Spare Parts

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Intertec Group取得CPS Lam 亞洲區獨家代理,可提供下列系列之設備原廠全新零組件:


 Ø   Novellus: Concept One (C1D, C1W)

 Ø   Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).

 Ø   Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.


Part Number Tool Type OEM Description Condition Offer
01-3458 GaSonics GaSonics BASE, LIFT/TILT New OEM Contact Us
01-3461 GaSonics GaSonics CAM ARM, LIFT TILT New OEM Contact Us
01-3462 GaSonics GaSonics SHAFT, CAM New OEM Contact Us
01-3464 GaSonics GaSonics SHAFT, SUPPORT CAM,MECHANISM New OEM Contact Us
01-3667 GaSonics GaSonics HOLDER, PLASMA DETECTOR, CLEAN-DL New OEM Contact Us
01-3802 GaSonics GaSonics BLOCK, LOCK New OEM Contact Us
01-3806 GaSonics GaSonics CLAMP, GAS-INLET New OEM Contact Us
01-3831 GaSonics GaSonics FASTENER .25 CLAMP New OEM Contact Us
01-3924 GaSonics GaSonics WAFER SUPPORT 8 IN New OEM Contact Us
01-3943 GaSonics GaSonics PLATE, ADAPTOR, AL New OEM Contact Us
01-3944 GaSonics GaSonics FLANGE, AL, PRESSURE PROCESS CHAMBER New OEM Contact Us
01-3999 GaSonics GaSonics PLATE, SUPPORT New OEM Contact Us
01-4001 GaSonics GaSonics CHAMBER, BOTTOM, DDP, PEP New OEM Contact Us
01-4012 GaSonics GaSonics BLOCK, INSULATING, 2 POSITION New OEM Contact Us
01-4016 GaSonics GaSonics COVER, 2 POSITION, BLOCK, BOTTOM New OEM Contact Us
01-4043 GaSonics GaSonics CLAMP, NUT New OEM Contact Us
01-4044 GaSonics GaSonics SPACER,NUT, MATCHED SET New OEM Contact Us
01-4058 GaSonics GaSonics FLANGE New OEM Contact Us
01-4060 GaSonics GaSonics ADAPTOR LIFT PIN, DDP New OEM Contact Us
01-4068 GaSonics GaSonics GUIDE BUSHING New OEM Contact Us
01-4075 GaSonics GaSonics HOLLOW PIN-RETAINER New OEM Contact Us
01-4076 GaSonics GaSonics CLAMP, FEED-THRU New OEM Contact Us
01-4096 GaSonics GaSonics STRAP, RF PEP DDP New OEM Contact Us
01-4122 GaSonics GaSonics SUPPORT, SPOSUPPORT, SPOOL, New OEM Contact Us
01-4123 GaSonics GaSonics CLAMP, SHIELD, RF, HOSE New OEM Contact Us
01-4282 GaSonics GaSonics BASE, BRAZE PLATEN New OEM Contact Us
01-4323 GaSonics GaSonics COVER TOP PLASMA SOURCE, CLEAN-DL New OEM Contact Us
01-4327 GaSonics GaSonics CAVITY, PLASMA SOURCE, CLEAN-DL New OEM Contact Us
01-4334 GaSonics GaSonics SHAFT, LIFT PIN,CLTC COMPATIBLE New OEM Contact Us
01-4336 GaSonics GaSonics BLOCK, TRAVEL ADJUSTER New OEM Contact Us
01-4337 GaSonics GaSonics PLATE, ACTUATOR,IRIDIA-DL New OEM Contact Us
01-4338 GaSonics GaSonics NUT, ACTUATOR EXTENSION New OEM Contact Us
01-4339 GaSonics GaSonics NUT, 3MM QUARTZ SEAL New OEM Contact Us
01-4340 GaSonics GaSonics BRACKET VERTICAL SUPPORT New OEM Contact Us
01-4418 GaSonics GaSonics RESTRICTOR, FLOW,CHAMBER, CLEAN-DL New OEM Contact Us
01-4425 GaSonics GaSonics STOP, ADJUSTABLE,7/16 New OEM Contact Us
01-4488 GaSonics GaSonics NUT, CAP, CLTC New OEM Contact Us
01-4491 GaSonics GaSonics CAP, TOP, CLTC New OEM Contact Us
01-4500 GaSonics GaSonics RING, LIFT, LOCKING New OEM Contact Us
01-4552 GaSonics GaSonics BEARING, LINEAR New OEM Contact Us
01-4590 GaSonics GaSonics RETAINER, LAMP TRAY,4 WINDOWS New OEM Contact Us
01-4611 GaSonics GaSonics PLATE, MOUNTING ACTUATOR, IRIDIA New OEM Contact Us
01-4695 GaSonics GaSonics PLATE, CONNECTOR New OEM Contact Us
01-4697 GaSonics GaSonics PLATE, COUPLING New OEM Contact Us
01-4701 GaSonics GaSonics BOLT, COUPLING PLATE New OEM Contact Us
01-4709 GaSonics GaSonics FLANGE, CLTC FEED-THRU, CHAMBER,IRIDIA-D New OEM Contact Us
01-4713 GaSonics GaSonics SPACER TUBE,URETHANE SPRING, PLASMA GAS New OEM Contact Us
01-4715 GaSonics GaSonics BEZEL New OEM Contact Us
01-4738 GaSonics GaSonics SHAFT, LIFT PIN,CLTC, IRIDIA-DL New OEM Contact Us
01-4765 GaSonics GaSonics Clamp Lift Ring New OEM Contact Us
01-4780 GaSonics GaSonics LOCATOR,WAFER,CERAMIC New OEM Contact Us
01-4781 GaSonics GaSonics SUPPORT, SPOOL, PEP PLUS New OEM Contact Us
01-4812 GaSonics GaSonics RETAINER, WINDOW,LAMP TRAY, IRIDIA-DL New OEM Contact Us
01-4867 GaSonics GaSonics CLAMP, HEATER PLATEN, PEP PLUS New OEM Contact Us
01-4873 GaSonics GaSonics RING, LIFT, PEP PLUS New OEM Contact Us
01-4926 Gasonics GaSonics COVER, SEAL LL New OEM Contact Us
01-4928 Gasonics GaSonics SEAL, FIRST, LL New OEM Contact Us
01-4929 Gasonics GaSonics SEAL, SECOND, LL New OEM Contact Us
01-4938 Gasonics GaSonics INSERT, CERAMIC, RF New OEM Contact Us
01-4951 GaSonics GaSonics HOUSING, IDLER,BLADE New OEM Contact Us
01-4978 GaSonics GaSonics SHAFT, ENCODER, ATM ROBOT New OEM Contact Us
01-4992 GaSonics GaSonics CLAMP, PIN, RO New OEM Contact Us
01-4993 GaSonics GaSonics PLUG, RF New OEM Contact Us
01-4997 GaSonics GaSonics BAR, TENSIONER BLADE, ATM ROBOT New OEM Contact Us
01-4999 GaSonics GaSonics PIN,OUTER,RIGHT,ROTATION New OEM Contact Us
01-5006 GaSonics GaSonics PIN,OUTER,LEFT,ROTATION New OEM Contact Us
0150-109900 CMP Speedfam MTR,PAD OSCILLATOR K32V New OEM Contact Us
0150-110931 CMP Speedfam MTR, WAFER HEAD UPPER LEFT New OEM Contact Us
0150-110932 CMP Speedfam MTR, WAFER HEAD UPPER RIGHT New OEM Contact Us
0150-110983 CMP Speedfam MTR,DRIVE W/HUB 776 R1/R2 SM HOUSING New OEM Contact Us
0150-111665 CMP Speedfam MTR,5PHASE STEPPER 60MM 10:1 New OEM Contact Us
0150-111675 CMP Speedfam Driver, Stepper 5PH 24VDC New OEM Contact Us
0150-111717 CMP Speedfam PWR SUPPLY,5VDC 4AMP New OEM Contact Us
0150-700182 CMP Speedfam DRIVE,SLURRY MTR New OEM Contact Us
0150-700184 CMP Speedfam DRIVER,STEP MTR PAD CONDITIONER New OEM Contact Us
0150-700280 CMP Speedfam GENERATOR,VACUUM New OEM Contact Us
0150-701438 CMP Speedfam MTR,PAD CONDITIONER STEPPER New OEM Contact Us
0150-727165 CMP Speedfam MTR,MOD PUMP New OEM Contact Us
0150-737467 CMP Speedfam MTR,AC SERVO UL SGM02U3B4L New OEM Contact Us
0150-737502 CMP Speedfam MOTOR,STEPPER NEMA34 POWERPAC New OEM Contact Us
0150-737612 CMP Speedfam DRIVER,SERVO BRUSHLESS B30A8 New OEM Contact Us
0150-770143 CMP Speedfam MTR,EURO LOWER MP2 & 4 New OEM Contact Us
0150-770144 CMP Speedfam MTR,EURO LOWER MP1 & 3 New OEM Contact Us
0150-770147 CMP Speedfam MTR,EURO UPPER MP1 & 3 New OEM Contact Us
0150-770148 CMP Speedfam MTR,EURO UPPER MP2 & 4 New OEM Contact Us
0150-770249 CMP Speedfam GENERATOR,776 AV SERIES New OEM Contact Us
0150-770255 CMP Speedfam PWR SUPPLY,776 24V/7.2A/ECASE New OEM Contact Us
01-5179 GaSonics GaSonics STEM, BLADE MTG.,BLADE New OEM Contact Us
01-5184 GaSonics GaSonics CTR, PAD C New OEM Contact Us
01-5323 GaSonics GaSonics CTR, PAD A New OEM Contact Us
01-5346 GaSonics GaSonics CTR, PAD, B New OEM Contact Us
01-5361 GaSonics GaSonics PLATE,COOLING STATION,PEP New OEM Contact Us
01-5362 GaSonics GaSonics HOLDER, TUBE, RF New OEM Contact Us
01-5369 GaSonics GaSonics CASTING, IDLER,BLADE New OEM Contact Us
01-5376 GaSonics GaSonics TENSIONER, BLADE New OEM Contact Us
01-5392 GaSonics GaSonics STEM, ATM ROBOT New OEM Contact Us
01-5393 GaSonics GaSonics BLADE, BASE, ATM ROBOT New OEM Contact Us
01-5394 GaSonics GaSonics ROD, INDEX, ATM ROBOT New OEM Contact Us
01-5396 Gasonics GaSonics SHOWER HEAD, GDP 200MM, New OEM Contact Us
01-5399 GaSonics GaSonics VACUUM CUP,TITLE#2, ATM ROBOT New OEM Contact Us