Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 15-00935-01 | Concept One | Novellus | SCRW,10-32x.50,NICKEL | New OEM | Contact Us |
| 15-00948-00 | Concept One | Novellus | SCRW,PED HEATER | New OEM | Contact Us |
| 15-00949-00 | Concept One | Novellus | BLOCK, GUIDE | New OEM | Contact Us |
| 15-00950-00 | Concept One | Novellus | PIVOT BLK, SHK ABS. WCVD EXCL | New OEM | Contact Us |
| 15-00951-00 | Concept One | Novellus | CUP,SCREW COVER | New OEM | Contact Us |
| 15-00982-00 | Concept One | Novellus | SHAFT,SPDL, WCVD RING LIFT VER | New OEM | Contact Us |
| 15-00983-00 | Concept One | Novellus | CLAMP,SHAFT | New OEM | Contact Us |
| 15-00986-00 | Concept One | Novellus | CLAMP,THREADED | New OEM | Contact Us |
| 15-00987-00 | Concept One | Novellus | FLAG,SPINDLE | New OEM | Contact Us |
| 15-00988-00 | Concept One | Novellus | WHEEL, GENEVA | New OEM | Contact Us |
| 15-00990-00 | Concept One | Novellus | FLANGE,BEARING | New OEM | Contact Us |
| 15-00991-00 | Concept One | Novellus | FLANGE,SPINDLE FLAG | New OEM | Contact Us |
| 15-00992-00 | Concept One | Novellus | WSHR,THRUST | New OEM | Contact Us |
| 15-00993-00 | Concept One | Novellus | PLATE,BRG,RETAINING | New OEM | Contact Us |
| 15-00994-00 | Concept One | Novellus | NUT,HEX,3/4-16 | New OEM | Contact Us |
| 15-00995-00 | Concept One | Novellus | FLANGE,SPLINE | New OEM | Contact Us |
| 15-00996-00 | Concept One | Novellus | BUSHING, LOWER LIFT SHAFT | New OEM | Contact Us |
| 15-00997-00 | Concept One | Novellus | SUPPORT, CAM FOLLOWER | New OEM | Contact Us |
| 15-00998-00 | Concept One | Novellus | ARM, CAM FOLLOWER | New OEM | Contact Us |
| 15-00999-00 | Concept One | Novellus | FLANGE,BEARING,LOWER | New OEM | Contact Us |
| 15-01000-00 | Concept One | Novellus | SPACER,LOWER BEARING | New OEM | Contact Us |
| 15-01001-00 | Concept One | Novellus | CLAMP, SHAFT SUPPORT ARM | New OEM | Contact Us |
| 15-01012-00 | Concept One | Novellus | BLADE, EXTENDED (200MM) | New OEM | Contact Us |
| 15-01022-00 | Concept One | Novellus | PLATE,COPPER | New OEM | Contact Us |
| 15-01023-00 | Concept One | Novellus | PLATE,COPPER,200mm,SYS | New OEM | Contact Us |
| 15-01025-00 | Concept One | Novellus | RING,CAPMAN | New OEM | Contact Us |
| 15-01026-00 | Concept One | Novellus | SPACER,PIEZO MTG | New OEM | Contact Us |
| 15-01027-00 | Concept One | Novellus | SPACER,NUPRO VALVE | New OEM | Contact Us |
| 15-01032-00 | Concept One | Novellus | CLAMP,PIPE 2.00DIA | New OEM | Contact Us |
| 15-01033-00 | Concept One | Novellus | CLAMP,SHAFT 1.50DIA | New OEM | Contact Us |
| 15-01039-00 | Concept One | Novellus | FTG AIR INLET | New OEM | Contact Us |
| 15-01041-00 | Concept One | Novellus | CLAMP,CABLE-DBL | New OEM | Contact Us |
| 15-01044-00 | Concept One | Novellus | TOWER, SUPPORT LIGHT | New OEM | Contact Us |
| 15-01047-00 | Concept One | Novellus | PADDLE, DIMPLE 100mm | New OEM | Contact Us |
| 15-01048-00 | Concept One | Novellus | PADDLE, DIMPLE 125 MM | New OEM | Contact Us |
| 15-01049-00 | Concept One | Novellus | PADDLE, DIMPLE 150mm | New OEM | Contact Us |
| 15-01050-01 | Concept One | Novellus | SHIM,PADDLE,.001 THK | New OEM | Contact Us |
| 15-01050-02 | Concept One | Novellus | SHIM,PADDLE,.002 THK | New OEM | Contact Us |
| 15-01050-03 | Concept One | Novellus | SHIM,PADDLE,.003 THK | New OEM | Contact Us |
| 15-01052-00 | Concept One | Novellus | PADDLE, DIMPLE 200mm | New OEM | Contact Us |
| 15-01058-01 | Concept One | Novellus | BRKT,FRONT RH (PLASTIC CASS.) | New OEM | Contact Us |
| 15-01058-02 | Concept One | Novellus | BRKT,FRONT LH (PLASTIC CASS.) | New OEM | Contact Us |
| 15-01059-00 | Concept One | Novellus | BRKT REAR PLASTIC CASS | New OEM | Contact Us |
| 15-01060-00 | Concept One | Novellus | ROLLER, CASSETTE, 200mm | New OEM | Contact Us |
| 15-01081-01 | Concept One | Novellus | CLAMP,TUBE | New OEM | Contact Us |
| 15-01085-01 | Concept One | Novellus | BRKT,FRONT LEFT | New OEM | Contact Us |
| 15-01085-02 | Concept One | Novellus | BRKT,FRONT RIGHT | New OEM | Contact Us |
| 15-01101-00 | Concept One | Novellus | HUB, INDEXER | New OEM | Contact Us |
| 15-01102-00 | Concept One | Novellus | HUB,EXCLUSION RING | New OEM | Contact Us |
| 15-01103-00 | Concept One | Novellus | SHAFT,RING LIFT | New OEM | Contact Us |
| 15-01104-00 | Concept One | Novellus | SCRW,10-32x.75,NICKEL | New OEM | Contact Us |
| 15-01107-00 | Concept One | Novellus | PANEL,LL SIDE,DCS | New OEM | Contact Us |
| 15-01108-00 | Concept One | Novellus | PLATE,COOLING,DUAL | New OEM | Contact Us |
| 15-01109-01 | Concept One | Novellus | PLATFORM, 200MM OPTICAL | New OEM | Contact Us |
| 15-01111-00 | Concept One | Novellus | PADDLE 150mm OPTICAL | New OEM | Contact Us |
| 15-01112-00 | Concept One | Novellus | BRACKET DUAL CLAMP | New OEM | Contact Us |
| 15-01113-00 | Concept One | Novellus | BRKT,DUAL CLAMP | New OEM | Contact Us |
| 15-01116-00 | Concept One | Novellus | BRKT,MULTIPLE CASS HOLDER | New OEM | Contact Us |
| 15-01118-00 | Concept One | Novellus | WASHER,LIFT | New OEM | Contact Us |
| 15-01122-00 | Concept One | Novellus | BRKT,200MM PADDLE | New OEM | Contact Us |
| 15-01123-00 | Concept One | Novellus | PADDLE, DIMPLE, OPTICAL 125MM | New OEM | Contact Us |
| 15-01124-00 | Concept One | Novellus | PADDLE, DIMPLE, OPTICAL 100MM | New OEM | Contact Us |
| 15-01127-00 | Concept One | Novellus | PADDLE, 200MM OPTICAL PIN SEAR | New OEM | Contact Us |
| 15-01127-01 | Concept One | Novellus | PADDLE,DIMPLE 200MM,SPEC | New OEM | Contact Us |
| 15-01132-00 | Concept One | Novellus | HOUSING, BEARING, PURGED | New OEM | Contact Us |
| 15-01136-00 | Concept One | Novellus | BRKT,ARM CASS DOOR | New OEM | Contact Us |
| 15-01139-00 | Concept One | Novellus | RING, WINDOW | New OEM | Contact Us |
| 15-01140-00 | Concept One | Novellus | BRKT,SUPPORT | New OEM | Contact Us |
| 15-01141-00 | Concept One | Novellus | STOP, WINDOW | New OEM | Contact Us |
| 15-01142-00 | Concept One | Novellus | WINDOW, ROUND | New OEM | Contact Us |
| 15-01144-00 | Concept One | Novellus | WINDOW, LEXAN | New OEM | Contact Us |
| 15-01146-00 | Concept One | Novellus | PANEL,SIDE,LL (No Cutout) | New OEM | Contact Us |
| 15-01158-00 | Concept One | Novellus | BRKT,PADDLE 100MM | New OEM | Contact Us |
| 15-01160-00 | Concept One | Novellus | BRKT, WOPS SENSOR | New OEM | Contact Us |
| 15-01161-02 | Concept One | Novellus | PLATE,WTM,"D",WOPS | New OEM | Contact Us |
| 15-01167-00 | Concept One | Novellus | bracket, paddle 200,mm - Extended Platform | New OEM | Contact Us |
| 15-01175-00 | Concept One | Novellus | BLADE, REAR CASSETTE HOLDER | New OEM | Contact Us |
| 15-01176-00 | Concept One | Novellus | BRKT,REAR,CASS HOLDER | New OEM | Contact Us |
| 15-01177-00 | Concept One | Novellus | PLATFORM, PLASTIC CASSETTE | New OEM | Contact Us |
| 15-01194-00 | Concept One | Novellus | BRKT,200MM PADDLE | New OEM | Contact Us |
| 15-01219-00 | Concept One | Novellus | BASE,INDUCTOR | New OEM | Contact Us |
| 15-024109-00 | Concept One | Novellus | TUBING,SHUTTLE DLCM | New OEM | Contact Us |
| 15-024110-00 | Concept One | Novellus | SUPPORT,PLATFORM SHUTTLE | New OEM | Contact Us |
| 15-024111-00 | Concept One | Novellus | BRKT,A/CYL-CARRIAGE | New OEM | Contact Us |
| 15-024498-00 | Concept One | Novellus | FLANGE,VALVE ADAPT. | New OEM | Contact Us |
| 15-024555-00 | Concept One | Novellus | PLATE,SHTL,STRK,SNSR,DLCM,HYU | New OEM | Contact Us |
| 15-024587-00 | Concept One | Novellus | SPACER, HTR W/PIN HOLE | New OEM | Contact Us |
| 15-024611-00 | Concept One | Novellus | PADDLE, 200MM VTR5-DIMPLED | New OEM | Contact Us |
| 15-024759-00 | Concept One | Novellus | SIDE, SHTL. CARRIAGE, UMC | New OEM | Contact Us |
| 15-024881-00 | Concept One | Novellus | FORK,END,CAP | New OEM | Contact Us |
| 15-024924-01 | Concept One | Novellus | BRKT,FRONT LH,200MM CASS | New OEM | Contact Us |
| 15-024924-02 | Concept One | Novellus | BRKT,FRONT RH, 200MM CASS | New OEM | Contact Us |
| 15-024950-00 | Concept One | Novellus | CAP, HEATER, SCR. COVER | New OEM | Contact Us |
| 15-024985-00 | Concept One | Novellus | BRKT,REAR,PLASTIC CASS,SIEMENS | New OEM | Contact Us |
| 15-027004-00 | Concept One | Novellus | PLUG,COVER,HEATER,SCREW | New OEM | Contact Us |
| 15-027196-00 | Concept One | Novellus | PLATE, ARM | New OEM | Contact Us |
| 15-027199-00 | Concept One | Novellus | ARM,FLAPPER | New OEM | Contact Us |
| 15-027273-00 | Concept One | Novellus | BRKT,LL DOOR SNSR | New OEM | Contact Us |
| 15-028207-00 | Concept One | Novellus | NUT,SEAL RETAINING | New OEM | Contact Us |
| 15-028208-00 | Concept One | Novellus | HOUSING, BEARING | New OEM | Contact Us |