Spare Parts

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Intertec Group取得CPS Lam 亞洲區獨家代理,可提供下列系列之設備原廠全新零組件:


 Ø   Novellus: Concept One (C1D, C1W)

 Ø   Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).

 Ø   Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.


Part Number Tool Type OEM Description Condition Offer
964963 CMP Speedfam TARGET,WAFER SENSOR ACTIVE WAND MV New OEM Contact Us
964994 CMP Speedfam TUBING,PUR 5/32 RED TRANSLUCENT New OEM Contact Us
964996 CMP Speedfam TUBING,PUR 5/32 PURPLE TRANSLUCENT New OEM Contact Us
964998 CMP Speedfam TUBING,PUR 5/32 AQUA BLUE TRANSLUCENT New OEM Contact Us
964999 CMP Speedfam TUBING,PUR 5/32 BLUE TRANSLUCENT New OEM Contact Us
965019 CMP Speedfam TUBING,PUR 5/32 YELLOW TRANSLUCENT New OEM Contact Us
965042 CMP Speedfam CABLE, PS/2 CPU TO SERVSWITCH 10FT New OEM Contact Us
965287 CMP Speedfam POWER SUPPLY,90-260VAC IN 24VDC 1A OUT New OEM Contact Us
965400 CMP Speedfam VALVE,DIAPHRAGM,VACUUM TANK New OEM Contact Us
965404 CMP Speedfam SHAFT,PISTON,LOAD/UNLOAD CUP New OEM Contact Us
965406 CMP Speedfam SHAFT,GUIDE,LOWER New OEM Contact Us
965487 CMP Speedfam FINGER, GRIPPER, 200MM, STYLE A New OEM Contact Us
966099 CMP Speedfam SNSR,PROX 8MM THD SHLD 1.5MM RNG NPN New OEM Contact Us
966130 CMP Speedfam PAD, WET, VACUUM New OEM Contact Us
966158 CMP Speedfam BELT,TIMING,T5 78 TEETH New OEM Contact Us
966246 CMP Speedfam BATTERY New OEM Contact Us
966260 CMP Speedfam AC SERVO MOTOR(U AXIS) New OEM Contact Us
966318 CMP Speedfam SENSOR, CYL, 2ND PAD COND New OEM Contact Us
966422 CMP Speedfam VALVE,WET VACUUM New OEM Contact Us
966423 CMP Speedfam VALVE,DRY VACUUM New OEM Contact Us
966424 CMP Speedfam SNSR,VACUUM New OEM Contact Us
966440 CMP Speedfam CABLE, MTR.PWR, RLR, BOX2 SCRUB New OEM Contact Us
966487 CMP Speedfam TRANSDUCER, SMC New OEM Contact Us
966545 CMP Speedfam GENERATOR,VACUUM,.5 I.D. New OEM Contact Us
966716 CMP Speedfam SENSOR,ASSY,WAFER PRESENT New OEM Contact Us
966867 CMP Speedfam BLOCK,STOPPER 7700J New OEM Contact Us
966881 CMP Speedfam HOLDER,SHAFT 7700J New OEM Contact Us
966882 CMP Speedfam PLATE,MTR 2 7700J New OEM Contact Us
966883 CMP Speedfam PLATE,MTR 3 7700J New OEM Contact Us
966884 CMP Speedfam PULLY,1 MOD 7700J New OEM Contact Us
966885 CMP Speedfam PULLY,2 MOD 7700J New OEM Contact Us
966886 CMP Speedfam PLATE,END New OEM Contact Us
966887 CMP Speedfam SPINDLE,1 7700J New OEM Contact Us
966888 CMP Speedfam COVER,BEARING (A) 7700J New OEM Contact Us
966889 CMP Speedfam COLLAR,LABYRINTH New OEM Contact Us
966890 CMP Speedfam HOUSING,SEAL (A) 7700J New OEM Contact Us
966891 CMP Speedfam HOLDER,PAD (A) 7700J New OEM Contact Us
966892 CMP Speedfam COVER,MTR 7700J New OEM Contact Us
966893 CMP Speedfam FLANGE,SEAL 1 7700J New OEM Contact Us
966894 CMP Speedfam SEAL,RING New OEM Contact Us
966895 CMP Speedfam SEAL,FLANGE 2 7700J New OEM Contact Us
966896 CMP Speedfam CAP,A New OEM Contact Us
966897 CMP Speedfam GUARD,TUBE New OEM Contact Us
966899 CMP Speedfam HOLDER,NOZZLE (1) New OEM Contact Us
966900 CMP Speedfam HOLDER,NOZZLE (2) New OEM Contact Us
966902 CMP Speedfam NOZZLE,(A) 7700J New OEM Contact Us
966903 CMP Speedfam BELLOW,UPPER BRUSH ARM,7700J New OEM Contact Us
966906 CMP Speedfam COLLAR,3 New OEM Contact Us
966907 CMP Speedfam COLLAR,4 New OEM Contact Us
966940 CMP Speedfam HOLDER, BEARING (B) 7700J New OEM Contact Us
966965 CMP Speedfam Bellows B 7700J New OEM Contact Us
966968 CMP Speedfam Holder Pad B 7700J New OEM Contact Us
966970 CMP Speedfam Housing Seal B 7700J New OEM Contact Us
966971 CMP Speedfam SEAL,1 7700J New OEM Contact Us
966973 CMP Speedfam SPACER,R New OEM Contact Us
966974 CMP Speedfam CASE,BEARING 7700J New OEM Contact Us
966975 CMP Speedfam SHAFT,MAIN (B) 7700J New OEM Contact Us
966976 CMP Speedfam STAND,MAIN (B) 7700J New OEM Contact Us
966977 CMP Speedfam COVER,BEARING D 7700J New OEM Contact Us
967000 CMP Speedfam RING, IDLER 7700J New OEM Contact Us
967002 CMP Speedfam NUT,ADJUST 7700J New OEM Contact Us
967003 CMP Speedfam PLATE,KEY 7700J New OEM Contact Us
967004 CMP Speedfam ROLLER, HOLDER 1 7700J New OEM Contact Us
967005 CMP Speedfam WASHER, FLAT 2 7700J New OEM Contact Us
967006 CMP Speedfam COLLAR (B) 7700J New OEM Contact Us
967007 CMP Speedfam SHAFT,ROLLER 7700J New OEM Contact Us
967008 CMP Speedfam COVER,SEAL 7700J New OEM Contact Us
967009 CMP Speedfam HOLDER,SEAL 7700J New OEM Contact Us
967010 CMP Speedfam ROLLER, IDLING 1 770J New OEM Contact Us
967011 CMP Speedfam PLATE,RING 7700J New OEM Contact Us
967040 CMP Speedfam PIN,HINGE New OEM Contact Us
967041 CMP Speedfam BRKT,HINGE New OEM Contact Us
967042 CMP Speedfam BLOCK,HINGE 2 New OEM Contact Us
967043 CMP Speedfam SCRW,BOWL (B) 7700J New OEM Contact Us
967044 CMP Speedfam BLOCK,HINGE 1 New OEM Contact Us
967045 CMP Speedfam HANDLE,A New OEM Contact Us
967046 CMP Speedfam COVER,SUB (SRD-02) New OEM Contact Us
967047 CMP Speedfam COVER,SUB (SRD-01) New OEM Contact Us
967048 CMP Speedfam COVER,SUB (BU2-02) New OEM Contact Us
967049 CMP Speedfam COVER,SUB (BU2-01) New OEM Contact Us
967050 CMP Speedfam COVER,SUB (BU1-02) New OEM Contact Us
967051 CMP Speedfam COVER,SUB (BU1-01) New OEM Contact Us
967173 CMP Speedfam COVER, SENSOR, SRD, 7700J New OEM Contact Us
967174 CMP Speedfam COVER, SENSOR 2 7700J New OEM Contact Us
967177 CMP Speedfam JOINT,B New OEM Contact Us
967202 CMP Speedfam WSHR,FLAT New OEM Contact Us
967231 CMP Speedfam HOOD, UPPER 7700J New OEM Contact Us
967251 CMP Speedfam ARM,CHUCK R4 LH & RH New OEM Contact Us
967846 CMP Speedfam SWITCH,SERVSWITCH 8-PORT SLIM New OEM Contact Us
967881 CMP Speedfam BRKT,MOUNT SERF SWITCH MV New OEM Contact Us
967983 CMP Speedfam FUNNEL,HOSE MV New OEM Contact Us
968052 CMP Speedfam CAP,CLAMP DRIVELINE COUPLING 676/776 New OEM Contact Us
968073 CMP Speedfam AMPL,SERVSWITCH EXTENDER REV4 New OEM Contact Us
968277 CMP Speedfam BEARING,5/ X 1/4 676 New OEM Contact Us
968369 CMP Speedfam CONN,SPECTOGRAPH SMA TO SMA MV New OEM Contact Us
968371 CMP Speedfam CORD,PWR 3COND SPECTROGRAPH MV New OEM Contact Us
968376 CMP Speedfam LIGHT,ATTENUATOR SPECTROGRAPH MV New OEM Contact Us
968649 CMP Speedfam RING,SPLASH GUARD MP1&MP3 WIDE SHIELD MV New OEM Contact Us
968650 CMP Speedfam RING,SPLASH GUARD MP2&MP4 WIDE SHIELD MV New OEM Contact Us
968676 CMP Speedfam TUBING,5/32 GREEN POLYURETHANE New OEM Contact Us