Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 0700-111878 | CMP | Speedfam | O-RING,VITON .984ID X .139W | New OEM | Contact Us |
| 0700-111879 | CMP | Speedfam | O-RING,VITON 8.45ID X .210W | New OEM | Contact Us |
| 0700-111880 | CMP | Speedfam | O-RING,VITON 8.737ID X .103W | New OEM | Contact Us |
| 0700-700339 | CMP | Speedfam | LOCKRING,SEALING 1/2" YELLOW | New OEM | Contact Us |
| 0700-700401 | CMP | Speedfam | O-RING, | New OEM | Contact Us |
| 0700-700402 | CMP | Speedfam | O-RING, 2-263 N70 | New OEM | Contact Us |
| 0700-700404 | CMP | Speedfam | O-RING,2-271 N70 | New OEM | Contact Us |
| 0700-700406 | CMP | Speedfam | O-RING,DIAPHRAGM | New OEM | Contact Us |
| 0700-700407 | CMP | Speedfam | O-RING,DRIVE SHAFT | New OEM | Contact Us |
| 0700-700408 | CMP | Speedfam | O-RING,DRIVELINE ADPTR | New OEM | Contact Us |
| 0700-700409 | CMP | Speedfam | O-RING,2-133 N70 | New OEM | Contact Us |
| 0700-700412 | CMP | Speedfam | O-RING,PAD ASSY | New OEM | Contact Us |
| 0700-700414 | CMP | Speedfam | O-RING,SUMP FILTER | New OEM | Contact Us |
| 0700-700415 | CMP | Speedfam | O-RING,8.737ID 8.943 OD | New OEM | Contact Us |
| 0700-700416 | CMP | Speedfam | O-RING,WAFER CARRIER RING | New OEM | Contact Us |
| 0700-700417 | CMP | Speedfam | O-RING,WRIST ASSEMBLY 2-118 | New OEM | Contact Us |
| 0700-701152 | CMP | Speedfam | SEAL,LIP R1 SIL 3/4 O-RING 50D | New OEM | Contact Us |
| 0700-717070 | CMP | Speedfam | GASKET,MTR MNT WET ENCL | New OEM | Contact Us |
| 0700-717773 | CMP | Speedfam | SEAL,PAD COND SLINGER | New OEM | Contact Us |
| 0700-718019 | CMP | Speedfam | O-RING,2-164 N70 | New OEM | Contact Us |
| 0700-718487 | CMP | Speedfam | RING,GAARD.560 GROOVED | New OEM | Contact Us |
| 0700-718617 | CMP | Speedfam | GASKET,SLURRY BASIN DRAIN | New OEM | Contact Us |
| 0700-718764 | CMP | Speedfam | GASKET,CERAMIC WAND | New OEM | Contact Us |
| 0700-718765 | CMP | Speedfam | TAPE,CERAMIC WAND UHMW | New OEM | Contact Us |
| 0700-718869 | CMP | Speedfam | O-RING,VITON 2-008 | New OEM | Contact Us |
| 0700-727372 | CMP | Speedfam | SEAL,SLINGER (TOP CLAMP RING) | New OEM | Contact Us |
| 0700-737430 | CMP | Speedfam | SEAL,TUBE | New OEM | Contact Us |
| 0700-737694 | CMP | Speedfam | SEAL,WSHR | New OEM | Contact Us |
| 0700-737696 | CMP | Speedfam | GASKET,VITON | New OEM | Contact Us |
| 0700-737699 | CMP | Speedfam | PLUG,HEX M5 | New OEM | Contact Us |
| 0700-739482 | CMP | Speedfam | PLUG,ROTARY UNION 3/8-16 | New OEM | Contact Us |
| 0700-739690 | CMP | Speedfam | PLUG,PRESSURE DRYSEAL 1/8-27 BRASS | New OEM | Contact Us |
| 0700-739705 | CMP | Speedfam | SEAL,OIL PAD COND SPECIAL | New OEM | Contact Us |
| 0700-770448 | CMP | Speedfam | RING,CONTACT WAND | New OEM | Contact Us |
| 0700-770456 | CMP | Speedfam | RING,SUCTION | New OEM | Contact Us |
| 0700-770479 | CMP | Speedfam | KICKER,CERAMIC WAND | New OEM | Contact Us |
| 0700-770673 | CMP | Speedfam | O-RING,NITRILE .176 ID .316 OD | New OEM | Contact Us |
| 0701-101741 | CMP | Speedfam | RING, RPC2 ENCODER SUPPORT | New OEM | Contact Us |
| 0710-100233 | CMP | Speedfam | SLIDE,DOUBLE MOUNT 340MM | New OEM | Contact Us |
| 0710-100248 | CMP | Speedfam | BELT,TIMING 10MM W 5MM P 300MM L | New OEM | Contact Us |
| 0710-102665 | CMP | Speedfam | COUPLING,OLDHAM MOD SRD MTR/SHAF | New OEM | Contact Us |
| 0710-104204 | CMP | Speedfam | ROLLER,STEPPED 5/8OD X 1/4W 1/4ID | New OEM | Contact Us |
| 0710-109403 | CMP | Speedfam | WELDMENT,CLAMP V-BAND REINF LATCH | New OEM | Contact Us |
| 0710-109817 | CMP | Speedfam | CLAMP,SPLINE SHAFT 200MM BUFF | New OEM | Contact Us |
| 0710-110265 | CMP | Speedfam | CLAMP,ACTIVE WAND UPPER MV | New OEM | Contact Us |
| 0710-111474 | CMP | Speedfam | COUPLING,SHAFT 10MM HELICAL SST HDW | New OEM | Contact Us |
| 0710-112384 | CMP | Speedfam | BELT,1/5 PITCH 83 GROOVE URETHANE | New OEM | Contact Us |
| 0710-112385 | CMP | Speedfam | BELT,1/5 PITCH 60 GROOVE URETHANE | New OEM | Contact Us |
| 0710-700035 | CMP | Speedfam | BELT,POLISH HEAD DRIVE | New OEM | Contact Us |
| 0710-700114 | CMP | Speedfam | CLAMP,5/8" NYLON CABLE | New OEM | Contact Us |
| 0710-700328 | CMP | Speedfam | LATCH, FLUSH PULL | New OEM | Contact Us |
| 0710-700329 | CMP | Speedfam | LATCH,WINDOW | New OEM | Contact Us |
| 0710-700619 | CMP | Speedfam | SPRING,.343 OD 1-1/2L .062 WIRE SST | New OEM | Contact Us |
| 0710-700620 | CMP | Speedfam | SPRING,OPPOSING SS | New OEM | Contact Us |
| 0710-717013 | CMP | Speedfam | CLAMP,BEARING RING WAFER HEAD | New OEM | Contact Us |
| 0710-717018 | CMP | Speedfam | PULLEY,MOD WAVE GENERATOR 48T | New OEM | Contact Us |
| 0710-717023 | CMP | Speedfam | SPOOL,BOTTOM DRIVE | New OEM | Contact Us |
| 0710-717026 | CMP | Speedfam | CLAMP,V-BAND UPPER RING | New OEM | Contact Us |
| 0710-717027 | CMP | Speedfam | CLAMP,V-BAND LOWER RING | New OEM | Contact Us |
| 0710-717058 | CMP | Speedfam | KEY,DRIVE COLLAR WAFER HEAD | New OEM | Contact Us |
| 0710-717390 | CMP | Speedfam | PIN,DELRIN DRIVE PIN | New OEM | Contact Us |
| 0710-717682 | CMP | Speedfam | PULLEY,WAVE GENERATOR MODIFIED | New OEM | Contact Us |
| 0710-717992 | CMP | Speedfam | STRAINER,SLURRY DRAIN (SHORT/NEW) | New OEM | Contact Us |
| 0710-722029 | CMP | Speedfam | MESH,SLURRY DETAIL | New OEM | Contact Us |
| 0710-727028 | CMP | Speedfam | STOP,CASSETTE | New OEM | Contact Us |
| 0710-727126 | CMP | Speedfam | GUIDE,PNEUMATIC PANEL LOWER | New OEM | Contact Us |
| 0710-727158 | CMP | Speedfam | RING,CONN SLRY SHIELD | New OEM | Contact Us |
| 0710-727354 | CMP | Speedfam | STRAINER,BETA DRAIN SLRY BASIN (OLD | New OEM | Contact Us |
| 0710-727369 | CMP | Speedfam | FUNNEL,HOSE | New OEM | Contact Us |
| 0710-728071 | CMP | Speedfam | HATCH,LOCK LWR PNEUMATIC PANEL | New OEM | Contact Us |
| 0710-728073 | CMP | Speedfam | KEY,NYLATRON DRIVESHAFT WAFER HEAD | New OEM | Contact Us |
| 0710-730008 | CMP | Speedfam | WEDGE,HOME STOP PAD CONDITIONER | New OEM | Contact Us |
| 0710-730009 | CMP | Speedfam | WEDGE,LIMIT STOP PAD CONDITIONER | New OEM | Contact Us |
| 0710-737381 | CMP | Speedfam | GEAR,ROTARY ACTUATOR | New OEM | Contact Us |
| 0710-737382 | CMP | Speedfam | CLAMP,CONN SHAFT | New OEM | Contact Us |
| 0710-737522 | CMP | Speedfam | PULLEY,1/5 PITCH 20 GROOVES | New OEM | Contact Us |
| 0710-737581 | CMP | Speedfam | COUPLING, 3/8ID X 1/2ID X 1-1/8OD | New OEM | Contact Us |
| 0710-737583 | CMP | Speedfam | CLAMP,SPLINE SHAFT | New OEM | Contact Us |
| 0710-737591 | CMP | Speedfam | TURNBUCKLE, ROLLER | New OEM | Contact Us |
| 0710-737595 | CMP | Speedfam | SLEEVE, LABYRINTH | New OEM | Contact Us |
| 0710-737700 | CMP | Speedfam | CLAMP, V-BAND LWR RING-SST | New OEM | Contact Us |
| 0710-737704 | CMP | Speedfam | PULLEY,20 GROOVE GEARBOX | New OEM | Contact Us |
| 0710-737710 | CMP | Speedfam | BELT,1/5 PITCH 83 GROOVE URETHANE | New OEM | Contact Us |
| 0710-737711 | CMP | Speedfam | BELT,1/5 PITCH 60 GROOVE URETHANE | New OEM | Contact Us |
| 0710-738070 | CMP | Speedfam | CHAIN,ENERGY SERIES 07 15 LINKS | New OEM | Contact Us |
| 0710-738578 | CMP | Speedfam | BELT,TIMING 3/8PITCH 1/2"W 36TOOTH | New OEM | Contact Us |
| 0710-738581 | CMP | Speedfam | BELT,TIMING 3/8PITCH 1/2"WD 44TOOTH | New OEM | Contact Us |
| 0710-738669 | CMP | Speedfam | JUMPER, STRIP CERAMIC WEAR RING 150M | New OEM | Contact Us |
| 0710-738674 | CMP | Speedfam | PULLEY,FLANGED INTERNAL UPPER ARM | New OEM | Contact Us |
| 0710-738675 | CMP | Speedfam | PULLEY,FLANGED LOWER PLATEN | New OEM | Contact Us |
| 0710-738677 | CMP | Speedfam | PULLEY, UPPER ARM BALL SPLINE | New OEM | Contact Us |
| 0710-738716 | CMP | Speedfam | PULLEY,INTERNAL UPPER ARM | New OEM | Contact Us |
| 0710-738898 | CMP | Speedfam | ABRASIVE SHEET,PAD COND BLADDERLESS | New OEM | Contact Us |
| 0710-738902 | CMP | Speedfam | BAND,SCRUBBER BOX URETHANE TALL | New OEM | Contact Us |
| 0710-738903 | CMP | Speedfam | ROLLER, SCRUBBER BOX 1.500 OD TALL | New OEM | Contact Us |
| 0710-738904 | CMP | Speedfam | ROLLER,SCRUBBER 1.700 OD TALL | New OEM | Contact Us |
| 0710-738905 | CMP | Speedfam | ROLLER, SCRUB 1.700FLANG INTGRL SNSR | New OEM | Contact Us |
| 0710-738939 | CMP | Speedfam | BELT,TIMING 3/8PITCH X 1/2WD 46TTH | New OEM | Contact Us |
| 0710-739211 | CMP | Speedfam | SPRING,EXTENSION GRIPPR 2-1/4"L SST | New OEM | Contact Us |
| 0710-739270 | CMP | Speedfam | GEARHEAD,PLANETARY INLINE 10:1 | New OEM | Contact Us |