Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 372-72001-1 | CMP | Speedfam | COUPLING,SHAFT | New OEM | Contact Us |
| 372-72065-1 | CMP | Speedfam | PIN, DOWEL EYE BLOCK | New OEM | Contact Us |
| 372-72094 | CMP | Speedfam | CENTER,LOCATE-PIVOT ARM | New OEM | Contact Us |
| 372-72129-1 | CMP | Speedfam | DEUBLIN FLEX COUPLNG ANTIROTATE ARM | New OEM | Contact Us |
| 372-72183-1 | CMP | Speedfam | KEY,LOWER ARM DRIVE | New OEM | Contact Us |
| 372-72184-1 | CMP | Speedfam | KEY, POLISH ARM DRUM SHAFT | New OEM | Contact Us |
| 372-72241-1 | CMP | Speedfam | SHAFT,CARRIER ROTATE MTR | New OEM | Contact Us |
| 372-72260-1 | CMP | Speedfam | SPLINE,ROLLER BRG. | New OEM | Contact Us |
| 372-72264-1 | CMP | Speedfam | DRIVER, RDCR SPINDLE | New OEM | Contact Us |
| 372-72266-1 | CMP | Speedfam | CLAMP,TUBE SPINDLE | New OEM | Contact Us |
| 372-72269-1 | CMP | Speedfam | NUT, HEX | New OEM | Contact Us |
| 372-72274-1 | CMP | Speedfam | SPACER,HEIGHT ADJ .062THK | New OEM | Contact Us |
| 372-72275-1 | CMP | Speedfam | SPACER,HEIGHT ADJ .090THK | New OEM | Contact Us |
| 372-72276-1 | CMP | Speedfam | SPACER,HEIGHT ADJ .032THK | New OEM | Contact Us |
| 372-72278-1 | CMP | Speedfam | SPACER,HEIGHT ADJ .010THK | New OEM | Contact Us |
| 372-72316-1 | CMP | Speedfam | WSHR,FLUID COUPLING | New OEM | Contact Us |
| 372-72361-1 | CMP | Speedfam | SHAFT,CARRIER DRIVE | New OEM | Contact Us |
| 372-72503-1 | CMP | Speedfam | LOCKNUT, CENTER LOCATOR PIVOT ARM | New OEM | Contact Us |
| 372-72564-2 | CMP | Speedfam | BLOCK,V-NOTCH POLISH ARM | New OEM | Contact Us |
| 372-72587-1 | CMP | Speedfam | ARM,DRIVE ENCODER WIRE | New OEM | Contact Us |
| 372-72588-1 | CMP | Speedfam | ASSY,ARM DRIVE 1 WIRE/SPRINGS | New OEM | Contact Us |
| 372-72589-1 | CMP | Speedfam | ARM,DRIVE 2 WIRES/SPRING | New OEM | Contact Us |
| 372-72595-1 | CMP | Speedfam | SHAFT,INPUT ARM DRIVE | New OEM | Contact Us |
| 372-73897-1 | CMP | Speedfam | PULLEY,MTR DRIVE RPC2 | New OEM | Contact Us |
| 372-73918-1 | CMP | Speedfam | BLOCK,ROLLER LIFT/C RPC2 | New OEM | Contact Us |
| 372-73924-1 | CMP | Speedfam | RING, SNSR RETAINING RPC2 | New OEM | Contact Us |
| 372-73927-1 | CMP | Speedfam | SPACER, BLOCK SWIVEL RPC2 | New OEM | Contact Us |
| 372-73937-1 | CMP | Speedfam | MOD-AIR STROKE ACTUATOR-RPC II | New OEM | Contact Us |
| 372-74004-1 | CMP | Speedfam | COVER,AIR ACTUATOR RPC2 POLISHER | New OEM | Contact Us |
| 372-76065-1 | CMP | Speedfam | LOCATOR, PLATEN CLAMP | New OEM | Contact Us |
| 372-76066-1 | CMP | Speedfam | STUD,PLATEN CLAMP | New OEM | Contact Us |
| 372-76067-1 | CMP | Speedfam | NUT,PLATEN CLAMP | New OEM | Contact Us |
| 372-76068-1 | CMP | Speedfam | WSHR,SPACER PLATEN CLAMP | New OEM | Contact Us |
| 372-76113-1 | CMP | Speedfam | SILICONE TUBING,SPINDLE SHAFT | New OEM | Contact Us |
| 372-76114-1 | CMP | Speedfam | SILICONE TUBING,SPNDLE SHFT PLSH PL | New OEM | Contact Us |
| 372-76135-1 | CMP | Speedfam | BUSHING,SEAL | New OEM | Contact Us |
| 372-76525-1 | CMP | Speedfam | SPACER,UPPER POLISH PLATE | New OEM | Contact Us |
| 372M-21111-1 | CMP | Speedfam | FINAL POLISH PLATEN,COOLED (ASSY) | New OEM | Contact Us |
| 372M-27021-1 | CMP | Speedfam | MOD, WASH STATION BRUSH | New OEM | Contact Us |
| 372M-29010-2 | CMP | Speedfam | ASSY,SLURRY FEED FINAL BELOW TABL | New OEM | Contact Us |
| 372M-29011-1 | CMP | Speedfam | SLURRY TUBE FINAL | New OEM | Contact Us |
| 372M-29020-2 | CMP | Speedfam | ASSY,SLURRY FEED PRIMARY BELOW TABL | New OEM | Contact Us |
| 372M-29021-1 | CMP | Speedfam | SLURRY,TUBE PRIMARY | New OEM | Contact Us |
| 372M-36297-1/RW | CMP | Speedfam | REWORKED BOARD,NOISE SUPPRESSION | New OEM | Contact Us |
| 372M-36374-1 | CMP | Speedfam | ASSY,AUX CONTROL CONSOLE PWB | New OEM | Contact Us |
| 372M-37074-1/R | CMP | Speedfam | ASSY,DISK EMULATOR 12 OR LESS EPROM | New OEM | Contact Us |
| 372M-46030-3 | CMP | Speedfam | ASSY,DI1 WTR PRSS REG | New OEM | Contact Us |
| 372M-46076-1 | CMP | Speedfam | ASSY,PANEL PNEUMATIC VALVES | New OEM | Contact Us |
| 372M-46173-51 | CMP | Speedfam | BRKT,MTG PRESSURE REGULATR/GAUGE | New OEM | Contact Us |
| 372M-67107-1 | CMP | Speedfam | SUPPORT,SHUTTLE GUIDE LH | New OEM | Contact Us |
| 372M-67430-1 | CMP | Speedfam | CAP,GUARD WAFER LIFT GUIDE ROD SHLD | New OEM | Contact Us |
| 372M-67431-1 | CMP | Speedfam | GUARD,WAFER LIFT GUIDE SHAFT | New OEM | Contact Us |
| 372M-72019-1 | CMP | Speedfam | PLATE,LOAD CELL | New OEM | Contact Us |
| 372M-76182-1 | CMP | Speedfam | SPACER,LOWER POLISH PLATE | New OEM | Contact Us |
| 38-0015-01 | CMP | Speedfam | SWITCH, MICRO, 3 AMP | New OEM | Contact Us |
| 38-052776-00 | CMP | Speedfam | CABLE,TRACK AND KEYBOARD EXT. | New OEM | Contact Us |
| 38-124025-15 | CMP | Speedfam | CABLE,DATA EXTN,AGV,DB25M-F | New OEM | Contact Us |
| 38-180804-00 | CMP | Speedfam | CABLE,R3 FLEX SIGNAL 4FT | New OEM | Contact Us |
| 38-180805-00 | CMP | Speedfam | CABLE,R3 FLEX PWR 4FT | New OEM | Contact Us |
| 38-2755-03 | CMP | Speedfam | CIRCUIT BREAKER, 2 POLE, 20 AMP, 208 VAC | New OEM | Contact Us |
| 38-288472-00 | CMP | Speedfam | CABLE,ETHERNET,CRSVR,EPD | New OEM | Contact Us |
| 38-377790-00 | CMP | Speedfam | CABLE,SPECTROMETER TRIGGER CNTR,7PIN LEM | New OEM | Contact Us |
| 38-381971-00 | CMP | Speedfam | CABLE,POWER/SIGNAL,200VDC,74L,90PIN,56 | New OEM | Contact Us |
| 3900-727049 | CMP | Speedfam | BRUSH,PAD CONDITIONER | New OEM | Contact Us |
| 3900-738168 | CMP | Speedfam | BRUSH,5.00 LH SPOKES BOTTOM | New OEM | Contact Us |
| 3900-738170 | CMP | Speedfam | BRUSH,5.00 RH SPOKES TOP | New OEM | Contact Us |
| 3910-700046 | CMP | Speedfam | BULB,24V T-4 1/2 | New OEM | Contact Us |
| 3910-700238 | CMP | Speedfam | FILTER,SLURRY | New OEM | Contact Us |
| 3910-700240 | CMP | Speedfam | FILTER,AIR | New OEM | Contact Us |
| 3910-719277 | CMP | Speedfam | FILTER,NYLON SELF DRAIN 1/8 NPTF | New OEM | Contact Us |
| 3910-739149 | CMP | Speedfam | FILTER,AIR 3/4NPT PORT COPPER FREE | New OEM | Contact Us |
| 39-2013 | CMP | Speedfam | LAMP HALOGEN,1000W,120VAC GE | New OEM | Contact Us |
| 3940-108158 | CMP | Speedfam | TAPE,R3 WAND | New OEM | Contact Us |
| 3940-108578 | CMP | Speedfam | TAPE,GORETEX GASKET .040THK | New OEM | Contact Us |
| 3940-109917 | CMP | Speedfam | TAPE,3 WIDE VINYL WHITE CLEAN ROOM | New OEM | Contact Us |
| 3940-770457 | CMP | Speedfam | TAPE,R1 WAND | New OEM | Contact Us |
| 3940-770458 | CMP | Speedfam | TAPE,R2 WAND | New OEM | Contact Us |
| 40-323705-00 | CMP | Speedfam | CABLE,FIBER OPTIC,CURVED PROBE,100UM,200 | New OEM | Contact Us |
| 4102-102045 | CMP | Speedfam | KIT,SHIM 200MM CARRIER BASE | New OEM | Contact Us |
| 42-0010-004 | CMP | Speedfam | CNTRLR,SEMIX MICROCOMPUTE | New OEM | Contact Us |
| 472-17004 | CMP | Speedfam | ASSY,LOAD CUP 100MM | New OEM | Contact Us |
| 472-17025 | CMP | Speedfam | ASSY,TRAY BONDED 100MM(SEE BSC DATA TXT) | New OEM | Contact Us |
| 472-17286-150 | CMP | Speedfam | RING,RETAIN CARRIER 150M N/LIP PPS | New OEM | Contact Us |
| 472-17286-200 | CMP | Speedfam | RING,RETAIN CARRIER 200M N/LIP PPS | New OEM | Contact Us |
| 472-17384 | CMP | Speedfam | CBL ASSY,ARM POSITION PL19-PL355 AND EN1 | New OEM | Contact Us |
| 472-17613 | CMP | Speedfam | TUBE,SLURRY DISTRIBUTION | New OEM | Contact Us |
| 60-178323-00 | CMP | Speedfam | FILTER,REGULATOR | New OEM | Contact Us |
| 60-183985-00 | CMP | Speedfam | FTG,TUBE,5/32 1-TCH,10-32,NKL | New OEM | Contact Us |
| 60-188590-00 | CMP | Speedfam | KIT,FILTER,REPAIR,1MICRON ELEMENT | New OEM | Contact Us |
| 60-275442-00 | CMP | Speedfam | RING,CNTRNG,NW16,AL,ID,PERLAST,G74P | New OEM | Contact Us |
| 60-307931-00 | CMP | Speedfam | CYL,63MM BORE,SINGLE ROD,DBL ACTING | New OEM | Contact Us |
| 60-308465-00 | CMP | Speedfam | REGULATOR,E/P,1/8",A-T DISABLED LOWER FL | New OEM | Contact Us |
| 60-312139-00 | CMP | Speedfam | ALVE,PNEU,5P,2POS,24VDC,W/ADAPTER | New OEM | Contact Us |
| 60-317688-00 | CMP | Speedfam | REGULATOR,E/P,1/8,A-T DISABLED LOWER FL | New OEM | Contact Us |
| 60-321341-00 | CMP | Speedfam | VALVE,PNEU,5P,2-WAY,24VDC,W/ADAPTER | New OEM | Contact Us |
| 60-338008-00 | CMP | Speedfam | REGULATOR,E/P,1/8",A-T DISABLED LOWER FL | New OEM | Contact Us |
| 60-385928-00 | CMP | Speedfam | CYL,3/8"BORE X 4"L,DOUBLE ACTING,SINGLE | New OEM | Contact Us |
| 60-392244-00 | CMP | Speedfam | CYL,COMPACT,1.5"BORE X 1"STROKE,DBL ACTI | New OEM | Contact Us |
| 60-446242-00 | CMP | Speedfam | CYL,COMPACT,40MM BORE,15MM STROKE,DOUBLE | New OEM | Contact Us |
| 61-357619-00 | CMP | Speedfam | BEARING,BALL,8.628 OD,LIMITED TILT | New OEM | Contact Us |