Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 22-10323-00 | Concept One | Novellus | New OEM | Contact Us | |
| 22-10329-00 | Concept One | Novellus | FLOW, CTL 10-32 | New OEM | Contact Us |
| 22-10369-00 | Concept One | Novellus | AIR CYL,1-1/8Bx2-1/2 STROKE | New OEM | Contact Us |
| 22-10387-00 | Concept One | Novellus | O-RING,2-244 | New OEM | Contact Us |
| 22-10391-00 | Concept One | Novellus | O-RING,SP,.210 x 12.44 ID,VITO | CE! | New OEM | Contact Us |
| 22-10392-00 | Concept One | Novellus | O-RING,SP,.210 X 31.95 ID,VITO | New OEM | Contact Us |
| 22-10528-00 | Concept One | Novellus | VALVE,NC/NC,MNOBLK,VCR | New OEM | Contact Us |
| 22-10529-00 | Concept One | Novellus | VALVE,3PORT,NO,DIAPH | New OEM | Contact Us |
| 22-10536-00 | Concept One | Novellus | O-RING,2-119,VITON | New OEM | Contact Us |
| 22-10537-00 | Concept One | Novellus | O-RING,2-134,VITON | New OEM | Contact Us |
| 22-110615-00 | Concept One | Novellus | 2-RING,2-249,VITON V747-75 | CE! | New OEM | Contact Us |
| 22-112743-00 | Concept One | Novellus | O-RING,2-020,KALREZ | New OEM | Contact Us |
| 22-114447-00 | Concept One | Novellus | O-RING, 2-110, KALREZ 4079 | New OEM | Contact Us |
| 22-115763-00 | Concept One | Novellus | FILTER,CER,M/F,HI-FLOW | CE! | New OEM | Contact Us |
| 22-118218-00 | Concept One | Novellus | BEARING,BALL,DEEP GRV | New OEM | Contact Us |
| 22-123217-00 | Concept One | Novellus | O-RING,2-261,KALREZ 4079 | New OEM | Contact Us |
| 22-123219-00 | Concept One | Novellus | GASKET,L-TYPE ACT SHAFT,SMC | New OEM | Contact Us |
| 22-128529-00 | Concept One | Novellus | O-RING,2-006,CHEMREZ,E38 | New OEM | Contact Us |
| 22-128529-21 | Concept One | Novellus | O-RING,2-263,CHEMRAZ E38,RECTA | New OEM | Contact Us |
| 22-130114-00 | Concept One | Novellus | PNEU SOL ASSY,3X14,ILDS | New OEM | Contact Us |
| 22-132450-00 | Concept One | Novellus | O-RING,2-128,SC1106 | New OEM | Contact Us |
| 22-138707-00 | Concept One | Novellus | FILTER,1.5 MICRON,1/4 FLARE | New OEM | Contact Us |
| 22-145269-00 | Concept One | Novellus | VALVE,930,LO/TO MNL,F-F | New OEM | Contact Us |
| 22-152051-00 | Concept One | Novellus | O-RING,2-010,KALREZ 8575 | CE | New OEM | Contact Us |
| 22-153909-00 | Concept One | Novellus | O-RING,.139 XSECT X 17.69 ID | New OEM | Contact Us |
| 22-158280-00 | Concept One | Novellus | 0-RING,2-006,KALREZ SAHARA8575 | CE! | New OEM | Contact Us |
| 22-159167-00 | Concept One | Novellus | O-RING, 2-043, KALREZ 6375 | New OEM | Contact Us |
| 22-250330-00 | Concept One | Novellus | FILTER,HI FLOW,1/4 VCR M-M,5", | CE! | New OEM | Contact Us |
| 22-250654-00 | Concept One | Novellus | O-RING,MLD,E38,SPLIT INSERT,.103,MESC,2-167 RECTANGULAR | New OEM | Contact Us |
| 22-251525-00 | Concept One | Novellus | O-RING,2-118,.862IDX .103W VIT | New OEM | Contact Us |
| 22-251902-00 | Concept One | Novellus | O-RING,2-272,KALREZ 4079 | CE! | New OEM | Contact Us |
| 22-251924-00 | Concept One | Novellus | FILTER,3 MICRN,3/8 FLARE | New OEM | Contact Us |
| 22-251953-00 | Concept One | Novellus | O-RING,2-168,VITON,50 DUROMETER | New OEM | Contact Us |
| 22-274918-00 | Concept One | Novellus | O-RING,2-259,VITON V0747-75,PEND VALVE | New OEM | Contact Us |
| 22-275477-00 | Concept One | Novellus | O-RING,9-123,CHEMRAZ SS520,1.174ID X.103 | New OEM | Contact Us |
| 22-275478-00 | Concept One | Novellus | 012 PERLAS O-RING | New OEM | Contact Us |
| 22-275479-00 | Concept One | Novellus | O-RING,-020,PERLAST G74P,.864 ID X.070 C | New OEM | Contact Us |
| 22-275499-00 | Concept One | Novellus | O-RING,-110,PERLAST G74P,.362" ID X.103 CS | New OEM | Contact Us |
| 22-275500-00 | Concept One | Novellus | 012 PERLAST O-RING | New OEM | Contact Us |
| 22-278096-00 | Concept One | Novellus | O-RING,-210,PERLAST,G74P,.734ID x .139CS | New OEM | Contact Us |
| 22-296825-00 | Concept One | Novellus | O-RING,NW100,G75B,325 C | CE! | New OEM | Contact Us |
| 22-298249-00 | Concept One | Novellus | O-RING,2-155,KALREZ 8085 | New OEM | Contact Us |
| 22-301288-00 | Concept One | Novellus | O-RING,-206,PERLAST G74P,.484ID x .139CS | New OEM | Contact Us |
| 22-305722-00 | Concept One | Novellus | OEM SPARE,GATE SEAL,GATE VALVE,VAT | New OEM | Contact Us |
| 22-306653-00 | Concept One | Novellus | O-RING, 2-112, KALREZ 8085, CE! | New OEM | Contact Us |
| 22-306654-00 | Concept One | Novellus | O-RING, 2-329, KALREZ 8085, CE! | New OEM | Contact Us |
| 22-307966-00 | Concept One | Novellus | O-RING, 2-258 CHEMRAZ E38 | New OEM | Contact Us |
| 22-310733-00 | Concept One | Novellus | O-RING, 2-155, KALREZ | New OEM | Contact Us |
| 22-343175-00 | Concept One | Novellus | O-RING,2-012,KALREZ 4079 | New OEM | Contact Us |
| 22-346441-00 | Concept One | Novellus | O-RING,2-019,0.801IDX.070,KALREZ 9100 UP | New OEM | Contact Us |
| 22-351325-00 | Concept One | Novellus | O-RING,MLD,22.50 ID X .139,FKM,75DUROM | CE! | New OEM | Contact Us |
| 22-353632-00 | Concept One | Novellus | VALVE,DIAPH,3PORT,NO,3.13" | New OEM | Contact Us |
| 22-359223-00 | Concept One | Novellus | O-RING,K-243,KALREZ 8575,4.109ID X .139 | New OEM | Contact Us |
| 22-391348-00 | Concept One | Novellus | MFC,2SLM,N2,1/4"VCR,9PIN D-SUB,GF125 | New OEM | Contact Us |
| 22-393191-00 | Concept One | Novellus | MFC,5SLM,N2,1/4"VCR,9PIN D-SUB,GF125 | New OEM | Contact Us |
| 22-394004-00 | Concept One | Novellus | MFC,20 SLM,N2,1/4" VCR,9PIN D-SUB,GF120 | New OEM | Contact Us |
| 22-403856-00 | Concept One | Novellus | MFC,1SLM,SIH4,1/4"VCR,9PIN DSUB,GF120 | New OEM | Contact Us |
| 22-403859-00 | Concept One | Novellus | MFC,5SLM,N2,1/4"VCR,9PIN D-SUB,GF120 | New OEM | Contact Us |
| 22-405816-00 | Concept One | Novellus | O-RING, AS568-242, KALREZ 9100, 68, AMBER | New OEM | Contact Us |
| 22-425049-00 | Concept One | Novellus | MFC,10SLM,N2,1/4"VCR,9PIN DSUB,GF125C | New OEM | Contact Us |
| 22-437794-00 | Concept One | Novellus | MFC,25SLM,H2,1/4"VCR,9PIN DSUB,GF125C | New OEM | Contact Us |
| 22-453096-00 | Concept One | Novellus | O-RING, AS568-110, KALREZ 9100, 68, AMBER TR | New OEM | Contact Us |
| 22-454102-00 | Concept One | Novellus | O-RING, AS568-143, KALREZ 9100, 68, AMBER TR | New OEM | Contact Us |
| 22-462726-00 | Concept One | Novellus | O-RING,K-223,KALREZ 9100 | New OEM | Contact Us |
| 22-462728-00 | Concept One | Novellus | O-RING,K-209,KALREZ 9100 | New OEM | Contact Us |
| 22-462730-00 | Concept One | Novellus | O-RING,K-142,KALREZ 9100 | New OEM | Contact Us |
| 22-462877-00 | Concept One | Novellus | O-RING,MLD,NW16,PERFREZ LM78,AL CNTR RING | New OEM | Contact Us |
| 22-462878-00 | Concept One | Novellus | O-RING,MLD,NW40,PERFREZ LM78,AL CNTR RING | New OEM | Contact Us |
| 22-462879-00 | Concept One | Novellus | O-RING,MLD,SHWRHD STEM,RPC,C2SEQ-X | New OEM | Contact Us |
| 22-462880-00 | Concept One | Novellus | O-RING,MLD,.375" ULTRA-TORR,RPC,C2SEQ-X | New OEM | Contact Us |
| 22-462882-00 | Concept One | Novellus | O-RING,-020,PERFREZ LM79 | New OEM | Contact Us |
| 22-462884-00 | Concept One | Novellus | O-RING,-226,PERFREZ LM79 | New OEM | Contact Us |
| 27-00002-00 | Concept One | Novellus | CAP, MANOMETER, 10 | New OEM | Contact Us |
| 27-00010-01 | Concept One | Novellus | TC,TYPE"J",RIGID,1/8 DIA x 12L | New OEM | Contact Us |
| 27-00035-00 | Concept One | Novellus | PCB, I/O MODULE | New OEM | Contact Us |
| 27-00062-00 | Concept One | Novellus | METER GAUGE | New OEM | Contact Us |
| 27-00072-00 | Concept One | Novellus | XFMR,120/24VAC | New OEM | Contact Us |
| 27-00079-00 | Concept One | Novellus | TC,TYPEJ,1/16DIA | New OEM | Contact Us |
| 27-00082-00 | Concept One | Novellus | Mtr. Driver for 2-arm Robot | New OEM | Contact Us |
| 27-00101-00 | Concept One | Novellus | ACTUATOR, ACME THD | New OEM | Contact Us |
| 27-00123-00 | Concept One | Novellus | PCB, TC FILTER | New OEM | Contact Us |
| 27-00127-00 | Concept One | Novellus | TC,TYPE"E" LG,GRND | New OEM | Contact Us |
| 27-00135-00/RW | Concept One | Novellus | TEMP.CNTRL.EUROTHERM, MOD 808 | New OEM | Contact Us |
| 27-00147-00 | Concept One | Novellus | CARD CAGE,12 SLOTS W/DOORS,EAR | New OEM | Contact Us |
| 27-00148-00 | Concept One | Novellus | VALVE,THROT,2,MKS | New OEM | Contact Us |
| 27-00148-01 | Concept One | Novellus | VALVE,THROT,NON-SEAL,KF50 | New OEM | Contact Us |
| 27-00160-00 | Concept One | Novellus | CNTL, MFC RAMP STEC | New OEM | Contact Us |
| 27-00163-00 | Concept One | Novellus | KYBD,COMPACT 16 PC | New OEM | Contact Us |
| 27-00164-00 | Concept One | Novellus | XFMR,120V/24V,100VA | New OEM | Contact Us |
| 27-00167-01 | Concept One | Novellus | MODULE,TRAZAR RF-RAMP | New OEM | Contact Us |
| 27-00167-02 | Concept One | Novellus | MODULE,KIT RF SP CONTROL | New OEM | Contact Us |
| 27-00175-00 | Concept One | Novellus | ELETRONOC,PNEU INTERFACE VLV | New OEM | Contact Us |
| 27-00184-00 | Concept One | Novellus | HEAD, PMT DETECTOR | New OEM | Contact Us |
| 27-028378-00 | Concept One | Novellus | BIRD4024 POWER SENSOR LC TYPE | CE! | New OEM | Contact Us |
| 27-028379-00 | Concept One | Novellus | AE PDX1400 1.4KW LF GEN. | New OEM | Contact Us |
| 27-028379-00RW | Concept One | Novellus | AE PDX1400 1.4KW LF GEN. | New OEM | Contact Us |
| 27-028428-00 | Concept One | Novellus | BIRD 5KW WATER COOLED LOAD | CE! | New OEM | Contact Us |
| 27-028502-00 | Concept One | Novellus | SOL,DBL W/BASE | New OEM | Contact Us |
| 27-029507-00 | Concept One | Novellus | PCA,PMT H/V CONT,DUAL CH | New OEM | Contact Us |
| 27-029508-00 | Concept One | Novellus | COMPUTER,ENDPOINT, DUAL HEAD | New OEM | Contact Us |