Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 15-00552-00 | Concept One | Novellus | SHAFT, EXTENSION | New OEM | Contact Us |
| 15-00553-05 | Concept One | Novellus | SHIM, HEATER.005 | New OEM | Contact Us |
| 15-00553-10 | Concept One | Novellus | SHIM, HEATER .010 | New OEM | Contact Us |
| 15-00553-18 | Concept One | Novellus | SHIM, HEATER .018 | New OEM | Contact Us |
| 15-00553-25 | Concept One | Novellus | SHIM,HEATER .025 | New OEM | Contact Us |
| 15-00553-31 | Concept One | Novellus | SHIM,HEATER .031 | New OEM | Contact Us |
| 15-00554-05 | Concept One | Novellus | SHIM, V .005 | New OEM | Contact Us |
| 15-00554-10 | Concept One | Novellus | SHIM, V .10 | New OEM | Contact Us |
| 15-00554-18 | Concept One | Novellus | SHIM, V .018 | New OEM | Contact Us |
| 15-00554-25 | Concept One | Novellus | SHIM, V .025 | New OEM | Contact Us |
| 15-00554-31 | Concept One | Novellus | SHIM, V .031 | New OEM | Contact Us |
| 15-00558-01 | Concept One | Novellus | SHIELD,HTR STRAP,2.00 LG | New OEM | Contact Us |
| 15-00558-02 | Concept One | Novellus | SHIELD,HTR STRAP,2.75 LG | New OEM | Contact Us |
| 15-00565-00 | Concept One | Novellus | STOP, BELLOWS | New OEM | Contact Us |
| 15-00567-00 | Concept One | Novellus | CERAMIC, TC | New OEM | Contact Us |
| 15-00569-00 | Concept One | Novellus | BRKT,MTG,SUPPORT | New OEM | Contact Us |
| 15-00570-00 | Concept One | Novellus | BRKT, MTG, SLIDE | New OEM | Contact Us |
| 15-00578-00 | Concept One | Novellus | CAP,CER FEEDTHRU | New OEM | Contact Us |
| 15-00581-00 | Concept One | Novellus | PLATE,MTG,VLV | New OEM | Contact Us |
| 15-00590-00 | Concept One | Novellus | BLOCK,SHIPPING CASS DOOR | New OEM | Contact Us |
| 15-00592-00 | Concept One | Novellus | SPACER,NUPRO VLV | New OEM | Contact Us |
| 15-00597-00 | Concept One | Novellus | GASKET,METAL | New OEM | Contact Us |
| 15-00601-00 | Concept One | Novellus | PLATE,TOP,8",WFR | New OEM | Contact Us |
| 15-00603-00 | Concept One | Novellus | CHAMBER PROCESS 8" WAFER | New OEM | Contact Us |
| 15-00607-00 | Concept One | Novellus | SUPPORT, LEFT | New OEM | Contact Us |
| 15-00608-00 | Concept One | Novellus | SUPPORT, RIGHT | New OEM | Contact Us |
| 15-00609-00 | Concept One | Novellus | BRKT,LEFT HOOK | New OEM | Contact Us |
| 15-00610-00 | Concept One | Novellus | BRKT,RIGHT HOOK | New OEM | Contact Us |
| 15-00613-00 | Concept One | Novellus | BRKT,BLADE HOLDER | New OEM | Contact Us |
| 15-00616-00 | Concept One | Novellus | WHEEL, GENEVA 8" WAFER | New OEM | Contact Us |
| 15-00617-00 | Concept One | Novellus | DRIVER,GENEVA,8"WFR | New OEM | Contact Us |
| 15-00619-00 | Concept One | Novellus | PLATE,BTM,8",WFR | New OEM | Contact Us |
| 15-00631-00 | Concept One | Novellus | BRACKET | New OEM | Contact Us |
| 15-00632-00 | Concept One | Novellus | FLAG,GENEVA MECH | New OEM | Contact Us |
| 15-00633-00 | Concept One | Novellus | MOTOR MOUNT | New OEM | Contact Us |
| 15-00634-00 | Concept One | Novellus | BRKT,DISTRIBUTION TUNER | New OEM | Contact Us |
| 15-00653-00 | Concept One | Novellus | CLAMP,HSG | New OEM | Contact Us |
| 15-00654-00 | Concept One | Novellus | WASHER,FLANGE | New OEM | Contact Us |
| 15-00655-00 | Concept One | Novellus | SPINDLE ALIGN BLOCK | New OEM | Contact Us |
| 15-00656-00 | Concept One | Novellus | SHAFT, EXT.-REDUCTION | New OEM | Contact Us |
| 15-00657-00 | Concept One | Novellus | SPACER,GEAR-EXT | New OEM | Contact Us |
| 15-00661-00 | Concept One | Novellus | SPACER,GEAR-ROT | New OEM | Contact Us |
| 15-00662-00 | Concept One | Novellus | BSHG, PRE-LOAD | New OEM | Contact Us |
| 15-00663-00 | Concept One | Novellus | BSHG, BRG-EXT. | New OEM | Contact Us |
| 15-00664-00 | Concept One | Novellus | SPACER,BEARING,2.125 | New OEM | Contact Us |
| 15-00665-00 | Concept One | Novellus | SHAFT, ROT.-REDUCTION | New OEM | Contact Us |
| 15-00666-00 | Concept One | Novellus | BSHG, ROTATION | New OEM | Contact Us |
| 15-00667-00 | Concept One | Novellus | HUB, EXTENTION | New OEM | Contact Us |
| 15-00668-00 | Concept One | Novellus | HUB | New OEM | Contact Us |
| 15-00680-00 | Concept One | Novellus | SLEEVE, CERAMIC | New OEM | Contact Us |
| 15-00684-00 | Concept One | Novellus | CERAMIC CONTROL TC | New OEM | Contact Us |
| 15-00685-00 | Concept One | Novellus | FEEDTHRU,INNER | New OEM | Contact Us |
| 15-00686-00 | Concept One | Novellus | WASHER,FT | New OEM | Contact Us |
| 15-00692-00 | Concept One | Novellus | VIEWPORT, WOPS | New OEM | Contact Us |
| 15-00696-00 | Concept One | Novellus | BRKT,ADAPTER,SNSR | New OEM | Contact Us |
| 15-00698-00 | Concept One | Novellus | SCRW,FORK | New OEM | Contact Us |
| 15-00699-01 | Concept One | Novellus | FORK, FINGER 7.5" | New OEM | Contact Us |
| 15-00699-02 | Concept One | Novellus | FORK, FINGER 8" | New OEM | Contact Us |
| 15-00709-00 | Concept One | Novellus | EXTENDER, SHAFT | New OEM | Contact Us |
| 15-00714-00 | Concept One | Novellus | BLOCK,SW MTG | New OEM | Contact Us |
| 15-00721-00 | Concept One | Novellus | WSHR,#8,NICKEL | New OEM | Contact Us |
| 15-00729-00 | Concept One | Novellus | CLAMP,FLAT | New OEM | Contact Us |
| 15-00731-00 | Concept One | Novellus | BUSHING, KEYED | New OEM | Contact Us |
| 15-00732-00 | Concept One | Novellus | BRKT,INTLK SE,(2 HAND) | New OEM | Contact Us |
| 15-00734-00 | Concept One | Novellus | BRKT,SWIVEL | New OEM | Contact Us |
| 15-00735-00 | Concept One | Novellus | SWIVEL, SPLIT-REAR | New OEM | Contact Us |
| 15-00736-00 | Concept One | Novellus | SWIVEL, SPLIT FRONT | New OEM | Contact Us |
| 15-00737-00 | Concept One | Novellus | BUSHING, ADJUST 200MM | New OEM | Contact Us |
| 15-00737-01 | Concept One | Novellus | BUSHING, ADJUST | New OEM | Contact Us |
| 15-00742-00 | Concept One | Novellus | TUBE,CENTER | New OEM | Contact Us |
| 15-00743-00 | Concept One | Novellus | RETAINER WASHER | New OEM | Contact Us |
| 15-00745-00 | Concept One | Novellus | FTG,PORT | New OEM | Contact Us |
| 15-00774-00 | Concept One | Novellus | BRKT,ADAPTER,LEMO | New OEM | Contact Us |
| 15-00803-00 | Concept One | Novellus | SHAFT, SWING ARM WCVD | New OEM | Contact Us |
| 15-00806-00 | Concept One | Novellus | LINK, CYLINDER WCVD | New OEM | Contact Us |
| 15-00807-00 | Concept One | Novellus | PIVOT, STAMP WCVD | New OEM | Contact Us |
| 15-00810-00 | Concept One | Novellus | PIN, 3/8 DIAX1.38 LG | New OEM | Contact Us |
| 15-00818-00 | Concept One | Novellus | DRIVER,GENEVA,WCVD | New OEM | Contact Us |
| 15-00824-00 | Concept One | Novellus | PLATE,SHIELD,CVD-W | New OEM | Contact Us |
| 15-00826-00 | Concept One | Novellus | SCRW,10-24x.75L,NICKEL,WCVD | New OEM | Contact Us |
| 15-00830-00 | Concept One | Novellus | FTG,90 DEGREE 3/8 TUBE | New OEM | Contact Us |
| 15-00832-00 | Concept One | Novellus | FLAG,GENEVA WCVD | New OEM | Contact Us |
| 15-00834-00 | Concept One | Novellus | PIN, LIFT WCVD | New OEM | Contact Us |
| 15-00835-00 | Concept One | Novellus | PLATFORM,LIFT PIN WCVD | New OEM | Contact Us |
| 15-00839-00 | Concept One | Novellus | SCRW,1/4-20x.9L,NICKEL | New OEM | Contact Us |
| 15-00866-00 | Concept One | Novellus | SPRING,PED,CER,WCVD | New OEM | Contact Us |
| 15-00870-01 | Concept One | Novellus | ARM, TRANSFER, F.RIGHT | New OEM | Contact Us |
| 15-00870-02 | Concept One | Novellus | ARM, TRANSFER, R.RIGHT | New OEM | Contact Us |
| 15-00870-03 | Concept One | Novellus | ARM, TRANSFER R. LEFT | New OEM | Contact Us |
| 15-00870-04 | Concept One | Novellus | ARM, TRANSFER, R.LEFT | New OEM | Contact Us |
| 15-00882-00 | Concept One | Novellus | HARD STOP, OUT | New OEM | Contact Us |
| 15-00883-00 | Concept One | Novellus | HARD STOP, IN | New OEM | Contact Us |
| 15-00888-01 | Concept One | Novellus | SPACER,SPRING-01 | New OEM | Contact Us |
| 15-00888-02 | Concept One | Novellus | SPACER,SPRING,8-02 | New OEM | Contact Us |
| 15-00915-01 | Concept One | Novellus | PLATE,INSULATION,TEOS,RH | New OEM | Contact Us |
| 15-00915-02 | Concept One | Novellus | PLATE,INSULATION,TEOS,LH | New OEM | Contact Us |
| 15-00916-00 | Concept One | Novellus | PLATE,MTG,TEOS | New OEM | Contact Us |
| 15-00924-00 | Concept One | Novellus | CLAMP,BAR,HUB,EXCL OPTION | New OEM | Contact Us |
| 15-00932-00 | Concept One | Novellus | SCREW NICKEL | New OEM | Contact Us |
| 15-00935-00 | Concept One | Novellus | SCRW,10-32x.5,NICKEL | New OEM | Contact Us |