Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 03-032766-01 | Concept One | Novellus | ASSY,HARN,RIGHT INDEXER POS | New OEM | Contact Us |
| 03-042616-00 | Concept One | Novellus | CBL ASSY,RG217,SPD-S | New OEM | Contact Us |
| 03-042741-00 | Concept One | Novellus | ASSY,HARN,WATER FLOW SW,SPD-S | New OEM | Contact Us |
| 03-045549-00 | Concept One | Novellus | ASSY,RG393,SHORT-HF | New OEM | Contact Us |
| 03-055296-00 | Concept One | Novellus | HARNESS ASSY, VIDEO SWITCH BOX | New OEM | Contact Us |
| 03-057923-01 | Concept One | Novellus | CABLE ASSY,DLSM,C1 | New OEM | Contact Us |
| 03-10411-00 | Concept One | Novellus | ASSY,SPRING LOADED TC | New OEM | Contact Us |
| 03-10434-00 | Concept One | Novellus | ASSY,HARN,CVD SPINDLE | New OEM | Contact Us |
| 03-104931-00 | Concept One | Novellus | CBL ASSY,FLOPPY POWER | New OEM | Contact Us |
| 03-104934-00 | Concept One | Novellus | CBL ASSY,FLOPPY SIGNAL,FEMAL | New OEM | Contact Us |
| 03-10667-00 | Concept One | Novellus | ASSY,HARN,CVD-D SPINDLE | New OEM | Contact Us |
| 03-10702-00 | Concept One | Novellus | CABLE ASSY, CVD, TOP, CVR | New OEM | Contact Us |
| 03-10819-01 | Concept One | Novellus | CBL ASSY,PUMP,REMOTE,SPD,75F | New OEM | Contact Us |
| 03-10981-00 | Concept One | Novellus | CABLE ASSY,CURRENT SENSE | New OEM | Contact Us |
| 03-115665-00 | Concept One | Novellus | CABLE ASSY,ADPTR,C1,MKS651C/CA | New OEM | Contact Us |
| 03-133009-07 | Concept One | Novellus | CBL ASSY,MFC 9P,CA68 | New OEM | Contact Us |
| 03-142566-00 | Concept One | Novellus | PCA,DUAL FLEX 8 | New OEM | Contact Us |
| 03-147415-00 | Concept One | Novellus | ASSY,RF CURRENT SENSOR PCA | New OEM | Contact Us |
| 03-155625-02 | Concept One | Novellus | CABLE ASSY, J4 EXT CABLE 93 | New OEM | Contact Us |
| 03-167636-00 | Concept One | Novellus | ASSY, EMO SWITCH | New OEM | Contact Us |
| 03-173864-00 | Concept One | Novellus | HARNESS ASSY,LEFT DIST BOX TO JUNCTION BOX | New OEM | Contact Us |
| 03-173865-00 | Concept One | Novellus | HARNESS ASSY,RIGHT DIST BOX TO JUNCTION BOX | New OEM | Contact Us |
| 03-255004-00 | Concept One | Novellus | CBL ASSY,RG393,COAX,TUNABLE MATCH,HF | New OEM | Contact Us |
| 03-273090-00 | Concept One | Novellus | CBL ASSY, RIBBON, IDE, 10, 44 TO 4 | New OEM | Contact Us |
| 03-320791-00 | Concept One | Novellus | CBL ASSY, INTERLOCK, C1D, AE, MATCH, RETROFIT | New OEM | Contact Us |
| 03-346881-00 | Concept One | Novellus | CBL ASSY, PENDULUM VALVE OPEN, C1 | New OEM | Contact Us |
| 03-360699-00 | Concept One | Novellus | CBL ASSY,CBL ASSY,CA271 | New OEM | Contact Us |
| 03-383589-00 | Concept One | Novellus | CBL ASSY,LFT/EXT,SNSR | New OEM | Contact Us |
| 03-383590-00 | Concept One | Novellus | CBL ASSY,EXT MOTOR,STRAIN RELIEF,C1D | New OEM | Contact Us |
| 03-390783-00 | Concept One | Novellus | CBL ASSY,C1 ROT MOTOR,C1D | New OEM | Contact Us |
| 03-427111-01 | Concept One | Novellus | CBL ASSY,MFC,GF120-125,9P,C1D,CA62 | New OEM | Contact Us |
| 03-427111-02 | Concept One | Novellus | CBL ASSY,MFC,GF120-125,9P,C1D,CA63 | New OEM | Contact Us |
| 03-427111-03 | Concept One | Novellus | CBL ASSY,MFC,GF120-125,9P,CID,CA64 | New OEM | Contact Us |
| 03-427111-04 | Concept One | Novellus | CBL ASSY,MFC,GF120-125,9P,C1D,CA65 | New OEM | Contact Us |
| 03-427111-05 | Concept One | Novellus | CBL ASSY,MFC,GF120-125,9P,C1D,CA66 | New OEM | Contact Us |
| 03-427111-06 | Concept One | Novellus | CBL ASSY,MFC,GF120-125,9P,C1D,CA67 | New OEM | Contact Us |
| 03-427111-07 | Concept One | Novellus | CBL ASSY, MFC GF120-125 9P CID, CA68 | New OEM | Contact Us |
| 03-427111-08 | Concept One | Novellus | CBL ASSY,MFC,GF120-125,9P,C1D,CA69 | New OEM | Contact Us |
| 03-427111-09 | Concept One | Novellus | CBL ASSY,MFC,GF120-125,9P,C1D,CA147 | New OEM | Contact Us |
| 03-427111-10 | Concept One | Novellus | CABLE ASSY, MFC, GF120-125, 9P, CID, CA146 | New OEM | Contact Us |
| 03-427111-11 | Concept One | Novellus | CBL ASSY, MFC, GF120-125, 9P, C1D, CA148 | New OEM | Contact Us |
| 04-00015-00 | Concept One | Novellus | CONSUMABLE KIT, FUSES | New OEM | Contact Us |
| 04-047558-00 | Concept One | Novellus | KIT,LL DOOR DRILL TOOLS | New OEM | Contact Us |
| 04-050170-00 | Concept One | Novellus | KIT,REMOTE AC,LF UPGRD 208VAC | New OEM | Contact Us |
| 04-053804-00 | Concept One | Novellus | KIT,PM,GATE VALVE,ALTUS-S | New OEM | Contact Us |
| 04-123321-00 | Concept One | Novellus | KIT,MKS 651 RETRO TO C1 | New OEM | Contact Us |
| 04-130817-00 | Concept One | Novellus | KIT,INSTALL,MERC3013,WCVD | New OEM | Contact Us |
| 04-143771-00 | Concept One | Novellus | KIT,GAUGE,375 CONTROLLER | New OEM | Contact Us |
| 04-144564-00 | Concept One | Novellus | KIT,DISK,VERITY,DUAL,EP,V3.10 | New OEM | Contact Us |
| 04-153944-00 | Concept One | Novellus | KIT, ONE-ARM #3, BIPOLAR MOTOR | New OEM | Contact Us |
| 04-170002-00 | Concept One | Novellus | KIT,INSERT,PADDLE,300MM,VESPEL | CE! | New OEM | Contact Us |
| 04-2382-06/B | Concept One | Novellus | HEATER CARTRIDGE,200W, 120V, 1/4 D X 1 1/2L,37.25 IN CBL | New OEM | Contact Us |
| 04-264558-00 | Concept One | Novellus | KIT,DC DIST PS SYS,W/ 70V SUPPLY | New OEM | Contact Us |
| 04-265855-00 | Concept One | Novellus | PM KIT,RF STRAP & CLAMP,3 BOLT | New OEM | Contact Us |
| 04-270339-00 | Concept One | Novellus | KIT,REPLACEMENT, PRESSURE SWITCH | New OEM | Contact Us |
| 04-270790-00 | Concept One | Novellus | KIT,REPLACEMENT, CONTACTOR,3 P,50 A,120V | New OEM | Contact Us |
| 04-285223-00 | Concept One | Novellus | PM KIT,C1D,SHOWERHEAD ASSY,FAIRCHILD,150 | New OEM | Contact Us |
| 04-306658-00 | Concept One | Novellus | PM KIT,VAT PEND VLV,STD KALREZ8085,C3VCTR | New OEM | Contact Us |
| 04-306660-00 | Concept One | Novellus | PM KIT,VAT PEND VLV,ACT SEALS,KALREZ8085,CE! | New OEM | Contact Us |
| 04-340270-00 | Concept One | Novellus | KIT,C1D,KEEPER,LATCH | New OEM | Contact Us |
| 04-358890-00 | Concept One | Novellus | KIT,QUARTZ WAFER SENSOR,C1D | New OEM | Contact Us |
| 04-369577-00 | Concept One | Novellus | KIT,REPLACE CDL1106 MANOMETER AND CABLE | New OEM | Contact Us |
| 04-370748-00 | Concept One | Novellus | KIT,REPLACED MKS 223B,10 TORR,BY MANOMET | New OEM | Contact Us |
| 04-370749-00 | Concept One | Novellus | KIT,REPLACED MKS 223B,1 TORR BY DIFF CAP | New OEM | Contact Us |
| 04-388692-00 | Concept One | Novellus | KIT,15" LCD,TOUCHSCREEN,POWER BRICK | New OEM | Contact Us |
| 04-422038-00 | Concept One | Novellus | KIT, HTR ISO PCB, C2SEQ-X, COOL TRACE, 8AWG | New OEM | Contact Us |
| 04-428555-01 | Concept One | Novellus | CONV KIT,COAXIAL SNSRS,RIGHT LL | New OEM | Contact Us |
| 04-428555-02 | Concept One | Novellus | CONV KIT,COAXIAL SNSRS,LEFT LL, | New OEM | Contact Us |
| 04-434085-00 | Concept One | Novellus | KIT,PANEL,TEMP LIMIT REPLACEMENT,C1D | New OEM | Contact Us |
| 04-462997-00 | Concept One | Novellus | PM KIT,RPC VLV,RPC NEXT,C2SEQ-X | New OEM | Contact Us |
| 04-718608-01 | Concept One | Novellus | ASSY,BELLOWS,FLEX | New OEM | Contact Us |
| 05-00003-03 | Concept One | Novellus | NEW STYLE 150MM TOP PLATE UPGRADE | New OEM | Contact Us |
| 05-00005-00 | Concept One | Novellus | KIT,RETRO,1P HTR REPLACE | New OEM | Contact Us |
| 05-00005-01 | Concept One | Novellus | RF STRAP, KIT | New OEM | Contact Us |
| 05-00007-00 | Concept One | Novellus | PM KIT, REACTOR CHAMB | New OEM | Contact Us |
| 05-00009-00 | Concept One | Novellus | PM KIT, POU/SI FILTER | New OEM | Contact Us |
| 05-00010-00 | Concept One | Novellus | PM KIT, N2 FILTER | New OEM | Contact Us |
| 05-00011-00 | Concept One | Novellus | PM KIT, GAS FEED-THRU | New OEM | Contact Us |
| 05-00013-00 | Concept One | Novellus | PM KIT, SPINDLE OVERHAUL | New OEM | Contact Us |
| 05-00023-00 | Concept One | Novellus | PM KIT, SEMI-ANNUAL | New OEM | Contact Us |
| 05-00024-00 | Concept One | Novellus | PM KIT, HTR CONN DUAL FR | New OEM | Contact Us |
| 05-00025-00 | Concept One | Novellus | PM KIT, HTR CONN 1-PC | New OEM | Contact Us |
| 05-00066-00 | Concept One | Novellus | KIT,PM,REACT CHAMB 200MM | New OEM | Contact Us |
| 05-00069-00 | Concept One | Novellus | KIT,PM,ONE ARM ROBOT | New OEM | Contact Us |
| 05-00077-00 | Concept One | Novellus | KIT,ONE ARM ROBOT SEALS | New OEM | Contact Us |
| 05-00080-00 | Concept One | Novellus | KIT,DUAL SHUNT FCO 42 | New OEM | Contact Us |
| 05-00104-00 | Concept One | Novellus | KIT,4"VLV INTLK | New OEM | Contact Us |
| 05-00112-00 | Concept One | Novellus | PM KIT, VALVE STACK SEALS | New OEM | Contact Us |
| 05-00118-01 | Concept One | Novellus | KIT,FCO #71 LL PRESS CONTROL | New OEM | Contact Us |
| 05-00118-02 | Concept One | Novellus | KIT,FCO#71 LL PRESS CONTROL | New OEM | Contact Us |
| 05-00118-03 | Concept One | Novellus | KIT,FCO #71 LL PRESS CONTROL | New OEM | Contact Us |
| 05-00132-00 | Concept One | Novellus | KIT,FCO 60 HEAT CURRENT MON | New OEM | Contact Us |
| 05-00166-00 | Concept One | Novellus | KIT,FCO,69 TRZAR MATCH,NTWK | New OEM | Contact Us |
| 05-00184-00 | Concept One | Novellus | KIT,FCO,R-F RAMP REMOTE AC | New OEM | Contact Us |
| 05-00187-00 | Concept One | Novellus | KIT,PM,ANNUAL,C1-W | New OEM | Contact Us |
| 05-00195-00 | Concept One | Novellus | KIT,FCO #92 BACKFILL SOFTSTART | New OEM | Contact Us |
| 05-00196-00 | Concept One | Novellus | KIT,FCO #93 CASSETTE DOOR INLK | New OEM | Contact Us |
| 05-00213-01 | Concept One | Novellus | RETROKIT,NON-CONTACT,4 INCH,METAL CASS | New OEM | Contact Us |
| 05-00213-03 | Concept One | Novellus | RETRO KIT, NON-CONTACT, 6" METAL CASSETTE | New OEM | Contact Us |
| 05-00221-01 | Concept One | Novellus | MICRO CONTAMINATION UPGRADE KIT FOR SN OVER 600 | New OEM | Contact Us |