Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| CPS-20167 | Concept One | Novellus | MODULE,PS, 90V/2.1AT2 | New OEM | Contact Us |
| CPS-20171 | Concept One | Novellus | PS, MEGAPAC 2, 7 OUTPUT 90V | New OEM | Contact Us |
| CPS-20230 | Concept One | Novellus | ASSY, ROBOT, C1, 70V WITH ARM, REWORKED | New OEM | Contact Us |
| CPS-20231 | Concept One | Novellus | ASSY, ROBOT, C1, 70V NO ARM, REWORKED | New OEM | Contact Us |
| CPS-20232 | Concept One | Novellus | ASSY, ROBOT, C1, 90V WITH ARM, REWORKED | New OEM | Contact Us |
| CPS-20233 | Concept One | Novellus | ASSY, ROBOT, C1, 90V NO ARM, REWORKED | New OEM | Contact Us |
| CPS-20244 | Concept One | Novellus | STOP, WAFER CASSETTE, REPLACEMENT | New OEM | Contact Us |
| CPS-20245 | Concept One | Novellus | BATTERY, LITHIUM, 3.6V | New OEM | Contact Us |
| CPS-20247-01 | Concept One | Novellus | MFC, BROOKS INSTRUMENT GF125 UHP, N2, 1SLPM | New OEM | Contact Us |
| CPS-20247-02 | Concept One | Novellus | MFC, BROOKS INSTRUMENT GF125 UHP, N2, 2SLPM | New OEM | Contact Us |
| CPS-20247-03 | Concept One | Novellus | MFC, BROOKS INSTRUMENT GF125 UHP, N2, 5SLPM | New OEM | Contact Us |
| CPS-20247-04 | Concept One | Novellus | MFC, BROOKS INSTRUMENT GF125 UHP, N2, 10SLPM | New OEM | Contact Us |
| CPS-20247-05 | Concept One | Novellus | MFC, BROOKS INSTRUMENT GF125 UHP, N2, 20SLPM | New OEM | Contact Us |
| CPS-20247-06 | Concept One | Novellus | MFC, BROOKS INSTRUMENT GF125 UHP, NH3, 5SLPM | New OEM | Contact Us |
| CPS-20247-07 | Concept One | Novellus | MFC, BROOKS INSTRUMENT GF125 UHP, NH3, 200SCCM | New OEM | Contact Us |
| CPS-20247-08 | Concept One | Novellus | MFC, BROOKS INSTRUMENT GF125 UHP, HE, 5SLPM | New OEM | Contact Us |
| CPS-20251 | Concept One | Novellus | VALVE, 3 WAY | New OEM | Contact Us |
| CPS-20252 | Concept One | Novellus | VALVE 4 WAY | New OEM | Contact Us |
| CPS-20253 | Concept One | Novellus | MANIFOLD, 4 STATION | New OEM | Contact Us |
| CPS-20254 | Concept One | Novellus | MANIFOLD, 5 STATION | New OEM | Contact Us |
| CPS-20255 | Concept One | Novellus | MANIFOLD, 10 STATION | New OEM | Contact Us |
| CPS-20271 | Concept One | Novellus | BELT, TIMING, SPNDL MTR, 200MM | New OEM | Contact Us |
| CPS-20295 | Concept One | Novellus | ASSY, C1-D LF MONITOR | New OEM | Contact Us |
| CPS-20299 | Concept One | Novellus | CASSETTE, OPEN, 4 INCH | New OEM | Contact Us |
| CPS-20341 | Concept One | Novellus | ASSY, CASSETTE 4” & 6” NESTED | New OEM | Contact Us |
| CPS-20447 | Concept One | Novellus | CLAMP, TEST INDICATOR | New OEM | Contact Us |
| CPS-20450 | Concept One | Novellus | LEVEL, CIRCULAR SURFACE-MOUNT, 1” DIA., 7/16” HT | New OEM | Contact Us |
| CPS-20451 | Concept One | Novellus | HOLDER, HEIGHT GAGE, 4 INCH LONG | New OEM | Contact Us |
| CPS-20455 | Concept One | Novellus | INDICATOR, DROP, DIGITAL | New OEM | Contact Us |
| CPS-20465 | Concept One | Novellus | ASSY, CASSETTE 4” & 6” NESTED, SST | New OEM | Contact Us |
| CPS-20583 | Concept One | Novellus | O-RING,SPLICED,11.475 ID X .187 W | New OEM | Contact Us |
| CPS-20591-01 | Concept One | Novellus | MFC,2%SIH4/98%HE,2SLM,1/4VCR,9PIN GF120 | New OEM | Contact Us |
| CPS-20591-02 | Concept One | Novellus | MFC,5SLM,NH3,1/4"VCR,9PIN,D-SUB, GF120 | New OEM | Contact Us |
| CPS-20591-03 | Concept One | Novellus | MFC,20SLM,O2,1/4"VCR,9PIN,D-SUB,GF120 | New OEM | Contact Us |
| CPS-20591-04 | Concept One | Novellus | MFC,10SLM,N2O,1/4"VCR,9PIN,D-SUB,GF120 | New OEM | Contact Us |
| CPS-27-00168-01 | Concept One | Novellus | TEOS LFC MODULE, DIGITAL, C1, DOPED | New OEM | Contact Us |
| CPS-27-00169-01 | Concept One | Novellus | TEOS LFC MODULE, DIGITAL, C1, UNDOPED | New OEM | Contact Us |
| CPS-61-100001 | Concept One | Novellus | SPINDLE ASSEMBLY, FERROTECH WITH CORE EXCHANGE | New OEM | Contact Us |
| CPS-TEOS10007 | Concept One | Novellus | CONTROLLER, FLOW FOR TEOS, PLC | New OEM | Contact Us |
| CPS-TEOS10008 | Concept One | Novellus | TEOS CONTROLLER 5ul/Min TEOS, 0.5 TMP, 0.5 TMB | New OEM | Contact Us |
| 02-00081-00 | Concept One | Novellus | ASSY,HTR RETURN ENC. | New OEM | Contact Us |
| 02-00081-01 | Concept One | Novellus | ASSY,HTR RETURN ENC. | New OEM | Contact Us |
| 02-00081-02 | Concept One | Novellus | ASSY,HTR RETURN ENC | New OEM | Contact Us |
| 02-00081-03 | Concept One | Novellus | ASSY,HTR FT ENCLOSURE | New OEM | Contact Us |
| 03-00018-00 | Concept One | Novellus | ASSY,PWR BOARD | New OEM | Contact Us |
| 03-00028-00 | Concept One | Novellus | CABLE ASSY,CA29 | New OEM | Contact Us |
| 03-00074-00 | Concept One | Novellus | ASSY,CASS DOOR SENS HRNS | New OEM | Contact Us |
| 03-00238-00 | Concept One | Novellus | CBL ASSY,SW FLOW,PROTEUS CA8 | New OEM | Contact Us |
| 04-285224-00 | Concept One | Novellus | PM KIT,C1D,WET CLEAN #1,FAIRCHILD,C1D | New OEM | Contact Us |
| 04-285234-00 | Concept One | Novellus | PM KIT,C1D,NEW HEATER KIT,FAIRCHILD,C1D | New OEM | Contact Us |
| 04-324422-00 | Concept One | Novellus | KIT,POWER SUPPLY REPLACE 27-10054-00 | New OEM | Contact Us |
| 04-421494-00 | Concept One | Novellus | KIT,CONTACTOR,AUX-CONTACT,24VDC,4-N/O | New OEM | Contact Us |
| 05-110416-01 | Concept One | Novellus | KIT,WINDOW,SAPPHIRE SINGLE EP | New OEM | Contact Us |
| 10-00424-00 | Concept One | Novellus | TUBE ASSY,INJECTOR,S6 | New OEM | Contact Us |
| 15-00645-00 | Concept One | Novellus | BLOCK,KYBD | New OEM | Contact Us |
| 19-00120-01 | Concept One | Novellus | CONDUIT,FLEX,6LG | New OEM | Contact Us |
| 19-00120-02 | Concept One | Novellus | CONDUIT,FLEX,5LG | New OEM | Contact Us |
| 22-117964-00 | Concept One | Novellus | MFC,5SLM,N2,AERA FC7800CU,CEDG | New OEM | Contact Us |
| 22-117995-00 | Concept One | Novellus | MFC,20SLM,N2,AERA FC7710CU,CED | New OEM | Contact Us |
| 27-00043-00 | Concept One | Novellus | PWR SPLY,24VDC/1A | New OEM | Contact Us |
| 27-00059-00 | Concept One | Novellus | VACUUM SWITCH | New OEM | Contact Us |
| 27-00074-00 | Concept One | Novellus | PCB, FAB HEATER FILTER | New OEM | Contact Us |
| 27-00198-00 | Concept One | Novellus | CNTRLR,SIGMA,6 | New OEM | Contact Us |
| 27-307952-00 | Concept One | Novellus | PWR SPLY,24V,6.5A,150W | New OEM | Contact Us |
| 30-00003-00 | Concept One | Novellus | INDUCTOR,2.2UH,435MA | New OEM | Contact Us |
| 33-00002-01 | Concept One | Novellus | MOTOR, 115V 60HZ MAG BRK(SPIN) | New OEM | Contact Us |
| 34-028026-30 | Concept One | Novellus | CB,30A,1P,RNG LUG | New OEM | Contact Us |
| 60-00001-00 | Concept One | Novellus | VALVE,THROT,VAC | New OEM | Contact Us |
| 60-10317-00 | Concept One | Novellus | VALVE,THROT,HEATED | New OEM | Contact Us |
| 72-00051-00 | Concept One | Novellus | WRENCH,TORQUE-ALLEN 15 IN-LB | New OEM | Contact Us |
| 99-032026-00 | Concept One | Novellus | U.H.V.ALUM FOIL 18 X 500FT | New OEM | Contact Us |
| 951407 | GaSonics | GaSonics | FUSE,20A,500V | New OEM | Contact Us |
| 01-4620 | GaSonics | GaSonics | CLAMP, NUT PLATEN 150mm | New OEM | Contact Us |
| 01-0196-01 | GaSonics | GaSonics | BRKT,MOTOR PIVOT | New OEM | Contact Us |
| 01-0197-01 | GaSonics | GaSonics | ROLLER,CORE | New OEM | Contact Us |
| 01-0423 | GaSonics | GaSonics | BRACKET,MTG,LAMP TRAY | New OEM | Contact Us |
| 01-0441 | GaSonics | GaSonics | ADAPTER,REDUCER,VACUUM EXHAUST | New OEM | Contact Us |
| 01-0462 | GaSonics | GaSonics | DOOR,CHAMBER,ONE TOOL POINT | New OEM | Contact Us |
| 01-0507 | GaSonics | GaSonics | PLATE,6 IN VACUUM | New OEM | Contact Us |
| 01-0508 | GaSonics | GaSonics | COVER,BOTTOM,6 IN,FIXED | New OEM | Contact Us |
| 01-0509 | GaSonics | GaSonics | RING,LIFTER, 6 IN | New OEM | Contact Us |
| 01-0515 | GaSonics | GaSonics | RING,LIFTER-WAFER(5 IN -8 IN) | New OEM | Contact Us |
| 01-0585 | GaSonics | GaSonics | LOCATOR, WAFER,HARD ANODIZE | New OEM | Contact Us |
| 01-0616 | GaSonics | GaSonics | FASTENER, CLAMP,PROCESS CHAMBER | New OEM | Contact Us |
| 01-0617 | GaSonics | GaSonics | CLAMP, SHOWER HEAD | New OEM | Contact Us |
| 01-0668 | GaSonics | GaSonics | LIFT CHAMBER ASSY,NW50 | New OEM | Contact Us |
| 01-0697 | GaSonics | GaSonics | CHAMBER,LOWER | New OEM | Contact Us |
| 01-0698 | Gasonics | Gasonics | CHAMBER,UPPER | New OEM | Contact Us |
| 01-0699 | GaSonics | GaSonics | PLATE,BOTTOM,REACTOR CENTER ASSY | New OEM | Contact Us |
| 01-2195 | GaSonics | GaSonics | LAMP HOLDER L3510 | New OEM | Contact Us |
| 01-2356 | GaSonics | GaSonics | LOCATOR, WAFER, 8 IN,HARD ANODIZED | New OEM | Contact Us |
| 01-2474 | GaSonics | GaSonics | FORK, LATCH, SHORT REACTOR CENTER ASSY | New OEM | Contact Us |
| 01-2484 | GaSonics | GaSonics | FORK, LATCH, LONG REACTOR CENTER ASSY | New OEM | Contact Us |
| 0125-101881 | GaSonics | GaSonics | SWITCH,SAFTY INTRLK LEVIII 30VDC .18AMP | New OEM | Contact Us |
| 01-2524 | GaSonics | GaSonics | BUSHING, CHAMBER ALIGN BASEPLATE, ASSY | New OEM | Contact Us |
| 01-2574 | GaSonics | GaSonics | FLANGE, EOP, CHAMBER | New OEM | Contact Us |
| 01-2575 | GaSonics | GaSonics | MOUNT, EOP, REACTOR CENTER | New OEM | Contact Us |
| 01-2577 | GaSonics | GaSonics | Blank-Off, Chamber Reactor Center | New OEM | Contact Us |
| 0125-772766 | GaSonics | GaSonics | PENDANT,TEACH MODIFIED | New OEM | Contact Us |
| 01-2582 | GaSonics | GaSonics | GUSSET, CHAMBER ASSY | New OEM | Contact Us |