Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 0300-717933 | CMP | TERMINAL,RING YELLOW #10-8 | New OEM | Contact Us | |
| 0300-717984 | CMP | LOOM, POLY 3/4" | New OEM | Contact Us | |
| 0300-737848 | CMP | CONN,RECTANGULAR MULTI 5/32 OD | New OEM | Contact Us | |
| 0300-738524 | CMP | CORDSET, 2M W/QUICK CONNECT | New OEM | Contact Us | |
| 0300-770125 | CMP | RECPT,776 QUICK CHANGE 4P MALE | New OEM | Contact Us | |
| 0300-770335 | CMP | GRIP,CORD 1" .800-1.065 | New OEM | Contact Us | |
| 0300-770406 | CMP | TERMINAL,776 EQUIPE TEACH | New OEM | Contact Us | |
| 03-021441-00 | Concept One | CABLE ASSY, PS TO 1/F BOARD | New OEM | Contact Us | |
| 03-021442-00 | Concept One | CBL ASSY, I/F BD TO LWR AC | New OEM | Contact Us | |
| 03-029112-00 | Concept One | CBL ASSY, END POINT, RS-232 | New OEM | Contact Us | |
| 03-029509-00 | Concept One | CBL, ASSY, CA296 | New OEM | Contact Us | |
| 03-032160-00 | Concept One | CABLE ASSY,15PIN,BREAKOUT | New OEM | Contact Us | |
| 03-032579-02 | Concept One | CBL ASSY,CA310,40 FT | New OEM | Contact Us | |
| 03-032728-01 | Concept One | CABLE,ACP CVD 25FT. | New OEM | Contact Us | |
| 03-032728-02 | Concept One | CABLE,ACP CVD 50FT | New OEM | Contact Us | |
| 03-032728-03 | Concept One | CABLE,ACP CVD 75FT | New OEM | Contact Us | |
| 03-042741-00 | Concept One | ASSY,HARN,WATER FLOW SW,SPD-S | New OEM | Contact Us | |
| 03-055296-00 | Concept One | HARNESS ASSY, VIDEO SWITCH BOX | New OEM | Contact Us | |
| 03-10411-00 | Concept One | ASSY,SPRING LOADED TC | New OEM | Contact Us | |
| 03-104931-00 | Concept One | CBL ASSY,FLOPPY POWER | New OEM | Contact Us | |
| 03-104934-00 | Concept One | CBL ASSY,FLOPPY SIGNAL,FEMAL | New OEM | Contact Us | |
| 03-10667-00 | Concept One | ASSY,HARN,CVD-D SPINDLE | New OEM | Contact Us | |
| 03-10702-00 | Concept One | CABLE ASSY, CVD, TOP, CVR | New OEM | Contact Us | |
| 03-10819-01 | Concept One | CBL ASSY,PUMP,REMOTE,SPD,75F | New OEM | Contact Us | |
| 03-115665-00 | Concept One | CABLE ASSY,ADPTR,C1,MKS651C/CA | New OEM | Contact Us | |
| 03-133009-07 | Concept One | CBL ASSY,MFC 9P,CA68 | New OEM | Contact Us | |
| 03-142566-00 | Concept One | PCA,DUAL FLEX 8 | New OEM | Contact Us | |
| 03-147415-00 | Concept One | ASSY,RF CURRENT SENSOR PCA | New OEM | Contact Us | |
| 03-155625-02 | Concept One | CABLE ASSY, J4 EXT CABLE 93 | New OEM | Contact Us | |
| 03-164905-01 | GaSonics | ASSY, CABLE, HEATER,26 IN. | New OEM | Contact Us | |
| 03-164905-02 | GaSonics | ASSY, CABLE, HEATER,27 IN | New OEM | Contact Us | |
| 03-167636-00 | Concept One | ASSY, EMO SWITCH | New OEM | Contact Us | |
| 03-171851-00 | GaSonics | CABLE ASSY THERMOSTAT | New OEM | Contact Us | |
| 03-173864-00 | Concept One | HARNESS ASSY,LEFT DIST BOX TO JUNCTION BOX | New OEM | Contact Us | |
| 03-173865-00 | Concept One | HARNESS ASSY,RIGHT DIST BOX TO JUNCTION BOX | New OEM | Contact Us | |
| 03-180277-00 | CMP | CBL ASSY,SNSR,CARRIER,300MM | New OEM | Contact Us | |
| 03-182087-00 | CMP | CBL ASSY,4 PORT COM,SYSCON-VERITY,MV200 | New OEM | Contact Us | |
| 03-2000-01 | GaSonics | TBG, TEFLON, HIPRESS | New OEM | Contact Us | |
| 03-2502 | GaSonics | HOSE, FLEX, LITE 2 ID HIGH TEMP | New OEM | Contact Us | |
| 03-2530 | GaSonics | WL PROTEUS UNIT TO TEE | New OEM | Contact Us | |
| 03-2557 | GaSonics | TUBE, COOLING BLK UPR EXIT FTG. 90 DEG | New OEM | Contact Us | |
| 0325-737465 | CMP | CABLE,ENCODER 10FT SERVOPACK | New OEM | Contact Us | |
| 0325-738361 | CMP | CABLE,PS2 6 MALE TO AT 5 FEM | New OEM | Contact Us | |
| 0325-740443 | CMP | CABLE,REV 3.3 I/O TO FURON R1-R2 | New OEM | Contact Us | |
| 0325-740447 | CMP | CABLE,SMIF TO R3 SIGNAL | New OEM | Contact Us | |
| 0325-740643 | CMP | CABLE, 110FT CAT5 NETWORK 776 | New OEM | Contact Us | |
| 03-2579 | GaSonics | COIL, COOLING, LAMP TRAY | New OEM | Contact Us | |
| 03-262226-00 | GaSonics | CBL ASSY,RF MODULE 3 INTERLOCKS,G2100 | New OEM | Contact Us | |
| 03-2630 | GaSonics | WATER LINE, QUICK DISC-TEE | New OEM | Contact Us | |
| 03-2655 | GaSonics | TUBING, SILICONE,.250 I.D. X .530 O.D. | New OEM | Contact Us | |
| 03-267737-00 | GaSonics | CBL ASSY,RF MODULE INTERLOCKS RF3,G2100 | New OEM | Contact Us | |
| 03-273090-00 | Concept One | CBL ASSY, RIBBON, IDE, 10, 44 TO 4 | New OEM | Contact Us | |
| 03-277387-00 | GaSonics | CBL ASSY,DC PWR,LONGVIEW | New OEM | Contact Us | |
| 03-287956-00 | CMP | CBL ASSY,WHS,MV200,3,ROBOT COMM | New OEM | Contact Us | |
| 03-308990-00 | CMP | CBL ASSY,PNEU PNL,REG I/O | New OEM | Contact Us | |
| 03-320791-00 | Concept One | CBL ASSY, INTERLOCK, C1D, AE, MATCH, RETROFIT | New OEM | Contact Us | |
| 03-346881-00 | Concept One | CBL ASSY, PENDULUM VALVE OPEN, C1 | New OEM | Contact Us | |
| 03-352607-00 | CMP | CBL ASSY,472 AEON MONITOR POWER | New OEM | Contact Us | |
| 03-357307-00 | GaSonics | CBL ASSY,HEATER CARTRIDGE,#10,33 IN | New OEM | Contact Us | |
| 03-383351-00 | CMP | CBL ASSY,KEY SWITCH R1 | New OEM | Contact Us | |
| 03-383589-00 | Concept One | CBL ASSY,LFT/EXT,SNSR | New OEM | Contact Us | |
| 03-383590-00 | Concept One | CBL ASSY,EXT MOTOR,STRAIN RELIEF,C1D | New OEM | Contact Us | |
| 03-390783-00 | Concept One | CBL ASSY,C1 ROT MOTOR,C1D | New OEM | Contact Us | |
| 03-391754-00 | CMP | CBL ASSY,PL40 TO SENSOR | New OEM | Contact Us | |
| 03-395586-00 | CMP | CBL ASSY,EXTENSION 12V R1 | New OEM | Contact Us | |
| 03-395592-00 | CMP | CBL ASSY,R1 INTERLOCK GENMARK | New OEM | Contact Us | |
| 03-412202-00 | CMP | CBL ASSY,JUMPER R1 INTERLOCK | New OEM | Contact Us | |
| 03-414790-00 | CMP | CBL ASSY,MODE SWITCH | New OEM | Contact Us | |
| 03-427111-01 | Concept One | CBL ASSY,MFC,GF120-125,9P,C1D,CA62 | New OEM | Contact Us | |
| 03-427111-02 | Concept One | CBL ASSY,MFC,GF120-125,9P,C1D,CA63 | New OEM | Contact Us | |
| 03-427111-03 | Concept One | CBL ASSY,MFC,GF120-125,9P,CID,CA64 | New OEM | Contact Us | |
| 03-427111-04 | Concept One | CBL ASSY,MFC,GF120-125,9P,C1D,CA65 | New OEM | Contact Us | |
| 03-427111-05 | Concept One | CBL ASSY,MFC,GF120-125,9P,C1D,CA66 | New OEM | Contact Us | |
| 03-427111-06 | Concept One | CBL ASSY,MFC,GF120-125,9P,C1D,CA67 | New OEM | Contact Us | |
| 03-427111-07 | Concept One | CBL ASSY, MFC GF120-125 9P CID, CA68 | New OEM | Contact Us | |
| 03-427111-08 | Concept One | CBL ASSY,MFC,GF120-125,9P,C1D,CA69 | New OEM | Contact Us | |
| 03-427111-11 | Concept One | CBL ASSY, MFC, GF120-125, 9P, C1D, CA148 | New OEM | Contact Us | |
| 03-451859-00 | CMP | CBL ASSY,MONITOR POWER MV200 | New OEM | Contact Us | |
| 03470-01 | GaSonics | CAPACITOR ASSY INPUT 702 | New OEM | Contact Us | |
| 03471-01 | GaSonics | MOTOR ASSY AUTOMATCH INPUT | New OEM | Contact Us | |
| 0350-102609 | CMP | SHIELD,FRONT SWING UP | New OEM | Contact Us | |
| 0350-103807 | CMP | SHIELD,472 FRONT SWING UP HOOD | New OEM | Contact Us | |
| 0350-718615 | CMP | FAN,115V ROOFMOUNT PAGODA | New OEM | Contact Us | |
| 03-6007-01 | GaSonics | TBG,FLEXLINE 8IN | New OEM | Contact Us | |
| 0375-111075 | CMP | SCANNER,LASER CLASS 1 | New OEM | Contact Us | |
| 04-00015-00 | Concept One | CONSUMABLE KIT, FUSES | New OEM | Contact Us | |
| 04-0050 | GaSonics | TUBE PLASMA CERAMIC (8.660 LG) | New OEM | Contact Us | |
| 04-047558-00 | Concept One | KIT,LL DOOR DRILL TOOLS | New OEM | Contact Us | |
| 04-123321-00 | Concept One | KIT,MKS 651 RETRO TO C1 | New OEM | Contact Us | |
| 04-143771-00 | Concept One | KIT,GAUGE,375 CONTROLLER | New OEM | Contact Us | |
| 04-144564-00 | Concept One | KIT,DISK,VERITY,DUAL,EP,V3.10 | New OEM | Contact Us | |
| 04-153944-00 | Concept One | KIT, ONE-ARM #3, BIPOLAR MOTOR | New OEM | Contact Us | |
| 04-177310-00 | CMP | KIT,ONSERT INSTALL,O-RING | New OEM | Contact Us | |
| 04-179313-00 | CMP | KIT,SHIP1,ONSERT,200MM,SLD,T1 | New OEM | Contact Us | |
| 04-179842-00 | CMP | KIT,O-RING,ONSERT,300MM | New OEM | Contact Us | |
| 04-181864-00 | CMP | KIT,0200-700163 CNTOR REPLACEMENT | New OEM | Contact Us | |
| 04-2382-06/B | Concept One | HEATER CARTRIDGE,200W, 120V, 1/4 D X 1 1/2L,37.25 IN CBL | New OEM | Contact Us | |
| 04-2420 | GaSonics | HEATER, 100 W,120 V,3/8 DIA. X 7.38 L,96 IN LEAD | New OEM | Contact Us | |
| 04-264530-00 | GaSonics | PM KIT,L3510 CONSUMABLE,ST CATANIA,L3510 | New OEM | Contact Us | |
| 04-264531-00 | GaSonics | PM KIT,QUARTZ CONSUMABLE,ST CATANIA,L351 | New OEM | Contact Us |