Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 0770-738177 | CMP | Speedfam | SHAFT,GEAR WFR TRANSFER | New OEM | Contact Us |
| 0770-738680 | CMP | Speedfam | SPINDLE,RETAINING BEARING BUFF | New OEM | Contact Us |
| 0770-739253 | CMP | Speedfam | SPLINE,BALL 80L | New OEM | Contact Us |
| 0770-739687 | CMP | Speedfam | SHAFT,EXTENSION PAD COND SPECIAL | New OEM | Contact Us |
| 0780-107659 | CMP | Speedfam | GEARHEAD,RIGHT ANGLE 10:1 W/SEAL | New OEM | Contact Us |
| 0780-107866 | CMP | Speedfam | GEARHEAD,RIGHT ANGLE 10:1 W/SL1/8HL | New OEM | Contact Us |
| 0780-109166 | CMP | Speedfam | GEARHEAD,MULTIDRIVE BAYSIDE | New OEM | Contact Us |
| 0780-717404 | CMP | Speedfam | GEARBOX,PAD CONDITIONER | New OEM | Contact Us |
| 0790-109924 | CMP | Speedfam | BASE,PAD CONDITIONER 1.90 X .482 776 | New OEM | Contact Us |
| 0790-738890 | CMP | Speedfam | BASE,SPRAY PAD COND BLADDERLESS | New OEM | Contact Us |
| 0795-727048 | CMP | Speedfam | BASIN,SLURRY | New OEM | Contact Us |
| 0800-109377 | CMP | Speedfam | BLOCK,PAD COND NOSE | New OEM | Contact Us |
| 0800-110269 | CMP | Speedfam | HEAD,ACTIVE WAND MV | New OEM | Contact Us |
| 0800-727197 | CMP | Speedfam | BLOCK,LOCK LEFT WINDOW INTERLOCK | New OEM | Contact Us |
| 0800-727198 | CMP | Speedfam | BLOCK,LOCK RIGHT WINDOW INTERLOCK | New OEM | Contact Us |
| 0800-738207 | CMP | Speedfam | BLOCK,TENSIONER UPPER ARM | New OEM | Contact Us |
| 0800-738583 | CMP | Speedfam | BLOCK,TENSIONER UPPER ARM | New OEM | Contact Us |
| 0800-740221 | CMP | Speedfam | BLOCK,CLAMP SPLINED SHAFT 4.22 | New OEM | Contact Us |
| 0810-104477 | CMP | Speedfam | WELDMENT,TRAY SHUTTLE 200MM STD | New OEM | Contact Us |
| 0810-110291 | CMP | Speedfam | TRAY,WAFER SUPPORT ACTIVE WAND 200MM MV | New OEM | Contact Us |
| 0810-110733 | CMP | Speedfam | PLATE,LOWER PAD | New OEM | Contact Us |
| 0810-110736 | CMP | Speedfam | PLATE, LARGE GIMBAL | New OEM | Contact Us |
| 0810-717011 | CMP | Speedfam | PLATE,WAFER CARRIER | New OEM | Contact Us |
| 0810-717415 | CMP | Speedfam | PLATE,WAFER BACKING .125 HOLES | New OEM | Contact Us |
| 0810-727274 | CMP | Speedfam | PLATE,MANF 4POS VALVE | New OEM | Contact Us |
| 0810-730020 | CMP | Speedfam | PLATE,ADPTR PAD CONDITIONER | New OEM | Contact Us |
| 0810-737438 | CMP | Speedfam | PLATE,BRUSH UPPER 200MM | New OEM | Contact Us |
| 0810-738534 | CMP | Speedfam | PLATE,WFR BACKING 200MM.04DIA HOLES | New OEM | Contact Us |
| 0810-739736 | CMP | Speedfam | PLATE,MTR MTG ADJUSTABLE LWR MP | New OEM | Contact Us |
| 0815-108477 | CMP | Speedfam | COVER, HV SAFETY UPPER 776 | New OEM | Contact Us |
| 0815-111773 | CMP | Speedfam | SHROUD,EMERGENCY OFF | New OEM | Contact Us |
| 0815-700602 | CMP | Speedfam | SHIELD,TERMINAL SCREW FOR 2SETS OF 4POLE | New OEM | Contact Us |
| 0815-700885 | CMP | Speedfam | COVER,TOP LIFT JACK ASSY | New OEM | Contact Us |
| 0815-700886 | CMP | Speedfam | COVER,LEFT FRONT LIFTING JACK | New OEM | Contact Us |
| 0815-700888 | CMP | Speedfam | COVER,RIGHT FRONT LIFTING JACK | New OEM | Contact Us |
| 0815-717775 | CMP | Speedfam | TURRET,PAD CONDITIONER | New OEM | Contact Us |
| 0815-727102 | CMP | Speedfam | COVER,BLADE 25 SNSR ARRAY | New OEM | Contact Us |
| 0815-727166 | CMP | Speedfam | COVER,BACK LIFTING JACK | New OEM | Contact Us |
| 0815-727370 | CMP | Speedfam | SKIRT,POLISH BELL | New OEM | Contact Us |
| 0815-727395 | CMP | Speedfam | SHIELD,SLURRY MOD16 | New OEM | Contact Us |
| 0815-738270 | CMP | Speedfam | DOOR,ACCESS RODLESS CYLINDER | New OEM | Contact Us |
| 0815-738987 | CMP | Speedfam | COVER,SNSR | New OEM | Contact Us |
| 0815-739264 | CMP | Speedfam | HOOD,SHROUD 150/200MM SRD | New OEM | Contact Us |
| 0815-770157 | CMP | Speedfam | END CAP,776 MTR HOUSE PAD COND LNG | New OEM | Contact Us |
| 0820-110280 | CMP | Speedfam | GUIDE,ACTIVE WAND MV | New OEM | Contact Us |
| 0820-112230 | CMP | Speedfam | GUIDE,SPRAY BOX LONG 200MM 776 | New OEM | Contact Us |
| 0820-112231 | CMP | Speedfam | GUIDE,SPRAY BOX SHORT 200MM 776 | New OEM | Contact Us |
| 0820-722151 | CMP | Speedfam | TOWER,ADJUSTER MICRO PLANARIZER | New OEM | Contact Us |
| 0820-727162 | CMP | Speedfam | ROD,PUSH LIFT JACK ASSY | New OEM | Contact Us |
| 0820-727171 | CMP | Speedfam | ADJUSTER,JACKING SCRW | New OEM | Contact Us |
| 0820-738022 | CMP | Speedfam | SLIDE,RAIL W/BLOCK 1500MM SST | New OEM | Contact Us |
| 0820-739378 | CMP | Speedfam | POST,776 HARD STOP PAD COND | New OEM | Contact Us |
| 0820-739512 | CMP | Speedfam | KIT,ALIGNMENT TOOL PAD | New OEM | Contact Us |
| 0820-770480 | CMP | Speedfam | SUPPORT,CERAMIC WAND TAIL | New OEM | Contact Us |
| 0830-110214 | CMP | Speedfam | MANF,SPINDLE BUFF | New OEM | Contact Us |
| 0830-111046 | CMP | Speedfam | MANF,CH2 | New OEM | Contact Us |
| 0830-112641 | CMP | Speedfam | MANF,2 VALVE N/C 1/4 FLOW OUTLET | New OEM | Contact Us |
| 0830-112642 | CMP | Speedfam | MANF,3 VALVE N/C 1/4 FLOW OUTLET | New OEM | Contact Us |
| 0830-112643 | CMP | Speedfam | MANF,10 VALVE N/C | New OEM | Contact Us |
| 0830-739210 | CMP | Speedfam | MANF,W/12 VALVE PNEUMATIC | New OEM | Contact Us |
| 0830-739447 | CMP | Speedfam | MANF, 3 VLV FURON HPV RIGHT DWO | New OEM | Contact Us |
| 0845-109072 | CMP | Speedfam | WAND, CENTER CONTACT R1 | New OEM | Contact Us |
| 0845-109073 | CMP | Speedfam | WAND,CENTER CONTACT R2 | New OEM | Contact Us |
| 0845-717702 | CMP | Speedfam | ADPTR,CERAMIC WAND | New OEM | Contact Us |
| 0845-717703 | CMP | Speedfam | LOAD DISTRIBUTE PLATE,CERAMIC WAND | New OEM | Contact Us |
| 0845-718858 | CMP | Speedfam | WAND,CERAMIC 3 PIECE 90MIL | New OEM | Contact Us |
| 0845-770455 | CMP | Speedfam | WAND,R2 | New OEM | Contact Us |
| 0845-770580 | CMP | Speedfam | WAND,776 R3 200MM | New OEM | Contact Us |
| 0850-718035 | CMP | Speedfam | ARM,DUAL CASS LIFT RIGHT A192-81M | New OEM | Contact Us |
| 0850-718036 | CMP | Speedfam | ARM,DUAL CASS LIFT LEFT A192-81M | New OEM | Contact Us |
| 0850-718370 | CMP | Speedfam | ARM, CYLINDER EXTENSION MAINT LIFT | New OEM | Contact Us |
| 0850-727006 | CMP | Speedfam | ARM,PAD CONDITIONER | New OEM | Contact Us |
| 0850-738887 | CMP | Speedfam | ARM,SWING PAD COND BLADDERLESS | New OEM | Contact Us |
| 0860-700833 | CMP | Speedfam | LOADER,WAFER POST SPRAY BOX | New OEM | Contact Us |
| 0860-700834 | CMP | Speedfam | BASE,WAFER HOLDER SPRAY BOX | New OEM | Contact Us |
| 0860-700835 | CMP | Speedfam | HOLDER,WAFER FINGERS SPRAY BOX | New OEM | Contact Us |
| 0860-727423 | CMP | Speedfam | HOLDER,TEE | New OEM | Contact Us |
| 0860-738197 | CMP | Speedfam | HOLDER, WAFER 200MM | New OEM | Contact Us |
| 0870-739107 | CMP | Speedfam | FINGER, GRIPPER TALL | New OEM | Contact Us |
| 0880-110703 | CMP | Speedfam | GENERATOR,ULTRA SONIC W/XDCR | New OEM | Contact Us |
| 0880-737917 | CMP | Speedfam | WELDMENT,POLISH BELL SST | New OEM | Contact Us |
| 0880-739155 | CMP | Speedfam | GENERATOR,VACUUM AV116 W/NPT | New OEM | Contact Us |
| 0880-740085 | CMP | Speedfam | WAVE GENERATOR,HIGH SPEED BALANCED | New OEM | Contact Us |
| 0900-111548 | CMP | Speedfam | PLATEN,LOWER BUFF | New OEM | Contact Us |
| 1000-106890 | CMP | Speedfam | SCRW,SET HALF DOG 10-32 X 3/16 | New OEM | Contact Us |
| 1000-108516 | CMP | Speedfam | SCRW,SHC 6-32 X 3/8 SELF LOCK SST | New OEM | Contact Us |
| 1000-700508 | CMP | Speedfam | SCRW,BHC 10-32 X 1-5/8 SST | New OEM | Contact Us |
| 1000-700516 | CMP | Speedfam | SCRW,BHC 4-40 X 1/2 SST | New OEM | Contact Us |
| 1000-700540 | CMP | Speedfam | SCRW,FHC 8-32 X 1/2 SST | New OEM | Contact Us |
| 1000-700541 | CMP | Speedfam | SCRW,FHC 8-32 X 5/8 SST | New OEM | Contact Us |
| 1000-717717 | CMP | Speedfam | SCRW,FHSL 5/16-18 X 3/8 MOD NYLON | New OEM | Contact Us |
| 1000-718017 | CMP | Speedfam | SCRW,SET 4-40 X 1/4 SST | New OEM | Contact Us |
| 1000-718612 | CMP | Speedfam | SCRW,SET 6-32 X 1/4 SST | New OEM | Contact Us |
| 1000-737619 | CMP | Speedfam | SCRW,FLUID LINES 1/4-20UNC | New OEM | Contact Us |
| 1000-737695 | CMP | Speedfam | SCRW,10-32 X 1 O-RING | New OEM | Contact Us |
| 1000-738018 | CMP | Speedfam | SCRW,SHC 5/16-24 X 3/8 O-RING | New OEM | Contact Us |
| 10-155435-00 | CMP | Speedfam | TUBE ASSY,LFCOUT,P2000I,S6,TMP | New OEM | Contact Us |
| 10-155436-00 | CMP | Speedfam | TUBE ASSY, ILDS, LFCIN, P200I, SG | New OEM | Contact Us |
| 120-012 | CMP | Speedfam | HEATSHRINK,3/8 BLACK | New OEM | Contact Us |
| 1200-727320 | CMP | Speedfam | NUT,BLKHD | New OEM | Contact Us |