Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| CPS-04-10086 | CMP | Speedfam | RFK, PUMPHEAD PARISTALTIC | New OEM | Contact Us |
| CPS-04-10087 | CMP | Speedfam | KIT,SOFTWARE V4.502b1, 676 | New OEM | Contact Us |
| CPS-04-10100 | CMP | Speedfam | KIT,SOFTWARE, MV200/776,V4.60 B10 | New OEM | Contact Us |
| CPS-04-10123 | CMP | Speedfam | KIT, UPPR AND LWR RING CLAMPS, NO V-BAND | New OEM | Contact Us |
| CPS-04-10125 | CMP | Speedfam | KIT,POWER SUPPLY,UPPER PNEU PNL | New OEM | Contact Us |
| CPS-04-10126 | CMP | Speedfam | KIT,RELAY,INTERLOCK,MV200 | New OEM | Contact Us |
| CPS-04-10127-100 | CMP | Speedfam | KIT,KVM SWITCH,16 CHANNEL,UPGRADE,100 FT | New OEM | Contact Us |
| CPS-04-10127-50 | CMP | Speedfam | KIT,KVM SWITCH,16 CHANNEL,UPGRADE,50 FT | New OEM | Contact Us |
| CPS-15-00007 | CMP | Speedfam | REV. A 12.612"OD X .030 "THK Longwood B5N2X-030 WITH 108 HOLES .192" - .201"DIA AND 2 hOLES .140"DIA | New OEM | Contact Us |
| CPS-15-00010 | CMP | Speedfam | ROLLER,BAND 86D | New OEM | Contact Us |
| CPS-15-00021 | CMP | Speedfam | ROLLER, BAND, NATURAL, 90-92 DUROMETER | New OEM | Contact Us |
| CPS-15-00071 | CMP | Speedfam | TAPE,R1 WAND, SPECIAL | New OEM | Contact Us |
| CPS-15-00111 | CMP | Speedfam | RING, WEAR PET-P TX, #10 | New OEM | Contact Us |
| CPS-15-00144 | CMP | Speedfam | ROLLER, BAND, NATURAL., TI | New OEM | Contact Us |
| CPS-15-00160 | CMP | Speedfam | FIXTURE, WEAR RING CENTERING | New OEM | Contact Us |
| CPS-20106 | CMP | Speedfam | ENCODER,R-AXIS,676 HINE ROBOT | New OEM | Contact Us |
| CPS-20107 | CMP | Speedfam | MOTOR,R-AXIS,676 HINE ROBOT | New OEM | Contact Us |
| CPS-20108 | CMP | Speedfam | KIT,UPPER BRUSH ARM,CLARUS CLEANER (2 ARMS) | New OEM | Contact Us |
| CPS-20118 | CMP | Speedfam | ASSY, ENCODER/MOTOR, R-AXIS, MODEL, 4.3 (676) | New OEM | Contact Us |
| CPS-20119 | CMP | Speedfam | ASSY, ENCODER/MOTOR, T-AXIS, MODEL, 4.3 (676) | New OEM | Contact Us |
| CPS-20123 | CMP | Speedfam | CYLINDER,ACTUATOR, ROTARY SMIF POD LATCH | New OEM | Contact Us |
| CPS-20124 | CMP | Speedfam | CYLINDER, AIR 3/4 BORE W/AUTO-SW, SMIF POD UP/DOWN | New OEM | Contact Us |
| CPS-20125 | CMP | Speedfam | CYLINDER, ACTUATOR, ROTARY, SMIF POD LOCK | New OEM | Contact Us |
| CPS-20127 | CMP | Speedfam | CPS-20127 CABLE,INTERNAL,SMIF MODULE | New OEM | Contact Us |
| CPS-20129 | CMP | Speedfam | COMPUTER,QNX,GAMMA 2100 | New OEM | Contact Us |
| CPS-20174 | CMP | Speedfam | .080" (MXL) Pitch, 175 Teeth, 1/4" Wide Single Sided Urethane Belt with Kevlar Cords | New OEM | Contact Us |
| CPS-20188 | CMP | Speedfam | Drive Tape, 4.3 Robot Bottom tub,.313 Wd. 15.785 Lg | New OEM | Contact Us |
| CPS-20189 | CMP | Speedfam | Drive Tape, 4.3 Robot Bottom tub,.313 Wd. 15.430 Lg | New OEM | Contact Us |
| CPS-20190 | CMP | Speedfam | FAB: 4.3 RB, 2 Band Drive Tape, 1/4" Wd, 11.997/12.014 Lg, 2X.003 Thk | New OEM | Contact Us |
| CPS-20192 | CMP | Speedfam | KIT,UPPER BRUSH ARM,1 ARM,CLARUS CLEANER | New OEM | Contact Us |
| CPS-20193 | CMP | Speedfam | ASSY, IDLER ROLLER, 7700J CLEANER | New OEM | Contact Us |
| CPS-20194 | CMP | Speedfam | ASSY, SENSOR ROLLER, 7700J CLEANER | New OEM | Contact Us |
| CPS-20198 | CMP | Speedfam | ASSY, POLISH ARM #3, WITH LOAD CELL, PARTIAL, AURIGA | New OEM | Contact Us |
| CPS-20199 | CMP | Speedfam | ASSY, POLISH ARM #3, WITHOUT LOAD CELL, PARTIAL, AURIGA | New OEM | Contact Us |
| CPS-20207 | CMP | Speedfam | ASSY, VALVE, 2WAY NC 02 SERV DIO 12, REPLACED HE430107 | New OEM | Contact Us |
| CPS-20222 | CMP | Speedfam | ASSY, MANIFOLD, PNEUMATIC, 5 STATION, AURIGA MULTIHEAD | New OEM | Contact Us |
| CPS-20223 | CMP | Speedfam | ASSY, MANIFOLD, PNEUMATIC, 6 STATION, AURIGA PNEU CABINET | New OEM | Contact Us |
| CPS-20226 | CMP | Speedfam | PNEUMATIC VALVE, 3 POSITION, 4 WAY | New OEM | Contact Us |
| CPS-20235 | CMP | Speedfam | PIN, FRICTION ROLLER, HINE ROBOT | New OEM | Contact Us |
| CPS-20238 | CMP | Speedfam | MOTOR, R3 TRACK, MV | New OEM | Contact Us |
| CPS-20243 | CMP | Speedfam | MANIFOLD VALVE, CDV, REPLACEMENT | New OEM | Contact Us |
| CPS-20256 | CMP | Speedfam | END EFFECTOR, DUAL, GENMARK ROBOT, PEP | New OEM | Contact Us |
| CPS-20267 | CMP | Speedfam | PAD, IC1000, A2, DH2, 22.5”OD, K-GROOVE, STACKED | New OEM | Contact Us |
| CPS-20268 | CMP | Speedfam | PAD, POLITEX, EMBOSSED, 21” OD | New OEM | Contact Us |
| CPS-20269 | CMP | Speedfam | FILM, R601, 200MM | New OEM | Contact Us |
| CPS-20270 | CMP | Speedfam | FILM, DF200, 200MM | New OEM | Contact Us |
| CPS-20275 | CMP | Speedfam | ASSY, CNTRLR, END POINT, 200MM ORBITAL | New OEM | Contact Us |
| CPS-20348 | CMP | Speedfam | SPRING, COMP, 0.36"OD, 0.69"L, SST, 11 LBS | New OEM | Contact Us |
| CPS-20388 | CMP | Speedfam | MOTOR, GRIPPER, WITH ENCODER, GENMARK, MV | New OEM | Contact Us |
| CPS-20480 | CMP | Speedfam | ASSY, POWER SUPPLY, R3 ROBOT | New OEM | Contact Us |
| CPS-20492 | CMP | Speedfam | CABLE,FLEXIBLE POWER | New OEM | Contact Us |
| CPS-20505 | CMP | Speedfam | FTG,ONE TOUCH,6MM T X 10-32 | New OEM | Contact Us |
| CPS-20514 | CMP | Speedfam | MOTOR, R4 TRACK, MV | New OEM | Contact Us |
| CPS-20546 | CMP | Speedfam | Gearhead Mount RM090-262 | New OEM | Contact Us |
| CPS-20550 | CMP | Speedfam | ASSY, TILTER, CASSETTE | New OEM | Contact Us |
| CPS-20561 | CMP | Speedfam | MOUNTING KIT, GEARHEAD, DTR115 | New OEM | Contact Us |
| CPS-20644 | CMP | Speedfam | ASSY,PAD BKR,RIVETED,15 HOLES,ADHESIVE MOD | New OEM | Contact Us |
| CPS-20645 | CMP | Speedfam | ASSY,POLISH PAD,16 HOLE,CTR PLUG,ADHESIVE MOD | New OEM | Contact Us |
| CPS-20650 | CMP | Speedfam | ASSY,PAD BACKING RIVETED,ADHESIVE MOD | New OEM | Contact Us |
| CPS-20654 | CMP | Speedfam | ASSY,PAD BACKER,RIVETED,25 HOLES,ADHESIVE MOD | New OEM | Contact Us |
| CPS-20656 | CMP | Speedfam | ASSY,PAD BACKER,RIVET,16 HOLE,CTR PLUG,SLOTTED,ADHESIVE MOD | New OEM | Contact Us |
| CPS-20727 | CMP | Speedfam | BELT, REPLACEMENT, R4, 7700 CLNR | New OEM | Contact Us |
| CPS-20738 | CMP | Speedfam | VALVE, CHECK, 1/16” ID, BARB | New OEM | Contact Us |
| CPS-20741 | CMP | Speedfam | ASSY, ROLLER RING, CLARUS | New OEM | Contact Us |
| CPS-853-200975-001 | CMP | Speedfam | KIT,ONSERT REFURB,CUSTOMER,W-EPDM (W-EPDM for IFX) | New OEM | Contact Us |
| CR090315 | CMP | Speedfam | ROLLER,CAM 7/16-20 .750 D .500 W | New OEM | Contact Us |
| CZ140045 | CMP | Speedfam | PLGR | New OEM | Contact Us |
| DM050903 | CMP | Speedfam | SPG,CPRSN 1-1/8 L .360 OD .026 WIRE | New OEM | Contact Us |
| DM051283 | CMP | Speedfam | SPG,CPRSN 1.000 L .480 OD .038 WIRE | New OEM | Contact Us |
| DM051708 | CMP | Speedfam | SPG,CPRSN 2-1/4 L .660 OD .055 WIRE | New OEM | Contact Us |
| DU011020 | CMP | Speedfam | SHOCK ABSORBER | New OEM | Contact Us |
| DU130046 | CMP | Speedfam | DAMPER | New OEM | Contact Us |
| DU130047 | CMP | Speedfam | SHOCK ABSORBER, | New OEM | Contact Us |
| EA110095 | CMP | Speedfam | GEARBOX,MORSE STAINLESS | New OEM | Contact Us |
| ED090167 | CMP | Speedfam | UNION,ROTATING 3/4-16UNF RH THREAD | New OEM | Contact Us |
| ED190020 | CMP | Speedfam | UNION,ROTARY 5/16-18 ROTOR | New OEM | Contact Us |
| EH010158 | CMP | Speedfam | BELT,TIMING 1/2 W X 187 PITCH LG | New OEM | Contact Us |
| EH020125 | CMP | Speedfam | BELT,TIMING 3/8W X 1/5PITCH | New OEM | Contact Us |
| EH030031 | CMP | Speedfam | BELT,TIMING 72 PITCH LG | New OEM | Contact Us |
| EJ010505 | CMP | Speedfam | BELT,V GRIPNOTCH 33.5 O/LG 3/8 WIDE | New OEM | Contact Us |
| EJ010513 | CMP | Speedfam | BELT,V GRIPNOTCH 53.0 O/LG 3/8 WIDE | New OEM | Contact Us |
| EP010010 | CMP | Speedfam | PULLEY,TIMING BELT 1/5P 15GROOVE | New OEM | Contact Us |
| EY030023 | CMP | Speedfam | CHAIN,158 PITCH 15.500 LENGTH | New OEM | Contact Us |
| EY030025 | CMP | Speedfam | CHAIN,189 PITCH 18.555 LENGTH | New OEM | Contact Us |
| FA500008 | CMP | Speedfam | O-RING,BUNA-N 70D 3/16ID 1/16T | New OEM | Contact Us |
| FA500015 | CMP | Speedfam | O-RING,BUNA-N 70D 9/16ID 1/16T | New OEM | Contact Us |
| FA500022 | CMP | Speedfam | O-RING,BUNA-N 70D 1.00ID 1/16T | New OEM | Contact Us |
| FA500028 | CMP | Speedfam | O-RING,BUNA-N 70D 1-3/8ID 1/16T | New OEM | Contact Us |
| FA500030 | CMP | Speedfam | O-RING,BUNA-N 70D 1-5/8ID 1/16T | New OEM | Contact Us |
| FA500037 | CMP | Speedfam | O-RING, BUNA-N 70D 2-1/2ID 1/16T | New OEM | Contact Us |
| FA500042 | CMP | Speedfam | O-RING,BUNA-N 70D 3-1/4ID 1/16T | New OEM | Contact Us |
| FA500124 | CMP | Speedfam | O-RING,BUNA-N 70D 1-1/4ID 3/32T | New OEM | Contact Us |
| FA500140 | CMP | Speedfam | O-RING,BUNA-N 70D 2-1/4ID 3/32T | New OEM | Contact Us |
| FA500170 | CMP | Speedfam | O-RING,BUNA-N 70D 7-3/4 ID 3/32 T | New OEM | Contact Us |
| FA500172 | CMP | Speedfam | O-RING,BUNA-N 70D 8-1/4 ID 3/32 T | New OEM | Contact Us |
| FA500216 | CMP | Speedfam | O-RING,BUNA-N 70D 1-1/8 ID 1/8 T | New OEM | Contact Us |
| FA500226 | CMP | Speedfam | O-RING, BUNA-N 70D 2.000 ID 1/8 T | New OEM | Contact Us |
| FA500231 | CMP | Speedfam | O-RING,BUNA-N 70D 2-5/8 ID 1/8 T | New OEM | Contact Us |
| FA500240 | CMP | Speedfam | O-RING,BUNA-N 70D 3-3/4 ID 1/8 T | New OEM | Contact Us |
| FA500250 | CMP | Speedfam | O-RING,BUNA-N 70D 5.0ID 1/8T | New OEM | Contact Us |