Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 2000-700279 | CMP | Speedfam | GAUGE,PRESSURE 0-60PSI | New OEM | Contact Us |
| 20-0122 | CMP | Speedfam | Fitting, Elbow | New OEM | Contact Us |
| 2005086-00 | CMP | Speedfam | CYLINDER ISO CD85N20-60C-A | New OEM | Contact Us |
| 200540-065 | CMP | Speedfam | REGULATOR,ELECTRO PNEUMATIC 14PSI | New OEM | Contact Us |
| 200837-009 | CMP | Speedfam | TUBING,POLYURETHANE .25OD WHT | New OEM | Contact Us |
| 200837-011 | CMP | Speedfam | TUBING, POLYURETHANE .250D CLEAR | New OEM | Contact Us |
| 200837-013 | CMP | Speedfam | TUBING,POLYURETHANE .375OD BLK | New OEM | Contact Us |
| 200837-017 | CMP | Speedfam | TUBING,POLYURETHANE .375OD GRN | New OEM | Contact Us |
| 20-102683-00 | CMP | Speedfam | REGULATOR, DI, 1/2" | New OEM | Contact Us |
| 20-179876-00 | CMP | Speedfam | STRIP,PVC FOAM SEALANT ADHESIVE | New OEM | Contact Us |
| 20-180582-00 | CMP | Speedfam | SPRING,JACKING TOWER,RED DIE | New OEM | Contact Us |
| 20-182467-00 | CMP | Speedfam | TUBING,STA-PURE PTFE/TEFLON | New OEM | Contact Us |
| 20-185354-00 | CMP | Speedfam | PAD,SUPPORT,PASSIVE EE | New OEM | Contact Us |
| 20-188619-00 | CMP | Speedfam | TUBING,5/32OD BLACK POLYPNEUMATICS | New OEM | Contact Us |
| 202111-004 | CMP | Speedfam | HANGER,PIPE 1" | New OEM | Contact Us |
| 20-301949-00 | CMP | Speedfam | OEM SPARE,PLATEN DRIVE GEAR BOX,372/472 | New OEM | Contact Us |
| 20-315664-00 | CMP | Speedfam | PIN,COTTER,.1875IN,.9375IN,18-8 SS | New OEM | Contact Us |
| 20-384282-00 | CMP | Speedfam | STOP,WAFER ARRESTOR | New OEM | Contact Us |
| 20-384329-00 | CMP | Speedfam | SPRING,TORSION,RH,0.160OD,0.017WIRE,5C | New OEM | Contact Us |
| 20-398448-00 | CMP | Speedfam | SUPPORT,WAFER FRONT MV200 EGEE GENMARK | New OEM | Contact Us |
| 20-398449-00 | CMP | Speedfam | SUPPORT,WAFER REAR MV200 EGEE GENMARK | New OEM | Contact Us |
| 20-398451-00 | CMP | Speedfam | STOP,WAFER GRIP FINGER MV200 EGEE GENMAR | New OEM | Contact Us |
| 20-398453-00 | CMP | Speedfam | PIN,WAFER GRIP FINGER MV200 EGEE GENMARK | New OEM | Contact Us |
| 20-398459-00 | CMP | Speedfam | STOP,WAFER REAR MV200 EGEE GENMARK | New OEM | Contact Us |
| 20-398464-00 | CMP | Speedfam | PIN,WAFER GRIP FINGER ROD MV200 EGEE GENMARK | New OEM | Contact Us |
| 20-398531-00 | CMP | Speedfam | PIN,WAFER ARRESTOR MV200 EGEE GENMARK | New OEM | Contact Us |
| 20-398543-00 | CMP | Speedfam | STOP,SPACER GRIP FINGER MV200 EGEE GENMA | New OEM | Contact Us |
| 20-399655-00 | CMP | Speedfam | PIN,DOWEL,3/32DIA,1/4LG,316SST,PLAIN | New OEM | Contact Us |
| 20-417596-00 | CMP | Speedfam | TUBING,3/4OD,PFA,18CORRUGATION,4.5CUF | New OEM | Contact Us |
| 20-421289-00 | CMP | Speedfam | TUBING,3/4OD,PFA,18CORRUGATION,4.5CUF | New OEM | Contact Us |
| 20-442979-00 | CMP | Speedfam | SPRING,COMP,0.36OD,0.62L,SST,12.41 LBS | New OEM | Contact Us |
| 20-456246-00 | CMP | Speedfam | PIN,SCREW GENMARK END EFFECTOR | New OEM | Contact Us |
| 2100-108885 | CMP | Speedfam | FIXTURE, BRUSH HEIGHT 7700 | New OEM | Contact Us |
| 2100-109254 | CMP | Speedfam | FIXTURE,LOAD CELL BUFF | New OEM | Contact Us |
| 2100-111153 | CMP | Speedfam | TOOL, ALIGNING JACKING RING | New OEM | Contact Us |
| 21-00421-00 | CMP | Speedfam | SCRW,SKT,HEX,8-32X.875 | New OEM | Contact Us |
| 21-0100-03 | CMP | Speedfam | REGULATOR,HFR,DOME,LOADED,VCR | New OEM | Contact Us |
| 21-041269-12 | CMP | Speedfam | SCRW,SKT,HEX,10-32x.75,SS | New OEM | Contact Us |
| 21-041300-06 | CMP | Speedfam | SCRW,FLAT,HEX,6-32x.375,SS | New OEM | Contact Us |
| 21-042024-05 | CMP | Speedfam | WSHR, LOCK,6,SS | New OEM | Contact Us |
| 21-174969-01 | CMP | Speedfam | SCRW,FHC,8-32UNC,1/2,316SST | New OEM | Contact Us |
| 21-179883-00 | CMP | Speedfam | SCRW,SKT,4-40 X 1/2,316 SST | New OEM | Contact Us |
| 21-179972-00 | CMP | Speedfam | SCRW,SKT,HEX,6-32X.375,316SST | New OEM | Contact Us |
| 21-180577-00 | CMP | Speedfam | SCRW,SKT,INT SEAL,10-32 X 1/4 316 SST | New OEM | Contact Us |
| 21-180578-00 | CMP | Speedfam | SCRW,SKT,INT SEAL,6-32 X 3/4 316 SST | New OEM | Contact Us |
| 21-181191-00 | CMP | Speedfam | SCRW,SKT,INT SEAL,1/4-20 X 1.375,VTN,SST | New OEM | Contact Us |
| 21-184002-00 | CMP | Speedfam | SCRW,BTN,HEX,INT SEAL,10-32X.25,VTN,316 | New OEM | Contact Us |
| 21-184837-00 | CMP | Speedfam | SCRW,FLAT,HEX,6-32 X .75,316SST | New OEM | Contact Us |
| 21-2383 | CMP | Speedfam | REGULATOR, MINI PRES 14.5-101.5 PSIG, 4MM T X M5 | New OEM | Contact Us |
| 21-311179-00 | CMP | Speedfam | SCRW,FLAT,HEX,8-32 X .5,316SST,WEAR RING | New OEM | Contact Us |
| 21-342891-00 | CMP | Speedfam | SCRW, HEX, HD, 7/16-20UNFX6, GRADE 8 | New OEM | Contact Us |
| 21-399653-00 | CMP | Speedfam | SCRW,FLAT,HEX,0-80 X 1/8 LG,18-8 SST,PL | New OEM | Contact Us |
| 21-709238-00 | CMP | Speedfam | SPRING,CPRSN,.240OD | New OEM | Contact Us |
| 21-8800-001 | CMP | Speedfam | CABLE,OPTO-INTERRUPTER | New OEM | Contact Us |
| 2200-101134 | CMP | Speedfam | VALVE,2WAY NC 3/8FPT 24VDC BRASS | New OEM | Contact Us |
| 2200-101225 | CMP | Speedfam | VALVE,ANGLE BODY 1/4FNPT | New OEM | Contact Us |
| 2200-101719 | CMP | Speedfam | VALVE,3WAY PNEUMATIC 1/4FPT TEFLON | New OEM | Contact Us |
| 2200-101720 | CMP | Speedfam | VALVE,2 STATION MANF 2HOLE MT | New OEM | Contact Us |
| 2200-110208 | CMP | Speedfam | VALVE,3WAY MANUAL ROLLER LEVER | New OEM | Contact Us |
| 2200-110457 | CMP | Speedfam | VALVE, 12 STATION MANF BUFF | New OEM | Contact Us |
| 2200-110711 | CMP | Speedfam | VALVE,2 STATION MANF 1/4 FLARED | New OEM | Contact Us |
| 2200-110713 | CMP | Speedfam | VALVE,3 STATION MANF | New OEM | Contact Us |
| 2200-110714 | CMP | Speedfam | VALVE,6 STATION MANF | New OEM | Contact Us |
| 22-00248-00 | CMP | Speedfam | BEARING,.8750ODX.3750ID | New OEM | Contact Us |
| 2200-700109 | CMP | Speedfam | VALVE,CHECK PILOT | New OEM | Contact Us |
| 2200-700110 | CMP | Speedfam | VALVE,CHECK PILOT | New OEM | Contact Us |
| 2200-700111 | CMP | Speedfam | VALVE,CHECK PP1/4FPT | New OEM | Contact Us |
| 2200-700752 | CMP | Speedfam | VALVE,2WAY | New OEM | Contact Us |
| 2200-700754 | CMP | Speedfam | VALVE,AIR 3WAY W/BASE | New OEM | Contact Us |
| 2200-700755 | CMP | Speedfam | VALVE,AIR MODIFIED | New OEM | Contact Us |
| 2200-700756 | CMP | Speedfam | VALVE,AIR W/CONN AND LEADS | New OEM | Contact Us |
| 2200-700758 | CMP | Speedfam | VALVE,MAIN AIR MODIFIED | New OEM | Contact Us |
| 2200-700759 | CMP | Speedfam | VALVE,PRESSURE RELIEF 1/4 NPT MALE | New OEM | Contact Us |
| 2200-700761 | CMP | Speedfam | VALVE, SHUTOFF | New OEM | Contact Us |
| 2200-717178 | CMP | Speedfam | VALVE,4WAY AIR | New OEM | Contact Us |
| 2200-718676 | CMP | Speedfam | VALVE,PNEUMATIC 2WAY FLUIDS | New OEM | Contact Us |
| 2200-719287 | CMP | Speedfam | VALVE,3WAY PILOT SS | New OEM | Contact Us |
| 2200-737414 | CMP | Speedfam | VALVE,CHECK 3/8 FLARE | New OEM | Contact Us |
| 2200-737823 | CMP | Speedfam | VALVE,2WAY NC 1/4NPT 4.5MM SST ORFC | New OEM | Contact Us |
| 2200-739150 | CMP | Speedfam | VALVE,SOLENOID 3/8PORT 24VDC N/C | New OEM | Contact Us |
| 2200-739151 | CMP | Speedfam | VALVE, AIR MAIN 3WAY 24VDC 1/2IN/OUT | New OEM | Contact Us |
| 2200-739257 | CMP | Speedfam | VALVE,2WAY HPV W/TOP STRAIGHT FLOW | New OEM | Contact Us |
| 2200-739501 | CMP | Speedfam | VALVE,CHECK LARGE 3/8 FLARE | New OEM | Contact Us |
| 2200-770167 | CMP | Speedfam | VALVE,DWO NVX 4 VALVE MANF | New OEM | Contact Us |
| 2200-770245 | CMP | Speedfam | VALVE,CHECK 1/4 TUBE SST | New OEM | Contact Us |
| 22-0324 | CMP | Speedfam | VALVE, DIAFRAM-VCR NC AP-TECH, M-F | New OEM | Contact Us |
| 22-050359-00 | CMP | Speedfam | GEAR HEAD | New OEM | Contact Us |
| 22-053609-00 | CMP | Speedfam | O-RING,2-276,VITON | New OEM | Contact Us |
| 22-104149-00 | CMP | Speedfam | FTG,TEE,STREET,1/4 NPTF | New OEM | Contact Us |
| 2210-700351 | CMP | Speedfam | MANF, 4 STATION | New OEM | Contact Us |
| 2210-717581 | CMP | Speedfam | MANF,DI DUAL CASSETTE | New OEM | Contact Us |
| 2210-727273 | CMP | Speedfam | MANF,VALVE FOUR | New OEM | Contact Us |
| 22-108210-00 | CMP | Speedfam | ELBOW, MALE, 1/4"NPTX3/8 PFA | New OEM | Contact Us |
| 22-116907-01 | CMP | Speedfam | STRAP,DOME,PANDUIT PLT4H-76 | New OEM | Contact Us |
| 22-138548-00 | CMP | Speedfam | O-RING,2-275,VITON 747-75 | New OEM | Contact Us |
| 22-138704-00 | CMP | Speedfam | ADPTR, .25 NPT x .38 FLARETEK | CE! | New OEM | Contact Us |
| 22-174886-00 | CMP | Speedfam | FTG,ELBOW,ADJUSTABLE,3/32T,316SST | New OEM | Contact Us |
| 22-177243-00 | CMP | Speedfam | O-RING,-210, PERLAST G70H | New OEM | Contact Us |
| 22-180918-00 | CMP | Speedfam | FTG,NUT,FLARE,3/8,PFA | New OEM | Contact Us |
| 22-182416-00 | CMP | Speedfam | SEAL,MV POLISHER WINDOW FRAME GASKET | New OEM | Contact Us |