Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 2315-700009 | CMP | Speedfam | ADPTR,FTG 10-32 TO 1/8 | New OEM | Contact Us |
| 2315-770044 | CMP | Speedfam | ADPTR,FLANGE 776 WAFER HEAD | New OEM | Contact Us |
| 23-2932 | CMP | Speedfam | SWITCH, OPTO,L-SHAPE | New OEM | Contact Us |
| 2350-718404 | CMP | Speedfam | HOSE,HOIST HYDRAULIC | New OEM | Contact Us |
| 2425-110622 | CMP | Speedfam | NOZZLE,PRESENCE DETECTION BUFF | New OEM | Contact Us |
| 2425-111815 | CMP | Speedfam | GUN,SPRAY DI RECIRULATING | New OEM | Contact Us |
| 2425-112504 | CMP | Speedfam | NOZZLE,.008 MIST SST | New OEM | Contact Us |
| 2425-700291 | CMP | Speedfam | GUN,SPRAY,W/3/6NPT PORT CONNECTION | New OEM | Contact Us |
| 2425-770537 | CMP | Speedfam | NOZZLE,SPRAY 1/8 SF-CE2 | New OEM | Contact Us |
| 2450-700475 | CMP | Speedfam | PUMP,MTR SLURRY | New OEM | Contact Us |
| 2450-701227 | CMP | Speedfam | PUMP,HEAD | New OEM | Contact Us |
| 2475-109687 | CMP | Speedfam | REGULATOR,AIR 1/8NPT W/BRKT | New OEM | Contact Us |
| 2475-112173 | CMP | Speedfam | REGULATOR,0-15PSI 10VDC 1/4PORT | New OEM | Contact Us |
| 2475-700257 | CMP | Speedfam | FLOW CONTROL,1/4NPT TO 1/4NPT | New OEM | Contact Us |
| 2475-700374 | CMP | Speedfam | MUFFLER,CLIPPARD | New OEM | Contact Us |
| 2475-700490 | CMP | Speedfam | REGULATOR,AIR | New OEM | Contact Us |
| 2475-701382 | CMP | Speedfam | REGULATOR,G4 | New OEM | Contact Us |
| 2475-737527 | CMP | Speedfam | REGULATOR,ELECTRO PUE 0-100 PSIG | New OEM | Contact Us |
| 2475-738023 | CMP | Speedfam | REGULATOR, 150PSI | New OEM | Contact Us |
| 2475-739173 | CMP | Speedfam | REGULATOR,AIR 3/8"MNPT 7-100PSI RLVG | New OEM | Contact Us |
| 2475-739174 | CMP | Speedfam | MUFFLER, 1/4MNPT POLYETHYLENE | New OEM | Contact Us |
| 2475-770165 | CMP | Speedfam | REGULATOR,776 PRESSURE 0-30 | New OEM | Contact Us |
| 2475-770752 | CMP | Speedfam | REGULATOR,1/2" W/INTEGRAL FILTER | New OEM | Contact Us |
| 2480-737597 | CMP | Speedfam | FLOWMETER,ROTARY .3 TO 3 L/MIN | New OEM | Contact Us |
| 2480-737598 | CMP | Speedfam | FLOWMETER,ROTARY .1 TO 1 L/MIN | New OEM | Contact Us |
| 2600-739733 | CMP | Speedfam | ADHESIVE,ULTRA BLUE RTV SILICONE | New OEM | Contact Us |
| 2630-700906 | CMP | Speedfam | LUBRICANT,ROBOT | New OEM | Contact Us |
| 2630-717865 | CMP | Speedfam | KRYTOX, GPL 205 | New OEM | Contact Us |
| 27-181952-00 | CMP | Speedfam | OEM SPARE,LAMP (BULB),FOR FL2002 | New OEM | Contact Us |
| 27-282244-00 | CMP | Speedfam | PWR SPLY,24V,2.5A,60W,DIN RAIL,SLIM LINE | New OEM | Contact Us |
| 27-311542-00 | CMP | Speedfam | PUMP,AIR DRIVEN,5:1,DOUBLE ENDED | New OEM | Contact Us |
| 27-314860-00/RW | CMP | Speedfam | COMPUTER,CLEANER,200MM,ORBITAL | New OEM | Contact Us |
| 27-339409-00 | CMP | Speedfam | PUMP,VAC,PIAB X60F5-KNA | New OEM | Contact Us |
| 27-345639-00 | CMP | Speedfam | GEN,FIBER OPTICS,FLASH LAMP ADJUSTABLE | New OEM | Contact Us |
| 27-346944-00 | CMP | Speedfam | DISPLAY, MONITOR LCD | New OEM | Contact Us |
| 27-358810-00/OBS | CMP | Speedfam | CNTRLR,VFD,MM37/2,230V,370W | New OEM | Contact Us |
| 27-359300-00 | CMP | Speedfam | CNTRLR,INVERTER,VFS11,1/2HP,240V,0.4KW | New OEM | Contact Us |
| 27-381568-00 | CMP | Speedfam | END EFFECTOR, W/ ROTATION BOX | New OEM | Contact Us |
| 27-384575-00 | CMP | Speedfam | CNTRLR,EXTENDER,24VDC,25W,1A,LONGVIEW | New OEM | Contact Us |
| 27-414137-00 | CMP | Speedfam | COMPUTER,SYSCON DUAL CORE | New OEM | Contact Us |
| 27-414138-00 | CMP | Speedfam | COMPUTER,CLARUS CLEANER DUAL CORE | New OEM | Contact Us |
| 27-414139-00 | CMP | Speedfam | COMPUTER,WHS DUAL CORE | New OEM | Contact Us |
| 27-414144-00 | CMP | Speedfam | COMPUTER,MP DUAL CORE | New OEM | Contact Us |
| 27-448663-00 | CMP | Speedfam | PWR SPLY,24V,21A,500W,84-264VAC,FULLY REGULATED O/P | New OEM | Contact Us |
| 27-451916-00 | CMP | Speedfam | DISPLAY,LCD,19SXGA,TOUCHSCREEN,W/ RESIS | New OEM | Contact Us |
| 27-999748-00 | CMP | Speedfam | CYL AIR 3/4 0X10' | New OEM | Contact Us |
| 2805-101888 | CMP | Speedfam | ASSY,WTR TRCK UNLD STAT INST 200MM | New OEM | Contact Us |
| 2805-102149 | CMP | Speedfam | ASSY,UNLOAD SHOE 200MM INVERT CASSE | New OEM | Contact Us |
| 2805-102150 | CMP | Speedfam | ASSY,LOAD SHOE 200MM INVERT CASS | New OEM | Contact Us |
| 2805-108452-001 | CMP | Speedfam | ASSY,PAD OSCILLATOR MP1 & MP3 | New OEM | Contact Us |
| 2805-108452-002 | CMP | Speedfam | ASSY,PAD OSCILLATOR MP2 & MP4 | New OEM | Contact Us |
| 2805-109621 | CMP | Speedfam | ASSY,MP1 & MP3 LOWER MTR HI SPEED | New OEM | Contact Us |
| 2805-109622 | CMP | Speedfam | ASSY,MP2 & MP4 LOWER MTR HI SPEED | New OEM | Contact Us |
| 2805-109927 | CMP | Speedfam | ASSY,BLADDERLESS PAD COND ARM | New OEM | Contact Us |
| 2805-110158 | CMP | Speedfam | ASSY,R1 CENTER BAR CONTACT WAND | New OEM | Contact Us |
| 2805-110883 | CMP | Speedfam | ASSY,ROLLER LARGE BUFF | New OEM | Contact Us |
| 2805-110927 | CMP | Speedfam | ASSY,PAD CONDITION MANF | New OEM | Contact Us |
| 2805-111263 | CMP | Speedfam | ASSY, MTR W/CONN BUFFER HEAD &PLTN | New OEM | Contact Us |
| 2805-111268 | CMP | Speedfam | ASSY,ROLLER SMALL BUFF | New OEM | Contact Us |
| 2805-111572 | CMP | Speedfam | KIT ASSY,PLATEN BUFF | New OEM | Contact Us |
| 2805-111573 | CMP | Speedfam | ASSY,PLATEN LIFT | New OEM | Contact Us |
| 2805-112227 | CMP | Speedfam | ASSY,SPRAY BOX 200MM | New OEM | Contact Us |
| 2805-112593 | CMP | Speedfam | ASSY,MP2 & MP4 FLOW CONTROL WAFER CYL676 | New OEM | Contact Us |
| 2805-700905 | CMP | Speedfam | ASSY,PAD ALIGNMENT FIXTURE | New OEM | Contact Us |
| 2805-700919 | CMP | Speedfam | KIT,POLISH HEAD TUBING | New OEM | Contact Us |
| 2805-701363 | CMP | Speedfam | ASSY,POLISH BELL | New OEM | Contact Us |
| 2805-701374 | CMP | Speedfam | ASSY,WAND TAPE | New OEM | Contact Us |
| 2805-717728 | CMP | Speedfam | ASSY,MP1 & MP3 FLOW CONTROL WAFER CYL676 | New OEM | Contact Us |
| 2805-717749 | CMP | Speedfam | ASSY,PAD COND BRUSH W/INSERTS | New OEM | Contact Us |
| 2805-718859 | CMP | Speedfam | ASSY,WAND CERAMIC 4 CHANNEL 90MIL | New OEM | Contact Us |
| 2805-737524 | CMP | Speedfam | ASSY,BALL SPLINE | New OEM | Contact Us |
| 2805-737567 | CMP | Speedfam | ASSY,676 200MM PARTS (CONVERSION KIT) | New OEM | Contact Us |
| 2805-737801 | CMP | Speedfam | ASSY,CASSETTE MANF OPTION 6 | New OEM | Contact Us |
| 2805-738078 | CMP | Speedfam | ASSY,WAFER TRANSFER HORIZ 150/200MM | New OEM | Contact Us |
| 2805-738104 | CMP | Speedfam | ASSY,WAFER HEAD | New OEM | Contact Us |
| 2805-738124 | CMP | Speedfam | ASSY,FILTER UPPER MP PNEU PANEL | New OEM | Contact Us |
| 2805-738143 | CMP | Speedfam | ASSY,POL HD 676 SST POL BELL INSTAL | New OEM | Contact Us |
| 2805-738144 | CMP | Speedfam | ASSY,POL BELL SST MP CHAMBER | New OEM | Contact Us |
| 2805-738166 | CMP | Speedfam | ASSY,DIAMOND STRIP BLADDER | New OEM | Contact Us |
| 2805-738196 | CMP | Speedfam | ASSY,WAFER HOLDER W/FLATS 200MM | New OEM | Contact Us |
| 2805-738543 | CMP | Speedfam | ASSY,WAFER CARRIER 200MM.040 DIA HOLES | New OEM | Contact Us |
| 2805-738609 | CMP | Speedfam | ASSY,BALL SPLINE ARM CHAM 1 | New OEM | Contact Us |
| 2805-738691 | CMP | Speedfam | ASSY,BALL SPLINE ARM CHAM 2 | New OEM | Contact Us |
| 2805-738835 | CMP | Speedfam | ASSY,SLURRY SHIELD JACKING | New OEM | Contact Us |
| 2805-739454 | CMP | Speedfam | ASSY,SLURRY PUMP HOSE W/POLYPR ELBW | New OEM | Contact Us |
| 2805-739664 | CMP | Speedfam | GEARBOX,PAD CONDITIONER | New OEM | Contact Us |
| 2805-739684 | CMP | Speedfam | ASSY,UPPER MTR SNSR 776 | New OEM | Contact Us |
| 2805-739732 | CMP | Speedfam | ASSY,POLISH HEAD 776 | New OEM | Contact Us |
| 2805-739854 | CMP | Speedfam | ASSY,DWO DI MANF RIGHT | New OEM | Contact Us |
| 2805-739855 | CMP | Speedfam | ASSY,DWO DI MANF LEFT | New OEM | Contact Us |
| 2805-739927 | CMP | Speedfam | ASSY,776 PAD CONDITIONER KEYED | New OEM | Contact Us |
| 2805-740107 | CMP | Speedfam | ASSY,ROLLER RING BU2 200MM FLATS | New OEM | Contact Us |
| 2805-770200/RW | CMP | Speedfam | ASSY,WAFER HEAD 676 776 MV | New OEM | Contact Us |
| 2805-772043 | CMP | Speedfam | ASSY,WAND R1 | New OEM | Contact Us |
| 2805-772045 | CMP | Speedfam | ASSY,WAND R2 | New OEM | Contact Us |
| 2805-772057 | CMP | Speedfam | ASSY,LOAD CUP 200MM 776 | New OEM | Contact Us |
| 2806-105382 | CMP | Speedfam | ASSY,CASS SHOE LOAD 100MM | New OEM | Contact Us |
| 2806-105383 | CMP | Speedfam | ASSY,SHOE UNLOAD 100MM | New OEM | Contact Us |
| 2807-112051 | CMP | Speedfam | ASSY,MP4 W/4.101 (676 Tool) | New OEM | Contact Us |
| 2807-719064 | CMP | Speedfam | SYSCON W/VERSION 3.00E2 | New OEM | Contact Us |