Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 02-00330-00 | Concept One | Novellus | ASSY,SENSE PIN BREAKOUT BC | New OEM | Contact Us |
| 02-00332-00 | Concept One | Novellus | ASSY,DEGAS MOD | New OEM | Contact Us |
| 02-00333-00 | Concept One | Novellus | CHANGE ASSY PLTFRM 150MM | New OEM | Contact Us |
| 02-00343-01 | Concept One | Novellus | ASSY,SNSR,HARN 25.5" | New OEM | Contact Us |
| 02-00343-02 | Concept One | Novellus | ASSY,SNSR,HARN 10.0 | New OEM | Contact Us |
| 02-00343-03 | Concept One | Novellus | ASSY,SNSR,HARN 17.5 | New OEM | Contact Us |
| 02-00343-04 | Concept One | Novellus | ASSY,SNSR,HARN 26.5 | New OEM | Contact Us |
| 02-00349-00 | Concept One | Novellus | ASSY,OPT PLATFORM,200mm | New OEM | Contact Us |
| 02-00350-00 | Concept One | Novellus | KIT ASSY,COOLING STATION | New OEM | Contact Us |
| 02-00350-CPS | Concept One | Novellus | COOL STATION WITH LARGE LEXAN PLATE | New OEM | Contact Us |
| 02-00355-00 | Concept One | Novellus | ASSY,DEGAS MOD-DOPED | New OEM | Contact Us |
| 02-00357-99 | Concept One | Novellus | CHG. GAS BOX CORE | New OEM | Contact Us |
| 02-00392-00 | Concept One | Novellus | ASSY,UPPER PCA OPTICAL | New OEM | Contact Us |
| 02-00393-05 | Concept One | Novellus | ASSY,COAX OPT.SNSR 23.75 | New OEM | Contact Us |
| 02-00393-06 | Concept One | Novellus | ASSY,COAX OPT,SNSR 13.75 | New OEM | Contact Us |
| 02-00394-00 | Concept One | Novellus | KIT,COOLING STATION PARALLEL | New OEM | Contact Us |
| 02-00395-00 | Concept One | Novellus | ASSY,PLATFORM,200mm (PLASTIC) | New OEM | Contact Us |
| 02-00397-00 | Concept One | Novellus | ASSY,SNSR,HARN PLASTIC | New OEM | Contact Us |
| 02-00399-00 | Concept One | Novellus | ASSY,HTR ISO FILTER | New OEM | Contact Us |
| 02-00402-02 | Concept One | Novellus | ASSY,SNSR,HARN 10.0" | New OEM | Contact Us |
| 02-00402-03 | Concept One | Novellus | New OEM | Contact Us | |
| 02-00403-00 | Concept One | Novellus | ASSY,PLATFORM,150mm,PLASTIC | New OEM | Contact Us |
| 02-00419-20 | Concept One | Novellus | KIT,200 MM WAFER SIZE POLY | New OEM | Contact Us |
| 02-00423-99 | Concept One | Novellus | ASSY,EXT PLTFRM,CORE | New OEM | Contact Us |
| 02-00430-04 | Concept One | Novellus | KIT,PADDLE,200mm,EXT'D P'FORM | New OEM | Contact Us |
| 02-00461-00 | Concept One | Novellus | KIT,ALIGNER,TOOLS,C-1 SYS | New OEM | Contact Us |
| 02-00463-00 | Concept One | Novellus | TOOL KIT, START UP | New OEM | Contact Us |
| 02-00470-01 | Concept One | Novellus | ASSY,PIN LIFT 1&2 | New OEM | Contact Us |
| 02-00470-02 | Concept One | Novellus | ASSY,PIN LIFT 3&4 | New OEM | Contact Us |
| 02-00470-03 | Concept One | Novellus | ASSY,PIN LIFT 5+BLANK | New OEM | Contact Us |
| 02-021422-00 | Concept One | Novellus | ASSY, DC PWR SPLY I/F BOARD | New OEM | Contact Us |
| 02-024645-00 | Concept One | Novellus | ASSY,INTFC.BOX,SLO BKFILL.PR | New OEM | Contact Us |
| 02-027364-00 | Concept One | Novellus | ASSY,LL,SIDE BEARING | New OEM | Contact Us |
| 02-029392-00 | Concept One | Novellus | ASSY,UPPER AC BOX C-1 DIEL | New OEM | Contact Us |
| 02-029393-00 | Concept One | Novellus | ASSY,LWR AC BOX C1-D & W | New OEM | Contact Us |
| 02-032283-01 | Concept One | Novellus | ASSY,ROBOT BRAKE LEFT INDEXER | New OEM | Contact Us |
| 02-032454-00 | Concept One | Novellus | KIT,200MM GAS DIST PLATE ADJ. | New OEM | Contact Us |
| 02-033134-00 | Concept One | Novellus | ASSY,PED,196.8mm,D,SEMI | New OEM | Contact Us |
| 02-033134-01 | Concept One | Novellus | ASSY,PED,200MM MOER,D.3,SEMI | New OEM | Contact Us |
| 02-033196-00 | Concept One | Novellus | KIT,WINDOW,SAPPHIRE,SNGL PORT | New OEM | Contact Us |
| 02-033394-00 | Concept One | Novellus | ASSY,PED,200mm,D,STD SEMI | New OEM | Contact Us |
| 02-033877-00 | Concept One | Novellus | KIT,HEATER INSTALL,C1-150 | New OEM | Contact Us |
| 02-033920-00 | Concept One | Novellus | ASSY, PED, 200MM, D, STD JEIDA | New OEM | Contact Us |
| 02-042897-00 | Concept One | Novellus | ASSY,DEGAS MOD-DOPED | New OEM | Contact Us |
| 02-042902-00 | Concept One | Novellus | ASSY, HOIST, LOCK | New OEM | Contact Us |
| 02-044015-00 | Concept One | Novellus | KIT,CASS,C1,SQ20940-1 | New OEM | Contact Us |
| 02-045721-01 | Concept One | Novellus | ASSY,PED,150MM STD,D.3 | New OEM | Contact Us |
| 02-047364-00 | Concept One | Novellus | INST,LL DOOR ACTUATOR,LEFT | New OEM | Contact Us |
| 02-047365-00 | Concept One | Novellus | INST,LL DOOR ACTUATOR,RIGHT | New OEM | Contact Us |
| 02-050267-00 | Concept One | Novellus | ASSY,HF PURGE CONTROL | New OEM | Contact Us |
| 02-051164-00 | Concept One | Novellus | ASSY,MOTOR,AC,6W | New OEM | Contact Us |
| 02-053798-00 | Concept One | Novellus | ASSY,HIM FILTER,C1-D | New OEM | Contact Us |
| 02-058452-00 | Concept One | Novellus | ASSY, DC PWR DIST, INTERNAL LPB | New OEM | Contact Us |
| 02-10250-00 | Concept One | Novellus | ASSY,RF SHUNT 2 CAPS | New OEM | Contact Us |
| 02-10606-00 | Concept One | Novellus | ASSY,PCB,HEATER MONITOR | New OEM | Contact Us |
| 02-106507-00 | Concept One | Novellus | FERRO-FLUIDIC SPINDLE | New OEM | Contact Us |
| 02-111903-00 | Concept One | Novellus | ASSY,RF FEEDTHRU | New OEM | Contact Us |
| 02-115275-00 | Concept One | Novellus | ASSY,SLIT VALVE,32MM,LL | New OEM | Contact Us |
| 02-115278-00 | Concept One | Novellus | ASSY,ACTUATOR SLTVLV,32X222,LL | New OEM | Contact Us |
| 02-119726-00 | Concept One | Novellus | ASSY,FORK,SEQ,ANTI-DFLC,MCA | New OEM | Contact Us |
| 02-121427-00 | Concept One | Novellus | ASSY,L-TYPE SLTVLV,46X236,PM | New OEM | Contact Us |
| 02-127038-00 | Concept One | Novellus | KIT,MANOMETER,COLD,SEQ-S | New OEM | Contact Us |
| 02-153946-00 | Concept One | Novellus | ASSY, PANEL, OEM 750, DRIVE C1. Included: p/n 17-14426-00 PLATE, MOUNTING C1, | New OEM | Contact Us |
| 02-157148-00 | Concept One | Novellus | ASSY,PWR SPLY, CTL MOD, C1, W/70V | New OEM | Contact Us |
| 02-257924-00 | Concept One | Novellus | ASSY,FEEDTHRU,RF PWR,SEQUEL | New OEM | Contact Us |
| 02-282791-00 | Concept One | Novellus | ASSY,RF STRAP,NON-RF SW,TOP PL,RPC | New OEM | Contact Us |
| 02-289945-00 | Concept One | Novellus | ASSY, NI FEEDTHRU, PWR SHORT | New OEM | Contact Us |
| 02-347706-00 | Concept One | Novellus | ASSY, C1, C2 PENDULUM VALVE INTERFACE BOX | New OEM | Contact Us |
| 02-377013-00 | Concept One | Novellus | PED ASSY,200MM,STD,D.3,C2ALT | New OEM | Contact Us |
| 02-383160-00 | Concept One | Novellus | ASSY,FEEDTHRU,PWR,LONG,SEQUEL | New OEM | Contact Us |
| 02-383161-00 | Concept One | Novellus | ASSY,FEEDTHRU,PWR,SHORT,SEQUEL | New OEM | Contact Us |
| 03-00021-04 | Concept One | Novellus | CABLE ASSY,CA04 | New OEM | Contact Us |
| 03-00022-03 | Concept One | Novellus | CBL ASSY,CA18 | New OEM | Contact Us |
| 03-00022-04 | Concept One | Novellus | CABLE ASSY CA23 | New OEM | Contact Us |
| 03-00022-09 | Concept One | Novellus | CABLE ASSY,CA283 | New OEM | Contact Us |
| 03-00026-00 | Concept One | Novellus | CABLE ASSY,CA54 | New OEM | Contact Us |
| 03-00029-02 | Concept One | Novellus | CABLE ASSY,CA48 | New OEM | Contact Us |
| 03-00031-00 | Concept One | Novellus | CABLE ASSY, CA42 | New OEM | Contact Us |
| 03-00032-00 | Concept One | Novellus | CBL ASSY,CA40 | New OEM | Contact Us |
| 03-00033-01 | Concept One | Novellus | CABLE ASSY,CA52 | New OEM | Contact Us |
| 03-00033-03 | Concept One | Novellus | CABLE ASSY,CA51 | New OEM | Contact Us |
| 03-00034-00 | Concept One | Novellus | CABLE ASSY,CA36 | New OEM | Contact Us |
| 03-00035-00 | Concept One | Novellus | CA 41 CABLE | New OEM | Contact Us |
| 03-00038-00 | Concept One | Novellus | CABLE ASSY, CA82 | New OEM | Contact Us |
| 03-00044-03 | Concept One | Novellus | CABLE ASSY, CA47 | New OEM | Contact Us |
| 03-00045-01 | Concept One | Novellus | CABLE ASSY,CA32 | New OEM | Contact Us |
| 03-00045-02 | Concept One | Novellus | CABLE ASSY,CA33 | New OEM | Contact Us |
| 03-00045-03 | Concept One | Novellus | CABLE ASSY,CA34 | New OEM | Contact Us |
| 03-00047-00 | Concept One | Novellus | CABLE ASSY,CA73 | New OEM | Contact Us |
| 03-00048-00 | Concept One | Novellus | CABLE ASSY, GP GAUGE CA74 | New OEM | Contact Us |
| 03-00055-00 | Concept One | Novellus | CBL ASSY, CAD8 | New OEM | Contact Us |
| 03-00057-00 | Concept One | Novellus | ASSY,LL,DOOR SNSR HARN | New OEM | Contact Us |
| 03-00061-00 | Concept One | Novellus | ASSY, LIFT EXT SNSR HARN | New OEM | Contact Us |
| 03-00062-00 | Concept One | Novellus | ASSY,ROT SNSR,HARN | New OEM | Contact Us |
| 03-00063-00 | Concept One | Novellus | ASSY,SPINDLE SNSR HARN | New OEM | Contact Us |
| 03-00067-00 | Concept One | Novellus | CABLE ASSY,CA119 | New OEM | Contact Us |
| 03-00068-00 | Concept One | Novellus | ASSY,GROUND,SPINDLE MTR | New OEM | Contact Us |
| 03-00076-00 | Concept One | Novellus | CABLE ASSY, CA101, LFRF | New OEM | Contact Us |
| 03-00078-02 | Concept One | Novellus | CBL ASSY,CA102,35.4FT | New OEM | Contact Us |
| 03-00079-01 | Concept One | Novellus | CABLE ASSY, CA120 | New OEM | Contact Us |