Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 15-257942-23 | Concept One | Novellus | NOZZLE,INJ,VARIABLE SIH4 DIA | New OEM | Contact Us |
| 15-258837-00 | Concept One | Novellus | CLAMP,RF STRAP,3.5IN,ALUM,SEQUEL | New OEM | Contact Us |
| 15-259094-00 | Concept One | Novellus | RF FEEDTHRU CLAMP | New OEM | Contact Us |
| 15-260407-00 | Concept One | Novellus | SCREW, HEX,1/4-20X.50IN | New OEM | Contact Us |
| 15-263868-00 | Concept One | Novellus | RING,GUARD,150MM,ANTI-ROT'N,HI PURITY | New OEM | Contact Us |
| 15-270513-00 | Concept One | Novellus | INSULATOR,FRONT,AC PWR,HTR HOT LEAD,SEQX | New OEM | Contact Us |
| 15-270514-00 | Concept One | Novellus | INSULATOR,BACK,AC PWR,HTR HOT LEAD,SEQX | New OEM | Contact Us |
| 15-275673-00 | Concept One | Novellus | WINDOW,VIEWPORT,LAMINATED, | New OEM | Contact Us |
| 15-277459-00 | Concept One | Novellus | CAP,FORK ASSY, C2SEQ-X | New OEM | Contact Us |
| 15-277460-00 | Concept One | Novellus | FORK,CERAMIC | New OEM | Contact Us |
| 15-277463-00 | Concept One | Novellus | PLATE,BOTTOM,CERAMIC,FORK ASSY | New OEM | Contact Us |
| 15-277464-00 | Concept One | Novellus | PLATE,TOP,FORK ASSY,C2SEQ-X | New OEM | Contact Us |
| 15-281894-00 | Concept One | Novellus | PLATE,MOUNT,BLK BDY SR72,HDP 200MM | New OEM | Contact Us |
| 15-290624-00 | Concept One | Novellus | INSERT,SPLIT,INNER,C2 | New OEM | Contact Us |
| 15-296184-00 | Concept One | Novellus | BLADE,END EFFCTR,ATM RBT,G2130 | CE! | New OEM | Contact Us |
| 15-301878-00 | Concept One | Novellus | BASE, CONTAINER, 200MM CATIONIC MEMBRANE | New OEM | Contact Us |
| 15-305056-00 | Concept One | Novellus | FORK,CERAMIC,C1-150MM | New OEM | Contact Us |
| 15-305097-00 | Concept One | Novellus | PLATE,BOTTOM,CERAMIC,C1-150 | New OEM | Contact Us |
| 15-305098-00 | Concept One | Novellus | PLATE,TOP,FORK ASSY,C1-150MM | New OEM | Contact Us |
| 15-307812-00 | Concept One | Novellus | BOTTOM PLATE, FORK, 200mm | New OEM | Contact Us |
| 15-307813-00 | Concept One | Novellus | FORK,TOP PLATE 200MM WAFER | New OEM | Contact Us |
| 15-308813-00 | Concept One | Novellus | BEZEL,C1,LOADLOCK, LCD/TOUCHSCREEN | New OEM | Contact Us |
| 15-309288-00 | Concept One | Novellus | FORK,CERAMIC, C2SEQ | New OEM | Contact Us |
| 15-315136-00 | Concept One | Novellus | PIN,MCA,SAPH,3/16DIAX13/16 LG,1 FLAT END | CE! | New OEM | Contact Us |
| 15-322960-00 | Concept One | Novellus | BLOCK,HOIST LOCK ASSY,C1D | New OEM | Contact Us |
| 15-324541-00 | Concept One | Novellus | Wafer Indexer, 200mm | New OEM | Contact Us |
| 15-324543-00 | Concept One | Novellus | PLATE,INDEXER,WAFER,EXCL,OPTION | New OEM | Contact Us |
| 15-325835-00 | Concept One | Novellus | FORK,BOTTOM PLATE | New OEM | Contact Us |
| 15-325836-00 | Concept One | Novellus | FORK,TOP PLATE | New OEM | Contact Us |
| 15-325977-01 | Concept One | Novellus | PIN,LOCATOR,MOER TYPE I | New OEM | Contact Us |
| 15-326237-00 | Concept One | Novellus | SCRW,HEX,10-32 X .31IN,NI,.81 LONG,FORK | New OEM | Contact Us |
| 15-333722-01 | Concept One | Novellus | FORK TOP PLATE | New OEM | Contact Us |
| 15-333722-02 | Concept One | Novellus | FORK,TOP PLATE,C,ANTIDEFLECT,S | New OEM | Contact Us |
| 15-333722-03 | Concept One | Novellus | FORK TOP PLATE | New OEM | Contact Us |
| 15-348967-00 | Concept One | Novellus | WSHR,SHOULDER,C1 HOIST SPACER | New OEM | Contact Us |
| 15-359394-00 | Concept One | Novellus | BUSHNG,FLNG,KEYED | New OEM | Contact Us |
| 15-359395-00 | Concept One | Novellus | CLAMP,FLAT,CERAMIC,FORK ASSY | New OEM | Contact Us |
| 15-359396-00 | Concept One | Novellus | CAP,FORK ASSY,C2SEQ-X | New OEM | Contact Us |
| 15-361222-00 | Concept One | Novellus | RING,WEAR,CERAMIC,150MM | New OEM | Contact Us |
| 15-375892-00 | Concept One | Novellus | PLATE,BOTTOM,CERAMIC,FORK,C2SEQ-X | New OEM | Contact Us |
| 15-376399-00 | Concept One | Novellus | SCRW,FLAT,8-32,C2SEQ-X | New OEM | Contact Us |
| 15-377532-00 | Concept One | Novellus | PLATE,TOP,FORK ASSY,C2SEQ-X | New OEM | Contact Us |
| 15-378125-00 | Concept One | Novellus | CLAMP,APM SPEED GEAR | New OEM | Contact Us |
| 15-385212-00 | Concept One | Novellus | PLATE,BOTTOM,CERAMIC,150MM,C1D | New OEM | Contact Us |
| 15-385213-00 | Concept One | Novellus | PLATE,TOP,FORK ASSY,150MM,C1D | New OEM | Contact Us |
| 15-386933-00 | Concept One | Novellus | SPRING,PLT,SEAL | New OEM | Contact Us |
| 15-395327-01 | Concept One | Novellus | BRKT, FRONT LEFT, C1D | New OEM | Contact Us |
| 15-395327-02 | Concept One | Novellus | BRKT, FRONT RIGHT, C1D | New OEM | Contact Us |
| 15-400304-00 | Concept One | Novellus | CUP,SCREW COVER,CERAMIC FORK | New OEM | Contact Us |
| 15-435871-00 | Concept One | Novellus | CUP, SCREW COVER, CERAMIC FORK | New OEM | Contact Us |
| 16-00018-01 | Concept One | Novellus | DOOR, LOAD LOCK | New OEM | Contact Us |
| 16-00025-00 | Concept One | Novellus | VIEWPORT, LOAD LOCK SIDE | New OEM | Contact Us |
| 16-00029-01 | Concept One | Novellus | PANEL,SIDE,2 (FRAME) | New OEM | Contact Us |
| 16-00030-00 | Concept One | Novellus | PANEL, SIDE, 9 MODULE | New OEM | Contact Us |
| 16-00030-01 | Concept One | Novellus | PANEL, SIDE, 3 (FRAME) | New OEM | Contact Us |
| 16-00047-00 | Concept One | Novellus | VIEWPORT, TOP PLATE LL | New OEM | Contact Us |
| 16-00088-00 | Concept One | Novellus | BOX,EXHAUST,WCVD | New OEM | Contact Us |
| 16-00090-00 | Concept One | Novellus | PLATE,GAS DIST,BTM | New OEM | Contact Us |
| 16-00092-00 | Concept One | Novellus | STRAP, HEATER FEEDTHROUGH | New OEM | Contact Us |
| 16-00097-00 | Concept One | Novellus | COVER,PNEUMATIC BOX | New OEM | Contact Us |
| 16-00098-00 | Concept One | Novellus | STRAP HEATER INSULATED | New OEM | Contact Us |
| 16-00110-00 | Concept One | Novellus | CHAMBER GAS DIST 8" WAFER | New OEM | Contact Us |
| 16-00123-00 | Concept One | Novellus | BELLOWS,WLDMT | New OEM | Contact Us |
| 16-00124-00 | Concept One | Novellus | STAGE, PARALLEL | New OEM | Contact Us |
| 16-00155-00 | Concept One | Novellus | DUCT,2"VACUUM | New OEM | Contact Us |
| 16-00158-00 | Concept One | Novellus | ARM, ACTUATOR, EXCL OPTION | New OEM | Contact Us |
| 16-00163-00 | Concept One | Novellus | GUIDE, CAM FOLLOWER | New OEM | Contact Us |
| 16-00190-00 | Concept One | Novellus | BRKT,VALVE MTG,SIGMA6 | New OEM | Contact Us |
| 16-00196-00 | Concept One | Novellus | PANEL,TOP | New OEM | Contact Us |
| 16-024504-00 | Concept One | Novellus | TUBE ASSY,4"LINE,13.25 | New OEM | Contact Us |
| 16-024509-00 | Concept One | Novellus | TUBE ASSY, EXHAUST LINE, 13.25 | New OEM | Contact Us |
| 16-032558-00 | Concept One | Novellus | PLATE,MTG,PED,D,STA#2-5 | New OEM | Contact Us |
| 16-033931-00N/B | Concept One | Novellus | SHOWER HD PINNED 200,WLDMNT | New OEM | Contact Us |
| 16-033932-00 | Concept One | Novellus | SHOWER HD PINNED 150,WLDMNT | New OEM | Contact Us |
| 16-034139-00 | Concept One | Novellus | TUBE,INJECTOR | New OEM | Contact Us |
| 16-051122-00 | Concept One | Novellus | HS6 BELLOW,SPNDL ASSY,WLDMNT | New OEM | Contact Us |
| 16-08109-00 | Concept One | Novellus | STUB SPOOL WIT 5 KF 25 PORTS | New OEM | Contact Us |
| 16-09479-00 | Concept One | Novellus | DOOR,LL W/WINDOW OPENINGS | New OEM | Contact Us |
| 16-10070-00 | Concept One | Novellus | MANF, BACKSIDE | New OEM | Contact Us |
| 16-130038-00 | Concept One | Novellus | PLATE,GAS DIST,TOP,SEQ-X | New OEM | Contact Us |
| 16-143136-00 | Concept One | Novellus | PLATE, GAS DIST, BOTTOM, SEQ-X | New OEM | Contact Us |
| 16-259089-00 | Concept One | Novellus | FEEDTHRU, PWR, C2SEQ-X, SHORT, CERAMIC ISOLA | New OEM | Contact Us |
| 16-300923-00 | Concept One | Novellus | DIFFUSER,HEMI,SINGLE ROW,RF SOURCE,G&E | New OEM | Contact Us |
| 16-348615-00 | Concept One | Novellus | SHWRHD, 200MM, PINNED, AL 3003 | New OEM | Contact Us |
| 17-00035-00 | Concept One | Novellus | MTG BRKT VLV | New OEM | Contact Us |
| 17-00059-00 | Concept One | Novellus | BRKT,LATCH | New OEM | Contact Us |
| 17-00083-00 | Concept One | Novellus | SHIELD,SPINDLE | New OEM | Contact Us |
| 17-00084-00 | Concept One | Novellus | FLAG,LIFT | New OEM | Contact Us |
| 17-00085-00 | Concept One | Novellus | BRKT,FLAG | New OEM | Contact Us |
| 17-00094-00 | Concept One | Novellus | STRAP, RF | New OEM | Contact Us |
| 17-00094-01 | Concept One | Novellus | STRAP, RF | New OEM | Contact Us |
| 17-00097-00 | Concept One | Novellus | BRKT,LIFT SNSR | New OEM | Contact Us |
| 17-00115-00 | Concept One | Novellus | BRKT,MTG,PURGE VALVES | New OEM | Contact Us |
| 17-00138-00 | Concept One | Novellus | FLAG EXTENSION | New OEM | Contact Us |
| 17-00139-00 | Concept One | Novellus | BRKT,EXT SNSR | New OEM | Contact Us |
| 17-00148-00 | Concept One | Novellus | FORK,SPRING | New OEM | Contact Us |
| 17-00152-00 | Concept One | Novellus | STRAP, CAPACITOR | New OEM | Contact Us |
| 17-00153-00 | Concept One | Novellus | BOX,RF SHUNT | New OEM | Contact Us |
| 17-00170-00 | Concept One | Novellus | FLAG,LIFT 200MM | New OEM | Contact Us |
| 17-00170-01 | Concept One | Novellus | FLAG,FORK | New OEM | Contact Us |