Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 12-8800-095 | CMP | Speedfam | ASSY, OPEN BRUSH BOX, CMC | New OEM | Contact Us |
| 12-8800-124 | CMP | Speedfam | ASSY,CYL POS SENSOR,PNP | New OEM | Contact Us |
| 12-8882-030 | CMP | Speedfam | ASSY,CHUCK LINK STYLE 200MM | New OEM | Contact Us |
| 12-8882-067 | CMP | Speedfam | ASSY,CBL,SPINDLE DC MTR,CE | New OEM | Contact Us |
| 1300-770630 | CMP | Speedfam | WSHR,#4,NYLON | New OEM | Contact Us |
| 13-8882-221 | CMP | Speedfam | FINGER,BUMPER | New OEM | Contact Us |
| 13-8882-418 | CMP | Speedfam | WAFER STOP,8" | New OEM | Contact Us |
| 1410-105102 | CMP | Speedfam | PIN,SLOTTED SPRING .062X.25 SST | New OEM | Contact Us |
| 1410-112128 | CMP | Speedfam | PIN,PAD CONDITIONER LATCH | New OEM | Contact Us |
| 1410-701171 | CMP | Speedfam | PIN,DOWEL 3/16" DIA X 3/4 LONG SST | New OEM | Contact Us |
| 1410-737809 | CMP | Speedfam | PIN,DOWEL 1/16 X 1/2 SST | New OEM | Contact Us |
| 1410-738893 | CMP | Speedfam | PIN,PIVOT PAD COND BLADDERLESS | New OEM | Contact Us |
| 1410-739065 | CMP | Speedfam | PIN,ROLL 1/8" X 2" STEEL | New OEM | Contact Us |
| 1420-700609 | CMP | Speedfam | SNAP RING,SST | New OEM | Contact Us |
| 1420-717007 | CMP | Speedfam | RING,WAFER PLATE RETAINING | New OEM | Contact Us |
| 1420-717019 | CMP | Speedfam | RING,INSIDE BEARING CLAMP | New OEM | Contact Us |
| 1420-717021 | CMP | Speedfam | RING,LOWER BEARING CLAMP | New OEM | Contact Us |
| 1420-717038 | CMP | Speedfam | RING,WEAR | New OEM | Contact Us |
| 1420-717052 | CMP | Speedfam | RING,TOP CLAMP | New OEM | Contact Us |
| 1420-717053 | CMP | Speedfam | RING,TOP CLAMP | New OEM | Contact Us |
| 1420-718644 | CMP | Speedfam | RING,WAFER HEAD WEAR 150MM | New OEM | Contact Us |
| 1420-727371 | CMP | Speedfam | RING,TOP CLAMP MODIFIED | New OEM | Contact Us |
| 1420-737596 | CMP | Speedfam | RING, RETAINING .562OD X .39W | New OEM | Contact Us |
| 1420-737623 | CMP | Speedfam | RING,RETAINING SPIRAL | New OEM | Contact Us |
| 1420-738690 | CMP | Speedfam | RING, RETAINING EXT.75 SHAFT DIA SST | New OEM | Contact Us |
| 14-918954-00 | CMP | Speedfam | WASHER,WAVY SPRING | New OEM | Contact Us |
| 15-174936-00 | CMP | Speedfam | DIAPHRAGM,OVERLAY,T3 WEAR RING,RWR | New OEM | Contact Us |
| 15-175377-00 | CMP | Speedfam | PIN,LIGHT,EPD,MOLDED | New OEM | Contact Us |
| 15-176387-00 | CMP | Speedfam | PLATEN,200MM,SOLID,LP CAPABLE | New OEM | Contact Us |
| 15-176396-00 | CMP | Speedfam | PLUG,RETAINER TOP LIGHT PIN | New OEM | Contact Us |
| 15-177364-00 | CMP | Speedfam | PLUG,PLATEN W/O ENDPOINT | New OEM | Contact Us |
| 15-177659-00 | CMP | Speedfam | MANF,PLATEN PDM LP CAPABLE SST 200MM | New OEM | Contact Us |
| 15-177748-00 | CMP | Speedfam | RING,WEAR REAR LATCHED PET-P TX 300MM | New OEM | Contact Us |
| 15-180868-00 | CMP | Speedfam | PLUG,RETAINER,EPD LIGHT PIN,316SS | New OEM | Contact Us |
| 15-181651-00 | CMP | Speedfam | KEY,WAFER HEAD DRIVE SHAFT,3 INCH | New OEM | Contact Us |
| 15-182606-00 | CMP | Speedfam | LATCH,COMPRESSION,SST FOR MP WINDOW | New OEM | Contact Us |
| 15-182719-00 | CMP | Speedfam | END EFFECTOR,COATED,R3 200MM | New OEM | Contact Us |
| 15-183889-00 | CMP | Speedfam | O-RING,SPLICED,10.625OD X .103W,BUNA | New OEM | Contact Us |
| 15-184819-00 | CMP | Speedfam | CLAMP,1/8 PIPE CLAMP,FLUID SPRAY,XDF | New OEM | Contact Us |
| 15-185198-00 | CMP | Speedfam | ADPTR,LIFTING,EXTENDED SPRAY RING | New OEM | Contact Us |
| 15-185199-00 | CMP | Speedfam | CLIP, ANTI-ROTATION, EXTENDED SPRAY RING | New OEM | Contact Us |
| 15-185202-00 | CMP | Speedfam | BLOCK,SPRAY SHIELD ALIGNMENT | New OEM | Contact Us |
| 15-185277-00 | CMP | Speedfam | BLOCK,LIFT & ROTATE | New OEM | Contact Us |
| 15-185310-00 | CMP | Speedfam | PULLEY,W/SHAFT,UPPER BRUSH | New OEM | Contact Us |
| 15-2725 | CMP | Speedfam | BELT, TIMING | New OEM | Contact Us |
| 15-2730 | CMP | Speedfam | BELT, TIMING | New OEM | Contact Us |
| 15-2762 | CMP | Speedfam | ROLLER, CARBON STEEL | New OEM | Contact Us |
| 15-276860-00 | CMP | Speedfam | FLANGE,NIPPLE,NUCLEAR TUBE LIGHT,MV200 | New OEM | Contact Us |
| 15-291593-00 | CMP | Speedfam | INSERT, STACKED, 7.60"NC, 7.57"FLAT, .200"SP | New OEM | Contact Us |
| 15-315788-00 | CMP | Speedfam | BASE,SINGLE BUTTON,SRD CHUCK,ANTI-SKID | New OEM | Contact Us |
| 15-325759-00 | CMP | Speedfam | DIAPHRAGM,WEAR RING | New OEM | Contact Us |
| 15-325760-00 | CMP | Speedfam | DIAPHRAGM,OVERLAY | New OEM | Contact Us |
| 15-348475-00 | CMP | Speedfam | COUPLING,PNEU,7-CHAN,CARRIER,FLOATING | New OEM | Contact Us |
| 15-354355-00 | CMP | Speedfam | CLAMP,CAP,DRIVELINE COUPLING | New OEM | Contact Us |
| 15-358770-00 | CMP | Speedfam | PLATE,INVERTER ADAPTER,S11,2HP | New OEM | Contact Us |
| 15-358771-00 | CMP | Speedfam | PLATE,INVERTER ADPATER,S11,1/2HP | New OEM | Contact Us |
| 15-361383-00 | CMP | Speedfam | PLATEN,THRU BRUSH,CLARUS CLEANER | New OEM | Contact Us |
| 15-367555-00 | CMP | Speedfam | SHIM,.025THK,200MM,WFR CAR,MYLAR | New OEM | Contact Us |
| 15-367557-00 | CMP | Speedfam | SHIM,0.051MMTHK,200MM,WFR CAR | New OEM | Contact Us |
| 15-375505-00 | CMP | Speedfam | BRKT,PNEUMATICS EXTENSION | New OEM | Contact Us |
| 15-388546-00 | CMP | Speedfam | PLATEN,UPPER,THRU BR,CLARUS,PEEK,MV200 | New OEM | Contact Us |
| 15-388547-00 | CMP | Speedfam | COLLAR,THRU BRUSH,CLARUS,PEEK | New OEM | Contact Us |
| 15-388548-00 | CMP | Speedfam | CAP,CLARUS,PEEK,MV200 | New OEM | Contact Us |
| 15-388549-00 | CMP | Speedfam | PLATEN,LOWER,CLARUS,PEEK,MV200 | New OEM | Contact Us |
| 15-392367-00 | CMP | Speedfam | ROLLER,SENSOR,CLARUS CLEANER,MV200 | New OEM | Contact Us |
| 15-399921-00 | CMP | Speedfam | PLATE,CALIBRATION CLAMP,676/776 | New OEM | Contact Us |
| 15-405248-00 | CMP | Speedfam | PLATE,ROLLER RING,PEEK,CLARUS,MV200 | New OEM | Contact Us |
| 15-433332-00 | CMP | Speedfam | PLATE,BELL,POLISH SOLID PLATEN,BOLT-ON | New OEM | Contact Us |
| 15-433333-00 | CMP | Speedfam | PLATEN,200MM,SOLID,LP CAPABLE,BOLT-ON,MV200 | New OEM | Contact Us |
| 15-460620-00 | CMP | Speedfam | FTG,SLURRY DIAPHRAGM,316SST | New OEM | Contact Us |
| 15-460622-00 | CMP | Speedfam | SCRW,FLAT HD,SLOTTED,MOD,316SST | New OEM | Contact Us |
| 16-273307-00 | CMP | Speedfam | DIFFUSER, LA, EWD, 7.7 ID, 200MM, NEXT | New OEM | Contact Us |
| 16321-01 | CMP | Speedfam | DISK DRIVE, FLOPPY 3.5 IN - ALT | New OEM | Contact Us |
| 16-350920-00 | CMP | Speedfam | MEMBRANE,SAC,200MM,CATIONIC,NEXT CELL | New OEM | Contact Us |
| 16-464842-00 | CMP | Speedfam | BRKT, APM, ROTATION SNSR, MP1, MP3 | New OEM | Contact Us |
| 17-3219 | CMP | Speedfam | BOLT, CARBON STEEL | New OEM | Contact Us |
| 17-365850-00 | CMP | Speedfam | PLATE,INNER PNL,R2 EMO,GENMARK | New OEM | Contact Us |
| 18-0600-03 | CMP | Speedfam | SCRW,PH PNHD, 6-32 X 3/8 L, CPS | New OEM | Contact Us |
| 18-0873-05 | CMP | Speedfam | SCRW,FLAT,HEX,8-32x.5,SS | New OEM | Contact Us |
| 18-1001-03 | CMP | Speedfam | SCRW,SKT,HEX,10-32X.375,SS | New OEM | Contact Us |
| 18-182950-00 | CMP | Speedfam | BLADDER,01011,T4,300MM,TAPERED TAB | New OEM | Contact Us |
| 18-351216-00 | CMP | Speedfam | BLADDER,DIAPHRAGM,SLURRY,.074THK,NO CUTO | New OEM | Contact Us |
| 18-453766-00 | CMP | Speedfam | BLADDER,1011,T1,200MM,TAPER TAB,VERSION2 | New OEM | Contact Us |
| 18-456163-00 | CMP | Speedfam | BLADDER,DIAPHRAGM,WFR HD,FAIRPRENE,LONGW | New OEM | Contact Us |
| 19-1030-32 | CMP | Speedfam | NUT, HEX, 10-32, SS | New OEM | Contact Us |
| 19-10312-00 | CMP | Speedfam | CBL ASSY,IND,ARM | New OEM | Contact Us |
| 1920-100975 | CMP | Speedfam | RING,RETAINING INT 37.7MM OD 1.27TH,SS,MS16627-1137 | New OEM | Contact Us |
| 1920-737509 | CMP | Speedfam | RING,RETAINING SPIRAL 52MM | New OEM | Contact Us |
| 1920-737521 | CMP | Speedfam | RING,RETAINING 25MM | New OEM | Contact Us |
| 19-2239-20 | CMP | Speedfam | NUT,1/4-20,SELF LOCKING,SST,(NYLOK) | New OEM | Contact Us |
| 19-2665 | CMP | Speedfam | WSHR,THRUST,.375 ID X .812 OD X .062 THK,SST | New OEM | Contact Us |
| 19-2677 | CMP | Speedfam | WSHR,FLAT,FNDR,17/64 ID X 1 OD X 3/64 THK,SST | New OEM | Contact Us |
| 2000-110048 | CMP | Speedfam | GAUGE,GUARD W/0-30PSI PNL MT GAUGE | New OEM | Contact Us |
| 2000-110065 | CMP | Speedfam | GAUGE,GUARD 0-30PSI MOD PNL MT 1/8F | New OEM | Contact Us |
| 2000-110066 | CMP | Speedfam | GAUGE,GUARD 1-100PSI MOD PNL MT 1/8 | New OEM | Contact Us |
| 2000-111517 | CMP | Speedfam | METER,DIGITAL STRAIN GAGE 4 DIGIT | New OEM | Contact Us |
| 20-00303-00 | CMP | Speedfam | CLAMP,SPLIT,1/4ID | New OEM | Contact Us |
| 2000-700275 | CMP | Speedfam | GAUGE,PRESSURE 0-100PSI | New OEM | Contact Us |
| 2000-700276 | CMP | Speedfam | GAUGE, PRESSURE 0-160 | New OEM | Contact Us |
| 2000-700278 | CMP | Speedfam | GAUGE,PRESSURE 0-60 | New OEM | Contact Us |