Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 17-00173-00 | Concept One | Novellus | COVER,TC ASSY | New OEM | Contact Us |
| 17-00175-00 | Concept One | Novellus | CLAMP,CERAMIC FORK FXTR | New OEM | Contact Us |
| 17-00176-00 | Concept One | Novellus | DRUM, DIST., TUNER | New OEM | Contact Us |
| 17-00227-00 | Concept One | Novellus | PANEL,HALFQ | New OEM | Contact Us |
| 17-00236-00 | Concept One | Novellus | HOUSING, GAS VENT A/B | New OEM | Contact Us |
| 17-00237-01 | Concept One | Novellus | DUCT, STATIONARY | New OEM | Contact Us |
| 17-00250-00 | Concept One | Novellus | PANEL, PU/BF | New OEM | Contact Us |
| 17-00268-00 | Concept One | Novellus | PLATE,PNEU,TMB/TMP | New OEM | Contact Us |
| 17-00279-01 | Concept One | Novellus | BEZEL, CRT/TOUCHSCREEN, 200MM | New OEM | Contact Us |
| 17-00290-00 | Concept One | Novellus | SHIM, LEVELING, .002 THK | New OEM | Contact Us |
| 17-00290-01 | Concept One | Novellus | SHIM, LEVELING, .008 THK | New OEM | Contact Us |
| 17-00290-02 | Concept One | Novellus | SHIM, LEVELING, .020 THK | New OEM | Contact Us |
| 17-00305-00 | Concept One | Novellus | BRACKET, MOUNTING, PURGE | New OEM | Contact Us |
| 17-00312-00 | Concept One | Novellus | ENCL,VM-3000 | New OEM | Contact Us |
| 17-00316-00 | Concept One | Novellus | BRKT,CABLE | New OEM | Contact Us |
| 17-00318-00 | Concept One | Novellus | BOX,HTR ISO FLTR | New OEM | Contact Us |
| 17-00319-00 | Concept One | Novellus | COVER, HEATER ISO FILTER | New OEM | Contact Us |
| 17-00321-00 | Concept One | Novellus | ENCL,PWR SPLY | New OEM | Contact Us |
| 17-00337-00 | Concept One | Novellus | FLAG,OPTOSENSOR,PLATFORM | New OEM | Contact Us |
| 17-021433-00 | Concept One | Novellus | BASE I/F BOARD DC PWR SUPPL, SM | New OEM | Contact Us |
| 17-021434-00 | Concept One | Novellus | I/F BOARD COVER DC PWR SUP, SM | New OEM | Contact Us |
| 17-024406-00 | Concept One | Novellus | BRKT,SW PLATFORM | New OEM | Contact Us |
| 17-024434-00 | Concept One | Novellus | FLAG,OPTOSENSOR METAL CASSETTE | New OEM | Contact Us |
| 17-024672-00 | Concept One | Novellus | BRKT,3.5" DIS | New OEM | Contact Us |
| 17-032013-00 | Concept One | Novellus | BRKT, MTG, MFC, BROOKS | New OEM | Contact Us |
| 17-032018-00 | Concept One | Novellus | SCREEN RF SHIELD, ETCHED | New OEM | Contact Us |
| 17-045060-00 | Concept One | Novellus | BRKT,WATER FLOW SW | New OEM | Contact Us |
| 17-101596-00 | Concept One | Novellus | RTNR,FORK | New OEM | Contact Us |
| 17-10392-00 | Concept One | Novellus | FLAG,CARRIAGE | New OEM | Contact Us |
| 17-103987-00 | Concept One | Novellus | STRAP, RF | New OEM | Contact Us |
| 17-10514-00 | Concept One | Novellus | BRKT,CAPACITOR | New OEM | Contact Us |
| 17-10515-00 | Concept One | Novellus | STRAP, SHUNT CAPACITOR | New OEM | Contact Us |
| 17-115725-00 | Concept One | Novellus | SNUBBER, WAFER | New OEM | Contact Us |
| 17-120155-00 | Concept One | Novellus | PLATE,INTFC,AE MATCH,SEQ-E | New OEM | Contact Us |
| 17-134423-00 | Concept One | Novellus | BRKT,RELAY MTG,RF SW | New OEM | Contact Us |
| 17-146010-00 | Concept One | Novellus | BRKT, MOUNT, LFC, P2000i | New OEM | Contact Us |
| 17-159253-00 | Concept One | Novellus | BRKT, CONN, CPC, C1 ROBOT | New OEM | Contact Us |
| 17-434017-00 | Concept One | Novellus | PANEL,FRONT,TEMP/PRESS CNTRL | New OEM | Contact Us |
| 18-0271-01 | Concept One | Novellus | SCRW,HEX SCH 2-56 X 1/4 L, SST | New OEM | Contact Us |
| 18-0473-01 | Concept One | Novellus | SCREW, PH FLHD, 4-40 X 1/4, SST | New OEM | Contact Us |
| 18-0671-03 | Concept One | Novellus | SCRW,HEX SCH, 6-32 X 3/8 L, SST | New OEM | Contact Us |
| 18-2838 | Concept One | Novellus | SET SCREW, 5/16-18 X 1-3/32 L, SOC, NO MAR TIP, SS | New OEM | Contact Us |
| 19-00007-00 | Concept One | Novellus | ASSY,LEAD SCRW,MOD | New OEM | Contact Us |
| 19-00019-00 | Concept One | Novellus | PIN, 1\4DIA 1.38L MODIFICATION | New OEM | Contact Us |
| 19-00020-02 | Concept One | Novellus | SHAFT, LL DOOR-RH | New OEM | Contact Us |
| 19-00020-03 | Concept One | Novellus | SHAFT, LL DOOR-LH | New OEM | Contact Us |
| 19-00022-00 | Concept One | Novellus | SHAFT, BAFFLE MODIFICATION | New OEM | Contact Us |
| 19-00056-00 | Concept One | Novellus | FEEDTHRU,HI VOLT,ALTER DETAIL | New OEM | Contact Us |
| 19-00058-00 | Concept One | Novellus | PULLY, 16XL MOD. | New OEM | Contact Us |
| 19-00064-00 | Concept One | Novellus | BRG, 3/8-7/8 (SL-39) | New OEM | Contact Us |
| 19-00066-00 | Concept One | Novellus | BRG, 8/22MM DUP(SL-39)MOD | New OEM | Contact Us |
| 19-00068-00 | Concept One | Novellus | BRG, DICRONITE COATED | New OEM | Contact Us |
| 19-00071-00 | Concept One | Novellus | TUBE,FTG INS,FEMALE 1/16 | New OEM | Contact Us |
| 19-00072-00 | Concept One | Novellus | TUBE FITTING INSERT MALE 1/16 | New OEM | Contact Us |
| 19-00079-00 | Concept One | Novellus | SPLINE, SHAFT, SPINDLE LIFT | New OEM | Contact Us |
| 19-00108-00 | Concept One | Novellus | CABLE ASSY,ARM,BALL | New OEM | Contact Us |
| 19-00109-00 | Concept One | Novellus | CABLE ASSY,FOREARM,BALL | New OEM | Contact Us |
| 19-00111-00 | Concept One | Novellus | ACTUATOR, BALL SCR LIFT | New OEM | Contact Us |
| 19-00117-00 | Concept One | Novellus | ASSY,BELLOWS,WELDED | New OEM | Contact Us |
| 19-00123-00 | Concept One | Novellus | PCB, INDEXER EXT W/JUMP | New OEM | Contact Us |
| 19-00124-00 | Concept One | Novellus | PCB, INDEXER ROT W/JUMP | New OEM | Contact Us |
| 19-00125-00 | Concept One | Novellus | PCB, INDEXER LIFT W/JUMP | New OEM | Contact Us |
| 19-00127-00 | Concept One | Novellus | PCB, ANALOG OUT W/JUMPER | New OEM | Contact Us |
| 19-00130-00 | Concept One | Novellus | PCB, SERIAL I/O SBX351 | New OEM | Contact Us |
| 19-00136-00 | Concept One | Novellus | ASSY,PCB,ANA.OUT W/JUMP | New OEM | Contact Us |
| 19-00144-00 | Concept One | Novellus | GEAR, MOTOR-ROTATION | New OEM | Contact Us |
| 19-00145-00 | Concept One | Novellus | GEAR, MOTOR-EXT. | New OEM | Contact Us |
| 19-00146-00 | Concept One | Novellus | GEAR, ROTATION | New OEM | Contact Us |
| 19-00147-00 | Concept One | Novellus | GEAR, EXT. | New OEM | Contact Us |
| 19-00148-00 | Concept One | Novellus | GEAR, ANTI-BACKLASH-PRIM. | New OEM | Contact Us |
| 19-00149-00 | Concept One | Novellus | GEAR, ANTI-BACKLASH-SEC. | New OEM | Contact Us |
| 19-00154-00 | Concept One | Novellus | HEATER BLK,2KW AND 2KW 8" | New OEM | Contact Us |
| 19-00154-01 | Concept One | Novellus | HTR BLK,SLOTTED,C1,NO PINS,NO SCRIBE,MOD | New OEM | Contact Us |
| 19-00154-02 | Concept One | Novellus | HTR BLK,NO SLOT,SEQUEL,ALL STA PINS | New OEM | Contact Us |
| 19-00154-03 | Concept One | Novellus | HTR BLK,SLOTTED,C1,ALL STA PINS | New OEM | Contact Us |
| 19-00154-04 | Concept One | Novellus | HTR BLK,NO SLOT,SEQUEL,STA 1 PINS | New OEM | Contact Us |
| 19-00154-05 | Concept One | Novellus | HTR BLK, SLOTTED, C1, STA 1 PINS | New OEM | Contact Us |
| 19-00154-06 | Concept One | Novellus | HTR BLK,NO SLOT,SEQUEL,SCRIBED | New OEM | Contact Us |
| 19-00154-07 | Concept One | Novellus | HTR BLK,SLOTTED,C1,SCRIBED | New OEM | Contact Us |
| 19-00154-09 | Concept One | Novellus | HTR BLK,SLOTTED,C1,SCRIBED,STA 1 PINS | New OEM | Contact Us |
| 19-00154-11 | Concept One | Novellus | HTR BLK, SLOTTED, C1, SCRIBED, ALL STA PINS | New OEM | Contact Us |
| 19-00154-13 | Concept One | Novellus | HTR BLK, SLOTTED, 200/150 MM C1, ALL STA PI | New OEM | Contact Us |
| 19-00155-00 | Concept One | Novellus | HEATER,3KW AND 2KW 6 | New OEM | Contact Us |
| 19-00155-04 | Concept One | Novellus | HTR BLK,SLOTTED,PINS ALL STA,MOD | New OEM | Contact Us |
| 19-00156-00 | Concept One | Novellus | PCB, DIGITAL I/O 519A #1 | New OEM | Contact Us |
| 19-00157-00 | Concept One | Novellus | PCB, DIGITAL I/O 519A #2 | New OEM | Contact Us |
| 19-00168-00 | Concept One | Novellus | PCB, DI9 I/O 519A W/JUMPERS #2 | New OEM | Contact Us |
| 19-00176-00 | Concept One | Novellus | ASSY BLK PWR DIST 3 POLE | New OEM | Contact Us |
| 19-00188-00 | Concept One | Novellus | SPLINE, SHAFT WCVD | New OEM | Contact Us |
| 19-00206-02 | Concept One | Novellus | FLOW RESTRICT .043 VCR GSK | New OEM | Contact Us |
| 19-00224-01 | Concept One | Novellus | SPRING,TORSION,RT | New OEM | Contact Us |
| 19-00224-02 | Concept One | Novellus | SPRING,TORSION,LFT | New OEM | Contact Us |
| 19-00229-00 | Concept One | Novellus | BUS, 3 POLE, 1LUG | New OEM | Contact Us |
| 19-00232-00 | Concept One | Novellus | SPLINE,SHFT,SPNDL LIFT EXC OP | New OEM | Contact Us |
| 19-00248-00 | Concept One | Novellus | CLAMP,L/L DOOR MOD | New OEM | Contact Us |
| 19-00249-00 | Concept One | Novellus | VALVE,ANGLE,LIMIT SW & CBL | New OEM | Contact Us |
| 19-00260-10 | Concept One | Novellus | MANF, 3WAY 10 STAT. MOD | New OEM | Contact Us |
| 19-00262-00 | Concept One | Novellus | ELBOW,KF50 MODIF | New OEM | Contact Us |
| 19-00266-01 | Concept One | Novellus | MOTOR, CONCEPT ONE ROBOT, "C" TYPE, EXTENSION FOR 90 V ROBOT | New OEM | Contact Us |
| 19-00267-01 | Concept One | Novellus | MOTOR, CONCEPT ONE ROBOT, "C" TYPE, ROTATION FOR 90 V ROBOT | New OEM | Contact Us |