Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 955642 | CMP | LENS,SNSR | New OEM | Contact Us | |
| 956129 | CMP | RING,CAM,SPINNER | New OEM | Contact Us | |
| 956152 | CMP | ACTUATOR,CYLINDER,SPINNER | New OEM | Contact Us | |
| 956155 | CMP | BUSHING, CAM ACTUATOR, SPINNER | New OEM | Contact Us | |
| 956165 | CMP | RING, RINSE, 200C | New OEM | Contact Us | |
| 956209 | CMP | CYLINDER,AIR,9/16X2 1/2""STROKE | New OEM | Contact Us | |
| 956210 | CMP | CYLINDER,AIR,1 1/16X1 STROKE | New OEM | Contact Us | |
| 956287 | CMP | MODULE,INPUT,ANALOG CUR.,4CH | New OEM | Contact Us | |
| 956289 | CMP | AMPLIFIER, FIBER W/LCD DISPLAY | New OEM | Contact Us | |
| 956305 | CMP | VALVE,CHECK,O-RING,1/2 FNPT | New OEM | Contact Us | |
| 956475 | CMP | ARM,GRIPPER,LEFT,200MM | New OEM | Contact Us | |
| 956791 | CMP | DOOR,OUTER,SPINNER | New OEM | Contact Us | |
| 956826 | CMP | BEARING,LINEAR | New OEM | Contact Us | |
| 956827 | CMP | ROD,BEARING,SPINNER | New OEM | Contact Us | |
| 956948 | CMP | BATTERY UNIT | New OEM | Contact Us | |
| 956949 | CMP | TIMING BELT(R AXIS) | New OEM | Contact Us | |
| 956950 | CMP | TIMING BELT (B AXIS) | New OEM | Contact Us | |
| 956973 | CMP | CABLE,MACHINE-NET,25FT,W/LBLS | New OEM | Contact Us | |
| 957447 | CMP | CYLINDER, AIR, DIA40MMX25MM | New OEM | Contact Us | |
| 958429 | CMP | VACUUM, ASSY, TRAP | New OEM | Contact Us | |
| 958559 | CMP | BELT,TIMING,330MMX10MM | New OEM | Contact Us | |
| 958823 | CMP | CAMERA,ROBOT,MOTOMAN | New OEM | Contact Us | |
| 958857 | CMP | CABLE CYL DOWN MAIN TABLE | New OEM | Contact Us | |
| 958858 | CMP | CABLE CYL UP MAIN TABLE | New OEM | Contact Us | |
| 958859 | CMP | CABLE CYL TABLE MAIN TABLE | New OEM | Contact Us | |
| 958948 | CMP | KEYBOARD,TIP,NEMA 4 | New OEM | Contact Us | |
| 959060 | CMP | PIN ASSY,WATER TRACK,M12 | New OEM | Contact Us | |
| 959266 | CMP | ASSY,VALVE,3 WAY,PNEU | New OEM | Contact Us | |
| 959267 | CMP | ASSY,MANIFOLD,DI 20 VALVE | New OEM | Contact Us | |
| 959340 | CMP | PIN,ROLLER,SLIDING DOOR | New OEM | Contact Us | |
| 959560 | CMP | SEAL,ROTARY,TEFLON | New OEM | Contact Us | |
| 959586 | CMP | VALVE, SOLENOID, 5P 2POS | New OEM | Contact Us | |
| 960433 | CMP | CABLE, MOTOMAN CAMERA | New OEM | Contact Us | |
| 961016 | CMP | CABLE, UPPER ARM, T-AXIS SV3CR | New OEM | Contact Us | |
| 962334 | CMP | BELT,TIMING,850MM POWER GRIP GT | New OEM | Contact Us | |
| 962335 | CMP | BELT,TIMING,1150MM POWER GRIP GT | New OEM | Contact Us | |
| 962600 | CMP | MODULE,ANALOG 1AO 1AI HUNTAIR | New OEM | Contact Us | |
| 962607 | CMP | ADPTR,LIFT EXTENDED SPRAY RING 676/776 | New OEM | Contact Us | |
| 962608 | CMP | TAB,LIFTING EXTENDED SPRAY RING 676/776 | New OEM | Contact Us | |
| 962609 | CMP | CLIP,ANTI ROTATION EXTENDED SPRAY RING | New OEM | Contact Us | |
| 962610 | CMP | CLIP, ANTI ROTATION FORK EXTN SPRAY RING | New OEM | Contact Us | |
| 962611 | CMP | SHIELD,SLURRY UPPER EXTENDED SPRAY RING | New OEM | Contact Us | |
| 962677 | CMP | ASSY,SPRAY RING EXTENDED MP1&MP3 676/776 | New OEM | Contact Us | |
| 962678 | CMP | ASSY,SPRAY RING EXTENDED LIFT 676/776 | New OEM | Contact Us | |
| 962721 | CMP | ASSY,WAVE GENERATOR SOLID PLATEN 676/776 | New OEM | Contact Us | |
| 962722 | CMP | ASSY,WAVE GENERATOR BALANCED SOLID PLTN | New OEM | Contact Us | |
| 962728 | CMP | SKIRT,POLISH BELL SOLID PLATEN 676/776 | New OEM | Contact Us | |
| 962730 | CMP | BELL,POLISH SOLID PLATEN 676/776 | New OEM | Contact Us | |
| 962749 | CMP | COMPUTER,EVC II INDUSTRIAL | New OEM | Contact Us | |
| 962761 | CMP | ACTUATOR,SMIF POD OPENER W/SNSR | New OEM | Contact Us | |
| 962768 | CMP | CABLE,VIDEO EXTENSION 15-PIN 7.6M | New OEM | Contact Us | |
| 962849 | CMP | PLATE,QUICK CHANGE 9HOLES 776/876 | New OEM | Contact Us | |
| 962914 | CMP | ROD,PUSH LIFT JACK ASSY EXTENDED SPRAY | New OEM | Contact Us | |
| 962934 | CMP | BOOT,PISTON SEAL ACTIVE WAND MV | New OEM | Contact Us | |
| 962935 | CMP | GUIDE,SPACER ACTIVE WAND MV | New OEM | Contact Us | |
| 962936 | CMP | PIN,MOUNT ACTIVE WAND MV | New OEM | Contact Us | |
| 962937 | CMP | PIN,GUIDE ACTIVE WAND MV | New OEM | Contact Us | |
| 962938 | CMP | FINGER,ACTIVE WAND MV | New OEM | Contact Us | |
| 962939 | CMP | PISTON,ACTIVE WAND MV | New OEM | Contact Us | |
| 962940 | CMP | PISTON,STOP ACTIVE WAND MV | New OEM | Contact Us | |
| 962941 | CMP | ARM,RETURN ACTIVE WAND MV | New OEM | Contact Us | |
| 962942 | CMP | SPACER,ACTIVE WAND MV | New OEM | Contact Us | |
| 962943 | CMP | STOPPER,ACTIVE WAND MV | New OEM | Contact Us | |
| 963513 | CMP | SHIELD,SPIN CHUCK GRIPPER LABYRINTH MV | New OEM | Contact Us | |
| 964177 | CMP | POWER SUPPLY,24VDC 50A 1200WATTS | New OEM | Contact Us | |
| 964225 | CMP | NUT, BULKHEAD EXTENDED SPRAYRING 676/776nder | New OEM | Contact Us | |
| 964226 | CMP | ADAPTER,DRIVELINE ENDPOINT 676/776 | New OEM | Contact Us | |
| 964227 | CMP | DRIVE,LINE ENDPOINT & APM | New OEM | Contact Us | |
| 964270 | CMP | GENERATOR,VACUUM TEFLON 2.22 SCFM | New OEM | Contact Us | |
| 964272 | CMP | VALVE,24VDC 2POS SGL 10-32PORT 5/3PILOT | New OEM | Contact Us | |
| 964427 | CMP | ASSY,SPIN CHUCK GRIPPER MV | New OEM | Contact Us | |
| 964464 | CMP | SLEEVE,PISTON ACTIVE WAND MV | New OEM | Contact Us | |
| 964484 | CMP | REGULATOR,AIR 1/4MNPT 7-100PSIG RLV SST | New OEM | Contact Us | |
| 964485 | CMP | CONVERTER,DC/DC 24V 15VDC 2AMP | New OEM | Contact Us | |
| 964506 | CMP | DISK, SPIN CHUCK GRIPPER MV | New OEM | Contact Us | |
| 964507 | CMP | FINGER,SPIN CHUCK GRIPPER MV | New OEM | Contact Us | |
| 964508 | CMP | FINGER,SPIN CHUCK GRIPPER MOUNT MV | New OEM | Contact Us | |
| 964509 | CMP | PIN,FINGER SPIN CHUCK GRIPPER MV | New OEM | Contact Us | |
| 964511 | CMP | POST,SPIN CHUCK GRIPPER O-RING MV | New OEM | Contact Us | |
| 964512 | CMP | SHAFT, SPIN CHUCK GRIPPER MV | New OEM | Contact Us | |
| 964513 | CMP | SHIELD,SPIN CHUCK GRIPPER LABYRINTH MV | New OEM | Contact Us | |
| 964566 | CMP | MTR,RODLESS CYLINDER 1.75AMP 24V | New OEM | Contact Us | |
| 964651 | CMP | CARD,DUAL ETHERNET RJ45 PCI | New OEM | Contact Us | |
| 964656 | CMP | CARD,CNTRLR ADEPT SMIF LPO | New OEM | Contact Us | |
| 964665 | CMP | SENSOR,CAPACITIVE 12M 8MM UNSHIELDED | New OEM | Contact Us | |
| 964666 | CMP | AMPL,300MA 10-35VDC SUPPLY | New OEM | Contact Us | |
| 964679 | CMP | C/A,FIBER OPTIC ZONE 2&3 SOLID PLATEN MV | New OEM | Contact Us | |
| 964695 | CMP | HOUSING,POST SPIN CHUCK GRIPPER MV | New OEM | Contact Us | |
| 964744 | CMP | ARM,ANTI ROTATION MV | New OEM | Contact Us | |
| 964837 | CMP | PLATE,WEAR RING BACKING CARRIER #11 MV | New OEM | Contact Us | |
| 964839 | CMP | CLAMP,DIAPHRAGM INNER WEAR RING C11 MV | New OEM | Contact Us | |
| 964841 | CMP | CLAMP,DIAPHRAGM OUTER WEAR RING #11 MV | New OEM | Contact Us | |
| 964846 | CMP | DIAPHRAGM,WEAR RING CARRIER #11 MV | New OEM | Contact Us | |
| 964924 | CMP | CYLINDER, AIR TOWER LOCK ADEPT SMIF LPO | New OEM | Contact Us | |
| 964962 | CMP | SHAFT,WAFER SENSOR ACTIVE WAND MV | New OEM | Contact Us | |
| 964963 | CMP | TARGET,WAFER SENSOR ACTIVE WAND MV | New OEM | Contact Us | |
| 964994 | CMP | TUBING,PUR 5/32 RED TRANSLUCENT | New OEM | Contact Us | |
| 964996 | CMP | TUBING,PUR 5/32 PURPLE TRANSLUCENT | New OEM | Contact Us | |
| 964998 | CMP | TUBING,PUR 5/32 AQUA BLUE TRANSLUCENT | New OEM | Contact Us | |
| 964999 | CMP | TUBING,PUR 5/32 BLUE TRANSLUCENT | New OEM | Contact Us |