Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 15-00089-00 | Concept One | Novellus | PIVOT, STAND | New OEM | Contact Us |
| 15-00094-00 | Concept One | Novellus | HSG, L.L. DOOR BEARING | New OEM | Contact Us |
| 15-00126-00 | Concept One | Novellus | STRAP, HEATER GND | New OEM | Contact Us |
| 15-00138-00 | Concept One | Novellus | FLAG, LL .505 DIA | New OEM | Contact Us |
| 15-00180-00 | Concept One | Novellus | COVER, FRONT W/O PERF | New OEM | Contact Us |
| 15-00190-00 | Concept One | Novellus | BAR, LL SIDE/BAFFLE | New OEM | Contact Us |
| 15-00216-01 | Concept One | Novellus | HOLDER, FILTER LL BACKFILL | New OEM | Contact Us |
| 15-00229-00 | Concept One | Novellus | NUT,FEEDTHROUGH,1/2-20 | New OEM | Contact Us |
| 15-00270-00 | Concept One | Novellus | SUPPORT, PLATFORM 4" | New OEM | Contact Us |
| 15-00288-00 | Concept One | Novellus | SPACER,PLT LOWER | New OEM | Contact Us |
| 15-00293-01 | Concept One | Novellus | BRKT,RT HOOK (PLATFORM) | New OEM | Contact Us |
| 15-00293-02 | Concept One | Novellus | BRKT,LEFT HOOK (PLATFORM) | New OEM | Contact Us |
| 15-00308-00 | Concept One | Novellus | BRKT,LL DOOR SNSR | New OEM | Contact Us |
| 15-00309-00 | Concept One | Novellus | HANGER, NOZZLE | New OEM | Contact Us |
| 15-00309-01 | Concept One | Novellus | HANGER,NOZZLE | New OEM | Contact Us |
| 15-00311-00 | Concept One | Novellus | NUT CAP 1/4 - 20 NICKEL | New OEM | Contact Us |
| 15-00313-01 | Concept One | Novellus | BLADE, WAFER PLACEMENT | New OEM | Contact Us |
| 15-00314-01 | Concept One | Novellus | ROD, WAFER ALIGNER | New OEM | Contact Us |
| 15-00320-00 | Concept One | Novellus | BRKT,SW,AL .005 | New OEM | Contact Us |
| 15-00341-00 | Concept One | Novellus | SCRW,1/4-20X.25,NICKEL | New OEM | Contact Us |
| 15-00343-00 | Concept One | Novellus | GUARD, SWITCH | New OEM | Contact Us |
| 15-00352-00 | Concept One | Novellus | BRKT,ADJUST MT. | New OEM | Contact Us |
| 15-00354-00 | Concept One | Novellus | BRKT,CYL MTG | New OEM | Contact Us |
| 15-00357-00 | Concept One | Novellus | CLAMP,SHAFT | New OEM | Contact Us |
| 15-00358-00 | Concept One | Novellus | BSHG, ADJUST. | New OEM | Contact Us |
| 15-00359-00 | Concept One | Novellus | FLANGE,SPLINE | New OEM | Contact Us |
| 15-00361-00 | Concept One | Novellus | SCRW,ADJUST | New OEM | Contact Us |
| 15-00362-00 | Concept One | Novellus | FLANGE,SPLINE | New OEM | Contact Us |
| 15-00368-00 | Concept One | Novellus | SHAFT, GENEVA | New OEM | Contact Us |
| 15-00371-00 | Concept One | Novellus | New OEM | Contact Us | |
| 15-00372-00 | Concept One | Novellus | WASHER,HEATER STRAP | New OEM | Contact Us |
| 15-00373-00 | Concept One | Novellus | FLAG,GENEVA MECHANISM` | New OEM | Contact Us |
| 15-00376-00 | Concept One | Novellus | PIN, GUIDE | New OEM | Contact Us |
| 15-00378-00 | Concept One | Novellus | CLAMP NOZZLE TO RF CAP | New OEM | Contact Us |
| 15-00385-00 | Concept One | Novellus | NUT, HEX 10-32 NICKEL | New OEM | Contact Us |
| 15-00386-00 | Concept One | Novellus | WSHR,#10, NICKEL | New OEM | Contact Us |
| 15-00391-00 | Concept One | Novellus | BSHG, CERAMIC UPPER | New OEM | Contact Us |
| 15-00396-00 | Concept One | Novellus | FLANGE,SHAFT | New OEM | Contact Us |
| 15-00399-01 | Concept One | Novellus | SCRW,HEX,8-32X.8,NI | New OEM | Contact Us |
| 15-00399-02 | Concept One | Novellus | SCRW, HEX, 8-32 X .96, NI | New OEM | Contact Us |
| 15-00399-03 | Concept One | Novellus | SCRW,HEX,8-32X.55,NI | New OEM | Contact Us |
| 15-00399-04 | Concept One | Novellus | SCRW,HEX,8-32X1.02,NI | New OEM | Contact Us |
| 15-00399-05 | Concept One | Novellus | SCRW,HEX,8-32X1.12,NI | New OEM | Contact Us |
| 15-00399-06 | Concept One | Novellus | SCRW,HEX,8-32X1.23,NI | New OEM | Contact Us |
| 15-00401-00 | Concept One | Novellus | SHAFT, SPINDLE | New OEM | Contact Us |
| 15-00409-00 | Concept One | Novellus | WINDOW, PYREX | New OEM | Contact Us |
| 15-00410-00 | Concept One | Novellus | WINDOW LEXAN | New OEM | Contact Us |
| 15-00412-00 | Concept One | Novellus | FLANGE,BEARING | New OEM | Contact Us |
| 15-00413-00 | Concept One | Novellus | WASHER,THRUST | New OEM | Contact Us |
| 15-00414-00 | Concept One | Novellus | CLAMP,BRG | New OEM | Contact Us |
| 15-00418-00 | Concept One | Novellus | SPACER,BEARING | New OEM | Contact Us |
| 15-00437-00 | Concept One | Novellus | BLOCK,PILLOW,RH | New OEM | Contact Us |
| 15-00438-00 | Concept One | Novellus | BLOCK,PILLOW,LH | New OEM | Contact Us |
| 15-00440-00 | Concept One | Novellus | SHAFT, LEFT | New OEM | Contact Us |
| 15-00442-00 | Concept One | Novellus | COVER,PILLOW BLOCK | New OEM | Contact Us |
| 15-00443-00 | Concept One | Novellus | COVER,UPPER BEARING-L.S. | New OEM | Contact Us |
| 15-00444-00 | Concept One | Novellus | COVER,UPPER BEARING | New OEM | Contact Us |
| 15-00445-00 | Concept One | Novellus | PLATE,STOP,BRKT | New OEM | Contact Us |
| 15-00457-00 | Concept One | Novellus | SCRW,HEATER STRAP | New OEM | Contact Us |
| 15-00462-00 | Concept One | Novellus | PLATE INS DIST TUNER | New OEM | Contact Us |
| 15-00474-00 | Concept One | Novellus | HSG, SPRING | New OEM | Contact Us |
| 15-00475-00 | Concept One | Novellus | FEEDTHRU,TOP PLATE | New OEM | Contact Us |
| 15-00477-00 | Concept One | Novellus | PLATE,BTM,1.25" | New OEM | Contact Us |
| 15-00479-00 | Concept One | Novellus | GENEVA WHEEL | New OEM | Contact Us |
| 15-00480-00 | Concept One | Novellus | DRIVER,GENEVA | New OEM | Contact Us |
| 15-00483-00 | Concept One | Novellus | RING, CERAMIC | New OEM | Contact Us |
| 15-00484-00 | Concept One | Novellus | BSHG, CERAMIC | New OEM | Contact Us |
| 15-00485-00 | Concept One | Novellus | BRACKET 150mm | New OEM | Contact Us |
| 15-00487-00 | Concept One | Novellus | BRKT,100MM | New OEM | Contact Us |
| 15-00488-00 | Concept One | Novellus | ARM, ONE ARM ROBOT | New OEM | Contact Us |
| 15-00489-00 | Concept One | Novellus | SEAL, HOUSING | New OEM | Contact Us |
| 15-00492-00 | Concept One | Novellus | FOREARM, ONE-ARM ROBOT | New OEM | Contact Us |
| 15-00501-00 | Concept One | Novellus | NUT,HOUSING | New OEM | Contact Us |
| 15-00503-00 | Concept One | Novellus | BRKT,ONE-ARM ROBOT | New OEM | Contact Us |
| 15-00506-00 | Concept One | Novellus | SPACER,EXT SHAFT | New OEM | Contact Us |
| 15-00507-00 | Concept One | Novellus | SPACER,EXT. SEAL | New OEM | Contact Us |
| 15-00510-00 | Concept One | Novellus | SPACER,ARM BEARING | New OEM | Contact Us |
| 15-00511-00 | Concept One | Novellus | SPACER,ROTATION SHAFT | New OEM | Contact Us |
| 15-00512-00 | Concept One | Novellus | SPACER,EXT COUPLING | New OEM | Contact Us |
| 15-00514-00 | Concept One | Novellus | BSHG, ROT BREARING | New OEM | Contact Us |
| 15-00515-00 | Concept One | Novellus | BSHG, BEARING | New OEM | Contact Us |
| 15-00516-00 | Concept One | Novellus | BSHG, BRAKE | New OEM | Contact Us |
| 15-00517-00 | Concept One | Novellus | BUSHING, EXT. BEARING | New OEM | Contact Us |
| 15-00518-00 | Concept One | Novellus | BSHG, ROTATION SEAL` | New OEM | Contact Us |
| 15-00520-00 | Concept One | Novellus | BSHG, SEAL GUIDE | New OEM | Contact Us |
| 15-00521-00 | Concept One | Novellus | CLAMP,ARM PULLEY | New OEM | Contact Us |
| 15-00522-00 | Concept One | Novellus | COUPLING, EXT.SHAFT | New OEM | Contact Us |
| 15-00523-00 | Concept One | Novellus | PULLY, FOREARM DRIVE | New OEM | Contact Us |
| 15-00525-00 | Concept One | Novellus | PULLEY, ARM DRIVE | New OEM | Contact Us |
| 15-00526-00 | Concept One | Novellus | PULLEY, ARM DRIVE | New OEM | Contact Us |
| 15-00527-00 | Concept One | Novellus | PULLEY, FOREARM DRIVE | New OEM | Contact Us |
| 15-00532-00 | Concept One | Novellus | WASHER,BRAKE | New OEM | Contact Us |
| 15-00534-00 | Concept One | Novellus | FLANGE,BRAKE | New OEM | Contact Us |
| 15-00538-00 | Concept One | Novellus | COVER,ARM | New OEM | Contact Us |
| 15-00539-00 | Concept One | Novellus | COVER,SEAL | New OEM | Contact Us |
| 15-00543-00 | Concept One | Novellus | COVER,PULLEY | New OEM | Contact Us |
| 15-00545-00 | Concept One | Novellus | COVER,HOUSING | New OEM | Contact Us |
| 15-00547-00 | Concept One | Novellus | SHAFT, ARM | New OEM | Contact Us |
| 15-00549-00 | Concept One | Novellus | SHAFT, FOREARM | New OEM | Contact Us |
| 15-00551-00 | Concept One | Novellus | SHAFT, ROTATION | New OEM | Contact Us |