Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 19-00268-01 | Concept One | Novellus | 90V LIFT MOTOR | New OEM | Contact Us |
| 19-00273-00 | Concept One | Novellus | WASHER,SPRING MOD | New OEM | Contact Us |
| 19-00291-00 | Concept One | Novellus | TUBING,TEFLON 1/16 CLEANED SOF | New OEM | Contact Us |
| 19-00299-00 | Concept One | Novellus | Manifold.Dual Injecton. Heated | New OEM | Contact Us |
| 19-00301-00 | Concept One | Novellus | TUBE,MODIF,DEGAS NIPPLE | New OEM | Contact Us |
| 19-00306-00 | Concept One | Novellus | RELAY,24V DELAY ON MAKE 60 SEC | New OEM | Contact Us |
| 19-00308-00 | Concept One | Novellus | TERM BLK,W/RES & DIODE | New OEM | Contact Us |
| 19-00309-00/RW | Concept One | Novellus | PCB, RS422 SERIAL | New OEM | Contact Us |
| 19-00313-01 | Concept One | Novellus | LFC 5 ML (SSI) | New OEM | Contact Us |
| 19-00313-02 | Concept One | Novellus | LFC, 5 ML (VCR) | New OEM | Contact Us |
| 19-00323-00 | Concept One | Novellus | GEAR, SPUR-MODIF., .625PD | New OEM | Contact Us |
| 19-00331-00 | Concept One | Novellus | PCB, DIGI SERIAL | New OEM | Contact Us |
| 19-00336-00 | Concept One | Novellus | LFC,.5ML,VCR | New OEM | Contact Us |
| 19-00357-00 | Concept One | Novellus | CONN,EXT PLATFORM BREAK-OUT | New OEM | Contact Us |
| 19-032015-01 | Concept One | Novellus | HEATER BLK,150MM 6"OD PINNED | New OEM | Contact Us |
| 19-033108-00 | Concept One | Novellus | MODIF,XY STAGE | New OEM | Contact Us |
| 19-033267-00 | Concept One | Novellus | BELLOWS,LIFT PIN | New OEM | Contact Us |
| 19-034573-01 | Concept One | Novellus | SCREW LIFT IND | New OEM | Contact Us |
| 19-034573-03 | Concept One | Novellus | BEARING, BALL, .50 ID X .875 | New OEM | Contact Us |
| 19-034573-04 | Concept One | Novellus | BEARING, LINEAR/ROTARY 1 WTM | New OEM | Contact Us |
| 19-034573-06 | Concept One | Novellus | BEARING, NEEDLE 3PT CONT | New OEM | Contact Us |
| 19-034573-07 | Concept One | Novellus | BEARING, 1.06 OD | New OEM | Contact Us |
| 19-034573-08 | Concept One | Novellus | BEARING, 1.50 OD | New OEM | Contact Us |
| 19-034573-09 | Concept One | Novellus | BEARING, 2.62 OD | New OEM | Contact Us |
| 19-034573-10 | Concept One | Novellus | BEARING, 2.50 OD | New OEM | Contact Us |
| 19-034573-11 | Concept One | Novellus | BEARING, DUPLEX | New OEM | Contact Us |
| 19-034573-13 | Concept One | Novellus | BEARING,LINEAR SINGLE | New OEM | Contact Us |
| 19-034573-14 | Concept One | Novellus | BEARING, LINEAR DOUBLE | New OEM | Contact Us |
| 19-034573-15 | Concept One | Novellus | BEARING, RADIAL7/8 ODX 5/8 ID | New OEM | Contact Us |
| 19-034573-17 | Concept One | Novellus | BEARING, ROLLER 11/32 OD | New OEM | Contact Us |
| 19-034974-00 | Concept One | Novellus | LEAD SCRW,INDEXER ROBOT | New OEM | Contact Us |
| 19-051384-00 | Concept One | Novellus | ASSY,VALVE,100MM TORR,SPD-S | New OEM | Contact Us |
| 19-0626-00 | Concept One | Novellus | WSHR,FLAT,#6,NYLON | New OEM | Contact Us |
| 19-10313-00 | Concept One | Novellus | CABLE ASSAY, INDO, FOREARM | New OEM | Contact Us |
| 19-110004-00 | Concept One | Novellus | WSHR,SPRING,MOD,NP | New OEM | Contact Us |
| 19-116251-00 | Concept One | Novellus | GASKET,1/4"VCR,UNPLTD NI,.045D | New OEM | Contact Us |
| 19-116631-00 | Concept One | Novellus | ATC CAP,330PF,3600V,MOD | New OEM | Contact Us |
| 19-116632-00 | Concept One | Novellus | ATC CAP,1000 PF,1000 V,MOD | New OEM | Contact Us |
| 19-117915-00 | Concept One | Novellus | SPLINE,SHFT,SPNDL LIFT EXC OD | New OEM | Contact Us |
| 19-140178-00 | Concept One | Novellus | KIT,TOUCHSCREEN SYS | New OEM | Contact Us |
| 19-163074-00 | Concept One | Novellus | MOD,1/4 VCR GSKT,ORIFICE,.037 | New OEM | Contact Us |
| 19-163075-00 | Concept One | Novellus | MOD,1/4 VCR GSKT,ORIFICE,.103 | New OEM | Contact Us |
| 19-2651 | Concept One | Novellus | WASHER, SHOULDER,1/4 INCH, NYLON,.25 DP | New OEM | Contact Us |
| 19-379884-00 | Concept One | Novellus | WSHR,FLAT,SIZE .990 X .125X.050,C2SEQ-X,MOD | New OEM | Contact Us |
| 19-380481-00 | Concept One | Novellus | WSHR,BELLEVILLE,#8,0.168"ID,0.344"OD,NICKEL,MOD | New OEM | Contact Us |
| 19-380482-00 | Concept One | Novellus | NUT,STD,HEX,8-32,11/32"W,1/8"L,NICKEL 200,MOD | New OEM | Contact Us |
| 20-00020-01 | Concept One | Novellus | BLOCK,PILLOW,1.5 BUSHING | New OEM | Contact Us |
| 20-00064-00 | Concept One | Novellus | SPRING,CPRSN,.360OD | New OEM | Contact Us |
| 20-00066-00 | Concept One | Novellus | RING, RETAINER 1/4 EXT. | New OEM | Contact Us |
| 20-00067-00 | Concept One | Novellus | ROD CLEVIS 2.5" BORE STD | New OEM | Contact Us |
| 20-00070-00 | Concept One | Novellus | RING, RETAINING EXT. 1/2" | New OEM | Contact Us |
| 20-00072-00 | Concept One | Novellus | CLEVIS, PISTON ROD 4" STROKE | New OEM | Contact Us |
| 20-00073-00 | Concept One | Novellus | SCRW,SHLDR,10-32/1.5 LG | New OEM | Contact Us |
| 20-00074-00 | Concept One | Novellus | RING RETAINING 3/16" | New OEM | Contact Us |
| 20-00081-00 | Concept One | Novellus | BGR, OIL-LESS .502/.627 | New OEM | Contact Us |
| 20-00081-02 | Concept One | Novellus | BEARING,.531ODX.437ID | New OEM | Contact Us |
| 20-00098-00 | Concept One | Novellus | RECEPTACLE #81 | New OEM | Contact Us |
| 20-00103-00 | Concept One | Novellus | SHAFT, SWING ARM | New OEM | Contact Us |
| 20-00109-00 | Concept One | Novellus | TORR LUBE | New OEM | Contact Us |
| 20-00109-01 | Concept One | Novellus | TORR LUBE, 100CC | New OEM | Contact Us |
| 20-00114-00 | Concept One | Novellus | RTNR | New OEM | Contact Us |
| 20-00124-00 | Concept One | Novellus | SPRING,BRG PRELOAD,.875OD | New OEM | Contact Us |
| 20-00135-00 | Concept One | Novellus | BELT, 130XL037 ROT | New OEM | Contact Us |
| 20-00144-00 | Concept One | Novellus | BELT, TIMING | New OEM | Contact Us |
| 20-00145-00 | Concept One | Novellus | PULLEY, TIMIMG | New OEM | Contact Us |
| 20-00146-00 | Concept One | Novellus | GASKET,NYLON #10 | New OEM | Contact Us |
| 20-00150-00 | Concept One | Novellus | WASHER,WAVY,.390ID x .495OD | New OEM | Contact Us |
| 20-00153-00 | Concept One | Novellus | BALL,CERAMIC,2.000 DIA | New OEM | Contact Us |
| 20-00155-00 | Concept One | Novellus | WASHER,WAVY | New OEM | Contact Us |
| 20-00157-00 | Concept One | Novellus | WSHR,LOCK,INT-STAR,#6,BRASS | New OEM | Contact Us |
| 20-00168-00 | Concept One | Novellus | RING, RET., CAPTIVE SCREW | New OEM | Contact Us |
| 20-00174-00 | Concept One | Novellus | BALL, SST, .750 DIA | New OEM | Contact Us |
| 20-00177-00 | Concept One | Novellus | STUD, THREADED 1/4-20 1.2 | New OEM | Contact Us |
| 20-00180-00 | Concept One | Novellus | SCRW,SHLDR,ACTUATOR | New OEM | Contact Us |
| 20-00181-00 | Concept One | Novellus | NUT,SELF LOCK,5/16-24 | New OEM | Contact Us |
| 20-00187-00 | Concept One | Novellus | SCRW,SKT,HEX,4-40X.375,SS,VEN | New OEM | Contact Us |
| 20-00199-00 | Concept One | Novellus | LATCH,PINLATCH | New OEM | Contact Us |
| 20-00200-00 | Concept One | Novellus | RCPT,FLOATING | New OEM | Contact Us |
| 20-00208-00 | Concept One | Novellus | WASHER,FLAT,M8,SS | New OEM | Contact Us |
| 20-00209-00 | Concept One | Novellus | SCRW,SKT,HEX,CRS,BLK Ox | New OEM | Contact Us |
| 20-00210-00 | Concept One | Novellus | SCRW,SKT,HEX,CRS,BLK Ox | New OEM | Contact Us |
| 20-00212-00 | Concept One | Novellus | NUT, HANGER NOZZLE | New OEM | Contact Us |
| 20-00213-00 | Concept One | Novellus | SCRW,10-32,FRONT PANEL | New OEM | Contact Us |
| 20-00214-00 | Concept One | Novellus | SCRW,SET,HEX,1/4-2,CUP PT | New OEM | Contact Us |
| 20-00220-00 | Concept One | Novellus | STANDOFF, 4-40FEMALE3/16H X | New OEM | Contact Us |
| 20-00221-00 | Concept One | Novellus | WASHER,FLAT,#8,ALUM | New OEM | Contact Us |
| 20-00222-00 | Concept One | Novellus | WASHER, FLAT 1/4" ALUM. | New OEM | Contact Us |
| 20-00244-00 | Concept One | Novellus | NUT,HEX,1/4-20,BRASS,NP | New OEM | Contact Us |
| 20-00247-00 | Concept One | Novellus | SPRING,CPRSN,1.25OD,2.0LG,.63I | New OEM | Contact Us |
| 20-00248-00 | Concept One | Novellus | WASHER,1.28ID x .245OD | New OEM | Contact Us |
| 20-00249-00 | Concept One | Novellus | SCRW,SHLDR,4-40 UNC | New OEM | Contact Us |
| 20-00255-00 | Concept One | Novellus | WASHER,WAVY,2.12ID X 2.50OD | New OEM | Contact Us |
| 20-00256-00 | Concept One | Novellus | WASHER,WAVY,1.093ID X 1.365OD | New OEM | Contact Us |
| 20-00257-00 | Concept One | Novellus | WASHER,WAVY,1.250ID X 1.453OD | New OEM | Contact Us |
| 20-00258-00 | Concept One | Novellus | WASHER,WAVY,.650ID x .790OD | New OEM | Contact Us |
| 20-00259-00 | Concept One | Novellus | WASHER,CRESENT SPRING | New OEM | Contact Us |
| 20-00282-00 | Concept One | Novellus | DIAL INDICATOR,TEST,0-15-0,MIT | New OEM | Contact Us |
| 20-00287-00 | Concept One | Novellus | PIN, DOWELL 1/8X3/4 D14-1 2 | New OEM | Contact Us |
| 20-00288-00 | Concept One | Novellus | BELT, TIMING | New OEM | Contact Us |
| 20-00289-00 | Concept One | Novellus | PULLY, MOTOR | New OEM | Contact Us |