Spare Parts

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Intertec Group取得CPS Lam 亞洲區獨家代理,可提供下列系列之設備原廠全新零組件:


 Ø   Novellus: Concept One (C1D, C1W)

 Ø   Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).

 Ø   Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.


Part Number Tool Type OEM Description Condition Offer
109054 CMP Speedfam O-RING,210X3MM,NBR 70,PM200 New OEM Contact Us
110363 CMP Speedfam BEARING,BALL,6X19X6MM,SST,,PM200/PM300 New OEM Contact Us
168652 CMP Speedfam VALVE,THROTTLE CHECK,M5,PM200/PM300 New OEM Contact Us
196180 CMP Speedfam O-RING,6X2MM,FKM,PM200 New OEM Contact Us
200732 CMP Speedfam SWITCH,PROXIMITY,SN 1MM B, M8X1,PM200/PM New OEM Contact Us
211621 CMP Speedfam BELLOWS,HOSE,U,123 X 85MM,PM200 New OEM Contact Us
212104 CMP Speedfam BRUSH,ROUND, 40X56,PM200 New OEM Contact Us
212603 CMP Speedfam RING,V-TYPE,17.5-19MM,18MM,NBR,PM200 New OEM Contact Us
212622 CMP Speedfam O-RING,32X1.5MM,NBR 70,PM200/PM300 New OEM Contact Us
219668 CMP Speedfam PIN,DOWELL,2X10,SST New OEM Contact Us
220894 CMP Speedfam SWITCH,PROXIMITY,INDUCTIVE,PNP,PM200/PM3 New OEM Contact Us
221703 CMP Speedfam SEAL,RING,16X25 X3MM,STEEL,PM200 New OEM Contact Us
222928 CMP Speedfam VALVE,PILOT,PNEU,3/2 WAY,PM200/PM300 New OEM Contact Us
225013 CMP Speedfam VALVE,PRES RELIEF, NG 6/1/4 ,PM200 New OEM Contact Us
225092 CMP Speedfam VALVE,PRESSURE RELIEF,PM200/PM300 New OEM Contact Us
227378 CMP Speedfam VALVE,PRES RELIEF,NG 6/1/4,PM200/PM300 New OEM Contact Us
232550 CMP Speedfam FTG,TEE,T-FILTER, MAINTENANCE KIT,PM200/PM300 New OEM Contact Us
232551 CMP Speedfam VALVE,DIAPH,2PORT,A/O, 316 L, 240 BAR, P New OEM Contact Us
233097 CMP Speedfam MOTOR,1.5NM,PM200 New OEM Contact Us
235502 CMP Speedfam VALVE,DIAPH,3PORT,1/4NPT,PM200/PM300 New OEM Contact Us
238264 CMP Speedfam SHIM,UNDER FOIL,D500,10 M,PM200 New OEM Contact Us
238266 CMP Speedfam SHIM,UNDER FOIL,D500,50 M,PM200 New OEM Contact Us
238267 CMP Speedfam SHIM,UNDER FOIL,D500,100 M,PM200 New OEM Contact Us
243800 CMP Speedfam PIN,LOCATING,PEEK,PM200 New OEM Contact Us
246440 CMP Speedfam BELT,TIMING,TOOTHED,SYNCHRONOUS,PM300 New OEM Contact Us
246441 CMP Speedfam BELT, TIMING SYNCHRONOUS, L330 New OEM Contact Us
246442 CMP Speedfam BELT,TIMING,SYNCHRONOUS,L225MM,W6MM,PM200 New OEM Contact Us
246449 CMP Speedfam BELT,TIMING,W6MM,PM200 New OEM Contact Us
246469 CMP Speedfam CNTRLR, STEPPING MOTOR, 24-30V DC, 2A, PM200 New OEM Contact Us
248777 CMP Speedfam BELT,TIMING,SYNCHRONOUS,T5,L305MM,W16MM, New OEM Contact Us
950023 CMP Speedfam ASSY,PULLEY IDLER New OEM Contact Us
950179 CMP Speedfam BEARING,SPHERE,PAD,CONDITIONER New OEM Contact Us
950616 CMP Speedfam MOTOR, GEARHEAD, 6:1 New OEM Contact Us
950623 CMP Speedfam BASE,10 SLOT,120VAC,P/S New OEM Contact Us
950624 CMP Speedfam BASE,5 SLOT,120VAC,P/S New OEM Contact Us
950625 CMP Speedfam MOD.,INPUT,ANALOG VOLTAGE,4PT New OEM Contact Us
950629 CMP Speedfam MOD,OUTPUT,12/24VDC,POS,32PT New OEM Contact Us
950639 CMP Speedfam MTR,GEAR,24VDC,11.5 RAT New OEM Contact Us
950677 CMP Speedfam TIMING BELT, T5, KEVLAR New OEM Contact Us
950701 CMP Speedfam SENSOR, PROXIMITY New OEM Contact Us
950776 CMP Speedfam LOAD CELL,INTEGRAL AMP New OEM Contact Us
950777 CMP Speedfam TRANSDUCER, PRESSURE New OEM Contact Us
950973 CMP Speedfam MODULE,OUTPUT,ANALOG CURRENT New OEM Contact Us
951113 CMP Speedfam TERMINAL,PIN,TYPE II CRIMP New OEM Contact Us
951231 CMP Speedfam CABLE,POWER,USA AMP 1 New OEM Contact Us
951246 CMP Speedfam Cable, Bam to Micro I/O New OEM Contact Us
951287 CMP Speedfam CYLINDER,AIR 5/16BX1/2 ST New OEM Contact Us
951289 CMP Speedfam SWITCH,LIMIT SPST 7A New OEM Contact Us
951291 CMP Speedfam ACTUATOR,ROLLER MICRO SWITCH New OEM Contact Us
951353 CMP Speedfam FUSE,600VAC,45A New OEM Contact Us
951403 CMP Speedfam FUSE, 10A, 250V New OEM Contact Us
951407 GaSonics GaSonics FUSE,20A,500V New OEM Contact Us
951414 CMP Speedfam ASSY,CABLE,CYL. LOAD CUP #4 New OEM Contact Us
951433 CMP Speedfam ASSY,CABLE,PROXIMITY SNSR New OEM Contact Us
951462 CMP Speedfam CONN ASSY 41 CONTACTS New OEM Contact Us
951483 CMP Speedfam CABLE, MOTOR, POWER ROTATION 1 New OEM Contact Us
951484 CMP Speedfam CABLE,MOTOR POWER,ROTATION 5 New OEM Contact Us
951493 CMP Speedfam CABLE,MTR PWR,ROTATION 4 New OEM Contact Us
951544 CMP Speedfam ASSY,CABLE LOAD CELL New OEM Contact Us
951547 CMP Speedfam ASSY,SENSOR, PAD COND,ARM TABL New OEM Contact Us
951565 CMP Speedfam HINGE, POSITION New OEM Contact Us
951583 CMP Speedfam FUSE,250V,3.15A,5X20 New OEM Contact Us
951627 CMP Speedfam ASSY,CABLE,ARM 1-VAC TRANSDUCER New OEM Contact Us
951634 CMP Speedfam ASSY,CABLE ARM3 BACKFILL CNTRL New OEM Contact Us
951644 CMP Speedfam ASSY,CABLE,ARM 4-LOAD CELL New OEM Contact Us
951654 CMP Speedfam ASSY,CABLE,POWER 100 VAC,MHTA New OEM Contact Us
951681 CMP Speedfam ASSY,SNSR WAFER LOSS, ARM #1 New OEM Contact Us
951695 CMP Speedfam VALVE,PNEU. 1/4 NPT New OEM Contact Us
951734 CMP Speedfam FTG, PLUG, 1/4 NPT, SST New OEM Contact Us
951787 CMP Speedfam HOUSING, FILTER, SST New OEM Contact Us
951788 CMP Speedfam FILTER,COALESCER ELEMENT New OEM Contact Us
951814 CMP Speedfam RELAY,3POLE,24VDC COIL New OEM Contact Us
951815 CMP Speedfam RELAY,DPDT 24VDC COIL New OEM Contact Us
951844 CMP Speedfam POWER SUPPLY,120VAC,MIO New OEM Contact Us
952156 CMP Speedfam CHAIN,DRIVE,.375P,160T,PUR New OEM Contact Us
952189 CMP Speedfam DIA 9IN WB20 FILM WITH PSA II BACKING New OEM Contact Us
952216 CMP Speedfam CABLE,EXTENSION,VGA New OEM Contact Us
952221 CMP Speedfam SHIM,0.025THK,200MM,WFR CAR New OEM Contact Us
952225 CMP Speedfam SHIM,0.508THK,200MM,WFR CAR New OEM Contact Us
952314 CMP Speedfam SPINDLE UNIT NOS New OEM Contact Us
952386 CMP Speedfam HEAD,BRISTLE PAD CONDITIONER New OEM Contact Us
952523 CMP Speedfam SEAL,WAFER CARRIER New OEM Contact Us
952597 CMP Speedfam GUIDE,SIDE DOOR New OEM Contact Us
952836 CMP Speedfam ASSY,CARRIER HOME GAUGE New OEM Contact Us
952880 CMP Speedfam RETAINER,WAFER SEAL New OEM Contact Us
952928 CMP Speedfam VALVE,3WAY,PNEU,SLURRY New OEM Contact Us
952965 CMP Speedfam LABEL,952959 New OEM Contact Us
953091 CMP Speedfam SPRING, TORSION, LEFT HELIX New OEM Contact Us
953092 CMP Speedfam SPRING, TORSION, RIGHT HELIX New OEM Contact Us
953113 CMP Speedfam ROLLER,DOOR DELRIN New OEM Contact Us
953394 CMP Speedfam VALVE PNEU 16 STATION New OEM Contact Us
953439 CMP Speedfam VALVE,PFA,440HP,1/2FTHD New OEM Contact Us
953511 CMP Speedfam PUMP,HEAD,STANDARD L/S New OEM Contact Us
953643 CMP Speedfam VALVE,HPV DIAPHRAGM,PNEU,2-WAY New OEM Contact Us
953662 Speedfam Speedfam VALVE,ASSY,BACKFILL,BLOWOFF New OEM Contact Us
953663 Speedfam Speedfam VALVE,ASSY,VACUUM New OEM Contact Us
954178 CMP Speedfam SPRING New OEM Contact Us
954183 CMP Speedfam CABLE,POWER,10FT New OEM Contact Us
954239 CMP Speedfam CABLE,SIGNAL,10FT New OEM Contact Us
954982 CMP Speedfam ASSY,COUPLING New OEM Contact Us