Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 2810-102368 | CMP | Speedfam | CBL ASSY, SHUTTLE FORCE SNSR | New OEM | Contact Us |
| 2810-103446 | CMP | Speedfam | CBL ASSY,SHUTTLE POST TO RELAY | New OEM | Contact Us |
| 2810-109565 | CMP | Speedfam | CBL ASSY,PL143 TO TB4 | New OEM | Contact Us |
| 2810-109612 | CMP | Speedfam | CBL ASSY, COMPUTER PL1 TO CTRLR PL2 APM | New OEM | Contact Us |
| 2810-109617 | CMP | Speedfam | CBL ASSY,PL5A TO PL6-8 APM | New OEM | Contact Us |
| 2810-109626 | CMP | Speedfam | CBL ASSY,PL141 TO TB4 ULTRA FLEX | New OEM | Contact Us |
| 2810-109670 | CMP | Speedfam | CBL ASSY,PL6 TO CCW SNSR APM | New OEM | Contact Us |
| 2810-109671 | CMP | Speedfam | CBL ASSY,PL7 TO CW SNSR APM | New OEM | Contact Us |
| 2810-109672 | CMP | Speedfam | CBL ASSY,PL8 TO HOME SNSR APM | New OEM | Contact Us |
| 2810-109818 | CMP | Speedfam | CBL ASSY,SYSCON/HUNTAIR ALARM INTERFACE | New OEM | Contact Us |
| 2810-109923 | CMP | Speedfam | CBL ASSY, CNTRLR PL4 TO PL5 APM | New OEM | Contact Us |
| 2810-110420 | CMP | Speedfam | CBL ASSY, SNSR INTERFACE BUFF | New OEM | Contact Us |
| 2810-110531 | CMP | Speedfam | CBL ASSY, PL5 TO PL5A APM 776 | New OEM | Contact Us |
| 2810-110532 | CMP | Speedfam | CBL ASSY,PL10 TO MTR PL11 APM 776 | New OEM | Contact Us |
| 2810-110797 | CMP | Speedfam | CBL ASSY,IN SERVICE INTERFACE | New OEM | Contact Us |
| 2810-110798 | CMP | Speedfam | CBL ASSY,IN SERVICE SNSR | New OEM | Contact Us |
| 2810-111020 | CMP | Speedfam | CBL ASSY, CN46 DEVICE NET COMM NUMATICS | New OEM | Contact Us |
| 2810-111021 | CMP | Speedfam | CBL ASSY, CN47 NUMATICS MANF PWR | New OEM | Contact Us |
| 2810-738233 | CMP | Speedfam | CBL ASSY,PL25 TO TM1/TB6 | New OEM | Contact Us |
| 2810-738236/RW | CMP | Speedfam | CBL ASSY,PL101 TO MTR101 | New OEM | Contact Us |
| 2810-738237 | CMP | Speedfam | CBL ASSY,PL102 TO MTR102 | New OEM | Contact Us |
| 2810-738238 | CMP | Speedfam | CBL ASSY,PL103 TO MTR103 | New OEM | Contact Us |
| 2810-738239 | CMP | Speedfam | CBL ASSY,PL104 TO MTR104 | New OEM | Contact Us |
| 2810-738355 | CMP | Speedfam | CBL ASSY,PL141 TO S128/129 | New OEM | Contact Us |
| 2810-738383 | CMP | Speedfam | CBL ASSY,PL143 TO S130-S132 | New OEM | Contact Us |
| 2810-738402 | CMP | Speedfam | CBL ASSY,PL21/AMP1 TO PL22/23 | New OEM | Contact Us |
| 2810-738404 | CMP | Speedfam | CBL ASSY,PL25 TO PL20 | New OEM | Contact Us |
| 2810-738484 | CMP | Speedfam | C/A,PL43 TO CB3 | New OEM | Contact Us |
| 2810-738536 | CMP | Speedfam | CBL ASSY,TB4-PL27/35 MACVALVE 12FT | New OEM | Contact Us |
| 2810-738822 | CMP | Speedfam | CBL ASSY, CN337 TO CN326-329 BUFF | New OEM | Contact Us |
| 2810-738823 | CMP | Speedfam | CBL ASSY, CN338 TO CN320-323 BUFF | New OEM | Contact Us |
| 2810-739703 | CMP | Speedfam | CBL ASSY, PL65 TO S11-12 | New OEM | Contact Us |
| 2810-740109 | CMP | Speedfam | CBL ASSY,PL54 TO BU2-S8 | New OEM | Contact Us |
| 2850-105607 | CMP | Speedfam | RFK,ROTARY UNION POL ARM DRIVE | New OEM | Contact Us |
| 2850-105731 | CMP | Speedfam | KIT,REPAIR DI SPRAY GUN | New OEM | Contact Us |
| 2850-106767 | CMP | Speedfam | RFK,REPLACEMENT DMC1030 (QU390095) | New OEM | Contact Us |
| 2850-111716 | CMP | Speedfam | RFK,R3 CLASS 1 LASER CONVERSION | New OEM | Contact Us |
| 2850-112221 | CMP | Speedfam | KIT,BLADDERLESS PAD COND 1.9RAD | New OEM | Contact Us |
| 2850-718492 | CMP | Speedfam | KIT,SLURRY DIAPHRAGM FTG | New OEM | Contact Us |
| 2850-771260 | CMP | Speedfam | KIT,CERAMIC WAND TAPE ASSY | New OEM | Contact Us |
| 2855-109391 | CMP | Speedfam | KIT,WAFER HEAD OFFSET ALIGNMENT | New OEM | Contact Us |
| 30-0008-008 | CMP | Speedfam | O-RING | New OEM | Contact Us |
| 31-0004-056 | CMP | Speedfam | VALVE,DIAPHRAGM,3-WAY MAN | New OEM | Contact Us |
| 33-183141-00 | CMP | Speedfam | MTR,STEPPING,24VDC,ROBOT,WRIST | New OEM | Contact Us |
| 33-278673-00 | CMP | Speedfam | MOTOR, BRUSHLESS DC, 48V, SIZE 23 .250 SHAF | New OEM | Contact Us |
| 33-352925-00 | CMP | Speedfam | MOTOR,STEPPERING 2-PH,3A/PH,TWO FLAT | New OEM | Contact Us |
| 33-418537-00 | CMP | Speedfam | MOTOR,GEAR,SYNCHRONOUS,24VAC,6RPM,7W,50:1 | New OEM | Contact Us |
| 34-118545-00 | CMP | Speedfam | CB,25A,2P,MINI,RT | New OEM | Contact Us |
| 34-182059-02 | CMP | Speedfam | SNSR,PROX,INDUCT,PNP,NO,PICO CONN,1M | New OEM | Contact Us |
| 34-188524-00 | CMP | Speedfam | SW,PRESS,ADJ,100-1000PSI,1/4FNPT PRESS C | New OEM | Contact Us |
| 34-301516-05 | CMP | Speedfam | SENSOR,C/A,ROT SENSE,CLARUS PL501 | New OEM | Contact Us |
| 34-303415-00 | CMP | Speedfam | LAMP,HALOGEN,120V,100.0W,CLR,BIRNS | New OEM | Contact Us |
| 34-307941-00 | CMP | Speedfam | SENSOR,CYLINDER,SOLID STATE,10-30VDC,NPN | New OEM | Contact Us |
| 34-343094-00 | CMP | Speedfam | SENSOR,BUFF,PRESSURE 0-100PSI 0-5VOLT | New OEM | Contact Us |
| 34-380215-00 | CMP | Speedfam | LENS,DOME,TUBE LIGHT,3.5,BOROSILICATE G | New OEM | Contact Us |
| 372-15001-1 | CMP | Speedfam | ASSY,LOAD CUP 200MM | New OEM | Contact Us |
| 372-15160-1 | CMP | Speedfam | ASSY,ACTUATOR MOUNT APP1000 | New OEM | Contact Us |
| 372-15421-1 | CMP | Speedfam | BUTTON,CARRIER CTR CONTACT PPS | New OEM | Contact Us |
| 372-15801-1 | CMP | Speedfam | ASSY,WATER TRAP VACUUM(EIP-P0149) | New OEM | Contact Us |
| 372-21072-1 | CMP | Speedfam | O-RING,POLISH PLATEN 20.5/22.5 | New OEM | Contact Us |
| 372-35297-51 | CMP | Speedfam | AIR FILTER ELEMENT,MAIN ELEC CAB | New OEM | Contact Us |
| 372-36316-1 | CMP | Speedfam | ASSY,SERVO AMP MC4 | New OEM | Contact Us |
| 372-45019-1 | CMP | Speedfam | RING,FLOATING DRIVE 150MM CARRIER | New OEM | Contact Us |
| 372-45053-1 | CMP | Speedfam | BUTTON,CARRIER CTR CONTACT DELRIN | New OEM | Contact Us |
| 372-45080-1 | CMP | Speedfam | SPACER,CARRIER .003THK 150MM | New OEM | Contact Us |
| 372-45081-1 | CMP | Speedfam | SPACER,CARRIER .009/.011 150MM | New OEM | Contact Us |
| 372-45083-1 | CMP | Speedfam | SPACER,CARRIER .002THK 150MM | New OEM | Contact Us |
| 372-45084-1 | CMP | Speedfam | SPACER,CARRIER .004THK 150MM | New OEM | Contact Us |
| 372-45090-1 | CMP | Speedfam | SPACER,CARRIER .003THK 200MM | New OEM | Contact Us |
| 372-45091-1 | CMP | Speedfam | SPACER,CARRIER .009/.011THK 200MM | New OEM | Contact Us |
| 372-45093-1 | CMP | Speedfam | SPACER,CARRIER .002THK 200MM | New OEM | Contact Us |
| 372-45094-1 | CMP | Speedfam | SPACER,CARRIER .004THK 200MM | New OEM | Contact Us |
| 372-45096-1 | CMP | Speedfam | SPACER,CARRIER .0125/.0155 200MM | New OEM | Contact Us |
| 372-45104-1 | CMP | Speedfam | SPACER,CARRIER .125/.0155THK 150MM | New OEM | Contact Us |
| 372-45120-1 | CMP | Speedfam | RING,RETAIN 150M CARRIER N/LIP DELR | New OEM | Contact Us |
| 372-45130-1 | CMP | Speedfam | RING,RETAIN 200MM CARRIER N/LIP DEL | New OEM | Contact Us |
| 372-45140-1 | CMP | Speedfam | PIVOT RING,CARRIER EDGE CNTCT 200MM | New OEM | Contact Us |
| 372-45157-1 | CMP | Speedfam | CBASE,150/FLAT | New OEM | Contact Us |
| 372-45163-1 | CMP | Speedfam | CBASE,200/16FLAT | New OEM | Contact Us |
| 372-45179-1 | CMP | Speedfam | PIN,DRIVE RING 200MM | New OEM | Contact Us |
| 372-45233-1 | CMP | Speedfam | ASSY,CARRIER BASE 100M CNTR CONTACT | New OEM | Contact Us |
| 372-45235-1 | CMP | Speedfam | ASSY,CARRIER BASE 150M CNTR CONTACT | New OEM | Contact Us |
| 372-45236-1 | CMP | Speedfam | ASSY,CBASE 200M 16HOLE CNTR Contact | New OEM | Contact Us |
| 372-45524-1 | CMP | Speedfam | HOUSING,CARRIER 200MM | New OEM | Contact Us |
| 372-46024-1 | CMP | Speedfam | CLAMP,BASE GAUGE GUARD | New OEM | Contact Us |
| 372-46028-1 | CMP | Speedfam | CLAMP,BASE DI REGULATOR | New OEM | Contact Us |
| 372-50066-1 | CMP | Speedfam | FEED TUBE,RTRY UNION COOLING PLTN | New OEM | Contact Us |
| 372-67062-1 | CMP | Speedfam | LOCATOR, CASSETTE ALL HIGH | New OEM | Contact Us |
| 372-67092-1 | CMP | Speedfam | PIN,CAM ROLLER | New OEM | Contact Us |
| 372-67093-1 | CMP | Speedfam | CAM,ROLLER SHUTTLE PIVOT | New OEM | Contact Us |
| 372-67094-1 | CMP | Speedfam | TORSION SPRING SPACER | New OEM | Contact Us |
| 372-67095-1 | CMP | Speedfam | SPRING,TORSION WAFER TRANSPORT | New OEM | Contact Us |
| 372-67234-1 | CMP | Speedfam | RETAINER,BUSHING | New OEM | Contact Us |
| 372-67312-1 | CMP | Speedfam | CE,RAIL SHUTTLE HORIZONTAL | New OEM | Contact Us |
| 372-67364-1 | CMP | Speedfam | COVER,GUIDE ROD REAR SHUTTLE | New OEM | Contact Us |
| 372-67367-1 | CMP | Speedfam | GUIDE,PIN WAFER LIFT | New OEM | Contact Us |
| 372-67375-1 | CMP | Speedfam | LOCATOR,CASSETTE LOW INVERTED | New OEM | Contact Us |
| 372-67397-1 | CMP | Speedfam | GUIDE,WAFER LIFT 200MM | New OEM | Contact Us |
| 372-68389-1 | CMP | Speedfam | BELLOW,BOOT CASCADE TUB RINSE | New OEM | Contact Us |
| 372-69057-1 | CMP | Speedfam | LOCATOR, CASSETTE ALL LOW 3IN | New OEM | Contact Us |