Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 967002 | CMP | Speedfam | NUT,ADJUST 7700J | New OEM | Contact Us |
| 967003 | CMP | Speedfam | PLATE,KEY 7700J | New OEM | Contact Us |
| 967004 | CMP | Speedfam | ROLLER, HOLDER 1 7700J | New OEM | Contact Us |
| 967005 | CMP | Speedfam | WASHER, FLAT 2 7700J | New OEM | Contact Us |
| 967006 | CMP | Speedfam | COLLAR (B) 7700J | New OEM | Contact Us |
| 967007 | CMP | Speedfam | SHAFT,ROLLER 7700J | New OEM | Contact Us |
| 967008 | CMP | Speedfam | COVER,SEAL 7700J | New OEM | Contact Us |
| 967009 | CMP | Speedfam | HOLDER,SEAL 7700J | New OEM | Contact Us |
| 967010 | CMP | Speedfam | ROLLER, IDLING 1 770J | New OEM | Contact Us |
| 967011 | CMP | Speedfam | PLATE,RING 7700J | New OEM | Contact Us |
| 967040 | CMP | Speedfam | PIN,HINGE | New OEM | Contact Us |
| 967041 | CMP | Speedfam | BRKT,HINGE | New OEM | Contact Us |
| 967042 | CMP | Speedfam | BLOCK,HINGE 2 | New OEM | Contact Us |
| 967043 | CMP | Speedfam | SCRW,BOWL (B) 7700J | New OEM | Contact Us |
| 967044 | CMP | Speedfam | BLOCK,HINGE 1 | New OEM | Contact Us |
| 967045 | CMP | Speedfam | HANDLE,A | New OEM | Contact Us |
| 967046 | CMP | Speedfam | COVER,SUB (SRD-02) | New OEM | Contact Us |
| 967047 | CMP | Speedfam | COVER,SUB (SRD-01) | New OEM | Contact Us |
| 967048 | CMP | Speedfam | COVER,SUB (BU2-02) | New OEM | Contact Us |
| 967049 | CMP | Speedfam | COVER,SUB (BU2-01) | New OEM | Contact Us |
| 967050 | CMP | Speedfam | COVER,SUB (BU1-02) | New OEM | Contact Us |
| 967051 | CMP | Speedfam | COVER,SUB (BU1-01) | New OEM | Contact Us |
| 967066 | CMP | Speedfam | PROCESS,CHAMBER 7700J | New OEM | Contact Us |
| 967173 | CMP | Speedfam | COVER, SENSOR, SRD, 7700J | New OEM | Contact Us |
| 967174 | CMP | Speedfam | COVER, SENSOR 2 7700J | New OEM | Contact Us |
| 967202 | CMP | Speedfam | WSHR,FLAT | New OEM | Contact Us |
| 967231 | CMP | Speedfam | HOOD, UPPER 7700J | New OEM | Contact Us |
| 967251 | CMP | Speedfam | ARM,CHUCK R4 LH & RH | New OEM | Contact Us |
| 967879 | CMP | Speedfam | RING,CLAMP UPPER #4 WFR MODL MACH PLSTC | New OEM | Contact Us |
| 967881 | CMP | Speedfam | BRKT,MOUNT SERF SWITCH MV | New OEM | Contact Us |
| 967901 | CMP | Speedfam | RING,CLAMP UPPER #1 WFR MODL MACH PLSTC | New OEM | Contact Us |
| 967902 | CMP | Speedfam | RING,CLAMP UPPER #2 WFR MODL MACH PLSTC | New OEM | Contact Us |
| 967903 | CMP | Speedfam | RING,CLAMP UPPER #3 WFR MODL MACH PLSTC | New OEM | Contact Us |
| 967983 | CMP | Speedfam | FUNNEL,HOSE MV | New OEM | Contact Us |
| 968052 | CMP | Speedfam | CAP,CLAMP DRIVELINE COUPLING 676/776 | New OEM | Contact Us |
| 968073 | CMP | Speedfam | AMPL,SERVSWITCH EXTENDER REV4 | New OEM | Contact Us |
| 968177 | CMP | Speedfam | PROBE,SMART TAG 776 | New OEM | Contact Us |
| 968277 | CMP | Speedfam | BEARING,5/ X 1/4 676 | New OEM | Contact Us |
| 968331 | CMP | Speedfam | ASSY,PAD CONDITIONER TOP | New OEM | Contact Us |
| 968369 | CMP | Speedfam | CONN,SPECTOGRAPH SMA TO SMA MV | New OEM | Contact Us |
| 968371 | CMP | Speedfam | CORD,PWR 3COND SPECTROGRAPH MV | New OEM | Contact Us |
| 968376 | CMP | Speedfam | LIGHT,ATTENUATOR SPECTROGRAPH MV | New OEM | Contact Us |
| 968649 | CMP | Speedfam | RING,SPLASH GUARD MP1&MP3 WIDE SHIELD MV | New OEM | Contact Us |
| 968650 | CMP | Speedfam | RING,SPLASH GUARD MP2&MP4 WIDE SHIELD MV | New OEM | Contact Us |
| 968676 | CMP | Speedfam | TUBING,5/32 GREEN POLYURETHANE | New OEM | Contact Us |
| 968704 | CMP | Speedfam | AMPLIFIER,12-24VDC 100MA NPN W/DUST CVR | New OEM | Contact Us |
| 968705 | CMP | Speedfam | SENSOR,2-24VDC 100MA NPN DARK ON | New OEM | Contact Us |
| 968830 | CMP | Speedfam | BEARING,8.628OD 5.906ID .984THK 55%CURVE | New OEM | Contact Us |
| 968872 | CMP | Speedfam | GRIPPER,FINGER TALL TEL | New OEM | Contact Us |
| 969078 | CMP | Speedfam | POWER, STRIP 125VAC 6 OUTLETS 15FT | New OEM | Contact Us |
| 969101 | CMP | Speedfam | KIT,SHIM OPTICAL ENDPOINT PROBE MV | New OEM | Contact Us |
| 969103 | CMP | Speedfam | CABLE,FIBER OPTIC LIGHT SOURCE SET | New OEM | Contact Us |
| 969104 | CMP | Speedfam | CABLE,FIBER OPTIC PATCH LT SOURCE 5METER | New OEM | Contact Us |
| 969105 | CMP | Speedfam | CABLE,FIBER OPTIC PATCH SD1024 5METER | New OEM | Contact Us |
| 969108 | CMP | Speedfam | CBL ASSY, SENTINEL ENDPOINT I/O | New OEM | Contact Us |
| 969130 | CMP | Speedfam | RING,WEAR PET-P TX C11 | New OEM | Contact Us |
| 969199 | CMP | Speedfam | BEARING,Z 10MM HINE | New OEM | Contact Us |
| 969300 | CMP | Speedfam | C/A, PL75A-PL75 | New OEM | Contact Us |
| 969340 | CMP | Speedfam | C/A,PL77-PL78 PL79 PL80 | New OEM | Contact Us |
| 969384 | CMP | Speedfam | C/A,PL143-S130 S132 | New OEM | Contact Us |
| 969503 | CMP | Speedfam | PLATE,MOUNT PAD COND LOWER DRIVE | New OEM | Contact Us |
| 969539 | CMP | Speedfam | SNSR,SENTINEL 65-450CC/MIN | New OEM | Contact Us |
| 969548 | CMP | Speedfam | SENSOR, SENTINEL 350-2000CC/MIN | New OEM | Contact Us |
| 969572 | CMP | Speedfam | GRBX,7:1 PLNTY 16MM SHAFT W/ 5MM KEYWAY | New OEM | Contact Us |
| 969573 | CMP | Speedfam | COUPLG,1.5ODX1.8L 16X10MM BORE W/KWY SST | New OEM | Contact Us |
| 969581 | CMP | Speedfam | MANIFOLD, DVCNT 4 DUAL & 8 SINGLE VALVES | New OEM | Contact Us |
| 969638 | CMP | Speedfam | CABLE,SERIAL TOUCHSCREEN DB9F-DB9M 10FT | New OEM | Contact Us |
| 969710 | CMP | Speedfam | COLLAR,A | New OEM | Contact Us |
| 969713 | CMP | Speedfam | CASE,MTR | New OEM | Contact Us |
| 969725 | CMP | Speedfam | CYLINDER,SINE RODLESS | New OEM | Contact Us |
| 969731 | CMP | Speedfam | BLOCK,HINGE 1 MIRROR | New OEM | Contact Us |
| 969732 | CMP | Speedfam | BLOCK,HINGE 2 MIRROR | New OEM | Contact Us |
| 969936 | CMP | Speedfam | CYLINDER COMPACT 40MM BORE | New OEM | Contact Us |
| 969938 | CMP | Speedfam | CYLINDER,COMPACT LOW FRICTION | New OEM | Contact Us |
| 969945 | CMP | Speedfam | BEARING,COMBINATION ? ANGULAR 7001A DB | New OEM | Contact Us |
| 969946 | CMP | Speedfam | BEARING,SS 6802 ZZ | New OEM | Contact Us |
| 969947 | CMP | Speedfam | NUT,U FINE FU01 SUS | New OEM | Contact Us |
| 969953 | CMP | Speedfam | FTG,CONN THROUGH BORE | New OEM | Contact Us |
| 969955 | CMP | Speedfam | O-RING,G110 | New OEM | Contact Us |
| 969966 | CMP | Speedfam | WSHR,SPRING,M5,COATING | New OEM | Contact Us |
| 969968 | CMP | Speedfam | WSHR,FLAT,COATING M5 | New OEM | Contact Us |
| 969976 | CMP | Speedfam | GUIDE,LM | New OEM | Contact Us |
| 969978 | CMP | Speedfam | RING,CROSS ROLLER (B) | New OEM | Contact Us |
| 969979 | CMP | Speedfam | CYLINDER,COMPACT CDQSD25-75DCM-F9NVL | New OEM | Contact Us |
| 969981 | CMP | Speedfam | S-80/79.5x2 O-Ring | New OEM | Contact Us |
| 969992 | CMP | Speedfam | O-RING,G80 | New OEM | Contact Us |
| 969999 | CMP | Speedfam | O-RING,S15 | New OEM | Contact Us |
| 970000 | CMP | Speedfam | O-RING,S7 | New OEM | Contact Us |
| 970002 | CMP | Speedfam | SEAL,VARI TURCON ROTO TVM100100-Z80H | New OEM | Contact Us |
| 970007 | CMP | Speedfam | KEY,PARALLEL KEGS4-15 | New OEM | Contact Us |
| 970011 | CMP | Speedfam | BELT,TIMING URETHANE | New OEM | Contact Us |
| 970012 | CMP | Speedfam | O-RING,G35 | New OEM | Contact Us |
| 970013 | CMP | Speedfam | O-RING,S215 | New OEM | Contact Us |
| 970014 | CMP | Speedfam | O-RING,P16 | New OEM | Contact Us |
| 970015 | CMP | Speedfam | O-RING,P39 SD570 WHITE CHEMRAZ | New OEM | Contact Us |
| 970020 | CMP | Speedfam | SCRW,SKT,M5X25,316SST | New OEM | Contact Us |
| 970022 | CMP | Speedfam | O-ring G90 | New OEM | Contact Us |
| 970024 | CMP | Speedfam | FOLLOWER,CAM | New OEM | Contact Us |
| 970026 | CMP | Speedfam | VARISEAL,TURCON ROTO TVM300700-T01H | New OEM | Contact Us |
| 970063 | CMP | Speedfam | FLEX SERVO | New OEM | Contact Us |