 MFD CAP'S TYPE 292 | New OEM | Contact Us |
| 29-053218-00 | Concept One | Novellus | CDM 0.012 MFD CAP'S TYPE 292-0 | New OEM | Contact Us |
| 29-121071-00 | Concept One | Novellus | CAP, 2200pF, 8000WVDC, MICA, 5%, ST | New OEM | Contact Us |
| 29-167493-00 | Concept One | Novellus | CAP,VAR,490PPF,1414URMS | New OEM | Contact Us |
| 29-167613-00 | Concept One | Novellus | CAP, VAR, 490PPF, 1414URMS | New OEM | Contact Us |
| 29-355966-00 | Concept One | Novellus | CAP,0.1MF, 1000C, CER | New OEM | Contact Us |
| 30-119048-00 | Concept One | Novellus | INDUCTOR,TERMINATED,10 TURN | New OEM | Contact Us |
| 31-00000-00 | Concept One | Novellus | SENSOR,OPTICAL,THRU BEAM | New OEM | Contact Us |
| 31-00058-04 | Concept One | Novellus | TERM BLK,4POST | New OEM | Contact Us |
| 31-00060-01 | Concept One | Novellus | STR REL | New OEM | Contact Us |
| 31-00069-00 | Concept One | Novellus | DIODE, 1N914A, CE! | New OEM | Contact Us |
| 31-0008-020 | Concept One | Novellus | AIR CYLINDER,1/2"BORE,1"STROKE | New OEM | Contact Us |
| 31-00090-00 | Concept One | Novellus | LUGS, CIRCUIT BREAKER | New OEM | Contact Us |
| 31-0009-010 | Concept One | Novellus | CLEVIS,ROD | New OEM | Contact Us |
| 31-0009-011 | Concept One | Novellus | BRACKET,MOUNTING | New OEM | Contact Us |
| 31-00109-00 | Concept One | Novellus | JUMPER,2POS N 3/8 CTRS | New OEM | Contact Us |
| 31-00114-00 | Concept One | Novellus | RELAY,SOLID STATE,90A | New OEM | Contact Us |
| 31-00144-00 | Concept One | Novellus | CLAMP,HOSE,WORM,DRIVE | CE! | New OEM | Contact Us |
| 31-00176-00 | Concept One | Novellus | GASKET,1/8DIA,WIRE MESH RF SHL | New OEM | Contact Us |
| 31-00197-00 | Concept One | Novellus | LUG, 12-10 AWG 1/4 STUD | New OEM | Contact Us |
| 31-00222-00 | Concept One | Novellus | CLAMP,RTNG,0.25" RAD | New OEM | Contact Us |
| 31-00249-00 | Concept One | Novellus | AMPLIFIER, MODULATED | New OEM | Contact Us |
| 31-00267-00 | Concept One | Novellus | CLAMP,CABLE,0.375W X 1/8" RAD | New OEM | Contact Us |
| 31-00272-00 | Concept One | Novellus | CLAMP, STRAIN RLF, 0.125 | New OEM | Contact Us |
| 31-00284-00 | Concept One | Novellus | LAMP, 1.35V OH, 76-331 | New OEM | Contact Us |