Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 05-00228-00 | Concept One | Novellus | KIT,LL,SEALS | New OEM | Contact Us |
| 05-00229-00 | Concept One | Novellus | COOL STATION UPGRADE KIT | New OEM | Contact Us |
| 05-024230-00 | Concept One | Novellus | KIT,RETRO,150mm,26 WFR.CASS. | New OEM | Contact Us |
| 05-032200-04 | Concept One | Novellus | EXTENDED PLATFORM,8" PLASTIC | New OEM | Contact Us |
| 05-032627-00 | Concept One | Novellus | KIT,RETRO,CASS.NEST SWITCH | New OEM | Contact Us |
| 05-045724-00 | Concept One | Novellus | KIT,RET,C1-200 DUAL HD EPD | New OEM | Contact Us |
| 05-045725-00 | Concept One | Novellus | KIT,RET,C1-150,DUAL HD EP DECT | New OEM | Contact Us |
| 05-047249-00 | Concept One | Novellus | KIT, UPGRADE, FROM A 386 TO A PENTIUM | New OEM | Contact Us |
| 05-050169-00 | Concept One | Novellus | C-1D AE 1.4KW LF GEN KIT | New OEM | Contact Us |
| 05-10306-00 | Concept One | Novellus | KIT,C2 WCVD SPDL,SEALS | New OEM | Contact Us |
| 05-10350-00 | Concept One | Novellus | KIT,PIN LIFT SEAL | New OEM | Contact Us |
| 05-110416-00 | Concept One | Novellus | KIT, WINDOW, SAPPHIRE, SINGLEPORT | New OEM | Contact Us |
| 05-111184-00 | Concept One | Novellus | KIT,FCO,CVDW,SPLIT BUSH UPGRAD | New OEM | Contact Us |
| 05-111902-01 | Concept One | Novellus | KIT, PM RF STRAP 2 BOLT | New OEM | Contact Us |
| 05-113581-00 | Concept One | Novellus | KIT,RETRO DUAL EPD C1-D-150 | New OEM | Contact Us |
| 05-113582-00 | Concept One | Novellus | KIT,RETRO DUAL EPD C1-D-200mm | New OEM | Contact Us |
| 05-113897-00 | Concept One | Novellus | FERROFLUIDIC SPINDLE UPGRADE KIT | New OEM | Contact Us |
| 05-114025-00 | Concept One | Novellus | KIT,PM,SHIMS,HEATER BLOCK | New OEM | Contact Us |
| 05-115825-00 | Concept One | Novellus | KIT,RETROFIT,Z-CAL SNSR MOUNTS | New OEM | Contact Us |
| 05-116949-00 | Concept One | Novellus | KIT,TERM PNL,UPGRD TO C1 NG | New OEM | Contact Us |
| 05-117865-00 | Concept One | Novellus | KIT,UPGRD,WOP SENSOR RED C1 | New OEM | Contact Us |
| 05-119299-00 | Concept One | Novellus | KIT, C1, LCD, UPGRADE FROM OLD MONOCHROME | New OEM | Contact Us |
| 05-119299-02 | Concept One | Novellus | KIT,C1,LCD UPGRD/WAS ZYNK VGA | New OEM | Contact Us |
| 05-154194-00 | Concept One | Novellus | KIT,RETROFIT,ROT DRIVE,C1 | New OEM | Contact Us |
| 05-154195-00 | Concept One | Novellus | KIT,RETROFIT,LIFT DRIVE,C1 | New OEM | Contact Us |
| 05-154198-00 | Concept One | Novellus | KIT,UPGRADE,MOTOR,ROBOT,C1 | New OEM | Contact Us |
| 05-160259-00 | Concept One | Novellus | KIT,FCO,OEM750,FULL ROBOT,C1 | New OEM | Contact Us |
| 05-167431-00 | Concept One | Novellus | KIT,PM,BI-ANUAL,C1-150,STMICR | New OEM | Contact Us |
| 05-264548-00 | Concept One | Novellus | RETROFIT KIT, C1, MEGAPAC UPGRADE, W/70V | New OEM | Contact Us |
| 05-267137-00 | Concept One | Novellus | RETROKIT, C1, EXT DREIVE, FIXED STRAIN RELIEF | New OEM | Contact Us |
| 05-274815-00 | Concept One | Novellus | RETROFIT KIT, C1, MEGAPAC U | New OEM | Contact Us |
| 05-274816-00 | Concept One | Novellus | RETROKIT,C1,MEGAPAC UPGRD,W/90V,NO LINE FLTR | New OEM | Contact Us |
| 05-289164-00 | Concept One | Novellus | RETROKIT,C2SEQ-X,FORKS,STD,CERAMIC BOTTOM PLATE | New OEM | Contact Us |
| 05-290438-00 | Concept One | Novellus | RETROKIT,C2SEQ,AC & RF PWR NI FEEDTHRUS | New OEM | Contact Us |
| 05-305055-00 | Concept One | Novellus | RETROKIT,C1-D,CERAMIC BTM PLT | New OEM | Contact Us |
| 05-306158-00 | Concept One | Novellus | RETROKIT, C1-D,LL DOOR SHAFT | New OEM | Contact Us |
| 05-313042-00 | Concept One | Novellus | RETRO KIT CID WATLOW TEMPERATURE CONTROLLER | New OEM | Contact Us |
| 05-313390-00 | Concept One | Novellus | RETROKIT,C1,OVERTEMP REPLACEMENT | New OEM | Contact Us |
| 05-317075-00 | Concept One | Novellus | C1, 15" LCD TOUCHSCREEN | New OEM | Contact Us |
| 05-319014-00 | Concept One | Novellus | RETROKIT,INTFC BOX,PURGE PANEL | New OEM | Contact Us |
| 05-323453-00 | Concept One | Novellus | RETROKIT, AE MATCH, C1D 200MM | New OEM | Contact Us |
| 05-323453-01 | Concept One | Novellus | RETROKIT,AE MATCH,C1D 150MM,C1W | New OEM | Contact Us |
| 05-346895-00 | Concept One | Novellus | RETROKIT,PEND VLV,C1D EXT COLD_HOT TV,13.55 OR 13.25 TUBE | New OEM | Contact Us |
| 05-346895-01 | Concept One | Novellus | MFG KIT, VAT PENDLUM VALVE CID, HEATED | New OEM | Contact Us |
| 05-346895-02 | Concept One | Novellus | RETROKIT,C1D,PEND VLV INTERNAL COLD VLVS | New OEM | Contact Us |
| 05-346895-03 | Concept One | Novellus | RETROKIT,C1D,PEND VLV INTERNAL HOT VLVS | New OEM | Contact Us |
| 05-347021-00 | Concept One | Novellus | RETROKIT,C1 HOIST LOCK ASSEMBLY | New OEM | Contact Us |
| 05-352599-00 | Concept One | Novellus | RETROKIT, HEATER FUSE REPLACEMENT WITH CIRCUIT BREAKERS | New OEM | Contact Us |
| 05-355338-00 | Concept One | Novellus | KIT, RETRO DUAL END RF, IMP | New OEM | Contact Us |
| 05-355339-00 | Concept One | Novellus | RETROKIT,TRACE-RITE W/AE MATCH C2SEQ ALL | New OEM | Contact Us |
| 05-355339-01 | Concept One | Novellus | RETROKIT,TRACE-RITE W/TRAZAR,C2SEQ ALL | New OEM | Contact Us |
| 05-355399-00 | Concept One | Novellus | RETROKIT,TRACE-RITE W/AE MATCH C2SEQ ALL | New OEM | Contact Us |
| 05-363177-00 | Concept One | Novellus | RETROKIT,C1-D,GP 375 DIGITAL CTRL LL | New OEM | Contact Us |
| 05-403148-00 | Concept One | Novellus | RETROKIT,SSR FAN AND T-STAT,C1-D | New OEM | Contact Us |
| 05-408056-00 | Concept One | Novellus | RETROKIT, STD FORKS, CERAMIC BOT PLT, C2SEQ-X, CID-200MM | New OEM | Contact Us |
| 05-408057-00 | Concept One | Novellus | RETROKIT,THIN FORKS,CERAMIC BOT PLT,C2SEQ-X,C1D-200MM | New OEM | Contact Us |
| 05-408058-00 | Concept One | Novellus | RETROKIT,STD FORKS,150MM CERAMIC BOT PLT,C1-D | New OEM | Contact Us |
| 05-420173-00 | Concept One | Novellus | RETROKIT_CID_RF ENCLOSURE W/REMOVABLE PNLS | New OEM | Contact Us |
| 05-50032-00 | Concept One | Novellus | KIT,STRAP,RF PLATE TO NOZZLE | New OEM | Contact Us |
| 05-50036-00 | Concept One | Novellus | KIT,DOOR PARTS,LL | New OEM | Contact Us |
| 05-50057-00 | Concept One | Novellus | KIT,STRAPS,LF BIAS | New OEM | Contact Us |
| 05-50058-00 | Concept One | Novellus | KIT,LEADS,SF,AC | New OEM | Contact Us |
| 05-50059-00 | Concept One | Novellus | KIT,LEADS,DF,AC | New OEM | Contact Us |
| 05-50072-00 | Concept One | Novellus | KIT,SPDL,SEALS | New OEM | Contact Us |
| 05-50102-02 | Concept One | Novellus | KIT,LFC,5 ML (VCR) | New OEM | Contact Us |
| 05-60213-00 | Concept One | Novellus | SPINDLE REDUCTION KIT - 150MM | New OEM | Contact Us |
| 0710-740535 | Concept One | Novellus | COUPLING,PAD COND UPR SHAFT SPECIAL | New OEM | Contact Us |
| 10-00031-01 | Concept One | Novellus | TUBE ASSEMBLY, VACUUM MANIFOLD | New OEM | Contact Us |
| 10-00032-02 | Concept One | Novellus | MANF, "B", GAS SUPPLY | New OEM | Contact Us |
| 10-00033-00 | Concept One | Novellus | PLMB, M2 PURGE | New OEM | Contact Us |
| 10-00035-01 | Concept One | Novellus | PLMB, "B", GAS SUPPLY | New OEM | Contact Us |
| 10-00036-00 | Concept One | Novellus | PLMB, MANIFOLD EXTENTION | New OEM | Contact Us |
| 10-00038-00 | Concept One | Novellus | MANF, GAS PURGE | New OEM | Contact Us |
| 10-00038-01 | Concept One | Novellus | TUBE WELDMENT, PURGE MA | New OEM | Contact Us |
| 10-00040-00 | Concept One | Novellus | TUBING,POLYURETHANE 1/8ODX.066ID | New OEM | Contact Us |
| 10-00045-00 | Concept One | Novellus | PLUMB UPPER A VCR | New OEM | Contact Us |
| 10-00046-00 | Concept One | Novellus | PLUMB UPPER "B" VCR | New OEM | Contact Us |
| 10-00049-00 | Concept One | Novellus | TUBE, POLYPROPYLENE1/4"OD, CE! | New OEM | Contact Us |
| 10-00072-00 | Concept One | Novellus | TUBE,GAS DIST | New OEM | Contact Us |
| 10-00073-00 | Concept One | Novellus | TUBE ASSEMBLY, MANIFOLD A | New OEM | Contact Us |
| 10-00074-00 | Concept One | Novellus | TUBE ASSEMBLY, MANIFOLD A | New OEM | Contact Us |
| 10-00079-00 | Concept One | Novellus | PLMB, UPR GAS MANFLD"A" | New OEM | Contact Us |
| 10-00080-00 | Concept One | Novellus | PLMB, "A"GAS MAN.VCO | New OEM | Contact Us |
| 10-00082-01 | Concept One | Novellus | PLMB, "A"GAS MAN.VCO | New OEM | Contact Us |
| 10-00082-02 | Concept One | Novellus | PLMB, "B" MAN.VCO | New OEM | Contact Us |
| 10-00092-00 | Concept One | Novellus | TUBE WLDMT, GAS OUTLET"A"MAN | New OEM | Contact Us |
| 10-00095-00 | Concept One | Novellus | TUBE ASSY, GAS DIST "T" | New OEM | Contact Us |
| 10-00096-00 | Concept One | Novellus | TUBE ASSY, BGAS MANIFOLD | New OEM | Contact Us |
| 10-00097-00 | Concept One | Novellus | TUBE ASSY, "A" GAS LWR VCO 200 | New OEM | Contact Us |
| 10-00100-00 | Concept One | Novellus | TUBE ASSY, GAS DIST."T" | New OEM | Contact Us |
| 10-00122-00 | Concept One | Novellus | TUBE ASSY,MFC OUTB23 FILM A | New OEM | Contact Us |
| 10-00123-00 | Concept One | Novellus | TUBE ASSY,FILTER B23 FILM A | New OEM | Contact Us |
| 10-00128-00 | Concept One | Novellus | TUBE BGAS MAN 200MM LWR VCR | New OEM | Contact Us |
| 10-00129-00 | Concept One | Novellus | TUBE,A GAS MAN 200MM UPR VCR | New OEM | Contact Us |
| 10-00130-00 | Concept One | Novellus | TUBE,B GAS MAN 200MM UPR VCR | New OEM | Contact Us |
| 10-00131-00 | Concept One | Novellus | TUBE AGAS MAN 200MM LWR VCR | New OEM | Contact Us |
| 10-00153-00 | Concept One | Novellus | TUBE ASSY, GAS INLET, FILTER | New OEM | Contact Us |
| 10-00172-00 | Concept One | Novellus | TUBING,PFA TEFLON | New OEM | Contact Us |
| 10-00174-00 | Concept One | Novellus | MANF,CAP MANOMETER | New OEM | Contact Us |
| 10-00186-00 | Concept One | Novellus | N2 NEEDLE VALVE FOR CHAMBER PURGE | New OEM | Contact Us |