Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 0175-700066 | CMP | CB, 3AMP | New OEM | Contact Us | |
| 02-00008-00 | Concept One | KIT,GAS DISP PLT ADJ | New OEM | Contact Us | |
| 02-00012-00 | Concept One | ASSY,PNEU CNTRL | New OEM | Contact Us | |
| 02-00055-00 | Concept One | ASSY,FOOT SWITCH | New OEM | Contact Us | |
| 02-00072-00 | Concept One | ASSY,NITRIDE TERM,PNL | New OEM | Contact Us | |
| 02-00075-00 | Concept One | ASSY,CASS DOOR | New OEM | Contact Us | |
| 02-00076-00 | Concept One | ASSY,NITRIDE FAC,PNL REV. AG | New OEM | Contact Us | |
| 02-00079-00 | Concept One | ASSY,HF CHOKE | New OEM | Contact Us | |
| 02-00080-00 | Concept One | ASSY,HTR ISO FILTER | New OEM | Contact Us | |
| 02-00085-00 | Concept One | ASSY,INDUCTOR,420UH 30A | New OEM | Contact Us | |
| 02-00090-00 | Concept One | PCB, ASSY HEATER FILTER | New OEM | Contact Us | |
| 02-00094-00 | Concept One | ASSY,PNEU CNTRL 34VLV | New OEM | Contact Us | |
| 02-00097-00 | Concept One | ASSY,TC BELLOWS | New OEM | Contact Us | |
| 02-00098-00 | Concept One | KIT,TEOS CONTROLLER MTG. | New OEM | Contact Us | |
| 02-00103-00 | Concept One | GAS INLET 200mm FACILITY PANEL | New OEM | Contact Us | |
| 02-00105-00 | Concept One | KIT, CAPAC. WITH JUMPER | New OEM | Contact Us | |
| 02-00119-00 | Concept One | ASSY,GENEVA DRIVE | New OEM | Contact Us | |
| 02-00150-00 | Concept One | PCB, ASSY POWER BOARD | New OEM | Contact Us | |
| 02-00163-00 | Concept One | ASSY,FORK,CERAMIC | New OEM | Contact Us | |
| 02-00164-00 | Concept One | ASSY,FORK,CERAMIC,200mmJ | New OEM | Contact Us | |
| 02-00167-00 | Concept One | ASSY,RF SHUNT 2 CAP'S | New OEM | Contact Us | |
| 02-00170-00 | Concept One | ASSY,AMP-WOPS(200mm) | New OEM | Contact Us | |
| 02-00171-00 | Concept One | KIT,WOPS INSTALL (200MM) | New OEM | Contact Us | |
| 02-00195-01 | Concept One | ASSY, TEMP CONTROLLER, WATLOW | New OEM | Contact Us | |
| 02-00199-00 | Concept One | ASSY,INDUCTOR 150MH RF DIST. | New OEM | Contact Us | |
| 02-00205-00 | Concept One | ASSY,FEEDTHRU | New OEM | Contact Us | |
| 02-00206-00 | Concept One | ASSY,TC RF FILTER,"E" TYPE | New OEM | Contact Us | |
| 02-00215-00 | Concept One | ASSY,GENEVA DRIVE 200MM | New OEM | Contact Us | |
| 02-00216-00 | Concept One | PCA, TC FILTER | New OEM | Contact Us | |
| 02-00230-00 | Concept One | POWER INLET 200mm FACILITY PANEL | New OEM | Contact Us | |
| 02-00269-00 | Concept One | ASSY, ONE ARM ROBOT | New OEM | Contact Us | |
| 02-00269-00RW | Concept One | COMPLETE REWORK: ASSY, ONE ARM ROBOT | New OEM | Contact Us | |
| 02-00279-01 | Concept One | ASSY, MAIN AC BOX C1-DIELECT | New OEM | Contact Us | |
| 02-00315-00 | Concept One | ASSY,SENSE PIN PCB | New OEM | Contact Us | |
| 02-00315-01 | Concept One | ASSY,SENSE PIN PCB | New OEM | Contact Us | |
| 02-00324-00 | Concept One | KIT,24V,TEOS,HTR | New OEM | Contact Us | |
| 02-00330-00 | Concept One | ASSY,SENSE PIN BREAKOUT BC | New OEM | Contact Us | |
| 02-00332-00 | Concept One | ASSY,DEGAS MOD | New OEM | Contact Us | |
| 02-00333-00 | Concept One | CHANGE ASSY PLTFRM 150MM | New OEM | Contact Us | |
| 02-00343-01 | Concept One | ASSY,SNSR,HARN 25.5" | New OEM | Contact Us | |
| 02-00343-02 | Concept One | ASSY,SNSR,HARN 10.0 | New OEM | Contact Us | |
| 02-00343-03 | Concept One | ASSY,SNSR,HARN 17.5 | New OEM | Contact Us | |
| 02-00343-04 | Concept One | ASSY,SNSR,HARN 26.5 | New OEM | Contact Us | |
| 02-00349-00 | Concept One | ASSY,OPT PLATFORM,200mm | New OEM | Contact Us | |
| 02-00350-00 | Concept One | KIT ASSY,COOLING STATION | New OEM | Contact Us | |
| 02-00350-CPS | Concept One | COOL STATION WITH LARGE LEXAN PLATE | New OEM | Contact Us | |
| 02-00355-00 | Concept One | ASSY,DEGAS MOD-DOPED | New OEM | Contact Us | |
| 02-00392-00 | Concept One | ASSY,UPPER PCA OPTICAL | New OEM | Contact Us | |
| 02-00393-05 | Concept One | ASSY,COAX OPT.SNSR 23.75 | New OEM | Contact Us | |
| 02-00393-06 | Concept One | ASSY,COAX OPT,SNSR 13.75 | New OEM | Contact Us | |
| 02-00394-00 | Concept One | KIT,COOLING STATION PARALLEL | New OEM | Contact Us | |
| 02-00395-00 | Concept One | ASSY,PLATFORM,200mm (PLASTIC) | New OEM | Contact Us | |
| 02-00397-00 | Concept One | ASSY,SNSR,HARN PLASTIC | New OEM | Contact Us | |
| 02-00399-00 | Concept One | ASSY,HTR ISO FILTER | New OEM | Contact Us | |
| 02-00402-02 | Concept One | ASSY,SNSR,HARN 10.0" | New OEM | Contact Us | |
| 02-00402-03 | Concept One | New OEM | Contact Us | ||
| 02-00403-00 | Concept One | ASSY,PLATFORM,150mm,PLASTIC | New OEM | Contact Us | |
| 02-00419-20 | Concept One | KIT,200 MM WAFER SIZE POLY | New OEM | Contact Us | |
| 02-00423-99 | Concept One | ASSY,EXT PLTFRM,CORE | New OEM | Contact Us | |
| 02-00461-00 | Concept One | KIT,ALIGNER,TOOLS,C-1 SYS | New OEM | Contact Us | |
| 02-00463-00 | Concept One | TOOL KIT, START UP | New OEM | Contact Us | |
| 02-00470-01 | Concept One | ASSY,PIN LIFT 1&2 | New OEM | Contact Us | |
| 02-00470-02 | Concept One | ASSY,PIN LIFT 3&4 | New OEM | Contact Us | |
| 02-00470-03 | Concept One | ASSY,PIN LIFT 5+BLANK | New OEM | Contact Us | |
| 0200-770258 | CMP | CNTOR,208V 100A 24V COIL | New OEM | Contact Us | |
| 02-021422-00 | Concept One | ASSY, DC PWR SPLY I/F BOARD | New OEM | Contact Us | |
| 02-024645-00 | Concept One | ASSY,INTFC.BOX,SLO BKFILL.PR | New OEM | Contact Us | |
| 02-029392-00 | Concept One | ASSY,UPPER AC BOX C-1 DIEL | New OEM | Contact Us | |
| 02-029393-00 | Concept One | ASSY,LWR AC BOX C1-D & W | New OEM | Contact Us | |
| 02-032454-00 | Concept One | KIT,200MM GAS DIST PLATE ADJ. | New OEM | Contact Us | |
| 02-032615-00 | Concept One | PCA,TERM PNL,C1,CVD-D | New OEM | Contact Us | |
| 02-033134-00 | Concept One | ASSY,PED,196.8mm,D,SEMI | New OEM | Contact Us | |
| 02-033134-01 | Concept One | ASSY,PED,200MM MOER,D.3,SEMI | New OEM | Contact Us | |
| 02-033196-00 | Concept One | KIT,WINDOW,SAPPHIRE,SNGL PORT | New OEM | Contact Us | |
| 02-033394-00 | Concept One | ASSY,PED,200mm,D,STD SEMI | New OEM | Contact Us | |
| 02-033877-00 | Concept One | KIT,HEATER INSTALL,C1-150 | New OEM | Contact Us | |
| 02-033920-00 | Concept One | ASSY, PED, 200MM, D, STD JEIDA | New OEM | Contact Us | |
| 02-042897-00 | Concept One | ASSY,DEGAS MOD-DOPED | New OEM | Contact Us | |
| 02-042902-00 | Concept One | ASSY, HOIST, LOCK | New OEM | Contact Us | |
| 02-051164-00 | Concept One | ASSY,MOTOR,AC,6W | New OEM | Contact Us | |
| 02-053798-00 | Concept One | ASSY,HIM FILTER,C1-D | New OEM | Contact Us | |
| 02-10606-00 | Concept One | ASSY,PCB,HEATER MONITOR | New OEM | Contact Us | |
| 02-106507-00 | Concept One | FERRO-FLUIDIC SPINDLE | New OEM | Contact Us | |
| 02-111903-00 | Concept One | ASSY,RF FEEDTHRU | New OEM | Contact Us | |
| 02-119726-00 | Concept One | ASSY,FORK,SEQ,ANTI-DFLC,MCA | New OEM | Contact Us | |
| 02-121427-00 | Concept One | ASSY,L-TYPE SLTVLV,46X236,PM | New OEM | Contact Us | |
| 02-1257 | GaSonics | PANEL TOP | New OEM | Contact Us | |
| 02-153946-00 | Concept One | ASSY, PANEL, OEM 750, DRIVE C1. Included: p/n 17-14426-00 PLATE, MOUNTING C1, | New OEM | Contact Us | |
| 02-157148-00 | Concept One | ASSY,PWR SPLY, CTL MOD, C1, W/70V | New OEM | Contact Us | |
| 02-1618 | GaSonics | BRKT,PIN STANDOFF, PASSIVE BACKPLANE | New OEM | Contact Us | |
| 02-1627 | GaSonics | BRKT,HV CAP SUPPORT,A1000 | New OEM | Contact Us | |
| 02-168036-00 | Gasonics | ASSY, AC POWER CONTROL, CLUSTER,JAPAN | New OEM | Contact Us | |
| 02-1681 | GaSonics | ENCLOSURE,PLASMA,RIGHT,REACTOR CENTER | New OEM | Contact Us | |
| 02-171654-00 | GaSonics | KEY,LANYARD, SAFETY,SWITCH, D | New OEM | Contact Us | |
| 02-174313-00 | GaSonics | ASSY,WAFER-HANDLING,YASKAWA R | New OEM | Contact Us | |
| 02-177007-00 | GaSonics | ASSY,RF MATCH BOX,MWH5,IRIDIA | New OEM | Contact Us | |
| 02-177392-00 | CMP | ASSY,SOLID PLTN 29 PDM,LAPED,LP CAPABLE | New OEM | Contact Us | |
| 02-181494-00 | CMP | ASSY,END EFFECTOR,R2 | New OEM | Contact Us | |
| 02-2288 | GaSonics | ENCLOSURE, PLASMA,LEFT REACTOR CENTER | New OEM | Contact Us | |
| 0225-700656 | CMP | TERMINAL BLOCK,5MM 3POSN ANGLED BLUE DIN | New OEM | Contact Us |