Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 952189 | CMP | Speedfam | DIA 9IN WB20 FILM WITH PSA II BACKING | New OEM | Contact Us |
| 952216 | CMP | Speedfam | CABLE,EXTENSION,VGA | New OEM | Contact Us |
| 952221 | CMP | Speedfam | SHIM,0.025THK,200MM,WFR CAR | New OEM | Contact Us |
| 952225 | CMP | Speedfam | SHIM,0.508THK,200MM,WFR CAR | New OEM | Contact Us |
| 952314 | CMP | Speedfam | SPINDLE UNIT NOS | New OEM | Contact Us |
| 952386 | CMP | Speedfam | HEAD,BRISTLE PAD CONDITIONER | New OEM | Contact Us |
| 952523 | CMP | Speedfam | SEAL,WAFER CARRIER | New OEM | Contact Us |
| 952597 | CMP | Speedfam | GUIDE,SIDE DOOR | New OEM | Contact Us |
| 952836 | CMP | Speedfam | ASSY,CARRIER HOME GAUGE | New OEM | Contact Us |
| 952865 | CMP | Speedfam | TUBING,PPRO-TEFLON LINER,1/4 | New OEM | Contact Us |
| 952880 | CMP | Speedfam | RETAINER,WAFER SEAL | New OEM | Contact Us |
| 952928 | CMP | Speedfam | VALVE,3WAY,PNEU,SLURRY | New OEM | Contact Us |
| 952965 | CMP | Speedfam | LABEL,952959 | New OEM | Contact Us |
| 953091 | CMP | Speedfam | SPRING, TORSION, LEFT HELIX | New OEM | Contact Us |
| 953092 | CMP | Speedfam | SPRING, TORSION, RIGHT HELIX | New OEM | Contact Us |
| 953113 | CMP | Speedfam | ROLLER,DOOR DELRIN | New OEM | Contact Us |
| 953394 | CMP | Speedfam | VALVE PNEU 16 STATION | New OEM | Contact Us |
| 953395 | CMP | Speedfam | VALVE, PNEUMATIC 8 STATION | New OEM | Contact Us |
| 953439 | CMP | Speedfam | VALVE,PFA,440HP,1/2FTHD | New OEM | Contact Us |
| 953511 | CMP | Speedfam | PUMP,HEAD,STANDARD L/S | New OEM | Contact Us |
| 953643 | CMP | Speedfam | VALVE,HPV DIAPHRAGM,PNEU,2-WAY | New OEM | Contact Us |
| 954178 | CMP | Speedfam | SPRING | New OEM | Contact Us |
| 954183 | CMP | Speedfam | CABLE,POWER,10FT | New OEM | Contact Us |
| 954239 | CMP | Speedfam | CABLE,SIGNAL,10FT | New OEM | Contact Us |
| 954982 | CMP | Speedfam | ASSY,COUPLING | New OEM | Contact Us |
| 955009 | CMP | Speedfam | PACKING,CORD,.139 VITON | New OEM | Contact Us |
| 955070 | CMP | Speedfam | FTG,ITN2HI,EJECT,VAC,1/4 PORTS | New OEM | Contact Us |
| 955642 | CMP | Speedfam | LENS,SNSR | New OEM | Contact Us |
| 955924 | CMP | Speedfam | PLUNGER,SPRING | New OEM | Contact Us |
| 956102 | CMP | Speedfam | CRIMP,SOCKET,TERMINAL 18-14AWG | New OEM | Contact Us |
| 956129 | CMP | Speedfam | RING,CAM,SPINNER | New OEM | Contact Us |
| 956152 | CMP | Speedfam | ACTUATOR,CYLINDER,SPINNER | New OEM | Contact Us |
| 956155 | CMP | Speedfam | BUSHING, CAM ACTUATOR, SPINNER | New OEM | Contact Us |
| 956165 | CMP | Speedfam | RING, RINSE, 200C | New OEM | Contact Us |
| 956209 | CMP | Speedfam | CYLINDER,AIR,9/16X2 1/2""STROKE | New OEM | Contact Us |
| 956210 | CMP | Speedfam | CYLINDER,AIR,1 1/16X1 STROKE | New OEM | Contact Us |
| 956287 | CMP | Speedfam | MODULE,INPUT,ANALOG CUR.,4CH | New OEM | Contact Us |
| 956289 | CMP | Speedfam | AMPLIFIER, FIBER W/LCD DISPLAY | New OEM | Contact Us |
| 956305 | CMP | Speedfam | VALVE,CHECK,O-RING,1/2 FNPT | New OEM | Contact Us |
| 956475 | CMP | Speedfam | ARM,GRIPPER,LEFT,200MM | New OEM | Contact Us |
| 956729 | CMP | Speedfam | SWITCH,MAGNETIC REED | New OEM | Contact Us |
| 956791 | CMP | Speedfam | DOOR,OUTER,SPINNER | New OEM | Contact Us |
| 956826 | CMP | Speedfam | BEARING,LINEAR | New OEM | Contact Us |
| 956827 | CMP | Speedfam | ROD,BEARING,SPINNER | New OEM | Contact Us |
| 956948 | CMP | Speedfam | BATTERY UNIT | New OEM | Contact Us |
| 956949 | CMP | Speedfam | TIMING BELT(R AXIS) | New OEM | Contact Us |
| 956950 | CMP | Speedfam | TIMING BELT (B AXIS) | New OEM | Contact Us |
| 956973 | CMP | Speedfam | CABLE,MACHINE-NET,25FT,W/LBLS | New OEM | Contact Us |
| 956981 | CMP | Speedfam | SENSOR,THRU-BEAM,PFA | New OEM | Contact Us |
| 957447 | CMP | Speedfam | CYLINDER, AIR, DIA40MMX25MM | New OEM | Contact Us |
| 958429 | CMP | Speedfam | VACUUM, ASSY, TRAP | New OEM | Contact Us |
| 958516 | CMP | Speedfam | GEAR A GEARBOX | New OEM | Contact Us |
| 958517 | CMP | Speedfam | GEAR B GEARBOX | New OEM | Contact Us |
| 958559 | CMP | Speedfam | BELT,TIMING,330MMX10MM | New OEM | Contact Us |
| 958823 | CMP | Speedfam | CAMERA,ROBOT,MOTOMAN | New OEM | Contact Us |
| 958857 | CMP | Speedfam | CABLE CYL DOWN MAIN TABLE | New OEM | Contact Us |
| 958858 | CMP | Speedfam | CABLE CYL UP MAIN TABLE | New OEM | Contact Us |
| 958859 | CMP | Speedfam | CABLE CYL TABLE MAIN TABLE | New OEM | Contact Us |
| 958948 | CMP | Speedfam | KEYBOARD,TIP,NEMA 4 | New OEM | Contact Us |
| 959060 | CMP | Speedfam | PIN ASSY,WATER TRACK,M12 | New OEM | Contact Us |
| 959266 | CMP | Speedfam | ASSY,VALVE,3 WAY,PNEU | New OEM | Contact Us |
| 959267 | CMP | Speedfam | ASSY,MANIFOLD,DI 20 VALVE | New OEM | Contact Us |
| 959336 | CMP | Speedfam | FUSE,70A,TYPE LPJ | New OEM | Contact Us |
| 959340 | CMP | Speedfam | PIN,ROLLER,SLIDING DOOR | New OEM | Contact Us |
| 959560 | CMP | Speedfam | SEAL,ROTARY,TEFLON | New OEM | Contact Us |
| 959586 | CMP | Speedfam | VALVE, SOLENOID, 5P 2POS | New OEM | Contact Us |
| 960433 | CMP | Speedfam | CABLE, MOTOMAN CAMERA | New OEM | Contact Us |
| 960956 | CMP | Speedfam | VALVE,PNEUMATIC,1 IN,NW25 FLANGE | New OEM | Contact Us |
| 961016 | CMP | Speedfam | CABLE, UPPER ARM, T-AXIS SV3CR | New OEM | Contact Us |
| 961242 | CMP | Speedfam | PADDLE,DRY,CERAMIC COATED | New OEM | Contact Us |
| 962334 | CMP | Speedfam | BELT,TIMING,850MM POWER GRIP GT | New OEM | Contact Us |
| 962335 | CMP | Speedfam | BELT,TIMING,1150MM POWER GRIP GT | New OEM | Contact Us |
| 962600 | CMP | Speedfam | MODULE,ANALOG 1AO 1AI HUNTAIR | New OEM | Contact Us |
| 962606 | CMP | Speedfam | RING,LOWER EXTENDED SPRAY RING 676/776 | New OEM | Contact Us |
| 962607 | CMP | Speedfam | ADPTR,LIFT EXTENDED SPRAY RING 676/776 | New OEM | Contact Us |
| 962608 | CMP | Speedfam | TAB,LIFTING EXTENDED SPRAY RING 676/776 | New OEM | Contact Us |
| 962609 | CMP | Speedfam | CLIP,ANTI ROTATION EXTENDED SPRAY RING | New OEM | Contact Us |
| 962610 | CMP | Speedfam | CLIP, ANTI ROTATION FORK EXTN SPRAY RING | New OEM | Contact Us |
| 962611 | CMP | Speedfam | SHIELD,SLURRY UPPER EXTENDED SPRAY RING | New OEM | Contact Us |
| 962677 | CMP | Speedfam | ASSY,SPRAY RING EXTENDED MP1&MP3 676/776 | New OEM | Contact Us |
| 962678 | CMP | Speedfam | ASSY,SPRAY RING EXTENDED LIFT 676/776 | New OEM | Contact Us |
| 962718 | CMP | Speedfam | ASSY,SOLID PLATEN POLISH HEAD | New OEM | Contact Us |
| 962721 | CMP | Speedfam | ASSY,WAVE GENERATOR SOLID PLATEN 676/776 | New OEM | Contact Us |
| 962722 | CMP | Speedfam | ASSY,WAVE GENERATOR BALANCED SOLID PLTN | New OEM | Contact Us |
| 962728 | CMP | Speedfam | SKIRT,POLISH BELL SOLID PLATEN 676/776 | New OEM | Contact Us |
| 962730 | CMP | Speedfam | BELL,POLISH SOLID PLATEN 676/776 | New OEM | Contact Us |
| 962749 | CMP | Speedfam | COMPUTER,EVC II INDUSTRIAL | New OEM | Contact Us |
| 962750 | CMP | Speedfam | GEARBOX,5:1 PLANETARY NEMA23 3/8IN | New OEM | Contact Us |
| 962761 | CMP | Speedfam | ACTUATOR,SMIF POD OPENER W/SNSR | New OEM | Contact Us |
| 962768 | CMP | Speedfam | CABLE,VIDEO EXTENSION 15-PIN 7.6M | New OEM | Contact Us |
| 962849 | CMP | Speedfam | PLATE,QUICK CHANGE 9HOLES 776/876 | New OEM | Contact Us |
| 962914 | CMP | Speedfam | ROD,PUSH LIFT JACK ASSY EXTENDED SPRAY | New OEM | Contact Us |
| 962934 | CMP | Speedfam | BOOT,PISTON SEAL ACTIVE WAND MV | New OEM | Contact Us |
| 962935 | CMP | Speedfam | GUIDE,SPACER ACTIVE WAND MV | New OEM | Contact Us |
| 962936 | CMP | Speedfam | PIN,MOUNT ACTIVE WAND MV | New OEM | Contact Us |
| 962937 | CMP | Speedfam | PIN,GUIDE ACTIVE WAND MV | New OEM | Contact Us |
| 962938 | CMP | Speedfam | FINGER,ACTIVE WAND MV | New OEM | Contact Us |
| 962939 | CMP | Speedfam | PISTON,ACTIVE WAND MV | New OEM | Contact Us |
| 962940 | CMP | Speedfam | PISTON,STOP ACTIVE WAND MV | New OEM | Contact Us |
| 962941 | CMP | Speedfam | ARM,RETURN ACTIVE WAND MV | New OEM | Contact Us |