Spare Parts

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Intertec Group取得CPS Lam 亞洲區獨家代理,可提供下列系列之設備原廠全新零組件:


 Ø   Novellus: Concept One (C1D, C1W)

 Ø   Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).

 Ø   Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.


Part Number Tool Type OEM Description Condition Offer
02-042897-00 Concept One Novellus ASSY,DEGAS MOD-DOPED New OEM Contact Us
02-042902-00 Concept One Novellus ASSY, HOIST, LOCK New OEM Contact Us
02-051164-00 Concept One Novellus ASSY,MOTOR,AC,6W New OEM Contact Us
02-053798-00 Concept One Novellus ASSY,HIM FILTER,C1-D New OEM Contact Us
02-058452-00 Concept One Novellus ASSY, DC PWR DIST, INTERNAL LPB New OEM Contact Us
02-10606-00 Concept One Novellus ASSY,PCB,HEATER MONITOR New OEM Contact Us
02-106507-00 Concept One Novellus FERRO-FLUIDIC SPINDLE New OEM Contact Us
02-111903-00 Concept One Novellus ASSY,RF FEEDTHRU New OEM Contact Us
02-119726-00 Concept One Novellus ASSY,FORK,SEQ,ANTI-DFLC,MCA New OEM Contact Us
02-121427-00 Concept One Novellus ASSY,L-TYPE SLTVLV,46X236,PM New OEM Contact Us
02-1257 GaSonics GaSonics PANEL TOP New OEM Contact Us
02-153946-00 Concept One Novellus ASSY, PANEL, OEM 750, DRIVE C1. Included: p/n 17-14426-00 PLATE, MOUNTING C1, New OEM Contact Us
02-157148-00 Concept One Novellus ASSY,PWR SPLY, CTL MOD, C1, W/70V New OEM Contact Us
02-1618 GaSonics GaSonics BRKT,PIN STANDOFF, PASSIVE BACKPLANE New OEM Contact Us
02-1627 GaSonics GaSonics BRKT,HV CAP SUPPORT,A1000 New OEM Contact Us
02-168036-00 Gasonics GaSonics ASSY, AC POWER CONTROL, CLUSTER,JAPAN New OEM Contact Us
02-1681 GaSonics GaSonics ENCLOSURE,PLASMA,RIGHT,REACTOR CENTER New OEM Contact Us
02-171654-00 GaSonics GaSonics KEY,LANYARD, SAFETY,SWITCH, D New OEM Contact Us
02-174313-00 GaSonics GaSonics ASSY,WAFER-HANDLING,YASKAWA R New OEM Contact Us
02-177007-00 GaSonics GaSonics ASSY,RF MATCH BOX,MWH5,IRIDIA New OEM Contact Us
02-177392-00 CMP Speedfam ASSY,SOLID PLTN 29 PDM,LAPED,LP CAPABLE New OEM Contact Us
02-181494-00 CMP Speedfam ASSY,END EFFECTOR,R2 New OEM Contact Us
02-2288 GaSonics GaSonics ENCLOSURE, PLASMA,LEFT REACTOR CENTER New OEM Contact Us
0225-700656 CMP Speedfam TERMINAL BLOCK,5MM 3POSN ANGLED BLUE DIN New OEM Contact Us
0225-771372 CMP Speedfam RELAY,24VDC 4 POLE New OEM Contact Us
02-257924-00 Concept One Novellus ASSY,FEEDTHRU,RF PWR,SEQUEL New OEM Contact Us
02-2585 GaSonics GaSonics PLATE, COVER, DOCKING PANEL New OEM Contact Us
02-260589-00 GaSonics GaSonics ASSY, LAMP CONTROLLER New OEM Contact Us
02-2649 Gasonics GaSonics PIN LIFT, SENSOR FLAG New OEM Contact Us
02-269278-00 GaSonics GaSonics ASSY,UNIFIED PLASMA TUBE New OEM Contact Us
02-2708 GaSonics GaSonics BRACKET, LIFT SENSOR, 6 IN PLATEN New OEM Contact Us
02-283678-00 CMP Speedfam ASSY,BRUSH PAD COND XDF STIFF New OEM Contact Us
02-2872 GaSonics GaSonics PANEL, ACCESS,UPPER-PROCESSOR FRAME New OEM Contact Us
02-2873 GaSonics GaSonics PNL ACCESS LOWER PROCESSOR New OEM Contact Us
02-2880 GaSonics GaSonics PANEL,ACCESS DOOR New OEM Contact Us
02-289945-00 Concept One Novellus ASSY, NI FEEDTHRU, PWR SHORT New OEM Contact Us
02-2902 GaSonics GaSonics SPACER, SCREW New OEM Contact Us
02-293065-00 CMP Speedfam ASSY,DISPLAY,EDGE GAP MEASUREMENT New OEM Contact Us
02-2972 GaSonics GaSonics BRACKET, SPRT, WATER-LINE, 3510A New OEM Contact Us
02-297366-00 GaSonics GaSonics ASSY,TOP CAP, CLTC New OEM Contact Us
02-297394-00 GaSonics GaSonics ASSY,CLTC,IRIDIA New OEM Contact Us
02-3019 GaSonics GaSonics PANEL LEFT BRUSHED New OEM Contact Us
02-3036 GaSonics GaSonics COVER, PRESSURE RELIEF, PROCESS CHAMBER New OEM Contact Us
02-311919-00 CMP Speedfam ASSY,PARTICLE CATCH TRAY,MV New OEM Contact Us
02-323520-00 GaSonics GaSonics ASSY,WAFER NEST, PROCESS CHAMBER, 8" New OEM Contact Us
02-3244 GaSonics GaSonics REFLECTOR, LAMP TRAY - GOLD PLATED New OEM Contact Us
02-3311 GaSonics GaSonics BRACKET, HEATER HOLDER New OEM Contact Us
02-347706-00 Concept One Novellus ASSY, C1, C2 PENDULUM VALVE INTERFACE BOX New OEM Contact Us
02-352037-00 GaSonics GaSonics ASSY,TC MODULE,TYPE K,200MM New OEM Contact Us
02-352037-00/RW GaSonics GaSonics ASSY,TC MODULE,TYPE K,200MM - Customer Core Required New OEM Contact Us
02-352472-00 CMP Speedfam ASSY,PAD BACKER,16 HOLES New OEM Contact Us
02-3567 GaSonics GaSonics COVER, JUNCTION BOX New OEM Contact Us
02-3573 GaSonics GaSonics PLATE, JUNCTION BOX, GROMMENT New OEM Contact Us
02-3574 GaSonics GaSonics BRACKET, JUNCTION BOX New OEM Contact Us
02-3659 GaSonics GaSonics COVER, SPOOL, RIGHT TAB, INTERLOCK New OEM Contact Us
02-3660 GaSonics GaSonics COVER, SPOOL, LEFT TAB, INTERLOCK New OEM Contact Us
02-3696 GaSonics GaSonics PANEL, PLASMA RIGHT CHAMBER, ACCESS New OEM Contact Us
02-3697 GaSonics GaSonics COVER, REAR ACCESS GAS INPUT BUBBLER New OEM Contact Us
02-3706 GaSonics GaSonics PANEL PLASMA,LEFT CHAMBER ACCESS New OEM Contact Us
02-377012-00 GaSonics GaSonics ASSY,150MM CLTC MODULE,.005TC,TYPE K,A1 New OEM Contact Us
02-377012-00/RW GaSonics GaSonics ASSY,150MM CLTC MODULE,.005"TC,TYPE K,A1-RW CUSTOMER CORE New OEM Contact Us
02-377013-00 Concept One Novellus PED ASSY,200MM,STD,D.3,C2ALT New OEM Contact Us
02-381217-00 CMP Speedfam ASSY,SOLID PLATEN,29 HOLE,LP,SST INSERT New OEM Contact Us
02-383160-00 Concept One Novellus ASSY,FEEDTHRU,PWR,LONG,SEQUEL New OEM Contact Us
02-383161-00 Concept One Novellus ASSY,FEEDTHRU,PWR,SHORT,SEQUEL New OEM Contact Us
02-3949 GaSonics GaSonics SUPPORT, SPOOL, LEFT PLASMA ENCLOSURE New OEM Contact Us
02-3994 GaSonics GaSonics REFLECTOR,LAMP TRAY,IRIDIA-DL New OEM Contact Us
02-3995 GaSonics GaSonics SHIELD, LAMP TRAY New OEM Contact Us
02-4124 GaSonics GaSonics REFLECTOR, W/THERMOSTAT MOUNT LAMP TRAY New OEM Contact Us
02-4136 GaSonics GaSonics ENCLOSURE, SUPPORT, SPOOL, RIGHT, PEP PLU New OEM Contact Us
02-4172 GaSonics GaSonics INSERT, ALUM, ASTEX APPLICATOR New OEM Contact Us
02-4281 GaSonics GaSonics BLADE, ATM ROBOT New OEM Contact Us
02-4282 GaSonics GaSonics COVER, TUBE New OEM Contact Us
02-4286 GaSonics GaSonics COVER, ATM ROBOT New OEM Contact Us
02-4483 GaSonics GaSonics STRAP, RF, 150MM,IRIDIA-DL New OEM Contact Us
02-460636-00 CMP Speedfam ASSY,PAD BACKING RIVETED,ADHESIVE MOD New OEM Contact Us
02-460637-00 CMP Speedfam ASSY,PAD BKR RIVET,16HOLE,CTR PLUG,ADHES New OEM Contact Us
02-460845-00 CMP Speedfam ASSY,PAD BKR,RIVETED,15 HOLES,ADHESIVE M New OEM Contact Us
02-460847-00 CMP Speedfam ASSY,PAD BACKER,16 HOLES,ADHESIVE MOD New OEM Contact Us
02-460848-00 CMP Speedfam ASSY,PAD BACKER,RIVETED,FLAT,ADHESIVE MOD New OEM Contact Us
02-462284-00 CMP Speedfam ASSY,PAD BACKER,RIVETED,25 HOLES,ADHESIV New OEM Contact Us
02-462400-00 CMP Speedfam ASSY,PAD BACKER,RIVET,16 HOLE,CTR PLUG,SLOTTED,ADHESIVE MOD New OEM Contact Us
02-4763 GaSonics GaSonics BRKT,MOUNTING,MFC New OEM Contact Us
0250-111774 CMP Speedfam SWITCH,EMERGENCY OFF New OEM Contact Us
0250-700639 CMP Speedfam SWITCH,PROXIMITY New OEM Contact Us
0250-700640 CMP Speedfam SWITCH, PROXIMITY New OEM Contact Us
0250-700641 CMP Speedfam SWITCH,SMC VACUUM New OEM Contact Us
0250-717242 CMP Speedfam BUTTON,ILLUM PUSH New OEM Contact Us
0250-718799 CMP Speedfam SWITCH,MICRO CE CERTIFIED New OEM Contact Us
0250-737505 CMP Speedfam SWITCH,PRESSURE DIGITAL 0-142 PSI New OEM Contact Us
0250-737599 CMP Speedfam SWITCH,DISCONNECT 3POLE ROTARY 20A New OEM Contact Us
0250-738366 CMP Speedfam SWITCH,SERVSWITCH 8CH VGA/KEY/MOUSE New OEM Contact Us
0250-770284 CMP Speedfam CONTACT,BLOC LMP INCNDSCNT 24VAC/DC New OEM Contact Us
0250-770286 CMP Speedfam CONTACT,BLOCK SGL W/SCRW TERM 1N/O New OEM Contact Us
0250-770288 CMP Speedfam CONTACT,BLOCK SGL W/SCRW TERM 1NC New OEM Contact Us
0250-770290 CMP Speedfam OPERATOR,PUSH SQ ILLUM WHT FLUSH DIFFUSE New OEM Contact Us
0250-770291 CMP Speedfam OPERATOR,PUSH BTN RECESSED SQ BLUE New OEM Contact Us
0250-772816 CMP Speedfam SWITCH,LOCAL/REMOTE ELECTRONIC New OEM Contact Us
02-5323-02 CMP Speedfam SPRING,BALL PIVOT,6 IN CAP New OEM Contact Us
0275-104048 CMP Speedfam SNSR,FLUID LEVEL HEAT EXCHANGER New OEM Contact Us