Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 60-00162-00 | Concept One | Novellus | FLOW CNTRL,1/8 NPT TO 1/4 O.D. | New OEM | Contact Us |
| 60-00163-00 | Concept One | Novellus | VALVE,GATE,HIVAC,3",PNUE ACT | New OEM | Contact Us |
| 60-00170-00 | Concept One | Novellus | GAUGE,TUBE,ANALOG,OUTPUT | New OEM | Contact Us |
| 60-00171-00 | Concept One | Novellus | FLOW CNTL,1/4"OD TUBE 1/4"NPT | New OEM | Contact Us |
| 60-00176-00 | Concept One | Novellus | AIR CYL, 2.0"BORE, 5"STRK, DBL-AC | New OEM | Contact Us |
| 60-00177-00 | Concept One | Novellus | ADPTR,NW40 TO 1 1/2 ASA SST | New OEM | Contact Us |
| 60-00180-00 | Concept One | Novellus | VACUUM TRANSDUCER,25KF FLANGE | New OEM | Contact Us |
| 60-00183-00 | Concept One | Novellus | FLOW CONTROL, ELBOW 1/4 OD OUT | New OEM | Contact Us |
| 60-00187-00 | Concept One | Novellus | ACTUATOR,RTRY VANE,PNUE W/ADJU | New OEM | Contact Us |
| 60-00193-00 | Concept One | Novellus | VACUUM, SWITCH, ATMP | New OEM | Contact Us |
| 60-00194-00 | Concept One | Novellus | VACUUM, SWITCH, 20 TORR | New OEM | Contact Us |
| 60-00195-00 | Concept One | Novellus | VACUUM, SWITCH, 100 TORR | New OEM | Contact Us |
| 60-00196-00 | Concept One | Novellus | FTG, TEE, KF-25 | New OEM | Contact Us |
| 60-00196-01 | Concept One | Novellus | FTG,TEE,KF25,SHORT | New OEM | Contact Us |
| 60-00205-00 | Concept One | Novellus | MANF,4" | New OEM | Contact Us |
| 60-00208-00 | Concept One | Novellus | VALVE,DIA,1/4"MVCR | New OEM | Contact Us |
| 60-00209-00 | Concept One | Novellus | FTG,ADPTR,KF25 TO 1/4 VCR | New OEM | Contact Us |
| 60-023088-00 | Concept One | Novellus | SWITCH,PRESS.1/4 MVCR | New OEM | Contact Us |
| 60-027139-00 | Concept One | Novellus | TG,TEE,KF-25,ALUM,SHORT | New OEM | Contact Us |
| 60-029344-00 | Concept One | Novellus | MANOMETER, 10 TORR, 11S06, EMC | New OEM | Contact Us |
| 60-034022-00 | Concept One | Novellus | VAC SWITCH, 600 TORR | New OEM | Contact Us |
| 60-034082-00 | Concept One | Novellus | VALVE,RTANG,O-SEAL,1/2XNW16 | New OEM | Contact Us |
| 60-034738-00 | Concept One | Novellus | SWITCH, PRESSURE CDA 05-100 | New OEM | Contact Us |
| 60-10006-00 | Concept One | Novellus | GUAGE, CONVECT, DO, W/VCR4 | New OEM | Contact Us |
| 60-10058-00 | Concept One | Novellus | SWITCH,PRESSURE CDA | New OEM | Contact Us |
| 60-10124-00 | Concept One | Novellus | SHOCK ABSORBER | New OEM | Contact Us |
| 60-10125-00 | Concept One | Novellus | ACTUATOR,494 ROTARY | New OEM | Contact Us |
| 60-10126-00 | Concept One | Novellus | ACTUATOR, LINEAR 12" | New OEM | Contact Us |
| 60-10137-00 | Concept One | Novellus | VALVE,INLINE | New OEM | Contact Us |
| 60-10152-00 | Concept One | Novellus | RING, CENTERING NW200 ALUM | New OEM | Contact Us |
| 60-10312-00 | Concept One | Novellus | GATE, VAT INSERT CASS W/PERFL | New OEM | Contact Us |
| 60-10316-00 | Concept One | Novellus | VALVE, RTANG, KF40, MNL | New OEM | Contact Us |
| 60-10318-00 | Concept One | Novellus | VALVE GATE HEATED | New OEM | Contact Us |
| 60-10321-00 | Concept One | Novellus | PNEUMATIC INTERLOCK, R-301 | New OEM | Contact Us |
| 60-10336-00 | Concept One | Novellus | VALVE,GATE,4",HEATED,B3 | New OEM | Contact Us |
| 60-103898-00 | Concept One | Novellus | VALVE, BOTTOMPORT | New OEM | Contact Us |
| 60-119965-00 | Concept One | Novellus | GATE,50MM X 336MM,CHEMRAZ,AL | New OEM | Contact Us |
| 60-121857-00 | Concept One | Novellus | GATE,50MM X 336MM,VITON,AL | CE! | New OEM | Contact Us |
| 60-125751-00 | Concept One | Novellus | VALVE,MKS,TV,KF40 | New OEM | Contact Us |
| 60-125752-00 | Concept One | Novellus | VALVE,THROT,ISO100,MKS | New OEM | Contact Us |
| 60-126668-00 | Concept One | Novellus | VALVE,THROT,4",HEATED,MKS | New OEM | Contact Us |
| 60-133208-00 | Concept One | Novellus | KIT, SEALS HVA 4" GATE VALVE HVA | New OEM | Contact Us |
| 60-136938-00 | Concept One | Novellus | SEAL RING ASSY,KF40,CHEMRAZ 51 | New OEM | Contact Us |
| 60-174048-00 | Concept One | Novellus | VLV, ISOLATION, NW100 | New OEM | Contact Us |
| 60-180953-00 | Concept One | Novellus | ASSY,VALVE,BOTTOM PORT,930 | New OEM | Contact Us |
| 60-180955-00 | Concept One | Novellus | ASSY,VALVE,RT ANGLE,2.19X2.07M,930 | New OEM | Contact Us |
| 60-251709-00 | Concept One | Novellus | MANOMETER,100MT,NON-HTD,HORIZ | New OEM | Contact Us |
| 60-254066-00 | Concept One | Novellus | ACTUATOR,VITON,200MM,SMC L-MOTION SLIT V | New OEM | Contact Us |
| 60-275760-00 | Concept One | Novellus | RING,CNTRNG,NW40,AL,ID,PERLAST,G74P | New OEM | Contact Us |
| 60-293510-00 | Concept One | Novellus | VALVE, PNEU, 3WAY, 1/2"FNPT, PTFE | New OEM | Contact Us |
| 60-388931-00 | Concept One | Novellus | MANOMETER,CAPACITANCE,BARATRON,0.1TORR,9 | New OEM | Contact Us |
| 60-405807-00 | Concept One | Novellus | RING, CNTRNG, NW16, KALREZ 9100 O-RING, SST | New OEM | Contact Us |
| 61-293748-00 | Concept One | Novellus | ORIFICE,5.E-3IN,MALE,1/4 VCR DOUBLE UNION, 1.55" L | New OEM | Contact Us |
| 61-355560-00 | Concept One | Novellus | OEM SPARE,SENSE-RITE,C1D/C2-AL | New OEM | Contact Us |
| 61-355855-00 | Concept One | Novellus | OEM SPARE,SENSE-RITE RF INSTL,W/TRAZER MATCH | New OEM | Contact Us |
| 61-362309-00 | Concept One | Novellus | OEM SPARE, INTRF CBL, DB37(M) TO DB15(F), 2 | New OEM | Contact Us |
| 61-403152-00 | Concept One | Novellus | RELAY,HBC-868,SSR FAN AND T-STAT,C1-D | New OEM | Contact Us |
| 63-309399-00/OBS | Concept One | Novellus | OEM SPARE,COMPUTER,SYSTEM ,ARISTA,C1 | New OEM | Contact Us |
| 63-323815-00/CPS | Concept One | Novellus | PENDULUM VALVE KALREZ 8075 | New OEM | Contact Us |
| 660-177321-002 | Concept One | Novellus | GEN,PARAMOUNT 6K,C2 SEQ,C2 SPEED | New OEM | Contact Us |
| 660-276236-770 | Concept One | Novellus | GEN,APEX 770,5KW,13.56MHZ | New OEM | Contact Us |
| 660-317763-001 | Concept One | Novellus | PWR SPLY,15V,50W | New OEM | Contact Us |
| 661-097953-001 | Concept One | Novellus | UV LAMP,MICROWAVE STRPR | New OEM | Contact Us |
| 676-262166-001 | Concept One | Novellus | MOT,ELEC,BRUSHLESS,DC, C2DLCM-S | New OEM | Contact Us |
| 679-112067-001 | Concept One | Novellus | MTR,RF PWR,BIRD 4421 | CE! | New OEM | Contact Us |
| 685-238920-105 | Concept One | Novellus | I/O CONTROLLER,HS | New OEM | Contact Us |
| 69-301031-00 | Concept One | Novellus | GREASE,UNIFLOR 8711,30CC SYRINGE,50 GRAM | CE! | New OEM | Contact Us |
| 70-0003-044 | Concept One | Novellus | BLOCK,TERMINAL CERAMIC | New OEM | Contact Us |
| 70-00053-00 | Concept One | Novellus | 6" METAL CASSETTES | New OEM | Contact Us |
| 70-00054-00 | Concept One | Novellus | CASS,125MM,H-SQUARE,MC-5HC,SOL | New OEM | Contact Us |
| 70-00055-00 | Concept One | Novellus | CASS,100MM,H-SQUARE,MC1-4HC | New OEM | Contact Us |
| 70-00058-00 | Concept One | Novellus | CASS,200MM,H-SQUARE,MC-8HC,SOL | New OEM | Contact Us |
| 70-00078-00 | Concept One | Novellus | CASS,200MM,POLY,FLUOROWARE,PA1 | New OEM | Contact Us |
| 70-00079-00 | Concept One | Novellus | CASS,150MM,POLY,FLUOROWARE,PA1 | New OEM | Contact Us |
| 70-0026-019 | Concept One | Novellus | FERRULE,14GA,UNINSULATED | New OEM | Contact Us |
| 70-09192-00 | Concept One | Novellus | CASS,150MM,METAL,H-SQUARE,SQ21 | New OEM | Contact Us |
| 70-132406-00 | Concept One | Novellus | GREASE, KRYTOX LVP, 2 OZ TUBE | New OEM | Contact Us |
| 71-00026-00 | Concept One | Novellus | INDICATOR FIXTURE | New OEM | Contact Us |
| 71-00062-00 | Concept One | Novellus | FIXTURE, PLATTEN | New OEM | Contact Us |
| 71-047543-00 | Concept One | Novellus | TAP,8-32 BOTTOMING | New OEM | Contact Us |
| 71-175640-00 | Concept One | Novellus | FIXTURE, COVER,APPLICATOR CLEANER | New OEM | Contact Us |
| 71-175641-00 | Concept One | Novellus | FIXTURE, TUBE,APPLICATOR CLEANER | New OEM | Contact Us |
| 72-00018-00 | Concept One | Novellus | WRENCH, TORQUE-35 OPEN END, ISO17025 New tool preset | New OEM | Contact Us |
| 72-00019-00 | Concept One | Novellus | WRENCH, TORQUE-35HEX, ISO17025 New tool preset | New OEM | Contact Us |
| 72-00021-00 | Concept One | Novellus | DRILL FXT-4 .250-20 HOLES | New OEM | Contact Us |
| 72-00026-00 | Concept One | Novellus | TOOL, PADDLE ALIGN-ONE, ARM | New OEM | Contact Us |
| 72-00028-00 | Concept One | Novellus | BLOCK,ARM INSTALLATION | New OEM | Contact Us |
| 72-00038-00 | Concept One | Novellus | SCALE, INSTRUMENTS, 6 LBS | New OEM | Contact Us |
| 72-00039-00 | Concept One | Novellus | BASE,DIAL INDICATOR,W/FINE ADJ | New OEM | Contact Us |
| 720-098739-001 | Concept One | Novellus | SCR, CAPTIVE SKT HD ASSY, 8-32 | New OEM | Contact Us |
| 720-181211-001 | Concept One | Novellus | SCR,HEX HD,#10-32,5/8 LG. | New OEM | Contact Us |
| 720-209433-001 | Concept One | Novellus | SCR,FLH,PH,0-80 X 1/8 | New OEM | Contact Us |
| 72-028425-00 | Concept One | Novellus | TOOL, REATAINING NUT | New OEM | Contact Us |
| 72-033283-00 | Concept One | Novellus | TORQUE HANDLE ADJUSTABLE | New OEM | Contact Us |
| 72-033285-00 | Concept One | Novellus | 3/8" SQAURE 5MM HEX BIT | New OEM | Contact Us |
| 72-034412-00 | Concept One | Novellus | REFERENCE TUBE,HASTINGS DB-20 | New OEM | Contact Us |
| 72-034850-00 | Concept One | Novellus | SEAL INSTALLATION TOOL | New OEM | Contact Us |
| 72-141782-00 | Concept One | Novellus | WRENCH,TORQUE,11/32" 10 IN-LBS | New OEM | Contact Us |
| 72-166629-00 | Concept One | Novellus | INSERT,SS ID1/4-20 OD7/16-14 | New OEM | Contact Us |
| 72490-04 | Concept One | Novellus | BELLOWS SS KF 40 | New OEM | Contact Us |