Spare Parts

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Intertec Group取得CPS Lam 亞洲區獨家代理,可提供下列系列之設備原廠全新零組件:


 Ø   Novellus: Concept One (C1D, C1W)

 Ø   Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).

 Ø   Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.


Part Number Tool Type OEM Description Condition Offer
01-5405 GaSonics GaSonics BAR, HOLDING, ATM ROBOT New OEM Contact Us
01-5407 GaSonics GaSonics PLATE, TOP, ATM ROBOT New OEM Contact Us
01-5417 GaSonics GaSonics SHOWER HEAD New OEM Contact Us
01-5418 GaSonics GaSonics BASE, SLIDER, ATM ROBOT New OEM Contact Us
01-5426 GaSonics GaSonics ARM CAM New OEM Contact Us
01-5430 GaSonics GaSonics BASE, MOTOR CENTERING New OEM Contact Us
01-5431 GaSonics GaSonics CASE, LIP, SEAL New OEM Contact Us
01-5432 GaSonics GaSonics PULLEY, I New OEM Contact Us
01-5435 GaSonics GaSonics CLAMP, CENTERING New OEM Contact Us
01-5436 GaSonics GaSonics PLATE, MOTOR New OEM Contact Us
01-5438 GaSonics GaSonics HOLDER, LIP SEAL New OEM Contact Us
01-5441 GaSonics GaSonics CUP, LIP SEAL New OEM Contact Us
01-5451 Gasonics GaSonics FLEXURE New OEM Contact Us
01-5470 GaSonics GaSonics SHAFT, MAIN CENTERING New OEM Contact Us
01-5477 GaSonics GaSonics BAR, LEFT,CENTERING New OEM Contact Us
01-5553 GaSonics GaSonics SET SCREW, M4X.25,ALUMINUM New OEM Contact Us
01-5813 GaSonics GaSonics HOLDER, LIFT PIN,IRIDIA-DL New OEM Contact Us
01-5821 GaSonics GaSonics WINDOW, V-PORT,TOP, TRANSFER CHAMBER, GAMMA 2100 New OEM Contact Us
01-5978 GaSonics GaSonics SPACER, RING, SCOPE,IRIDIA-DL New OEM Contact Us
01-5986 GaSonics GaSonics RING LIFT, PIN 200MM, IRIDIA-DL New OEM Contact Us
01-5988 GaSonics GaSonics RETAINER, LIFT PIN,IRIDIA-DL New OEM Contact Us
0175-700066 CMP Speedfam CB, 3AMP New OEM Contact Us
02-00008-00 Concept One Novellus KIT,GAS DISP PLT ADJ New OEM Contact Us
02-00012-00 Concept One Novellus ASSY,PNEU CNTRL New OEM Contact Us
02-00055-00 Concept One Novellus ASSY,FOOT SWITCH New OEM Contact Us
02-00055-01 Concept One Novellus ASSY,GUARDED CVR.FT.SW.CONTLR New OEM Contact Us
02-00072-00 Concept One Novellus ASSY,NITRIDE TERM,PNL New OEM Contact Us
02-00075-00 Concept One Novellus ASSY,CASS DOOR New OEM Contact Us
02-00076-00 Concept One Novellus ASSY,NITRIDE FAC,PNL REV. AG New OEM Contact Us
02-00079-00 Concept One Novellus ASSY,HF CHOKE New OEM Contact Us
02-00080-00 Concept One Novellus ASSY,HTR ISO FILTER New OEM Contact Us
02-00085-00 Concept One Novellus ASSY,INDUCTOR,420UH 30A New OEM Contact Us
02-00090-00 Concept One Novellus PCB, ASSY HEATER FILTER New OEM Contact Us
02-00094-00 Concept One Novellus ASSY,PNEU CNTRL 34VLV New OEM Contact Us
02-00097-00 Concept One Novellus ASSY,TC BELLOWS New OEM Contact Us
02-00098-00 Concept One Novellus KIT,TEOS CONTROLLER MTG. New OEM Contact Us
02-00103-00 Concept One Novellus GAS INLET 200mm FACILITY PANEL New OEM Contact Us
02-00105-00 Concept One Novellus KIT, CAPAC. WITH JUMPER New OEM Contact Us
02-00119-00 Concept One Novellus ASSY,GENEVA DRIVE New OEM Contact Us
02-00150-00 Concept One Novellus PCB, ASSY POWER BOARD New OEM Contact Us
02-00163-00 Concept One Novellus ASSY,FORK,CERAMIC New OEM Contact Us
02-00164-00 Concept One Novellus ASSY,FORK,CERAMIC,200mmJ New OEM Contact Us
02-00167-00 Concept One Novellus ASSY,RF SHUNT 2 CAP'S New OEM Contact Us
02-00170-00 Concept One Novellus ASSY,AMP-WOPS(200mm) New OEM Contact Us
02-00171-00 Concept One Novellus KIT,WOPS INSTALL (200MM) New OEM Contact Us
02-00195-01 Concept One Novellus ASSY, TEMP CONTROLLER, WATLOW New OEM Contact Us
02-00199-00 Concept One Novellus ASSY,INDUCTOR 150MH RF DIST. New OEM Contact Us
02-00205-00 Concept One Novellus ASSY,FEEDTHRU New OEM Contact Us
02-00206-00 Concept One Novellus ASSY,TC RF FILTER,"E" TYPE New OEM Contact Us
02-00215-00 Concept One Novellus ASSY,GENEVA DRIVE 200MM New OEM Contact Us
02-00216-00 Concept One Novellus PCA, TC FILTER New OEM Contact Us
02-00230-00 Concept One Novellus POWER INLET 200mm FACILITY PANEL New OEM Contact Us
02-00269-00 Concept One Novellus ASSY, ONE ARM ROBOT New OEM Contact Us
02-00269-00RW Concept One Novellus COMPLETE REWORK: ASSY, ONE ARM ROBOT New OEM Contact Us
02-00279-01 Concept One Novellus ASSY, MAIN AC BOX C1-DIELECT New OEM Contact Us
02-00315-00 Concept One Novellus ASSY,SENSE PIN PCB New OEM Contact Us
02-00315-01 Concept One Novellus ASSY,SENSE PIN PCB New OEM Contact Us
02-00324-00 Concept One Novellus KIT,24V,TEOS,HTR New OEM Contact Us
02-00330-00 Concept One Novellus ASSY,SENSE PIN BREAKOUT BC New OEM Contact Us
02-00332-00 Concept One Novellus ASSY,DEGAS MOD New OEM Contact Us
02-00333-00 Concept One Novellus CHANGE ASSY PLTFRM 150MM New OEM Contact Us
02-00343-01 Concept One Novellus ASSY,SNSR,HARN 25.5" New OEM Contact Us
02-00343-02 Concept One Novellus ASSY,SNSR,HARN 10.0 New OEM Contact Us
02-00343-03 Concept One Novellus ASSY,SNSR,HARN 17.5 New OEM Contact Us
02-00343-04 Concept One Novellus ASSY,SNSR,HARN 26.5 New OEM Contact Us
02-00349-00 Concept One Novellus ASSY,OPT PLATFORM,200mm New OEM Contact Us
02-00350-00 Concept One Novellus KIT ASSY,COOLING STATION New OEM Contact Us
02-00350-CPS Concept One Novellus COOL STATION WITH LARGE LEXAN PLATE New OEM Contact Us
02-00355-00 Concept One Novellus ASSY,DEGAS MOD-DOPED New OEM Contact Us
02-00392-00 Concept One Novellus ASSY,UPPER PCA OPTICAL New OEM Contact Us
02-00393-05 Concept One Novellus ASSY,COAX OPT.SNSR 23.75 New OEM Contact Us
02-00393-06 Concept One Novellus ASSY,COAX OPT,SNSR 13.75 New OEM Contact Us
02-00394-00 Concept One Novellus KIT,COOLING STATION PARALLEL New OEM Contact Us
02-00395-00 Concept One Novellus ASSY,PLATFORM,200mm (PLASTIC) New OEM Contact Us
02-00397-00 Concept One Novellus ASSY,SNSR,HARN PLASTIC New OEM Contact Us
02-00399-00 Concept One Novellus ASSY,HTR ISO FILTER New OEM Contact Us
02-00402-02 Concept One Novellus ASSY,SNSR,HARN 10.0" New OEM Contact Us
02-00402-03 Concept One Novellus New OEM Contact Us
02-00403-00 Concept One Novellus ASSY,PLATFORM,150mm,PLASTIC New OEM Contact Us
02-00419-20 Concept One Novellus KIT,200 MM WAFER SIZE POLY New OEM Contact Us
02-00423-99 Concept One Novellus ASSY,EXT PLTFRM,CORE New OEM Contact Us
02-00461-00 Concept One Novellus KIT,ALIGNER,TOOLS,C-1 SYS New OEM Contact Us
02-00463-00 Concept One Novellus TOOL KIT, START UP New OEM Contact Us
02-00470-01 Concept One Novellus ASSY,PIN LIFT 1&2 New OEM Contact Us
02-00470-02 Concept One Novellus ASSY,PIN LIFT 3&4 New OEM Contact Us
02-00470-03 Concept One Novellus ASSY,PIN LIFT 5+BLANK New OEM Contact Us
0200-770258 CMP Speedfam CNTOR,208V 100A 24V COIL New OEM Contact Us
02-021422-00 Concept One Novellus ASSY, DC PWR SPLY I/F BOARD New OEM Contact Us
02-024645-00 Concept One Novellus ASSY,INTFC.BOX,SLO BKFILL.PR New OEM Contact Us
02-027364-00 Concept One Novellus ASSY,LL,SIDE BEARING New OEM Contact Us
02-029392-00 Concept One Novellus ASSY,UPPER AC BOX C-1 DIEL New OEM Contact Us
02-029393-00 Concept One Novellus ASSY,LWR AC BOX C1-D & W New OEM Contact Us
02-032454-00 Concept One Novellus KIT,200MM GAS DIST PLATE ADJ. New OEM Contact Us
02-032615-00 Concept One Novellus PCA,TERM PNL,C1,CVD-D New OEM Contact Us
02-033134-00 Concept One Novellus ASSY,PED,196.8mm,D,SEMI New OEM Contact Us
02-033134-01 Concept One Novellus ASSY,PED,200MM MOER,D.3,SEMI New OEM Contact Us
02-033196-00 Concept One Novellus KIT,WINDOW,SAPPHIRE,SNGL PORT New OEM Contact Us
02-033394-00 Concept One Novellus ASSY,PED,200mm,D,STD SEMI New OEM Contact Us
02-033877-00 Concept One Novellus KIT,HEATER INSTALL,C1-150 New OEM Contact Us
02-033920-00 Concept One Novellus ASSY, PED, 200MM, D, STD JEIDA New OEM Contact Us