Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 20-00290-00 | Concept One | Novellus | 20XL025 5/16 6FA TIMING PULLEY | New OEM | Contact Us |
| 20-00299-00 | Concept One | Novellus | SCREWDRIVER,TORQUE, CALCERT-ISO | New OEM | Contact Us |
| 20-00300-00 | Concept One | Novellus | WASHER,WAVY,.390ID X .562OD | New OEM | Contact Us |
| 20-00301-00 | Concept One | Novellus | SPRING,EXT,.75LG | New OEM | Contact Us |
| 20-00304-00 | Concept One | Novellus | GEAR, SPUR .625 PD | New OEM | Contact Us |
| 20-00332-00 | Concept One | Novellus | RING, RETAINING, .250 DIA | New OEM | Contact Us |
| 20-00339-00 | Concept One | Novellus | SCREW, PANEL COVER | New OEM | Contact Us |
| 20-00407-00 | Concept One | Novellus | CLEVIS, PISTON ROD | New OEM | Contact Us |
| 20-00413-00 | Concept One | Novellus | THERMOPLASTIC HOSE 3/8T 30" LONG | New OEM | Contact Us |
| 20-00424-00 | Concept One | Novellus | RING, RETAINING .312 EXT | New OEM | Contact Us |
| 20-00426-00 | Concept One | Novellus | SPRING,EXT | New OEM | Contact Us |
| 20-00428-00 | Concept One | Novellus | RING,RETAIN.,CRESENT 1/2"SHAFT | New OEM | Contact Us |
| 20-00443-00 | Concept One | Novellus | SHOCK ABSORBER, 2" STROKE | New OEM | Contact Us |
| 20-00447-00 | Concept One | Novellus | LATCH,1 3/4X11/16X1/4(100 SERI | New OEM | Contact Us |
| 20-00450-00 | Concept One | Novellus | LATCH,SLIDE | New OEM | Contact Us |
| 20-00451-00 | Concept One | Novellus | WASHER,WAVY, 1.78ID x 2.00OD | New OEM | Contact Us |
| 20-00452-00 | Concept One | Novellus | E-RING, 1/2" | New OEM | Contact Us |
| 20-00454-00 | Concept One | Novellus | BEARING,BALL,1.00ODX.74ID | New OEM | Contact Us |
| 20-00461-00 | Concept One | Novellus | SPACER SHAFT 0.62 | New OEM | Contact Us |
| 20-00465-00 | Concept One | Novellus | WASHER,WAVY,.885ID x .980OD | New OEM | Contact Us |
| 20-00482-00 | Concept One | Novellus | SCRW,SHLDR,4-40X.125X.25 | New OEM | Contact Us |
| 20-00483-00 | Concept One | Novellus | KRYTOX, PFPE 143AD,1LB CONTAIN | New OEM | Contact Us |
| 20-00484-00 | Concept One | Novellus | SYRINGE, 3CC | New OEM | Contact Us |
| 20-00489-00 | Concept One | Novellus | SCRW,SHLDR,8-32X.188X.75 | New OEM | Contact Us |
| 20-0243-01 | Concept One | Novellus | FTG, 1/2 TEE UNION | New OEM | Contact Us |
| 20-024512-00 | Concept One | Novellus | NUT,THUMB,1/4-20 | New OEM | Contact Us |
| 20-027202-00 | Concept One | Novellus | SPACER,.500 SHAFT,.125 THK | New OEM | Contact Us |
| 20-047121-00 | Concept One | Novellus | CYLINDER,PLA,2.5"x3" | New OEM | Contact Us |
| 20-09045-00 | Concept One | Novellus | BALL, CERAMIC, .1875 DIA | New OEM | Contact Us |
| 20-10129-00 | Concept One | Novellus | BEARING,LINEAR | New OEM | Contact Us |
| 20-10130-00 | Concept One | Novellus | SEAL, BEARING | New OEM | Contact Us |
| 20-10133-00 | Concept One | Novellus | WORM | New OEM | Contact Us |
| 20-10137-00 | Concept One | Novellus | ROTARY DAMPER, LEFT | New OEM | Contact Us |
| 20-10139-00 | Concept One | Novellus | ROTARY DAMPER, RIGHT | New OEM | Contact Us |
| 20-10145-00 | Concept One | Novellus | RETRO-REFLECTOR | New OEM | Contact Us |
| 20-10150-00 | Concept One | Novellus | New OEM | Contact Us | |
| 20-102847-00 | Concept One | Novellus | FILTER,CARTRIDGE,10"0.05UM | New OEM | Contact Us |
| 20-1112 | Concept One | Novellus | FITTING SLEEVE CLAMP, 1/4 IN DERLIN | New OEM | Contact Us |
| 20-119516-00 | Concept One | Novellus | GATE,SLTVLV,32X222,SC1107,LL | New OEM | Contact Us |
| 20-123267-00 | Concept One | Novellus | GATE,L-TYPE VLV,46X236,SMC | New OEM | Contact Us |
| 20-134720-00 | Concept One | Novellus | STRIP,MTG,GASKET,REAR PANEL | New OEM | Contact Us |
| 20-134722-00 | Concept One | Novellus | BELT, TIMING, 1/5"P,75T,3/8W | New OEM | Contact Us |
| 20-143972-00 | Concept One | Novellus | J PLATE, PANEL MOUNT, ADAPTER | New OEM | Contact Us |
| 20-345390-00 | Concept One | Novellus | RACK, MOUNTING KIT | New OEM | Contact Us |
| 206-002 | Concept One | Novellus | FTG,10-32x1/16 BARB | New OEM | Contact Us |
| 21-00041-01 | Concept One | Novellus | SCRW,SET,4-40x.25,SS | New OEM | Contact Us |
| 21-00192-00 | Concept One | Novellus | NUT,KEP,10-32 | New OEM | Contact Us |
| 21-00243-00 | Concept One | Novellus | SCREW, FLAT HD, 4-40, 1/4" SS | New OEM | Contact Us |
| 21-00248-00 | Concept One | Novellus | SCRW,FLAT,4-40x1,SS | New OEM | Contact Us |
| 21-00332-00 | Concept One | Novellus | SCRW, SET HEX, 10-32X.5, SS | New OEM | Contact Us |
| 21-00351-00 | Concept One | Novellus | WSHR,LOCK,INST-STAR,#8 SS | New OEM | Contact Us |
| 21-00379-00 | Concept One | Novellus | SCRW,SKT,HEX,10-24x.75,SS | New OEM | Contact Us |
| 21-00415-00 | Concept One | Novellus | WASHER,FENDER,1/4,.75OD x .06T | New OEM | Contact Us |
| 21-00417-00 | Concept One | Novellus | SHLD SCRW,#10-24 X .25 DIA X .75 LG, STE | New OEM | Contact Us |
| 21-00444-00 | Concept One | Novellus | 1/2-30 HEX FIN JAM NUT 18-8SS | New OEM | Contact Us |
| 21-00455-00 | Concept One | Novellus | STANDOFF,6-32 x .38,M-F,.25 HE | New OEM | Contact Us |
| 21-024542-00 | Concept One | Novellus | SCRW,5/16-18x3.0,BLK OxIDE | New OEM | Contact Us |
| 21-024543-00 | Concept One | Novellus | SCRW,5/16-18X2.75,BLK OXIDE | New OEM | Contact Us |
| 21-029063-00 | Concept One | Novellus | HELICOIL, 8-32 X .32L, SS | New OEM | Contact Us |
| 21-032147-00 | Concept One | Novellus | SHOULDER SCR,1/4-20X5/16X.75LG | New OEM | Contact Us |
| 21-033536-00 | Concept One | Novellus | SCRW,SKT,HEX,10-32x1.125,AG | New OEM | Contact Us |
| 21-041264-06 | Concept One | Novellus | SCRW,SKT,HEX,4-40x.375,SS | New OEM | Contact Us |
| 21-041264-08 | Concept One | Novellus | SCRW,SKT,HEX,4-40x.5,SS | New OEM | Contact Us |
| 21-041264-12 | Concept One | Novellus | SCRW,SKT,HEX,4-40x.75,SS | New OEM | Contact Us |
| 21-041266-06 | Concept One | Novellus | SCRW,SKT,HEX,6-32X.375,SS | New OEM | Contact Us |
| 21-041266-08 | Concept One | Novellus | SCRW,SKT,HEX,6-32x.5,SS | New OEM | Contact Us |
| 21-041266-10 | Concept One | Novellus | SCRW,SKT,HEX,6-32x.625,SS | New OEM | Contact Us |
| 21-041266-12 | Concept One | Novellus | SCRW,SKT,HEX,6-32x.75,SS | New OEM | Contact Us |
| 21-041266-24 | Concept One | Novellus | SCRW,SKT,HEX,6-32x1.5,SS | New OEM | Contact Us |
| 21-041267-06 | Concept One | Novellus | SCRW,SKT,HEX,8-32X.375,SS | New OEM | Contact Us |
| 21-041267-08 | Concept One | Novellus | SCREW, SKHD, 8-32 X 1/2", SS | New OEM | Contact Us |
| 21-041267-10 | Concept One | Novellus | SCRW,SKT,HEX,8-32x.625,SS | New OEM | Contact Us |
| 21-041269-06 | Concept One | Novellus | SCRW,SKT,HEX,10-32X.375,SS | New OEM | Contact Us |
| 21-041269-08 | Concept One | Novellus | SCRW,SKT,HEX,10-32X.5,SS | New OEM | Contact Us |
| 21-041269-16 | Concept One | Novellus | SCRW,SKT,HEX,10-32x1,SS | New OEM | Contact Us |
| 21-041269-24 | Concept One | Novellus | SCRW, SKT, HEX 10-32 X 1 1/2" | New OEM | Contact Us |
| 21-041270-10 | Concept One | Novellus | SCRW,SKT,HEX,1/4-20x.625,SS | New OEM | Contact Us |
| 21-041270-12 | Concept One | Novellus | SCRW,SKT,HEX,1/4-20X.75,SS | New OEM | Contact Us |
| 21-041272-12 | Concept One | Novellus | SCRW,SKT,HEX,5/16-18x.75,SS | New OEM | Contact Us |
| 21-041273-12 | Concept One | Novellus | SCRW,SKT,HEX,5/16-24X.75,SS | New OEM | Contact Us |
| 21-041298-04 | Concept One | Novellus | SCRW,FLAT,HEX,4-40X.25,SS | New OEM | Contact Us |
| 21-041298-06 | Concept One | Novellus | SCRW,FLAT,HEX,4-40x.375,SS | New OEM | Contact Us |
| 21-041301-06 | Concept One | Novellus | SCRW,FLAT,HEX,8-32x.375,SS | New OEM | Contact Us |
| 21-041301-08 | Concept One | Novellus | SCRW,FLAT,HEX,8-32x.5,SS | New OEM | Contact Us |
| 21-041303-06 | Concept One | Novellus | 10-32 X 3/8 SK FL HD CS 18-8SS | New OEM | Contact Us |
| 21-041303-08 | Concept One | Novellus | SCRW,FLAT,HEX,10-32x.5,SS | New OEM | Contact Us |
| 21-041342-08 | Concept One | Novellus | SCRW,PAN,PHIL,4-40X.5,SS | New OEM | Contact Us |
| 21-041345-06 | Concept One | Novellus | SCRW,PAN,PHIL,6-32X.375,SS | New OEM | Contact Us |
| 21-041346-04 | Concept One | Novellus | SCRW,PAN,PHIL,8-32x.25,SS | New OEM | Contact Us |
| 21-041346-06 | Concept One | Novellus | SCRW,PAN,PHIL,8-32X.375,SS | New OEM | Contact Us |
| 21-041346-12 | Concept One | Novellus | SCRW,PH PNHD, 8-32 X 3/4 L, SST18-8 | New OEM | Contact Us |
| 21-041348-06 | Concept One | Novellus | SCRW,PAN,PHIL,10-32X.375,SS | New OEM | Contact Us |
| 21-041902-04 | Concept One | Novellus | SCRW,BUT,HEX,4-40x.25,SS | New OEM | Contact Us |
| 21-041902-06 | Concept One | Novellus | SCRW,BUT,HEX,4-40x.375,SS | New OEM | Contact Us |
| 21-041903-06 | Concept One | Novellus | 6-32 X 3/8 SK BT HD CS 18-8SS | New OEM | Contact Us |
| 21-041906-06 | Concept One | Novellus | SCRW,BUT,HEX,10-32x.375,SS | New OEM | Contact Us |
| 21-041907-12 | Concept One | Novellus | SCRW,BUT,HEX,1/4-20x.75,SS | New OEM | Contact Us |
| 21-041953-07 | Concept One | Novellus | NUT,HEX,4-40,SS | New OEM | Contact Us |
| 21-041953-11 | Concept One | Novellus | NUT,HEX,8-32,SS | New OEM | Contact Us |
| 21-041953-13 | Concept One | Novellus | NUT,HEX,10-32,SS | New OEM | Contact Us |