Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 15-032014-01 | Concept One | Novellus | WINDOW, ETCH RESISTANT, FUSED | New OEM | Contact Us |
| 15-032016-00 | Concept One | Novellus | PIN, CERAMIC VENTED FOR HTR BLK | New OEM | Contact Us |
| 15-032107-00 | Concept One | Novellus | BRKT,SHORT,SHELF SUPPORT,LH | New OEM | Contact Us |
| 15-032108-00 | Concept One | Novellus | BLOCK,SHFT SPRT | New OEM | Contact Us |
| 15-032137-00 | Concept One | Novellus | BRKT,SHELF SUPPORT,LH | New OEM | Contact Us |
| 15-032138-00 | Concept One | Novellus | BRKT,SHORT,SHELF SUPPORT,RH | New OEM | Contact Us |
| 15-032185-00 | Concept One | Novellus | PIN,CENTERING | New OEM | Contact Us |
| 15-032204-00 | Concept One | Novellus | SUPPORT,VALVE | New OEM | Contact Us |
| 15-032218-00 | Concept One | Novellus | BLADE,26 WAFER | New OEM | Contact Us |
| 15-032263-00 | Concept One | Novellus | HANGER,PIPE SUPPORT | New OEM | Contact Us |
| 15-032268-00 | Concept One | Novellus | INSERT,100,125,150&200MM METL | New OEM | Contact Us |
| 15-032502-00 | Concept One | Novellus | PIN,WAFER LIFT | New OEM | Contact Us |
| 15-032503-00 | Concept One | Novellus | RING,INSULATOR | New OEM | Contact Us |
| 15-032626-00 | Concept One | Novellus | TRAZAR-STRAP HOLE COVER | New OEM | Contact Us |
| 15-032631-00 | Concept One | Novellus | FLANGE,SPINDLE | New OEM | Contact Us |
| 15-032777-00 | Concept One | Novellus | EXCL RING,200MM,2.0MM OH,SEMI | New OEM | Contact Us |
| 15-032939-00 | Concept One | Novellus | EXCL RING,200MM,2.25MM OH,SEMI | New OEM | Contact Us |
| 15-033087-00 | Concept One | Novellus | SPACER,PLATE SENSOR | New OEM | Contact Us |
| 15-033874-00 | Concept One | Novellus | PLUG,INJECTOR MANF | New OEM | Contact Us |
| 15-034333-00 | Concept One | Novellus | TUBE PROCESS 4.13" | New OEM | Contact Us |
| 15-034847-00 | Concept One | Novellus | HUB UPPER INDEXER | New OEM | Contact Us |
| 15-034848-00 | Concept One | Novellus | HUB,LOWER,INDEXER | New OEM | Contact Us |
| 15-034849-00 | Concept One | Novellus | RTNR,SEAL | New OEM | Contact Us |
| 15-034851-00 | Concept One | Novellus | BUSHING,SPLIT | New OEM | Contact Us |
| 15-034852-00 | Concept One | Novellus | SPACER,BUSHING | New OEM | Contact Us |
| 15-034951-00 | Concept One | Novellus | STANDOFF,10-32 x .87,F-F,.38 R | New OEM | Contact Us |
| 15-045972-01 | Concept One | Novellus | CLAMP,BAR,EXCL HUB,INCONEL | New OEM | Contact Us |
| 15-046056-00 | Concept One | Novellus | BOLT,1/4-20 X 1.0,N1 | New OEM | Contact Us |
| 15-046261-00 | Concept One | Novellus | SHAFT,GENEVA DRIVER | New OEM | Contact Us |
| 15-050160-15 | Concept One | Novellus | TUBE INJECTOR HI-PUR 1.5" | New OEM | Contact Us |
| 15-050160-41 | Concept One | Novellus | TUBE,INJECTOR,HI-PURITY,4.13" | New OEM | Contact Us |
| 15-051032-00 | Concept One | Novellus | ADPTR,COUPLING,5/16 TO 1/4 | New OEM | Contact Us |
| 15-051711-25 | Concept One | Novellus | TUBE,INJECTOR,2.500" | New OEM | Contact Us |
| 15-051711-41 | Concept One | Novellus | TUBE, INJECTOR 4.13" LONG | New OEM | Contact Us |
| 15-052619-00 | Concept One | Novellus | TONG,RING LIFT 200MM | New OEM | Contact Us |
| 15-052620-00 | Concept One | Novellus | RTNR,TONG,R-LIFT | New OEM | Contact Us |
| 15-052621-00 | Concept One | Novellus | HUB,TONG, R-LIFT SST | New OEM | Contact Us |
| 15-053271-03 | Concept One | Novellus | TUBE,CLEAN INJ,SWIRL,SPD-S | New OEM | Contact Us |
| 15-053394-01 | Concept One | Novellus | MINIMUM AREA CONTACT FORK,6 | New OEM | Contact Us |
| 15-053394-02 | Concept One | Novellus | MINIMUM AREA CONTACT FORK,8" | New OEM | Contact Us |
| 15-053394-03 | Concept One | Novellus | MINIMUM AREA CONTACT FORK,HDEP | New OEM | Contact Us |
| 15-054434-01 | Concept One | Novellus | CERAMIC RING MOER | New OEM | Contact Us |
| 15-055720-00 | Concept One | Novellus | SPACER,BUSHING | New OEM | Contact Us |
| 15-055721-00 | Concept One | Novellus | BUSHING,SPLIT | New OEM | Contact Us |
| 15-08888-00 | Concept One | Novellus | PADDLE,200mm OPTICAL W/PINS | New OEM | Contact Us |
| 15-09455-00 | Concept One | Novellus | BLADE,EXTENDED-26 SLOTS (200) | New OEM | Contact Us |
| 15-09499-00 | Concept One | Novellus | BRKT,MULTI CASS HOLDER 26 SLOT | New OEM | Contact Us |
| 15-100263-00 | Concept One | Novellus | PADDLE, CERAMIC 8" NOVEL | New OEM | Contact Us |
| 15-101482-00 | Concept One | Novellus | FORK,TOPLATE,A,ANTIDEFLECT | New OEM | Contact Us |
| 15-10324-00 | Concept One | Novellus | BUTTON,PIN-CERAMIC | New OEM | Contact Us |
| 15-103651-00 | Concept One | Novellus | RING,GUARD,HI PURITY,200MM | New OEM | Contact Us |
| 15-103913-01 | Concept One | Novellus | FEEDTHRU,COPPER | New OEM | Contact Us |
| 15-103913-02 | Concept One | Novellus | CLAMP,STRAP,FEEDTHRU | New OEM | Contact Us |
| 15-10489-00 | Concept One | Novellus | CLAMP,CHMBR VWPRT | New OEM | Contact Us |
| 15-10571-00 | Concept One | Novellus | BRKT,DIST NUPRO | New OEM | Contact Us |
| 15-10676-00 | Concept One | Novellus | BLANK-OFF, MESA FLANGE | New OEM | Contact Us |
| 15-107698-00 | Concept One | Novellus | CAP,CERAMIC,FEEDTHRU | New OEM | Contact Us |
| 15-108174-00 | Concept One | Novellus | CUP, SCREW COVER | New OEM | Contact Us |
| 15-108307-00 | Concept One | Novellus | CLAMP, RF STRAP | New OEM | Contact Us |
| 15-108330-00 | Concept One | Novellus | SPRING,PED,CER,D 3,WCVD | New OEM | Contact Us |
| 15-109785-00 | Concept One | Novellus | HOUSING,BRG,DP SPNDL,CVDW | New OEM | Contact Us |
| 15-109794-00 | Concept One | Novellus | CAGE,SEAL,DP SPNDL,CVDW | New OEM | Contact Us |
| 15-109795-00 | Concept One | Novellus | RTNR,SEAL,BRNG HSNG,DP SPNDL | New OEM | Contact Us |
| 15-11031-00 | Concept One | Novellus | FEEDTHRU,TOP PLATE,CVD | New OEM | Contact Us |
| 15-110411-00 | Concept One | Novellus | Sapphire Window | New OEM | Contact Us |
| 15-110413-00 | Concept One | Novellus | CLAMP, CHMBR, VWPRT, SHORT | New OEM | Contact Us |
| 15-112560-00 | Concept One | Novellus | FLANGE,VERITY ENDPOINT | New OEM | Contact Us |
| 15-112561-00 | Concept One | Novellus | FLANGE,VERITY ENDPOINT DUAL | New OEM | Contact Us |
| 15-11263-02 | Concept One | Novellus | WINDOW, VIEWPORT | New OEM | Contact Us |
| 15-11285-00 | Concept One | Novellus | SPRING, PRELOAD, LFT | New OEM | Contact Us |
| 15-112882-00 | Concept One | Novellus | MOUNTING-SENSOR | New OEM | Contact Us |
| 15-113064-00 | Concept One | Novellus | NOZZLE,INJECTOR | New OEM | Contact Us |
| 15-11354-00 | Concept One | Novellus | CLAMP,RF CONN | New OEM | Contact Us |
| 15-113646-00 | Concept One | Novellus | SPACER,EXCL RING LOCATOR | New OEM | Contact Us |
| 15-114331-00 | Concept One | Novellus | SCRW,SKT,HEX,1/4-20X.5,NI T | New OEM | Contact Us |
| 15-11507-00 | Concept One | Novellus | EXCL RING,200MM,1.5MM OH,SEMI | New OEM | Contact Us |
| 15-116023-00 | Concept One | Novellus | PIN,2 PC WFR LIFT ASSY,WCVD | New OEM | Contact Us |
| 15-11606-00 | Concept One | Novellus | INSULATOR,GAS DIST | New OEM | Contact Us |
| 15-11683-00 | Concept One | Novellus | VIEWPORT,VAT BLANK | New OEM | Contact Us |
| 15-11690-00 | Concept One | Novellus | VIEWPORT CASSETTE CHAMBER | New OEM | Contact Us |
| 15-117849-00 | Concept One | Novellus | BRKT,MAIN,150MM,VER 2 | New OEM | Contact Us |
| 15-117850-00 | Concept One | Novellus | BRKT,MAIN,200MM,VER 2 | New OEM | Contact Us |
| 15-117851-00 | Concept One | Novellus | WHEEL,GENEVA,200MM,VER 2 | New OEM | Contact Us |
| 15-117852-00 | Concept One | Novellus | WHEEL,GENEVA,150MM, VER 2 | New OEM | Contact Us |
| 15-118451-00 | Concept One | Novellus | Bracket, mfc, AERA | New OEM | Contact Us |
| 15-119059-00 | Concept One | Novellus | SCRW,SKT,HEX,1/4-20X.25,NI | New OEM | Contact Us |
| 15-119216-00 | Concept One | Novellus | TUBE,CERAMIC,RF BREAK,SPD-S | New OEM | Contact Us |
| 15-120150-04 | Concept One | Novellus | TUBE,INJECTOR,1.00,HI PUR | New OEM | Contact Us |
| 15-126576-00 | Concept One | Novellus | SCRW,SPINDLE HSG CAP,ALT-S | New OEM | Contact Us |
| 15-128755-00 | Concept One | Novellus | CLAMP,SEAL PLATE | New OEM | Contact Us |
| 15-151243-00 | Concept One | Novellus | TUBE,THK CLEAN INJECTOR | New OEM | Contact Us |
| 15-152384-00 | Concept One | Novellus | FORK,TOPLATE,A,ANTIDEFLECT,SEQ | New OEM | Contact Us |
| 15-152384-01 | Concept One | Novellus | FORK,TOPLATE,B,ANTIDEFLECT,SEQ | New OEM | Contact Us |
| 15-158185-00 | Concept One | Novellus | INJECTOR TUBE CLN HI-PUR TOGGLE CLN | New OEM | Contact Us |
| 15-161585-00 | Concept One | Novellus | NOZZLE,INJECTOR,SPLIT,SPD-S | New OEM | Contact Us |
| 15-167939-00 | Concept One | Novellus | FTG,COMP,NUT,ALUM,DEGAS,ILDS | CE! | New OEM | Contact Us |
| 15-167940-00 | Concept One | Novellus | FTG,COMP,FRL,DELRIN,DEGAS,ILDS | CE! | New OEM | Contact Us |
| 15-170847-00 | Concept One | Novellus | RING,CENTER, 200MM,AL2O3 | New OEM | Contact Us |
| 15-255841-00 | Concept One | Novellus | NOZZLE,INJECTOR,SPLIT,MTL SEAL | New OEM | Contact Us |
| 15-257942-21 | Concept One | Novellus | NOZZLE,INJ,VARIABLE SIH4 DIA | New OEM | Contact Us |