Spare Parts

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Intertec Group取得CPS Lam 亞洲區獨家代理,可提供下列系列之設備原廠全新零組件:


 Ø   Novellus: Concept One (C1D, C1W)

 Ø   Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).

 Ø   Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.


Part Number Tool Type OEM Description Condition Offer
973427 CMP Speedfam ASSY,2 STATION MANF ORBITAL New OEM Contact Us
973429 CMP Speedfam ASSY,3STATION MANF ORBITAL New OEM Contact Us
973529 CMP Speedfam RING,CLAMP LOWER SST#5 WFR MODL 316L SST New OEM Contact Us
973835 CMP Speedfam MTR,R4 UP/DN New OEM Contact Us
973836 CMP Speedfam BRAKE,R4 UP/DN New OEM Contact Us
973853 CMP Speedfam SPRING,REPLMNT EQPT ROBOT WRIST HOUSING New OEM Contact Us
974070 CMP Speedfam KIT,ALIGNMENT TOOL PAD New OEM Contact Us
974083 CMP Speedfam FILTER,AIR LARGE BOWL New OEM Contact Us
974084 CMP Speedfam FILTER,AIR MEDIUM BOWL New OEM Contact Us
974113 CMP Speedfam PLATE,WAFER MODL 316L SST W/SNSR HOLE New OEM Contact Us
974133 CMP Speedfam GEARHEAD,RIGHT ANGLE 100:1RATIO 32MM New OEM Contact Us
974324 CMP Speedfam CONNECTOR,3CNDCT 30VAC 100MHZ New OEM Contact Us
974325 CMP Speedfam CABLE,3METER AMPL New OEM Contact Us
974326 CMP Speedfam ASSY,MECHANICAL PAD COND XDF New OEM Contact Us
974360 CMP Speedfam BEARING,6804ZZ(SUS) New OEM Contact Us
974361 CMP Speedfam BEARING,6807ZZ New OEM Contact Us
974507 CMP Speedfam CLAMP,END SHAFT LH PAD COND RIGID XDF New OEM Contact Us
974512 CMP Speedfam C/A, 15RACK2 SLOT2 I/O OUTPUT AB New OEM Contact Us
974513 CMP Speedfam C/A, 15RACK2 SLOT1 I/O INPUT AB New OEM Contact Us
974514 CMP Speedfam C/A, 15RACK2 SLOT1 I/O INPUT CD New OEM Contact Us
974517 CMP Speedfam C/A, I/O INTERCONNECT MIO New OEM Contact Us
974582 CMP Speedfam SCRW,SET 1/4-20X5/16 W/.040 316 SST New OEM Contact Us
974583 CMP Speedfam SCRW,SET CUP 1/4-20X5/16 W/.040 TEFLON New OEM Contact Us
974607 CMP Speedfam EXTENSION, TRIP-FLAT WFR SNSR ACTIVE WAND New OEM Contact Us
974683 CMP Speedfam ASSY,CABLE FEMALE ERU TO AMP New OEM Contact Us
974689 CMP Speedfam SNSR,CAPACITIVE 12M 8MM USHLD TEFLON New OEM Contact Us
974884 CMP Speedfam C/A,SENSOR ERU New OEM Contact Us
974886 CMP Speedfam ASSY,SNSR CAPT 12M 8MM USHLD TEFLON New OEM Contact Us
974887 CMP Speedfam BOOT,ELECTRICAL ROTARY UNION New OEM Contact Us
974923 CMP Speedfam FINGER,TALL ACTIVE WAND .060 New OEM Contact Us
974967 CMP Speedfam ASSY,MANIFOLD 3NOZZLE New OEM Contact Us
975001 CMP Speedfam NOZZLE,SPRAY 1/8NPTX1 316SST New OEM Contact Us
975002 CMP Speedfam NOZZLE,SPRAY 1/8NPT #5 316SST New OEM Contact Us
975003 CMP Speedfam FTG,ADJUSTABLE BALL 1/8NPTX1/8NPT 316SST New OEM Contact Us
975377 CMP Speedfam SNSR,PROX 8MMDIA 2MM RNG NPN 3WIRE New OEM Contact Us
975700 CMP Speedfam PIN,YOKE DRIVE LINE POLISH HEAD New OEM Contact Us
975765 CMP Speedfam ASSY,ROLLER TYPE A New OEM Contact Us
975843 CMP Speedfam MANIFOLD,VALVE 4PORT 1/2" New OEM Contact Us
975979 CMP Speedfam PROTECTOR,GAUGE 1/2T MALE X 1/2T FEM New OEM Contact Us
976007 CMP Speedfam SHIELD,EXTENDED SPRAY RING NOTCHED New OEM Contact Us
976241 CMP Speedfam PLATE,SPACER BRUSH XDF New OEM Contact Us
976267 CMP Speedfam ASSY,BRUSH PAD CONDITIONER XDF New OEM Contact Us
976499 CMP Speedfam BEARING,DDL-149022 New OEM Contact Us
976706 CMP Speedfam CNTRLR,I/O B3000-B New OEM Contact Us
976744 CMP Speedfam RFK,REPLACE OBSOLETE LD/UNLD SWITCH New OEM Contact Us
976854 CMP Speedfam SHAFT,ADAPTER APM New OEM Contact Us
976855 CMP Speedfam KEY,3/16SQ +.000/-.002 .5L 316SST New OEM Contact Us
976858 CMP Speedfam SHAFT,DRIVE ENDPOINT & APM New OEM Contact Us
976918 CMP Speedfam CNTRLR,INDEX/DR 7.9A 115V V2.060 New OEM Contact Us
977055 CMP Speedfam CNTRLR,FLOW 0-125ML/MIN W/12' CABLE New OEM Contact Us
977056 CMP Speedfam CONTROLLER,FLOW 0-250ML/MIN W/12' CABLE New OEM Contact Us
977059 CMP Speedfam BELT,BRUSH UPPER ARM 7700 New OEM Contact Us
977061 CMP Speedfam BELT,BRUSH UPPER DRIVE 7700 New OEM Contact Us
977062 CMP Speedfam BELT,BRUSH LOWER DRIVE 7700 New OEM Contact Us
977081 CMP Speedfam ASSY,TENSIONER UPPER ARM 7700 New OEM Contact Us
977596 CMP Speedfam CABLE,24AWG 4PAIR 25' CAT5 New OEM Contact Us
977672 CMP Speedfam ASSY,POLISH HEAD SOLID PLATEN New OEM Contact Us
977922 CMP Speedfam WELDMENT,CLAMP V-BAND REINF LATCH 316SST New OEM Contact Us
978101 CMP Speedfam MANIFOLD,CHEM DISTRIBUTION TEFLON New OEM Contact Us
978366 CMP Speedfam WELDMENT,COVER TOP XDF MV New OEM Contact Us
978367 CMP Speedfam BASE,COVER TOP XDF MV New OEM Contact Us
978368 CMP Speedfam ASSY, SHIELD ARM XDF MV New OEM Contact Us
978371 CMP Speedfam SEAL,SHIELD ARM XDF MV New OEM Contact Us
978417 CMP Speedfam DIAPHRAGM,SLURRY .074THK EPDM New OEM Contact Us
978559 CMP Speedfam FAN,MTR UNIT REPLACEMENT New OEM Contact Us
978581 CMP Speedfam SPACER,EGEE GRIP SNSR 200MM New OEM Contact Us
978588 CMP Speedfam ASSY,EGEE OPTIONAL SENSORS 200MM New OEM Contact Us
978605 CMP Speedfam C/A,EGEE SENSOR OPTION1 200MM New OEM Contact Us
978647 CMP Speedfam CARD,4PORT RS-232 INTERFACE New OEM Contact Us
978687 CMP Speedfam MANF,SLURRY 29HOLE PDM New OEM Contact Us
978697 CMP Speedfam POST, FRAME OUTSIDE CHASE SIDE R 200MM New OEM Contact Us
978703 CMP Speedfam CBL ASSY,LONGVIEW 200MM New OEM Contact Us
978706 CMP Speedfam C/A,SYSCON 200MM New OEM Contact Us
978721 CMP Speedfam BRKT,2-CH SPLITTER 200MM New OEM Contact Us
978722 CMP Speedfam BRKT,LONGVIEW 200MM New OEM Contact Us
978742 CMP Speedfam ASSY,EGEE W/SENSORS 200MM New OEM Contact Us
978754 CMP Speedfam DIAPHRAGM,WEAR RING RWR New OEM Contact Us
978756 CMP Speedfam RING,CLAMP LOWER #1 W/TEFLON 3.1A New OEM Contact Us
978852 CMP Speedfam 16.00SCREW,SET 4-40 X .75 MOD New OEM Contact Us
978895 CMP Speedfam PIN, GUIDE EGEE 316SST 200MM New OEM Contact Us
978896 CMP Speedfam PIN,MOUNT EGEE 316SST 200MM New OEM Contact Us
979116 CMP Speedfam VALVE, SELENOID 3WAY NC 24VDC New OEM Contact Us
979227 CMP Speedfam SHELF LOWER New OEM Contact Us
979228 CMP Speedfam SHELF UPPER New OEM Contact Us
979382 CMP Speedfam CABLE,SPECTROMETER TRIGGER CONTROL 9PIN New OEM Contact Us
979638 CMP Speedfam MTR,STEPPER 500 LINE ENCODER New OEM Contact Us
979987 CMP Speedfam COLLAR,THRU BRUSH 200MM New OEM Contact Us
01-4620 GaSonics GaSonics CLAMP, NUT PLATEN 150mm New OEM Contact Us
00-672057-00 CMP Speedfam PACK,20 WAFER CLIPS New OEM Contact Us
0100-101663 CMP Speedfam AMPL,BRUSH SERVO New OEM Contact Us
0100-700045 CMP Speedfam BRICK,DISCRETE New OEM Contact Us
0100-700359 CMP Speedfam MODULE,INPUT ANALOG 4-20MA New OEM Contact Us
0100-700360 CMP Speedfam MODULE,INPUT PLC KVC-16X New OEM Contact Us
0100-700363 CMP Speedfam MODULE,OUTPUT ANALOG 0-10V New OEM Contact Us
0100-700364 CMP Speedfam MODULE,PLC PWR DISTRIB New OEM Contact Us
0100-717408 CMP Speedfam BRICK,ANALOG New OEM Contact Us
0100-737852 CMP Speedfam MODULE,OUTPUT ANALOG 4-20MA MISTIC New OEM Contact Us
01-0196-01 GaSonics GaSonics BRKT,MOTOR PIVOT New OEM Contact Us
01-0197-01 GaSonics GaSonics ROLLER,CORE New OEM Contact Us
01-0251-01 CMP Speedfam ROLLER, HARD New OEM Contact Us