Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 22-00326-00 | Concept One | Novellus | O-RING,SP,.275 x 86.25 LG,BUNA | New OEM | Contact Us |
| 22-00342-00 | Concept One | Novellus | NUT, ULTRA-TORR 3/8 TUBE | New OEM | Contact Us |
| 22-00343-00 | Concept One | Novellus | SLEEVE, ULTRA TORR 3/8 TB | New OEM | Contact Us |
| 22-00344-00 | Concept One | Novellus | O-RING,2-012,VITON | New OEM | Contact Us |
| 22-00345-00 | Concept One | Novellus | O-RING VITON .562 X .362 | New OEM | Contact Us |
| 22-00346-00 | Concept One | Novellus | NUT, QUICK CNNCT 3/8OD TB | New OEM | Contact Us |
| 22-00347-00 | Concept One | Novellus | WASHER, 3/8OD TUBE | New OEM | Contact Us |
| 22-00355-00 | Concept One | Novellus | FTG,TEE,MALERUN 1/8NPT X 1/4 | New OEM | Contact Us |
| 22-00356-00 | Concept One | Novellus | FTG,TEE,MALERUN 1/8NPT X 1/8" | New OEM | Contact Us |
| 22-00358-00 | Concept One | Novellus | O-RING,2-010,VITON V75 | New OEM | Contact Us |
| 22-00359-00 | Concept One | Novellus | FTG, "T" 10-32 | New OEM | Contact Us |
| 22-00366-00 | Concept One | Novellus | ELBOW,MALE 1/4"NPT 1/4" | New OEM | Contact Us |
| 22-00373-00 | Concept One | Novellus | FERRULE,BACK 1/16,SWAGELOK | New OEM | Contact Us |
| 22-00374-00 | Concept One | Novellus | FERRULE,FRONT,1/16,SWAGELOK | New OEM | Contact Us |
| 22-00375-00 | Concept One | Novellus | NUT, SWAGELOK 1/16" | New OEM | Contact Us |
| 22-00379-00 | Concept One | Novellus | BEARING,RADIAL,.875ODX.625ID | New OEM | Contact Us |
| 22-00391-00 | Concept One | Novellus | O-RING,2-020,VITON V747-75 | New OEM | Contact Us |
| 22-00417-00 | Concept One | Novellus | GASKET,VCR NICKEL RET 1/4" | New OEM | Contact Us |
| 22-00425-00 | Concept One | Novellus | NUT, 1/8" SWAGELOCK | New OEM | Contact Us |
| 22-00426-00 | Concept One | Novellus | FERRULE,REAR,1/8,SWAGELOK | New OEM | Contact Us |
| 22-00427-00 | Concept One | Novellus | NUT, 1/4 TUBE, ULTRA-TORR | New OEM | Contact Us |
| 22-00429-00 | Concept One | Novellus | SLEEVE, 1/4 TUBE,ULTRA-TORR | New OEM | Contact Us |
| 22-00434-00 | Concept One | Novellus | O-RING,2-010,BUNA,N741-70 | New OEM | Contact Us |
| 22-00435-00 | Concept One | Novellus | GSKT BUNA-N ID OD .125 OD .295 | New OEM | Contact Us |
| 22-00558-00 | Concept One | Novellus | BUSHING, ISODAMP RIBBED | New OEM | Contact Us |
| 22-00559-00 | Concept One | Novellus | RING, ISODAMP RIBBED | New OEM | Contact Us |
| 22-00605-00 | Concept One | Novellus | BEARING,BALL,.375ODX.125IDX.15 | New OEM | Contact Us |
| 22-00606-00 | Concept One | Novellus | O-RING | New OEM | Contact Us |
| 22-00612-00 | Concept One | Novellus | VALVE,DIA,NC,1/4VCR-F,AIR OPR | New OEM | Contact Us |
| 22-00630-00 | Concept One | Novellus | O-RING, KIT, GATE VALVE | New OEM | Contact Us |
| 22-00631-00 | Concept One | Novellus | SEAL, SHAFT THROTTLE VALVE | New OEM | Contact Us |
| 22-00638-00 | Concept One | Novellus | BEARING,FLANGE,.500OD | New OEM | Contact Us |
| 22-00648-00 | Concept One | Novellus | TC O-RING | New OEM | Contact Us |
| 22-00653-00 | Concept One | Novellus | FTG,ADPTR,KF40 TOKF50 | New OEM | Contact Us |
| 22-00655-00 | Concept One | Novellus | VALVE,NO,DIAPH,FVCR | New OEM | Contact Us |
| 22-00656-00 | Concept One | Novellus | O-RING,2-264,KALREZ 4079 | New OEM | Contact Us |
| 22-00657-00 | Concept One | Novellus | O-RING,2-369,KALREZ K4079 | New OEM | Contact Us |
| 22-00658-00 | Concept One | Novellus | O-RING,2-443,KALREZ 4079 | New OEM | Contact Us |
| 22-00660-00 | Concept One | Novellus | MFC, 5 ML TEOS KALREZ | New OEM | Contact Us |
| 22-00681-00 | Concept One | Novellus | PRESS REG, 1-25 PSI | New OEM | Contact Us |
| 22-00702-00 | Concept One | Novellus | VALVE,3PORT,AIR PILOT,NO | New OEM | Contact Us |
| 22-00704-00 | Concept One | Novellus | O-RING,2-162,VITON V747-75 | New OEM | Contact Us |
| 22-00706-00 | Concept One | Novellus | VALVE, PIEZO, 2USLM | New OEM | Contact Us |
| 22-00707-00 | Concept One | Novellus | FTG,ADPTR,Y,1/8TUBE TO1/4NPT,B | New OEM | Contact Us |
| 22-00713-00 | Concept One | Novellus | SEAL, LIP , 50x75 | New OEM | Contact Us |
| 22-00715-00 | Concept One | Novellus | PLUG,SSI 1/16 | New OEM | Contact Us |
| 22-00716-00 | Concept One | Novellus | O-RING,2-231,KALREZ 4079 | New OEM | Contact Us |
| 22-00717-00 | Concept One | Novellus | O-RING,2-109,KALREZ 4079 | New OEM | Contact Us |
| 22-00718-00 | Concept One | Novellus | O-RING,2-222,KALREZ 4079 | New OEM | Contact Us |
| 22-00725-00 | Concept One | Novellus | O-RING,2-041,VITON | New OEM | Contact Us |
| 22-00737-00 | Concept One | Novellus | O-RING,SP,.040 X .070 ID,KALRE | New OEM | Contact Us |
| 22-00744-00 | Concept One | Novellus | VALVE,DIA,1/8"VCR,LIQUID | New OEM | Contact Us |
| 22-00745-00 | Concept One | Novellus | FILTER 1/8" VCR 0.5 MICRON | New OEM | Contact Us |
| 22-00756-00 | Concept One | Novellus | GLAND, 1/8 VCR | New OEM | Contact Us |
| 22-00762-00 | Concept One | Novellus | FTG,PLUG,1/8 VCR | New OEM | Contact Us |
| 22-00768-00 | Concept One | Novellus | O-RING,2-010,VITON V747-75 | New OEM | Contact Us |
| 22-00775-00 | Concept One | Novellus | O-RING, ADAPTOR FTG-LFC,KALREZ | New OEM | Contact Us |
| 22-00778-00 | Concept One | Novellus | VALVE,TGL,BN SERIES | New OEM | Contact Us |
| 22-00780-00 | Concept One | Novellus | O-RING,2-018,VITON V75 | New OEM | Contact Us |
| 22-00783-00 | Concept One | Novellus | LFC, D2000I, .5ML/MIN TMB | New OEM | Contact Us |
| 22-00788-00 | Concept One | Novellus | O-RING,2-014,KALREZ 4079 | New OEM | Contact Us |
| 22-00792-00 | Concept One | Novellus | GASKET,VCR,1/8,UNPLATED NICKEL | New OEM | Contact Us |
| 22-00795-00 | Concept One | Novellus | PRESSURE REGULATOR | New OEM | Contact Us |
| 22-026085-00 | Concept One | Novellus | VALVE,3PORT,PNEU,2 ACTUATOR | New OEM | Contact Us |
| 22-026085-04 | Concept One | Novellus | VALVE,930,MBLK,F-F-F,NC/NC,SID | New OEM | Contact Us |
| 22-026373-00 | Concept One | Novellus | FILTER,IN:ML,OUT:FML | New OEM | Contact Us |
| 22-026373-01 | Concept One | Novellus | FILTER,MILLIPORE,IN:ML,OUT:FML | New OEM | Contact Us |
| 22-028206-00 | Concept One | Novellus | SCRW,SKT,HEX,10-32x.5,NICKE | New OEM | Contact Us |
| 22-028382-00 | Concept One | Novellus | SEAL, FLANGE | New OEM | Contact Us |
| 22-028500-00 | Concept One | Novellus | O-RING,2-262 V75 VITON | CE! | New OEM | Contact Us |
| 22-033312-00 | Concept One | Novellus | O-RING,2-220,KALREZ 4079 | New OEM | Contact Us |
| 22-033425-00 | Concept One | Novellus | O-RING, 2-226, KALREZ 4079 | New OEM | Contact Us |
| 22-033574-00 | Concept One | Novellus | O-RING,2-351,VITON V75 | New OEM | Contact Us |
| 22-034148-00 | Concept One | Novellus | O-RING,2-143,KALREZ 4079 | New OEM | Contact Us |
| 22-034149-00 | Concept One | Novellus | O-RING,2-242,KALREZ 4079 | New OEM | Contact Us |
| 22-041961-00 | Concept One | Novellus | BELT,TIMING,.08 X 184 TEETH | New OEM | Contact Us |
| 22-042340-00 | Concept One | Novellus | SEAL, FLANGED | New OEM | Contact Us |
| 22-045296-00 | Concept One | Novellus | PIN,FASTEX,STD BALL | New OEM | Contact Us |
| 22-045874-00 | Concept One | Novellus | UPC,300SCCM HE,0-20 TORR | New OEM | Contact Us |
| 22-046263-00 | Concept One | Novellus | COUPLING,1/4",BERG CC10-14-4 | New OEM | Contact Us |
| 22-046264-00 | Concept One | Novellus | CLAMP,SPLIT,3/8DIA,PIC,CGI-31 | New OEM | Contact Us |
| 22-048917-00 | Concept One | Novellus | VALVE,DUAL,NC/NO,6LV-D1V222PAB | New OEM | Contact Us |
| 22-10015-00 | Concept One | Novellus | O-RING, 2-329, VITON, CE! | New OEM | Contact Us |
| 22-10018-00 | Concept One | Novellus | O-RING,2-385,VITON | New OEM | Contact Us |
| 22-100613-00 | Concept One | Novellus | BALL,SAPPHIRE,3/16 DIA | CE! | New OEM | Contact Us |
| 22-10062-00 | Concept One | Novellus | O-RING,2-374,VITON | New OEM | Contact Us |
| 22-10064-00 | Concept One | Novellus | BEARING,BALL,1.125ODX.5ID | New OEM | Contact Us |
| 22-10068-00 | Concept One | Novellus | O-RING,2-383,VITON | New OEM | Contact Us |
| 22-101053-00 | Concept One | Novellus | UPPER SEAL | New OEM | Contact Us |
| 22-10117-00 | Concept One | Novellus | O-RING,2-263,VITON | New OEM | Contact Us |
| 22-101315-00 | Concept One | Novellus | SPACER,SPLIT BUSHING,SPINDLE | New OEM | Contact Us |
| 22-101330-00 | Concept One | Novellus | O-RING,SP,.275 x 41.50 ID,VITO | CE! | New OEM | Contact Us |
| 22-10149-00 | Concept One | Novellus | SEAL, LIP | New OEM | Contact Us |
| 22-10172-00 | Concept One | Novellus | BEARING,XRLR,WAFER LIFT | New OEM | Contact Us |
| 22-10185-00 | Concept One | Novellus | O-RING, 2-112, VITON, CE! | New OEM | Contact Us |
| 22-10235-00 | Concept One | Novellus | FTG,CONN,MALE 1/8" KQH | New OEM | Contact Us |
| 22-102755-00 | Concept One | Novellus | CONN, MALE, 1/8 NPT X 1/4 | New OEM | Contact Us |
| 22-10291-00 | Concept One | Novellus | SEAL DOOR | New OEM | Contact Us |
| 22-10292-00 | Concept One | Novellus | SEAL DOOR | New OEM | Contact Us |
| 22-10299-00 | Concept One | Novellus | O-RING,2-222,VITON | New OEM | Contact Us |