Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 22-182735-00 | CMP | Speedfam | O-RING,266.29IDX3.53W VTN | New OEM | Contact Us |
| 22-182737-00 | CMP | Speedfam | O-RING,8.737IDX8.943OD VTN | New OEM | Contact Us |
| 22-184529-00 | CMP | Speedfam | FTG,TUBE,1/8X1/4,QUIKGRIP,PFA | New OEM | Contact Us |
| 22-184779-00 | CMP | Speedfam | RING,WEAR,PAD COND BLOCK Y CLEAN EDGE | New OEM | Contact Us |
| 22-185349-00 | CMP | Speedfam | VALVE,CHECK,3/8 FLARE,PFA | New OEM | Contact Us |
| 22-278532-00 | CMP | Speedfam | SEAL,WAFER HEAD | New OEM | Contact Us |
| 22-281048-00 | CMP | Speedfam | O-RING,2-176,VITON,75 DUROMETER | New OEM | Contact Us |
| 22-292844-00 | CMP | Speedfam | SEAL, SHIELD,ARM XDF, HP | New OEM | Contact Us |
| 22-296240-00 | CMP | Speedfam | GAUGE,PRESS,2.5IN,0-1500PSI,1/4 MNPT,BAK | New OEM | Contact Us |
| 22-311222-00 | CMP | Speedfam | O-RING,3-901,EPDM,70 DURO | New OEM | Contact Us |
| 22-311584-00 | CMP | Speedfam | O-RING,2-007,BUNA,70D | New OEM | Contact Us |
| 22-314321-00 | CMP | Speedfam | O-RING,.197 ID X .039 W,VITON,A75, METRI | New OEM | Contact Us |
| 22-320395-00 | CMP | Speedfam | GAUGE, PRESS, 2.5IN, 0-600PSI, 1/4MNPT, BAK, S | New OEM | Contact Us |
| 22-324234-00 | CMP | Speedfam | SEAL,WAFER HEAD,RESTRAINED | New OEM | Contact Us |
| 22-358255-00 | CMP | Speedfam | FTG,ADPTR,REDUCER,SPACESA | New OEM | Contact Us |
| 22-363097-00 | CMP | Speedfam | ORIFICE,AIR FLOW,0.004",PUR,10-32X1/16"I | New OEM | Contact Us |
| 22-363100-00 | CMP | Speedfam | ORIFICE,AIR FLOW,0.005",GRN,10-32X1/16"I | New OEM | Contact Us |
| 22-380216-00 | CMP | Speedfam | GASKET,LENS,1-21/32 X 1-1/4 SIZE,SILIC | New OEM | Contact Us |
| 22-399654-00 | CMP | Speedfam | RING,RETAIN,EXT,3/32"DIA,E-STYLE,SST,PLAIN | New OEM | Contact Us |
| 22-400471-00 | CMP | Speedfam | ACTUATOR,SPARE ROTATION/GRIPPER ASSEMBLY | New OEM | Contact Us |
| 22-400575-00 | CMP | Speedfam | SEAL,ROD,0.125ID X 0.25OD X 0.083W,UH | New OEM | Contact Us |
| 2250-109423 | CMP | Speedfam | FTG,CPLG 1/4ID QDISC GRAY POLY | New OEM | Contact Us |
| 2250-109424 | CMP | Speedfam | FTG,ELBOW HS BRB 1/4QDISC POLY | New OEM | Contact Us |
| 2250-111604 | CMP | Speedfam | FTG,ELBOW UN 3/8OD X1/4OD KYNAR | New OEM | Contact Us |
| 2250-700190 | CMP | Speedfam | FTG,ELBOW 1/4 | New OEM | Contact Us |
| 2250-700193 | CMP | Speedfam | FTG,ELBOW 3/8 | New OEM | Contact Us |
| 2250-700194 | CMP | Speedfam | FTG,ELBOW 3/8 1/4 90 SPDFT | New OEM | Contact Us |
| 2250-700203 | CMP | Speedfam | FTG,ELBOW BARBED 90' X 1" | New OEM | Contact Us |
| 2250-700206 | CMP | Speedfam | FTG,ELBOW ML 3/8OD X 1/8NPT | New OEM | Contact Us |
| 2250-700209 | CMP | Speedfam | FTG,ELBOW RIGID 1/4TUBE 1/4MNPT | New OEM | Contact Us |
| 2250-700210 | CMP | Speedfam | FTG,ELBOW RIGID 3/8 X 1/4NPT | New OEM | Contact Us |
| 2250-700211 | CMP | Speedfam | FTG,ELBOW SWIVEL | New OEM | Contact Us |
| 2250-700214 | CMP | Speedfam | FTG,ELBOW SWIVEL 3/8TUBE 1/4NPT | New OEM | Contact Us |
| 2250-700215 | CMP | Speedfam | FTG,ELBOW SWIVEL 5/32OD 1/8MNPT | New OEM | Contact Us |
| 2250-700247 | CMP | Speedfam | FTG,ADPTR 10-32 TO 1/8 | New OEM | Contact Us |
| 2250-700253 | CMP | Speedfam | FTG,BLKHD 1/4" | New OEM | Contact Us |
| 2250-700385 | CMP | Speedfam | NOZZLE,SPRAY,1/8NPTX1,PVC | New OEM | Contact Us |
| 2250-700454 | CMP | Speedfam | PLUG,1/8ID RUBBER CAP | New OEM | Contact Us |
| 2250-700657 | CMP | Speedfam | FTG,TEE 1" SCH40 W SXSXS | New OEM | Contact Us |
| 2250-700668 | CMP | Speedfam | FTG,TEE UNION 3/8 SPEEDFIT | New OEM | Contact Us |
| 2250-700670 | CMP | Speedfam | FTG,TEE SWIVEL 10-32 1/8 SST | New OEM | Contact Us |
| 2250-700672 | CMP | Speedfam | FTG,TEE UNION 1/2 X 1/2 X1/8 OD | New OEM | Contact Us |
| 2250-700674 | CMP | Speedfam | FTG,TEE UNION 1/4 (3104-56-00) | New OEM | Contact Us |
| 2250-700679 | CMP | Speedfam | FTG,TEE Y 3/8 2WAY DIVIDER | New OEM | Contact Us |
| 2250-700744 | CMP | Speedfam | FTG,UNION 1' SCH 80 B W/O-RING | New OEM | Contact Us |
| 2250-700750 | CMP | Speedfam | FTG,UNION ROTARY SST | New OEM | Contact Us |
| 2250-700990 | CMP | Speedfam | COUPLING,CUSTOM FLOW CNTRL | New OEM | Contact Us |
| 2250-700991 | CMP | Speedfam | FTG,JIC CUSTOM | New OEM | Contact Us |
| 2250-717036 | CMP | Speedfam | FTG,BLKHD | New OEM | Contact Us |
| 2250-717037 | CMP | Speedfam | FTG,BLKHD HI-FLOW | New OEM | Contact Us |
| 2250-717945 | CMP | Speedfam | FTG,ELBOW ST 90DEG 1"PVC SPGXS | New OEM | Contact Us |
| 2250-727044 | CMP | Speedfam | DRAIN, SLURRY BASIN - REV F | New OEM | Contact Us |
| 2250-727319 | CMP | Speedfam | FTG,BLKHD | New OEM | Contact Us |
| 2250-728068 | CMP | Speedfam | FTG,SLURRY DIAPHRAGM | New OEM | Contact Us |
| 2250-737692 | CMP | Speedfam | FTG,MANF | New OEM | Contact Us |
| 2250-737770 | CMP | Speedfam | FTG,TEE UNION 3/8T | New OEM | Contact Us |
| 2250-737775 | CMP | Speedfam | VALVE,IN-LINE FLOW CNTL 5/32T | New OEM | Contact Us |
| 2250-737815 | CMP | Speedfam | FTG,ELBOW MALE 1/4MNPT X 1/2T | New OEM | Contact Us |
| 2250-737941 | CMP | Speedfam | FTG,FERR BCK 1/4OD SST SWAGELOK | New OEM | Contact Us |
| 2250-737981 | CMP | Speedfam | FTG,TEE 1/4TX1/4T X 1/8MNPT PFA | New OEM | Contact Us |
| 2250-738109 | CMP | Speedfam | JOINT, FLOATING 5/16-24 | New OEM | Contact Us |
| 2250-738350 | CMP | Speedfam | VALVE, IN-LINE FLOW CNTL 1/4T | New OEM | Contact Us |
| 2250-738584 | CMP | Speedfam | FTG,ROTARY UNION BUFF MOD | New OEM | Contact Us |
| 2250-738804 | CMP | Speedfam | FTG, 1/4"TUBE SST QCK DSCNCT BDY | New OEM | Contact Us |
| 2250-738805 | CMP | Speedfam | FTG, 1/4"NPTM SST QUICK DSCNCT | New OEM | Contact Us |
| 2250-739136 | CMP | Speedfam | FTG,ELBOW 3/8MNPT X3/8TB OD SST | New OEM | Contact Us |
| 2250-739145 | CMP | Speedfam | FTG,T BRNCH 1/4MNPTX3/8X3/8 SST | New OEM | Contact Us |
| 2250-739584 | CMP | Speedfam | FTG,CONNECTOR 10-32UNFX1/4T SST | New OEM | Contact Us |
| 2250-739782 | CMP | Speedfam | FTG,ELBOW 1/4" 90DEG LOC-LINE | New OEM | Contact Us |
| 2250-770540 | CMP | Speedfam | FTG,ELBOW HOSE BRB 1/8 QCK DISC | New OEM | Contact Us |
| 2250-770541 | CMP | Speedfam | QUICK DISCONNECT,MALE 1/8NPT | New OEM | Contact Us |
| 2250-770576 | CMP | Speedfam | FTG,ELBOW 3/32 BESWICK SST | New OEM | Contact Us |
| 2250-770690 | CMP | Speedfam | FTG, ADPTR OXIDE CONDITIONER | New OEM | Contact Us |
| 229851-1 | CMP | Speedfam | HOSE,PUMP,3,1X6,3(DIXDA),MASTERFLEX 6402 | New OEM | Contact Us |
| 2300-110293 | CMP | Speedfam | TUBE,SUPPORT ACTIVE WAND 200MM MV | New OEM | Contact Us |
| 2300-110297 | CMP | Speedfam | TUBE,DYNAMIC ACTIVE WAND 200MM MV | New OEM | Contact Us |
| 2300-700701 | CMP | Speedfam | TUBE,COILED RECIRC | New OEM | Contact Us |
| 2300-700702 | CMP | Speedfam | TUBING,3/16 CLR | New OEM | Contact Us |
| 2300-700713 | CMP | Speedfam | TUBING,1/8ID X 1/4OD CLR POLYURE | New OEM | Contact Us |
| 2300-700721 | CMP | Speedfam | TUBING,3/8ID X 1/2 BLK POLY | New OEM | Contact Us |
| 2300-700723 | CMP | Speedfam | TUBING,3/8OD X .250ID 95 DUR RED | New OEM | Contact Us |
| 2300-700726 | CMP | Speedfam | TUBING,5/32 GRAY | New OEM | Contact Us |
| 2300-700727 | CMP | Speedfam | TUBING,BLUE TRANS 1/4 X 1/8 90DUR | New OEM | Contact Us |
| 2300-700731 | CMP | Speedfam | TUBING,ORANGE TRANS 1/4 X 1/8 90DUR | New OEM | Contact Us |
| 2300-700732 | CMP | Speedfam | TUBING,PURPLE TRANS 1/4 X 1/8 90D | New OEM | Contact Us |
| 2300-700734 | CMP | Speedfam | TUBING,RED TRANS 1/4 X 1/8 90 DUR | New OEM | Contact Us |
| 2300-700740 | CMP | Speedfam | TUBING,TYGON 1/8ID X 1/4OD CLR | New OEM | Contact Us |
| 2300-700742 | CMP | Speedfam | TUBING,WHITE 1/4 X 1/8 90 DUR | New OEM | Contact Us |
| 2300-700743 | CMP | Speedfam | TUBING,YELLOW TRANS 1/4 X 1/8 90DUR | New OEM | Contact Us |
| 2300-717469 | CMP | Speedfam | TUBING,GRAY 5/32 | New OEM | Contact Us |
| 2300-727245 | CMP | Speedfam | TUBE,SPRAY TOP | New OEM | Contact Us |
| 2300-727246 | CMP | Speedfam | TUBE,SPRAY BOTTOM | New OEM | Contact Us |
| 2300-727355 | CMP | Speedfam | TUBE,LH PAD COND BRUSH | New OEM | Contact Us |
| 2300-727356 | CMP | Speedfam | TUBE,RH PAD COND BRUSH | New OEM | Contact Us |
| 2300-737748 | CMP | Speedfam | TUBING,SMC 1/4IN OD RED TRANSLUCENT | New OEM | Contact Us |
| 2300-737749 | CMP | Speedfam | TUBING,SMC 6MM OD CLR | New OEM | Contact Us |
| 2300-737822 | CMP | Speedfam | TUBING,1/2 OD POLYURETHANE WHT | New OEM | Contact Us |
| 2300-738048 | CMP | Speedfam | 1 1/2 " CONVOLUTED PTFE TUBING WITH CUFF | New OEM | Contact Us |
| 2300-740158 | CMP | Speedfam | TUBING,FLEX CT 1.75ID x 78” LG | New OEM | Contact Us |
| 2300-770413 | CMP | Speedfam | TUBE,776 SPRAY BOX SPRAY | New OEM | Contact Us |