Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 61-400446-00 | CMP | Speedfam | END EFFECTOR,BODY ASSY SST GENMARK | New OEM | Contact Us |
| 61-414424-00 | CMP | Speedfam | MOTOR,BRUSHLESS 144 OZ-IN 3/8 SHAFT | New OEM | Contact Us |
| 61-442706-00 | CMP | Speedfam | MOTOR,BRUSHLESS 101 OZ-IN 3/8" SHAFT | New OEM | Contact Us |
| 62-307712-01 | CMP | Speedfam | SWITCH,FLOW,100 ML/MIN TRIP,1/8 PILLAR,C | New OEM | Contact Us |
| 63-314675-00 | CMP | Speedfam | KIT, SEALS, ROTARY UNION | New OEM | Contact Us |
| 63-314676-00 | CMP | Speedfam | KIT,SEALS AND BEARING,ROTARY UNION | New OEM | Contact Us |
| 63-380232-00 | CMP | Speedfam | OEM SPARE,PROTECTOR ASSY,LEXAN POLYCARBO | New OEM | Contact Us |
| 63-441958-00 | CMP | Speedfam | OEM SPARE,COMPUTER,EC2,QNX4,PLATFORM,E-NET | New OEM | Contact Us |
| 679-205332-001 | CMP | Speedfam | SNSR,CYL,SOLID STATE,5-28 VDC,NPN | New OEM | Contact Us |
| 683-210239-001 | CMP | Speedfam | CA,ASSY, SNSR BRD, DB25M/F -DB9M | New OEM | Contact Us |
| 683-210239-002 | CMP | Speedfam | CA,ASSY,SNSR BRD,DB25M/F - DB9F | New OEM | Contact Us |
| 683-210241-001 | CMP | Speedfam | CA,ASSY,ADPTR,DB9M/F-DB50M | New OEM | Contact Us |
| 71-284590-00 | CMP | Speedfam | TOOL,GAUGE BLOCK,GRADE2 CERAMIC,2MM | New OEM | Contact Us |
| 713-028230-001 | CMP | Speedfam | SLEEVE, INSULATOR, BANANA JACK | New OEM | Contact Us |
| 713-175280-001 | CMP | Speedfam | SHLD, APM SPEED SENSOR, M | New OEM | Contact Us |
| 71-361148-00 | CMP | Speedfam | SPECTROGRAPH,OEP,FIBER OPTICS 7 CHANNEL | New OEM | Contact Us |
| 714-002622-001 | CMP | Speedfam | STOP SWITCH EXIT POINT | New OEM | Contact Us |
| 715-012523-002 | CMP | Speedfam | PULLEY TIMING BELT 12 GROOVE | New OEM | Contact Us |
| 715-028229-002 | CMP | Speedfam | FTG, ADPTR, BANANA JACK | New OEM | Contact Us |
| 715-213646-001 | CMP | Speedfam | BRKT,MTG PLATE, XDCR,PRESSURE | New OEM | Contact Us |
| 716-021679-003 | CMP | Speedfam | PAD, WAFER HOLDER | New OEM | Contact Us |
| 716-021773-002 | CMP | Speedfam | GASKET, BELL JAR, 9.250" | New OEM | Contact Us |
| 716-159969-001 | CMP | Speedfam | BLADDER,T1,200MM,TAPERED TAB,KIRKHILL | New OEM | Contact Us |
| 716-161709-001 | CMP | Speedfam | DIAPHRAGM,SLURRY,0.074 THK EPDM | New OEM | Contact Us |
| 72-176556-00 | CMP | Speedfam | TOOL,LIGHT PIN PLUG INSTL TOP | New OEM | Contact Us |
| 72-176759-00 | CMP | Speedfam | FIXTURE,ASSY,PLATEN W/LIGHT PIN 200MM | New OEM | Contact Us |
| 72-184223-00 | CMP | Speedfam | TOOL,TORQUE SCRW DRIVER,7-36 IN-LBS | New OEM | Contact Us |
| 72-185218-00 | CMP | Speedfam | GAUGE,CAL,SNSR,CARRIER,025 | New OEM | Contact Us |
| 728-087677-010 | CMP | Speedfam | SCR,FLH,PH,M4 X 0.7 X 10MM LG,PEEK | New OEM | Contact Us |
| 73016-09 | CMP | Speedfam | FILTER UV-23,313NM+4NM | New OEM | Contact Us |
| 73277-04 | CMP | Speedfam | VLV,BELLOWS-AIR(F-M)VCR,NC | New OEM | Contact Us |
| 739-041591-005 | CMP | Speedfam | GSKT,RF,.187 DIA,LOW FORCE,5FT | New OEM | Contact Us |
| 73912-04 | CMP | Speedfam | NUT-5/16-24,JAM-SS | New OEM | Contact Us |
| 771-090453-002 | CMP | Speedfam | CONVECTRON, TUBE | New OEM | Contact Us |
| 771-213638-001 | CMP | Speedfam | XDCR,PRESSURE,0-25PSI | New OEM | Contact Us |
| 78-0090-01 | CMP | Speedfam | O-RING, 2-380, 11.475 ID X .207 W,SILICONE | New OEM | Contact Us |
| 78-2836 | CMP | Speedfam | SEAL, LIP | New OEM | Contact Us |
| 790-168059-001 | CMP | Speedfam | STOP WAFER ARRESTOR | New OEM | Contact Us |
| 79-412684-00 | CMP | Speedfam | LABEL,ADHESIVE STRIPED SVID2 | New OEM | Contact Us |
| 796-008792-012 | CMP | Speedfam | SCR, SOC HD VNT, 10-32 X 3/4 LG | CE! | New OEM | Contact Us |
| 799-205339-001 | CMP | Speedfam | CPU,COMPACT,AC PWR SPLY,RLY,8KB DATA | New OEM | Contact Us |
| 80-0002-048 | CMP | Speedfam | SENSOR CLAMP,UNVRSL.CLIPPARD | New OEM | Contact Us |
| 839-190347-102 | CMP | Speedfam | ASSY,GND,STRP,FL CA | New OEM | Contact Us |
| 853-001235-001 | CMP | Speedfam | ASSY CABLE EA ROM RIBBON | New OEM | Contact Us |
| 853-027430-003 | CMP | Speedfam | ASSY,LIMIT SWITCH,LIFTER,DOWN | New OEM | Contact Us |
| 853-190259-001 | CMP | Speedfam | ASSY, STPR MTR, ARM DRV EXT | New OEM | Contact Us |
| 853-200944-001 | CMP | Speedfam | KIT,REFURB,SST,ONSERT,B/S,NO FTGS/SCREWS KTI for OnSemi | New OEM | Contact Us |
| 853-200951-001 | CMP | Speedfam | KIT,REFURB,PLASTIC ONSERT,BAYSEAL KTI for TI | New OEM | Contact Us |
| 853-200974-001 | CMP | Speedfam | KIT,ONSERT REFURB,CUSTOMER,KT1 | New OEM | Contact Us |
| 856-184099-001 | CMP | Speedfam | KIT,UPGRD,SFTW CNTRLS,STDY SWP,472 AEON | New OEM | Contact Us |
| 857-159412-001 | CMP | Speedfam | KIT,CUST REFURB,KEVLAR T1 BLADDER,VER 2 (Type RT1 for IFX) | New OEM | Contact Us |
| 857-203090-001 | CMP | Speedfam | KIT,CYLINDER,ARM ACTUATOR, 372 | New OEM | Contact Us |
| 857-205342-001 | CMP | Speedfam | KIT,INSTL,CPU,COMPACT,MDL,ANALOG | New OEM | Contact Us |
| 857-213659-001 | CMP | Speedfam | KIT,XDCR,PRESSURE,0-25 PSI | New OEM | Contact Us |
| 857-215970-001 | CMP | Speedfam | KIT, CYL,63MM BORE W/ SENSOR | New OEM | Contact Us |
| 90-2670 | CMP | Speedfam | PCA, INTERFACE BOARD | CE! | New OEM | Contact Us |
| 931001-14 | CMP | Speedfam | SCRW,FHC-M4X16,A2-SST,DIN 7991 | New OEM | Contact Us |
| 931002-9 | CMP | Speedfam | SCRW,FHC,8-32UNCX3/8,A2-SST | New OEM | Contact Us |
| 931005-122 | CMP | Speedfam | SCRW,SHC,M4X18,A2-SST | New OEM | Contact Us |
| 931005-127 | CMP | Speedfam | SCRW,SHC,M2X6,A2-SST | New OEM | Contact Us |
| 931005-28 | CMP | Speedfam | SCRW,SHC,M4X12,A2-SST | New OEM | Contact Us |
| 931005-33 | CMP | Speedfam | SCRW,SHC,M4X20,A2-SST | New OEM | Contact Us |
| 931005-37 | CMP | Speedfam | SCRW,SHC,M4X40,A2-SST | New OEM | Contact Us |
| 931005-43 | CMP | Speedfam | SCRW,SHC,M5X12,A2-SST | New OEM | Contact Us |
| 931005-9 | CMP | Speedfam | SCRW, SHC, M2.5X12, A2-SST | New OEM | Contact Us |
| 931006-107 | CMP | Speedfam | SCRW, SHC, 10-24UNCX1/2, SST | New OEM | Contact Us |
| 931006-11 | CMP | Speedfam | SCRW,SHC,8-32UNCX1/2,A2-SST | New OEM | Contact Us |
| 931006-110 | CMP | Speedfam | SCRW,SHC,10-24UNCX7/8,SST | New OEM | Contact Us |
| 931006-114 | CMP | Speedfam | SCRW,SHC,10-24UNCX2-1/2,SST | New OEM | Contact Us |
| 931006-116 | CMP | Speedfam | SCRW,SHC,10-32UNFX1/4,SST | New OEM | Contact Us |
| 931006-128 | CMP | Speedfam | SCRW,SHC,10-32UNFX2,SST | New OEM | Contact Us |
| 931006-13 | CMP | Speedfam | SCRW,SHC,8-32UNCX1,A2-SST | New OEM | Contact Us |
| 931006-137 | CMP | Speedfam | SCRW, SHC, 1/4-20UNCX7/16, SST | New OEM | Contact Us |
| 931006-138 | CMP | Speedfam | SCRW, SHC, 1/4-20UNCX1/2, SST | New OEM | Contact Us |
| 931006-16 | CMP | Speedfam | SCRW,SHC,10-24UNCX3/4,A2-SST | New OEM | Contact Us |
| 931006-173 | CMP | Speedfam | SCRW, SHC, 5/16-18UNCX1-1/4, SST | New OEM | Contact Us |
| 931006-178 | CMP | Speedfam | SCRW,SHC,5/16-24UNFX5/8,SST | New OEM | Contact Us |
| 931006-182 | CMP | Speedfam | SCRW,SHC,5/16-24UNFX1-1/2,SST | New OEM | Contact Us |
| 931006-20 | CMP | Speedfam | SCRW,SHC,10-32UNFX5/16,A2-SST | New OEM | Contact Us |
| 931006-207 | CMP | Speedfam | SCRW,SHC,5/16-18UNCX1-3/8,SST | New OEM | Contact Us |
| 931006-22 | CMP | Speedfam | SCRW,SHC,10-32UNFX1/2,A2-SST | New OEM | Contact Us |
| 931006-224 | CMP | Speedfam | SCRW,SHC,4-40UNCX1/4,316 SST | New OEM | Contact Us |
| 931006-225 | CMP | Speedfam | SCRW,SHC,4-40UNCX1/2,316 SST | New OEM | Contact Us |
| 931006-226 | CMP | Speedfam | SCRW,SHC,6-32UNCX1/4,316 SST | New OEM | Contact Us |
| 931006-227 | CMP | Speedfam | SCRW,SHC,6-32UNCX1/2,316 SST | New OEM | Contact Us |
| 931006-228 | CMP | Speedfam | SCRW,SHC,8-32UNCX3/8,316 SST | New OEM | Contact Us |
| 931006-229 | CMP | Speedfam | SCRW,SHC,8-23UNCX1/2,316 SST | New OEM | Contact Us |
| 931006-233 | CMP | Speedfam | SCRW,SHC,4-40UNCX1/4,316 SST | New OEM | Contact Us |
| 931006-240 | CMP | Speedfam | SCRW,SHC,10-32UNFX3/4,316SST | New OEM | Contact Us |
| 931006-244 | CMP | Speedfam | SCRW,SHC,2-56UNCX5/16,316SST | New OEM | Contact Us |
| 931006-245 | CMP | Speedfam | SCRW,SHC,6-32UNCX7/8,316SST | New OEM | Contact Us |
| 931006-25 | CMP | Speedfam | SCRW,SHC,1/4-20UNCX3/8,A2-SST | New OEM | Contact Us |
| 931006-27 | CMP | Speedfam | SCRW, SHC, 1/4-20UNCX3/4, A2-SST | New OEM | Contact Us |
| 931006-3 | CMP | Speedfam | SCRW,SHC,4-40UNCX3/8,A2-SST | New OEM | Contact Us |
| 931006-40 | CMP | Speedfam | SCRW,SHC,8-32UNCX5/8,A2-SST | New OEM | Contact Us |
| 931006-41 | CMP | Speedfam | SCRW,SHC,10-32UNFX1,A2-SST | New OEM | Contact Us |
| 931006-46 | CMP | Speedfam | SCRW,SHC,6-32UNCX1/2,SST | New OEM | Contact Us |
| 931006-52 | CMP | Speedfam | SCRW,SHC,6-32UNCX5/8,SST | New OEM | Contact Us |
| 931006-53 | CMP | Speedfam | SCRW,SHC,2-56UNCX5/16,SST | New OEM | Contact Us |
| 931006-56 | CMP | Speedfam | SCRW,SHC,10-32UNFX1-1/4,SST | New OEM | Contact Us |