Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| FA500252 | CMP | Speedfam | O-RING,BUNA-N 70D 5-1/4 ID 1/8 T | New OEM | Contact Us |
| FB100011 | CMP | Speedfam | O-RING,VITON 75D 5/16ID 1/16 T | New OEM | Contact Us |
| FG080159 | CMP | Speedfam | SEAL,STUD | New OEM | Contact Us |
| FJ032589 | CMP | Speedfam | SEAL,2.375 SHAFT 3.005 OD .375 W | New OEM | Contact Us |
| FJ032723 | CMP | Speedfam | SEAL,2.500 SHAFT 3.376 OD .438 W | New OEM | Contact Us |
| FJ032929 | CMP | Speedfam | SEAL,2.750 SHAFT 4.336 OD .500 W | New OEM | Contact Us |
| FJ033782 | CMP | Speedfam | SEAL,5.000 SHAFT 6.007 OD .500 W | New OEM | Contact Us |
| FM010012 | CMP | Speedfam | GASKET,BUNA-N | New OEM | Contact Us |
| G64-0000008 | CMP | Speedfam | PHOTO SENSOR | New OEM | Contact Us |
| HA010079 | CMP | Speedfam | NOZZLE,SPRAY 1/8 NPT 90 DEG PVC | New OEM | Contact Us |
| HA040018 | CMP | Speedfam | NOZZLE,SPRAY CONN 1/8NPT | New OEM | Contact Us |
| HC010039 | CMP | Speedfam | GAUGE,0-15PSI 1/8 CBM 1-1/2 DIA | New OEM | Contact Us |
| HC510185 | CMP | Speedfam | GAUGE,0-30 HG 0-15PSI 2-1/2 CMPD | New OEM | Contact Us |
| HC630001 | CMP | Speedfam | GAUGE,0-60PSI 1/4NPT 2.0 DIA SST | New OEM | Contact Us |
| HD170024 | CMP | Speedfam | REGULATOR,PRESS 5-50PSI 1/4FPT PVDF | New OEM | Contact Us |
| HD430020 | CMP | Speedfam | REGULATOR, SINGLE USE W/SPEED CNTRL | New OEM | Contact Us |
| HD460125 | CMP | Speedfam | REGULATOR, PRESS 5-50 PSI PVC | New OEM | Contact Us |
| HE130020 | CMP | Speedfam | VALVE,2WAY 24VDC N/C 3/8NPT | New OEM | Contact Us |
| HE140325 | CMP | Speedfam | VALVE,CHECK RELIEF | New OEM | Contact Us |
| HE170153 | CMP | Speedfam | VALVE,AIR N/C 1 PVC | New OEM | Contact Us |
| HE170163 | CMP | Speedfam | VALVE,AIR N/C 1" POLYPRO | New OEM | Contact Us |
| HE170171 | CMP | Speedfam | VALVE,AIR N/C 1/2 PVDF | New OEM | Contact Us |
| HE170211 | CMP | Speedfam | VALVE, AIR N/O 1/2 PVDF | New OEM | Contact Us |
| HE170212 | CMP | Speedfam | VALVE, AIR N/O 3/4 PVDF | New OEM | Contact Us |
| HE430070 | CMP | Speedfam | VALVE,SOL 24VDC NEUM M | New OEM | Contact Us |
| HE430090 | CMP | Speedfam | VALVE,3WAY 24VDC 1.5W | New OEM | Contact Us |
| HE540145 | CMP | Speedfam | VALVE,SOL 24VDC W/PIN ARM | New OEM | Contact Us |
| HE640013 | CMP | Speedfam | VALVE,FLOW CONTROL 10-32 PORTS | New OEM | Contact Us |
| HE640121 | CMP | Speedfam | VALVE,SOL 3WAY | New OEM | Contact Us |
| HE640130 | CMP | Speedfam | Air Operated, 3/8” NPT ports, Normally Closed, with Bracket | New OEM | Contact Us |
| HE820029 | CMP | Speedfam | VALVE,2WAY 1/2NPT BYPASS PFA | New OEM | Contact Us |
| HE820030 | CMP | Speedfam | VALVE,2WAY 1/2FNPT PFA | New OEM | Contact Us |
| HE820034 | CMP | Speedfam | VALVE,2WAY INPT PFA | New OEM | Contact Us |
| HE820045 | CMP | Speedfam | VALVE,2WAY 2MALE 1/2PORT AIR OP | New OEM | Contact Us |
| HE820047 | CMP | Speedfam | VALVE,3WAY AIR OP | New OEM | Contact Us |
| HE940053 | CMP | Speedfam | VALVE,SOL 2WAY NC 24VDC W/VRS 80PSI | New OEM | Contact Us |
| HF260071 | CMP | Speedfam | CYLINDER,AIR | New OEM | Contact Us |
| HF260080 | CMP | Speedfam | CYLINDER, AIR WAFER TRANSPORT | New OEM | Contact Us |
| HF260290 | CMP | Speedfam | CYLINDER,AIR 3/4" STROKE | New OEM | Contact Us |
| HF280380 | CMP | Speedfam | CYLINDER,AIR 1-1/8B 1-1/4 + 1-1/2ST | New OEM | Contact Us |
| HF640045 | CMP | Speedfam | CYLINDER,ARM ACTUATOR | New OEM | Contact Us |
| HF970045 | CMP | Speedfam | CYLINDER,RODLESS | New OEM | Contact Us |
| HF970045/RW | CMP | Speedfam | REFURBISHED CYLINDER, ROBLESS | New OEM | Contact Us |
| HG140029 | CMP | Speedfam | FILTER,RPLCMNT 140U (ASSY HG140030) | New OEM | Contact Us |
| HG140030 | CMP | Speedfam | FILTER,ASSY (W/HG140029 140U ELMNT | New OEM | Contact Us |
| HG640045 | CMP | Speedfam | FILTER,ASSY (3910-103771 30U ELMNT) | New OEM | Contact Us |
| HG960046 | CMP | Speedfam | VACUUM GENERATOR | New OEM | Contact Us |
| HJ640009 | CMP | Speedfam | FILTER,REG ASSY (W/HG090014 5U ELMT | New OEM | Contact Us |
| HL170059 | CMP | Speedfam | GAUGE,GUARD 0-60 PSI PVC | New OEM | Contact Us |
| HL170092 | CMP | Speedfam | GAUGE,GUARD 0-60PSI PVDF | New OEM | Contact Us |
| HP100072 | CMP | Speedfam | PUMPHEAD,PLATEN FLUID | New OEM | Contact Us |
| HP100080 | CMP | Speedfam | PUMPHEAD,PARASTALTIC | New OEM | Contact Us |
| HP160005 | CMP | Speedfam | PUMP,W/MTR 115VAC 50/60HZ | New OEM | Contact Us |
| HS190002 | CMP | Speedfam | FLUID SNSR-PTFE ENCAP SNSR HEAD | New OEM | Contact Us |
| HT170014 | CMP | Speedfam | SWITCH,PRESSURE 35PSI DECRSNG | New OEM | Contact Us |
| HV110025 | CMP | Speedfam | SWITCH,LEVEL 50 TO 240VAC | New OEM | Contact Us |
| HV160001 | CMP | Speedfam | FLOAT SWITCH VERTICAL POLYPRO | New OEM | Contact Us |
| HY210010 | CMP | Speedfam | FLOW CNTRLR, | New OEM | Contact Us |
| HY210013 | CMP | Speedfam | FLOW CNTRLR, | New OEM | Contact Us |
| IPX0802 | CMP | Speedfam | PANEL,COVER,BOTTOM,BUFFY | New OEM | Contact Us |
| JA036302 | CMP | Speedfam | PIPE,FLEXIBLE PVC 1" | New OEM | Contact Us |
| JB022171 | CMP | Speedfam | FITTING,NIPPLE RDCNG HEX 3/8” x 1/4” | New OEM | Contact Us |
| JB036458 | CMP | Speedfam | BUSHING,RDCR 1 1/2-1SCH40 W SPGX | New OEM | Contact Us |
| JB036938 | CMP | Speedfam | FTG,NIPPLE 1/2" X 3" SCH40 PVC | New OEM | Contact Us |
| JB036940 | CMP | Speedfam | FTG,NIPPLE CLOSE 3/8MT X 3L PVC | New OEM | Contact Us |
| JB03C333 | CMP | Speedfam | FTG,CPVC 45 DEG EL 3/4TXT | New OEM | Contact Us |
| JB03C949 | CMP | Speedfam | FTG,NIPPLE CLOSE 3/4 X CL CPVC | New OEM | Contact Us |
| JB052040 | CMP | Speedfam | FTG,NIPPLE CLOSE 1/4NPT THD SST | New OEM | Contact Us |
| JB052103 | CMP | Speedfam | FTG,BUSHING RDCR 1/4MPT X1/8FPT | New OEM | Contact Us |
| JB052197 | CMP | Speedfam | FTG,TEE ST 1/4MT X 1/4FT SST | New OEM | Contact Us |
| JB053201 | CMP | Speedfam | FTG,NIPPLE LONG 1/4MTX1-1/2L BR | New OEM | Contact Us |
| JB073015 | CMP | Speedfam | COUPLING,SHORT 10-32TH BOTH ENDS | New OEM | Contact Us |
| JB073023 | CMP | Speedfam | FTG,L 10-32 BRASS | New OEM | Contact Us |
| JB073039 | CMP | Speedfam | FTG,ADPTR FEM 1/4 X 10-32 | New OEM | Contact Us |
| JB160060 | CMP | Speedfam | PLUG,1/8" NPT HEX SKT 316 SST | New OEM | Contact Us |
| JB313011 | CMP | Speedfam | INDICATOR,DIAL | New OEM | Contact Us |
| JD001110 | CMP | Speedfam | TUBING,PFA(1/2DX.06XWALL) | New OEM | Contact Us |
| JE012485 | CMP | Speedfam | TUBE FIT-QUICK DISCONNECT-STEM 1/4T | New OEM | Contact Us |
| JE190109 | CMP | Speedfam | FTG,CONN MALE 1/2TX1/4 MPT | New OEM | Contact Us |
| JE190143 | CMP | Speedfam | FTG,ELBOW ML 1/2T X 1/4MPT | New OEM | Contact Us |
| JE190180 | CMP | Speedfam | FTG, UNION RDCR PFA STRGT 3/8X1/4 | New OEM | Contact Us |
| JE190248 | CMP | Speedfam | FTG,TEE RUN ML 1/2X1/2TX1/2MPT | New OEM | Contact Us |
| JE360103 | CMP | Speedfam | FTG,CONN ML 5/32T X 10-32UNF | New OEM | Contact Us |
| JE360447 | CMP | Speedfam | FTG,ELBOW 1/8MNPT X 5/32 OD SST | New OEM | Contact Us |
| JE400007 | CMP | Speedfam | FTG,UNN ADPTR ML 1/2OD X 1/2NPT | New OEM | Contact Us |
| JG130059 | CMP | Speedfam | TUBING,NEOPRENE .253ID,BLACK LETTERING | New OEM | Contact Us |
| JG130060 | CMP | Speedfam | TUBING,NEOPRENE 5/16 ID | New OEM | Contact Us |
| JG230015 | CMP | Speedfam | HOSE,1/2ID 250PSIG RED GATES | New OEM | Contact Us |
| JH073017 | CMP | Speedfam | HOSE FTG 1/8HX10-32 BRASS | New OEM | Contact Us |
| JH073018 | CMP | Speedfam | FTG,HOSE BARB 1/16H X 10-32 BRS | New OEM | Contact Us |
| JJ032060 | CMP | Speedfam | CLAMP,HOSE 1.563MIN 2.5MAX | New OEM | Contact Us |
| JJ036012 | CMP | Speedfam | CLAMP,HOSE SNAPPER 3/8 | New OEM | Contact Us |
| JJ073020 | CMP | Speedfam | CLAMP,PRESS ON BRASS | New OEM | Contact Us |
| NJ310024 | CMP | Speedfam | WSHR, CURVED #10 SST | New OEM | Contact Us |
| NM310024 | CMP | Speedfam | SCRW,SET SOFT TIP 1/4 X 28 | New OEM | Contact Us |
| NN000019 | CMP | Speedfam | SCRW,FHC 10-24 X 1-1/2 SST | New OEM | Contact Us |
| PA020052 | CMP | Speedfam | OPERATOR,E-STOP BUTTON MAINTAINED | New OEM | Contact Us |
| PB020012 | CMP | Speedfam | CONTACT,BLOCK FOR SERS O4 1N/O 1N/C | New OEM | Contact Us |
| PB020046 | CMP | Speedfam | CONTACT,BLOCK FOR SERIES 51 2POLE | New OEM | Contact Us |
| PE010032 | CMP | Speedfam | SWITCH,LIMIT 1 X E11 | New OEM | Contact Us |