Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 10-00245-00 | Concept One | Novellus | TUBE ASSY, INLET/PURGE "A" | New OEM | Contact Us |
| 10-00246-00 | Concept One | Novellus | TUBE ASSY, INLET "B" | New OEM | Contact Us |
| 10-00247-00 | Concept One | Novellus | TUBE ASSY GAS INLET "A" MAN | New OEM | Contact Us |
| 10-00248-00 | Concept One | Novellus | TUBE ASSY GAS INLET"A"MAN | New OEM | Contact Us |
| 10-00249-00 | Concept One | Novellus | TUBE ASSY, FEMALE COUPLING | New OEM | Contact Us |
| 10-00250-00 | Concept One | Novellus | TUBE ASSY, FILTER PURGE BF | New OEM | Contact Us |
| 10-00251-00 | Concept One | Novellus | TUBE ASSY, PURGE/BF VALVE | New OEM | Contact Us |
| 10-00264-00 | Concept One | Novellus | MANIF, LL SENSOR 1$10 TORR | New OEM | Contact Us |
| 10-00264-01 | Concept One | Novellus | TUBE,LL PRESS | New OEM | Contact Us |
| 10-00274-00 | Concept One | Novellus | TUBE ASSY,TEOS DIVERT UPR | New OEM | Contact Us |
| 10-00285-02 | Concept One | Novellus | TUBE ASSY, SH COOLING, LONG | New OEM | Contact Us |
| 10-00314-00 | Concept One | Novellus | TUBE ASSY, PURGE MANIFOLD | New OEM | Contact Us |
| 10-00319-00 | Concept One | Novellus | TUBE ASSY,DIVERT FRAME "U" | New OEM | Contact Us |
| 10-00320-00 | Concept One | Novellus | TUBE ASSY,LWR DIVERT | New OEM | Contact Us |
| 10-00321-00 | Concept One | Novellus | TUBE ASSY,DIVERT TO FACIL 150M | New OEM | Contact Us |
| 10-00325-00 | Concept One | Novellus | TUBE ASSY,3/8 IN/OUT | New OEM | Contact Us |
| 10-00328-00 | Concept One | Novellus | TUBE ASSY,TEOS | New OEM | Contact Us |
| 10-00337-03 | Concept One | Novellus | TUBE ASSY, 1/8 MALE VCR25' | New OEM | Contact Us |
| 10-00337-04 | Concept One | Novellus | TUBE ASSY,1/8 MALE/MALE VCR | New OEM | Contact Us |
| 10-00337-05 | Concept One | Novellus | TUBE ASSY,1/8MALE,MALE VCR 50 | New OEM | Contact Us |
| 10-00340-00 | Concept One | Novellus | TUBE ASM, DEGAS TO TEOS OUTLET | New OEM | Contact Us |
| 10-00347-00 | Concept One | Novellus | TUBE ASM TEOS,INLET SCHUMACHER | New OEM | Contact Us |
| 10-00348-00 | Concept One | Novellus | TUBE ASM TEOS,INLET SCHUMACHER | New OEM | Contact Us |
| 10-00351-00 | Concept One | Novellus | TUBING, TEFLON .059ID X .006 WA | New OEM | Contact Us |
| 10-00358-00 | Concept One | Novellus | TUBE ASSY, N2 INLET | New OEM | Contact Us |
| 10-00366-00 | Concept One | Novellus | TUBE UPPER OUTLET | New OEM | Contact Us |
| 10-00371-00 | Concept One | Novellus | TUBE ASSY,1/8 DOPED | New OEM | Contact Us |
| 10-00372-00 | Concept One | Novellus | TUBE ASSY,1/8" UNDOPED | New OEM | Contact Us |
| 10-00376-00 | Concept One | Novellus | TUBE ASSY,LFC ADAPTER | New OEM | Contact Us |
| 10-00377-00 | Concept One | Novellus | TUBE ASSY,LFC OUTLET,TMB,TMD | New OEM | Contact Us |
| 10-00378-00 | Concept One | Novellus | TUBE ASSY,FILTER INLET | New OEM | Contact Us |
| 10-00379-00 | Concept One | Novellus | TUBE ASSY,MISING MANF | New OEM | Contact Us |
| 10-00380-00 | Concept One | Novellus | TUBE ASSY,DUMP MANF | New OEM | Contact Us |
| 10-00385-00 | Concept One | Novellus | TUBE ASSY VAC MANIFOLD | New OEM | Contact Us |
| 10-00386-00 | Concept One | Novellus | TUBE ASSY,"B" GAS MANF-VCO | New OEM | Contact Us |
| 10-00387-00 | Concept One | Novellus | TUBE ASSY "A" INLET/PURGE LINE | New OEM | Contact Us |
| 10-00388-00 | Concept One | Novellus | TUBE ASSY, MAN "B" GAS SUPPLY | New OEM | Contact Us |
| 10-00389-00 | Concept One | Novellus | TUBE ASSY, MAN "A" GAS SUPPLY | New OEM | Contact Us |
| 10-00392-00 | Concept One | Novellus | ADPTR, TOP | New OEM | Contact Us |
| 10-00393-00 | Concept One | Novellus | ADPTR, KF TO SWAGELOK | New OEM | Contact Us |
| 10-00395-01 | Concept One | Novellus | TUBE ASSY,"A"GAS MANF-VCO | New OEM | Contact Us |
| 10-00395-02 | Concept One | Novellus | TUBE ASSY,"A" GAS MANF-VCR | New OEM | Contact Us |
| 10-00396-01 | Concept One | Novellus | TUBE ASSY,"B" GAS MANF-VCO | New OEM | Contact Us |
| 10-00396-02/E | Concept One | Novellus | TUBE ASSY,"B"GAS MANF-VCR | New OEM | Contact Us |
| 10-00404-00 | Concept One | Novellus | TUBE ASSY,OUTLET | New OEM | Contact Us |
| 10-00408-00 | Concept One | Novellus | SPOOL,AMPULE OUTLET,YAMANAKA | New OEM | Contact Us |
| 10-00409-00 | Concept One | Novellus | TUBE ASSY,LFC OUTLET | New OEM | Contact Us |
| 10-00414-00 | Concept One | Novellus | PORT,VCR,LEAK CHECK | New OEM | Contact Us |
| 10-00415-00 | Concept One | Novellus | TUBE ASSY, DUMP MAIFOLD | New OEM | Contact Us |
| 10-00421-00 | Concept One | Novellus | TUBE,PURGE LINE | New OEM | Contact Us |
| 10-00432-00 | Concept One | Novellus | TUBE ASSY,PC SIGNAL | New OEM | Contact Us |
| 10-00432-01 | Concept One | Novellus | TUBE ASSY,PC SIGNAL | New OEM | Contact Us |
| 10-00433-00 | Concept One | Novellus | TUBE ASSY,DIFF PRESS | New OEM | Contact Us |
| 10-00433-01 | Concept One | Novellus | TUBE ASSY,DIFF PRESS | New OEM | Contact Us |
| 10-023000-00 | Concept One | Novellus | TUBE ASSY, INLET LEFT HAND | New OEM | Contact Us |
| 10-023100-00 | Concept One | Novellus | TUBE ASSY, UNDOPED TEOS OUT | New OEM | Contact Us |
| 10-024501-00 | Concept One | Novellus | TUBE, DIVERT, UPPER, 200mm, SYST | New OEM | Contact Us |
| 10-024502-00 | Concept One | Novellus | TUBE,DIVERT,LOWER,200MM,SYST. | New OEM | Contact Us |
| 10-024503-00 | Concept One | Novellus | TUBE, TEOS DIVERT | New OEM | Contact Us |
| 10-028426-00 | Concept One | Novellus | TUBE ASSY,1/16 LIQ.LINE | New OEM | Contact Us |
| 10-029376-00 | Concept One | Novellus | TUBE ASSY D MAN/ CRYO BRK | New OEM | Contact Us |
| 10-034540-00 | Concept One | Novellus | TUBE ASSY, GASBOX / TEOS VAC | New OEM | Contact Us |
| 10-034812-00 | Concept One | Novellus | VALVE, MANF, LL | New OEM | Contact Us |
| 10-034873-00 | Concept One | Novellus | TUBE ASSY,LLL VENT/PURGE | New OEM | Contact Us |
| 10-034874-00 | Concept One | Novellus | TUBE ASSY,RLL VENT/PURGE | New OEM | Contact Us |
| 10-042677-00 | Concept One | Novellus | TUBE ASSY,TEOS DIVERT UPPR VCR | New OEM | Contact Us |
| 10-042679-00 | Concept One | Novellus | MANF,INJECT. HTD DUAL 20W | New OEM | Contact Us |
| 10-045018-00 | Concept One | Novellus | FLEX SPOOL,5 GAL INLET | New OEM | Contact Us |
| 10-045019-00 | Concept One | Novellus | FLEX SPOOL,5 GAL OUTLET | New OEM | Contact Us |
| 10-045275-00 | Concept One | Novellus | TUBE ASSY, 3/8 SWL-AN, 53" LG | New OEM | Contact Us |
| 10-053060-00 | Concept One | Novellus | TUBE ASSY,LEAK CHECK | New OEM | Contact Us |
| 10-10319-00 | Concept One | Novellus | TUBE ASSY, 3/8 IN/OUT 49" | New OEM | Contact Us |
| 10-10322-00 | Concept One | Novellus | TUBE ASSY,VCR TO INSULATOR | New OEM | Contact Us |
| 10-10395-00 | Concept One | Novellus | FTG,3 PORT,LH | New OEM | Contact Us |
| 10-105926-00 | Concept One | Novellus | MANIFOLD ASSY,DURAFLO CABINET | New OEM | Contact Us |
| 10-107923-00 | Concept One | Novellus | Manifold, B/C | New OEM | Contact Us |
| 10-117186-00 | Concept One | Novellus | TUBE ASSY, TEOS DIVRT, 200MM, VCR | New OEM | Contact Us |
| 10-126181-00 | Concept One | Novellus | TUBE ASSY,ISO TO THRTL VLV,SPD | New OEM | Contact Us |
| 10-132621-00 | Concept One | Novellus | 10-132621-00 | New OEM | Contact Us |
| 10-345539-00 | Concept One | Novellus | Tube Assembly, LOTO Manifold B inlet 150mm | New OEM | Contact Us |
| 10-345540-00 | Concept One | Novellus | Tube Assembly, LOTO Manifold A inlet 150mm | New OEM | Contact Us |
| 10-345541-00 | Concept One | Novellus | TUBE,ASSY,LOTO,MANIFOLD A INLET 200MM | New OEM | Contact Us |
| 10-416961-00 | Concept One | Novellus | TUBE ASSY,INJECTOR S6 VCR,LOW FLOW,C2SEQ | New OEM | Contact Us |
| 10-464285-00 | Concept One | Novellus | TUBE ASSY,INJECTOR S6 VCR,C2SEQ | New OEM | Contact Us |
| 10-464288-00 | Concept One | Novellus | TUBE ASSY,INJECTOR S6 VCR,LOW FLOW,C2SEQ | New OEM | Contact Us |
| 10-464289-00 | Concept One | Novellus | TUBE ASSY,INJECTOR,S6 | New OEM | Contact Us |
| 10-464290-00 | Concept One | Novellus | TUBE ASSY,INJECTOR PAIR,S6,C2SEQ | New OEM | Contact Us |
| 10-464292-00 | Concept One | Novellus | TUBE ASSY,PAIR,INJECTOR,V3 | New OEM | Contact Us |
| 15-00004-01 | Concept One | Novellus | SUPPORT, BAR, LIFT | New OEM | Contact Us |
| 15-00004-02 | Concept One | Novellus | SUPPORT, BAR, LIFT | New OEM | Contact Us |
| 15-00011-02 | Concept One | Novellus | SUPPORT, LEVELING, ADJ. | New OEM | Contact Us |
| 15-00012-01 | Concept One | Novellus | SUPPORT, HTR (SHIPPING) | New OEM | Contact Us |
| 15-00019-02 | Concept One | Novellus | BLANK OFF,ALUMINUM | New OEM | Contact Us |
| 15-00027-02 | Concept One | Novellus | GUIDE, NOZZLE ADJUSTER | New OEM | Contact Us |
| 15-00043-02 | Concept One | Novellus | ADJUSTER,CERAMIC,GAS PLT | New OEM | Contact Us |
| 15-00068-01 | Concept One | Novellus | PADDLE, (150MM) WAFER MOL | New OEM | Contact Us |
| 15-00074-01 | Concept One | Novellus | BRKT,CYL ADAPTER | New OEM | Contact Us |
| 15-00075-00 | Concept One | Novellus | BRKT,LOAD LOCK SUPPORT | New OEM | Contact Us |
| 15-00076-00 | Concept One | Novellus | SWING ARM | New OEM | Contact Us |
| 15-00077-00 | Concept One | Novellus | LINK, CYLINDER | New OEM | Contact Us |