Spare Parts

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Intertec Group取得CPS Lam 亞洲區獨家代理,可提供下列系列之設備原廠全新零組件:


 Ø   Novellus: Concept One (C1D, C1W)

 Ø   Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).

 Ø   Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.


Part Number Tool Type OEM Description Condition Offer
968704 CMP Speedfam AMPLIFIER,12-24VDC 100MA NPN W/DUST CVR New OEM Contact Us
968705 CMP Speedfam SENSOR,2-24VDC 100MA NPN DARK ON New OEM Contact Us
968830 CMP Speedfam BEARING,8.628OD 5.906ID .984THK 55%CURVE New OEM Contact Us
968872 CMP Speedfam GRIPPER,FINGER TALL TEL New OEM Contact Us
969078 CMP Speedfam POWER, STRIP 125VAC 6 OUTLETS 15FT New OEM Contact Us
969101 CMP Speedfam KIT,SHIM OPTICAL ENDPOINT PROBE MV New OEM Contact Us
969104 CMP Speedfam CABLE,FIBER OPTIC PATCH LT SOURCE 5METER New OEM Contact Us
969105 CMP Speedfam CABLE,FIBER OPTIC PATCH SD1024 5METER New OEM Contact Us
969108 CMP Speedfam CBL ASSY, SENTINEL ENDPOINT I/O New OEM Contact Us
969130 CMP Speedfam RING,WEAR PET-P TX C11 New OEM Contact Us
969199 CMP Speedfam BEARING,Z 10MM HINE New OEM Contact Us
969300 CMP Speedfam C/A, PL75A-PL75 New OEM Contact Us
969503 CMP Speedfam PLATE,MOUNT PAD COND LOWER DRIVE New OEM Contact Us
969539 CMP Speedfam SNSR,SENTINEL 65-450CC/MIN New OEM Contact Us
969548 CMP Speedfam SENSOR, SENTINEL 350-2000CC/MIN New OEM Contact Us
969572 CMP Speedfam GRBX,7:1 PLNTY 16MM SHAFT W/ 5MM KEYWAY New OEM Contact Us
969573 CMP Speedfam COUPLG,1.5ODX1.8L 16X10MM BORE W/KWY SST New OEM Contact Us
969581 CMP Speedfam MANIFOLD, DVCNT 4 DUAL & 8 SINGLE VALVES New OEM Contact Us
969638 CMP Speedfam CABLE,SERIAL TOUCHSCREEN DB9F-DB9M 10FT New OEM Contact Us
969710 CMP Speedfam COLLAR,A New OEM Contact Us
969713 CMP Speedfam CASE,MTR New OEM Contact Us
969725 CMP Speedfam CYLINDER,SINE RODLESS New OEM Contact Us
969731 CMP Speedfam BLOCK,HINGE 1 MIRROR New OEM Contact Us
969732 CMP Speedfam BLOCK,HINGE 2 MIRROR New OEM Contact Us
969938 CMP Speedfam CYLINDER,COMPACT LOW FRICTION New OEM Contact Us
969945 CMP Speedfam BEARING,COMBINATION ? ANGULAR 7001A DB New OEM Contact Us
969946 CMP Speedfam BEARING,SS 6802 ZZ New OEM Contact Us
969947 CMP Speedfam NUT,U FINE FU01 SUS New OEM Contact Us
969953 CMP Speedfam FTG,CONN THROUGH BORE New OEM Contact Us
969955 CMP Speedfam O-RING,G110 New OEM Contact Us
969966 CMP Speedfam WSHR,SPRING,M5,COATING New OEM Contact Us
969968 CMP Speedfam WSHR,FLAT,COATING M5 New OEM Contact Us
969976 CMP Speedfam GUIDE,LM New OEM Contact Us
969978 CMP Speedfam RING,CROSS ROLLER (B) New OEM Contact Us
969979 CMP Speedfam CYLINDER,COMPACT CDQSD25-75DCM-F9NVL New OEM Contact Us
969992 CMP Speedfam O-RING,G80 New OEM Contact Us
969999 CMP Speedfam O-RING,S15 New OEM Contact Us
970002 CMP Speedfam SEAL,VARI TURCON ROTO TVM100100-Z80H New OEM Contact Us
970007 CMP Speedfam KEY,PARALLEL KEGS4-15 New OEM Contact Us
970011 CMP Speedfam BELT,TIMING URETHANE New OEM Contact Us
970012 CMP Speedfam O-RING,G35 New OEM Contact Us
970013 CMP Speedfam O-RING,S215 New OEM Contact Us
970014 CMP Speedfam O-RING,P16 New OEM Contact Us
970022 CMP Speedfam O-ring G90 New OEM Contact Us
970023 CMP Speedfam O-ring G60 New OEM Contact Us
970024 CMP Speedfam FOLLOWER,CAM New OEM Contact Us
970026 CMP Speedfam VARISEAL,TURCON ROTO TVM300700-T01H New OEM Contact Us
970063 CMP Speedfam FLEX SERVO New OEM Contact Us
970066 CMP Speedfam SUPPORT,UNIT BUM-10 New OEM Contact Us
970068 CMP Speedfam BEARING,RF-1980HH New OEM Contact Us
970094 CMP Speedfam MOUNT,CYLINDER FREE CDU20-25D-F9NL New OEM Contact Us
970099 CMP Speedfam HOLDER,PIN A New OEM Contact Us
970106 CMP Speedfam PIN,FASTENER New OEM Contact Us
970131 CMP Speedfam CYLINDER,COMPACT New OEM Contact Us
970225 CMP Speedfam COVER,1 New OEM Contact Us
970226 CMP Speedfam COVER,2 New OEM Contact Us
970227 CMP Speedfam COVER,3 New OEM Contact Us
970228 CMP Speedfam COVER,4 New OEM Contact Us
970318 CMP Speedfam CYLINDER,COMPACT New OEM Contact Us
970327 CMP Speedfam BRKT,SNSR ANTI ROTATION New OEM Contact Us
971948 CMP Speedfam MOUNT,WAND R1 New OEM Contact Us
972021 CMP Speedfam SENSOR,INDUCTIVE PROX 8MM UNSHLD 3MM NPN New OEM Contact Us
972219 CMP Speedfam SPLINE,BALL 10MM X 115MM LONG New OEM Contact Us
972302 CMP Speedfam SUPPORT SHELF LOWER New OEM Contact Us
972324 CMP Speedfam RING,CLAMP DIAPHRAGM MDL C11 WEAR RING New OEM Contact Us
972380 CMP Speedfam PLATE, MOUNTING C-11 WEAR RING MODULE New OEM Contact Us
972409 CMP Speedfam ROTARY,UNION 9PORT RS New OEM Contact Us
972412 CMP Speedfam ASSY,PAD COND 2 WAY CYLINDER XDF New OEM Contact Us
972414 CMP Speedfam PLATE,MOUNT TOP PIVOT 2WAY CYL XDF New OEM Contact Us
972415 CMP Speedfam PLATE,SUPPORT TOP PIVOT 2WAY CYL XDF New OEM Contact Us
972416 CMP Speedfam PLATE,MOUNT 2WAY CYL XDF New OEM Contact Us
972417 CMP Speedfam PIN,MOUNT 2WAY CYL XDF New OEM Contact Us
972418 CMP Speedfam BOLT,ROD 2WAY CYL XDF New OEM Contact Us
972419 CMP Speedfam PIN,ROD CLEVIS 2WAY CYL XDF New OEM Contact Us
972467 CMP Speedfam ASSY,TRANSDUCER +/-5PSID 4-20MA W/FTG New OEM Contact Us
972712 CMP Speedfam SHAFT,DRIVE WAFER HEAD MULTI PORT W/SEAL New OEM Contact Us
972730 CMP Speedfam O-RING,SQUARE CUT 2.02OD SHAFT 1.623OD New OEM Contact Us
972837 CMP Speedfam KIT,WEAR RING REPLACEMENT C-11 New OEM Contact Us
972912 CMP Speedfam REGULATOR,ELECTRO PNEU 24VDC 0-14PSI New OEM Contact Us
973000 CMP Speedfam GEARHEAD,RIGHT ANGLE 24MM 150:1 New OEM Contact Us
973010 CMP Speedfam COUPLING,20MM BORE 6KWY X 24MM BORE 8KWY New OEM Contact Us
973011 CMP Speedfam MOTOR,SERVO HIGH TORQUE W/RESOLVER PARKER New OEM Contact Us
973012 CMP Speedfam DRIVE,DIGITAL SERVO CONTINUOUS CUR 6AMP New OEM Contact Us
973019 CMP Speedfam REGULATOR, E/P A-T DISABLED HIGHER FLOW New OEM Contact Us
973029 CMP Speedfam CONTROLLER,I/O B3000 F/W 02/01 OR LATER New OEM Contact Us
973141 CMP Speedfam SHAFT,PAD COND XDF New OEM Contact Us
973142 CMP Speedfam HOUSING,PAD COND XDF New OEM Contact Us
973143 CMP Speedfam ASSY,PAD COND LOWER DRIVE XDF New OEM Contact Us
973158 CMP Speedfam KEY, SQUARE PARALLEL 6X6X35MM New OEM Contact Us
973194 CMP Speedfam ASSY,JOINT PIVOT COND RIGID XDF New OEM Contact Us
973195 CMP Speedfam CLAMP,END SHAFT RH PAD COND RIGID XDF New OEM Contact Us
973196 CMP Speedfam ARM,PAD COND RIGID XDF New OEM Contact Us
973198 CMP Speedfam CAP,JOINT BEARING RIGID XDF New OEM Contact Us
973199 CMP Speedfam CLEVIS,JOINT PAD COND RIGID XDF New OEM Contact Us
973200 CMP Speedfam SHAFT,JOINT PAD COND RIGID XDF New OEM Contact Us
973212 CMP Speedfam SENSOR,6-24VDC NPN MAGNETORESISTIVE New OEM Contact Us
973272 CMP Speedfam SHAFT,COUPLER PAD COND XDF New OEM Contact Us
973273 CMP Speedfam BLOCK,PIVOT PAD COND XDF New OEM Contact Us
973380 CMP Speedfam BAR,SPRAY PAD COND XDF New OEM Contact Us
973417 CMP Speedfam ASSY,TUBE SPRAY PAD COND XDF New OEM Contact Us