Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 04-421127-00 | CMP | Speedfam | KIT,RELAY,INTERLOCK,MV200 | New OEM | Contact Us |
| 04-464279-00 | CMP | Speedfam | KIT,OPTIC FIBER TEMP. CNTRLR,OR4000T | New OEM | Contact Us |
| 0710-740008 | CMP | Speedfam | COUPLING,JOINT FLOATING 30MM MOD | New OEM | Contact Us |
| 0710-770838 | CMP | Speedfam | TUBE,TRAP | New OEM | Contact Us |
| 0720-727065 | CMP | Speedfam | ARM,LIFT DUAL CASS 2 | New OEM | Contact Us |
| 0720-727339 | CMP | Speedfam | MOUNT,LIFT ARM CASSETTE 1 | New OEM | Contact Us |
| 0830-110901 | CMP | Speedfam | MANF,PAD CONDITIONER WET | New OEM | Contact Us |
| 0830-739275 | CMP | Speedfam | MANF,SOLENOID 16SNGL M1 PLUGGED | New OEM | Contact Us |
| 0845-718766 | CMP | Speedfam | WAND,CERAMIC 4 PORT 70MIL | New OEM | Contact Us |
| 1000-717869 | CMP | Speedfam | SCRW,SET 6-32 X 1/8 SST | New OEM | Contact Us |
| 15-182746-00 | CMP | Speedfam | RING,CLAMP,UPPER#3,CHAMF,200MM,SST | New OEM | Contact Us |
| 15-348474-00 | CMP | Speedfam | COUPLING,PNEU,7-CHAN,CARRIER,FIXED | New OEM | Contact Us |
| 15-417194-00 | CMP | Speedfam | ROLLER,BAND 86D,7700 CLEANER | New OEM | Contact Us |
| 18-182211-00 | CMP | Speedfam | BLADDER,1011,T1,200MM,TAPERED TAB | New OEM | Contact Us |
| 18-308067-00 | CMP | Speedfam | PIN,LIGHT,THREADED,PELLETHANE 2103-55,XC | New OEM | Contact Us |
| 19-185289-00 | CMP | Speedfam | SEAL,WAFER HEAD,MOD | New OEM | Contact Us |
| 2000-700277 | CMP | Speedfam | GAUGE,PRESSURE 0-30PSI | New OEM | Contact Us |
| 2200-109787 | CMP | Speedfam | VALVE,FLOW CONTROL MTR HOIST | New OEM | Contact Us |
| 2210-727037 | CMP | Speedfam | MANF,DI | New OEM | Contact Us |
| 22-179215-00 | CMP | Speedfam | O-RING,2-016,BLACK VITON-50 DURO | New OEM | Contact Us |
| 22-280133-00 | CMP | Speedfam | FTG,PIPE,PLUG,1/2NPT-M,PFA | New OEM | Contact Us |
| 22-380222-00 | CMP | Speedfam | RING,RETAIN,INT,1.9,304 SST,TUBELIGHT A | New OEM | Contact Us |
| 22-399710-00 | CMP | Speedfam | RING,RETAIN,EXT,0.062 IN,E-STYLE,SST,PLA | New OEM | Contact Us |
| 2250-700456 | CMP | Speedfam | PLUG,2C | New OEM | Contact Us |
| 2315-110303 | CMP | Speedfam | ADPTR,DRIVE SHAFT EQUIP ACTIVE WAND MV | New OEM | Contact Us |
| 27-381438-00 | CMP | Speedfam | ROBOT,GB4SB 7,2L14.5,MV200 | New OEM | Contact Us |
| 2805-737738 | CMP | Speedfam | ASSY,PAD BACKING RIVETED | New OEM | Contact Us |
| 2807-112464 | CMP | Speedfam | ASSY,MP1 W/3.0R-858 676 | New OEM | Contact Us |
| 34-179382-00 | CMP | Speedfam | SNSR,THRU BEAM,LT-ON,NPN,FRONT SENSING | New OEM | Contact Us |
| 3910-103771 | CMP | Speedfam | FILTER,RPLMNT 30U(FOR ASSY HG640045 | New OEM | Contact Us |
| 39-183909-00 | CMP | Speedfam | CONN,AC PWR MODULE GFIC | New OEM | Contact Us |
| 60-311256-00 | CMP | Speedfam | FTG,BARB,PLUG,3/32ID TUBE X 10-32 M | New OEM | Contact Us |
| 71-429075-00 | CMP | Speedfam | FIXTURE,GRIP FORCE,GENMARK ROBOT,MV200 | New OEM | Contact Us |
| 931006-121 | CMP | Speedfam | SCRW,SHC,10-32UNFX3/4,STL | New OEM | Contact Us |
| 931040-8 | CMP | Speedfam | GROMMET,3/8IDX7/8ODX3/8T,BUN | New OEM | Contact Us |
| 931118-6 | CMP | Speedfam | PIN,DOWEL,1/16X1/8,303-SST | New OEM | Contact Us |
| 931166-3 | CMP | Speedfam | WSHR,FLAT,USS,#10,SST | New OEM | Contact Us |
| 931180-2 | CMP | Speedfam | CAP,FLARE,3/8,PFA | New OEM | Contact Us |
| 931192-1 | CMP | Speedfam | RING,RETAINING,EXT,DIA .188,COPPER | New OEM | Contact Us |
| 931351-1 | CMP | Speedfam | FTG,FEM UNION,1-TCH,1/4TX1/8FNPT | New OEM | Contact Us |
| 931506-1 | CMP | Speedfam | SCRW,SHC,INT SEAL,4-40UNCX1/2,SST | New OEM | Contact Us |
| 931508-1 | CMP | Speedfam | SEAL,ROD&PISTON,.812IDX.937ODX.062,PTFE | New OEM | Contact Us |
| AC2106A1 | CMP | Speedfam | BELT,TIMING,14MM PITCH | New OEM | Contact Us |
| AC2475A1 | CMP | Speedfam | UNION,ROTATING,DUAL FLOW,1NPT | New OEM | Contact Us |
| AC2785A1 | CMP | Speedfam | REGULATOR,PRECISION,.4-10PSI | New OEM | Contact Us |
| AC3159A1 | CMP | Speedfam | CONNECTOR,PLUG,11-4PIN | New OEM | Contact Us |
| AC3677 | CMP | Speedfam | SCRW,SHOULDER,3/8X3/8X5/16-18 | New OEM | Contact Us |
| AD2333A1 | CMP | Speedfam | SHIM,FLAT,.25THK | New OEM | Contact Us |
| AD3201 | CMP | Speedfam | GUIDE,UPPER UNLOAD-200MM | New OEM | Contact Us |
| BF520011 | CMP | Speedfam | WSHR,LOCK SPLIT 5/16 SST | New OEM | Contact Us |
| CESCMP51152A | CMP | Speedfam | KIT,ROBOT INSTALLATION,MV200 | New OEM | Contact Us |
| CG020001 | CMP | Speedfam | BEARING,CUP/CONE | New OEM | Contact Us |
| HD080007 | CMP | Speedfam | REGULATOR,PRESSURE 0-30PSI W/KNOB | New OEM | Contact Us |
| JE360337 | CMP | Speedfam | FTG,CONN MALE 1/8NPT X 1/4T SST | New OEM | Contact Us |
| JH126010 | CMP | Speedfam | FTG,CONN ML 1/4SKTX1/8MT GRYPVC | New OEM | Contact Us |
| R22-400471-00 | CMP | Speedfam | RFRB, ACTUATOR,SPARE ROTATION/GRIPPER AS | New OEM | Contact Us |
| R978607 | CMP | Speedfam | RFRB, ROBOT,R1 SNSR ASSY COMPATIBLE 200M | New OEM | Contact Us |
| 18-0870-03 | Common | SCRW, PH PNHD, 8-32 X 3/8L, SST | New OEM | Contact Us | |
| 21-00137-00 | Common | Novellus | SCRW,10-32X.875,SS | New OEM | Contact Us |
| 953574 | Concept One | Novellus | INSERT,PRESSURE PLATE STORAGE | New OEM | Contact Us |
| 01-2596 | Concept One | Novellus | LOCATOR, CASSETTE,FLUOROWARE #PA192- 80M | New OEM | Contact Us |
| 01-4435 | Concept One | Novellus | COVER, BOTTOM | New OEM | Contact Us |
| 01-4516 | Concept One | Novellus | CLAMP, RING, LAMP TRAY, 4-WINDOW | New OEM | Contact Us |
| 01-5415 | Concept One | Novellus | IDLER, ATM ROBOT | New OEM | Contact Us |
| 02-00008-00 | Concept One | Novellus | KIT,GAS DISP PLT ADJ | New OEM | Contact Us |
| 02-00012-00 | Concept One | Novellus | ASSY,PNEU CNTRL | New OEM | Contact Us |
| 02-00055-00 | Concept One | Novellus | ASSY,FOOT SWITCH | New OEM | Contact Us |
| 02-00055-01 | Concept One | Novellus | ASSY,GUARDED CVR.FT.SW.CONTLR | New OEM | Contact Us |
| 02-00072-00 | Concept One | Novellus | ASSY,NITRIDE TERM,PNL | New OEM | Contact Us |
| 02-00075-00 | Concept One | Novellus | ASSY,CASS DOOR | New OEM | Contact Us |
| 02-00076-00 | Concept One | Novellus | ASSY,NITRIDE FAC,PNL REV. AG | New OEM | Contact Us |
| 02-00079-00 | Concept One | Novellus | ASSY,HF CHOKE | New OEM | Contact Us |
| 02-00080-00 | Concept One | Novellus | ASSY,HTR ISO FILTER | New OEM | Contact Us |
| 02-00085-00 | Concept One | Novellus | ASSY,INDUCTOR,420UH 30A | New OEM | Contact Us |
| 02-00090-00 | Concept One | Novellus | PCB, ASSY HEATER FILTER | New OEM | Contact Us |
| 02-00094-00 | Concept One | Novellus | ASSY,PNEU CNTRL 34VLV | New OEM | Contact Us |
| 02-00097-00 | Concept One | Novellus | ASSY,TC BELLOWS | New OEM | Contact Us |
| 02-00098-00 | Concept One | Novellus | KIT,TEOS CONTROLLER MTG. | New OEM | Contact Us |
| 02-00103-00 | Concept One | Novellus | GAS INLET 200mm FACILITY PANEL | New OEM | Contact Us |
| 02-00105-00 | Concept One | Novellus | KIT, CAPAC. WITH JUMPER | New OEM | Contact Us |
| 02-00119-00 | Concept One | Novellus | ASSY,GENEVA DRIVE | New OEM | Contact Us |
| 02-00163-00 | Concept One | Novellus | ASSY,FORK,CERAMIC | New OEM | Contact Us |
| 02-00164-00 | Concept One | Novellus | ASSY,FORK,CERAMIC,200mmJ | New OEM | Contact Us |
| 02-00167-00 | Concept One | Novellus | ASSY,RF SHUNT 2 CAP'S | New OEM | Contact Us |
| 02-00170-00 | Concept One | Novellus | ASSY,AMP-WOPS(200mm) | New OEM | Contact Us |
| 02-00171-00 | Concept One | Novellus | KIT,WOPS INSTALL (200MM) | New OEM | Contact Us |
| 02-00195-01 | Concept One | Novellus | ASSY, TEMP CONTROLLER, WATLOW | New OEM | Contact Us |
| 02-00199-00 | Concept One | Novellus | ASSY,INDUCTOR 150MH RF DIST. | New OEM | Contact Us |
| 02-00205-00 | Concept One | Novellus | ASSY,FEEDTHRU | New OEM | Contact Us |
| 02-00206-00 | Concept One | Novellus | ASSY,TC RF FILTER,"E" TYPE | New OEM | Contact Us |
| 02-00215-00 | Concept One | Novellus | ASSY,GENEVA DRIVE 200MM | New OEM | Contact Us |
| 02-00216-00 | Concept One | Novellus | PCA, TC FILTER | New OEM | Contact Us |
| 02-00230-00 | Concept One | Novellus | POWER INLET 200mm FACILITY PANEL | New OEM | Contact Us |
| 02-00269-00 | Concept One | Novellus | ASSY, ONE ARM ROBOT | New OEM | Contact Us |
| 02-00269-00RW | Concept One | Novellus | COMPLETE REWORK: ASSY, ONE ARM ROBOT | New OEM | Contact Us |
| 02-00279-01 | Concept One | Novellus | ASSY, MAIN AC BOX C1-DIELECT | New OEM | Contact Us |
| 02-00308-04 | Concept One | Novellus | ASSY,SPINDLE,W,DD,FLANGE,C1 | New OEM | Contact Us |
| 02-00315-00 | Concept One | Novellus | ASSY,SENSE PIN PCB | New OEM | Contact Us |
| 02-00315-01 | Concept One | Novellus | ASSY,SENSE PIN PCB | New OEM | Contact Us |
| 02-00324-00 | Concept One | Novellus | KIT,24V,TEOS,HTR | New OEM | Contact Us |