Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 01-2356 | GaSonics | LOCATOR, WAFER, 8 IN,HARD ANODIZED | New OEM | Contact Us | |
| 01-2474 | GaSonics | FORK, LATCH, SHORT REACTOR CENTER ASSY | New OEM | Contact Us | |
| 01-2484 | GaSonics | FORK, LATCH, LONG REACTOR CENTER ASSY | New OEM | Contact Us | |
| 0125-106306 | CMP | MODULE,OUTPUT QUAD SINK OPTO SNAP | New OEM | Contact Us | |
| 0125-106307 | CMP | MODULE,OUTPUT QUAD SOURCE OPTO SNAP | New OEM | Contact Us | |
| 0125-106308 | CMP | CARD,SERIAL PORT AC37 RS485 | New OEM | Contact Us | |
| 0125-106432 | CMP | CNTRLR,MOTION 3-AXIS VER 2.0 | New OEM | Contact Us | |
| 0125-107206/RW | CMP | PCB,CPU PNTM200MHZ MMX LCD(SEE BSC TXT) | New OEM | Contact Us | |
| 0125-112300 | CMP | MODULE,INPUT 776 R3 TRACK ASSY | New OEM | Contact Us | |
| 0125-112301 | CMP | MODULE,OUTPUT 776 R3 TRACK ASSY | New OEM | Contact Us | |
| 01-2524 | GaSonics | BUSHING, CHAMBER ALIGN BASEPLATE, ASSY | New OEM | Contact Us | |
| 0125-700330 | CMP | LIGHTPEN,VGA W/BUTTON | New OEM | Contact Us | |
| 0125-700450 | CMP | CNTRLR,PROGRAMMABLE CPU | New OEM | Contact Us | |
| 0125-701380 | CMP | MODULE,INPUT DIGITAL | New OEM | Contact Us | |
| 0125-701381 | CMP | MODULE,OUTPUT DIGITAL | New OEM | Contact Us | |
| 0125-718453 | CMP | TERMINATOR,RES SERIAL LINK OPTO 22 | New OEM | Contact Us | |
| 0125-737469 | CMP | MODULE,OUTPUT 0-10V ISO OPTO SNAP | New OEM | Contact Us | |
| 0125-737470 | CMP | MODULE,INPUT DUAL-10N TO 10V ISO OP | New OEM | Contact Us | |
| 0125-737471 | CMP | MODULE,INPUT QUAD FAST OPTO SNAP | New OEM | Contact Us | |
| 0125-737472 | CMP | MODULE,BACKPLANE SNAP B12M | New OEM | Contact Us | |
| 0125-737870 | CMP | PCB,MULTIPLEXER ANALOG | New OEM | Contact Us | |
| 0125-738145 | CMP | BACKPLANE,SNAP B16M | New OEM | Contact Us | |
| 0125-738162 | CMP | MODULE,I/O ANALOG OUTPUT 0-10V DUAL | New OEM | Contact Us | |
| 0125-739966/RW | CARD,MOTION 8 AXIS | New OEM | Contact Us | ||
| 0125-739967 | CMP | MODULE,DEVICENET SERIAL INTRFC 16CH | New OEM | Contact Us | |
| 01-2574 | GaSonics | FLANGE, EOP, CHAMBER | New OEM | Contact Us | |
| 01-2575 | GaSonics | MOUNT, EOP, REACTOR CENTER | New OEM | Contact Us | |
| 01-2577 | GaSonics | Blank-Off, Chamber Reactor Center | New OEM | Contact Us | |
| 0125-770404/RW | CMP | CNTRLR,776 EQUIPE R3 TILT & SMIF CAS | New OEM | Contact Us | |
| 0125-770594 | CMP | MOUSE,CIRCUIT BOARD & OVERLAY | New OEM | Contact Us | |
| 0125-770727 | CMP | CONVERTER,RS-232/422 | New OEM | Contact Us | |
| 0125-770729 | CMP | RELAY,24VDC RELECO | New OEM | Contact Us | |
| 0125-771422 | CMP | TOUCH STYLUS,SUPPLIED WITH FPD | New OEM | Contact Us | |
| 0125-771537 | CMP | CARD,NETWORK INTERFACE | New OEM | Contact Us | |
| 0125-772200 | CMP | MODULE,INPUT 2 CHANNEL AIMA | New OEM | Contact Us | |
| 01-2582 | GaSonics | GUSSET, CHAMBER ASSY | New OEM | Contact Us | |
| 01-2600 | GaSonics | LOCATOR, CASSETTE,REAR-FLUOROWARE #PA192-8H-XXX | New OEM | Contact Us | |
| 01-2715 | GaSonics | STAND OFF, HEAT AND COOL PLATEN, 6 IN | New OEM | Contact Us | |
| 01-2716 | Gasonics | PIN LIFTER, TEFLON COATED | New OEM | Contact Us | |
| 01-2718 | GaSonics | FERRULE,ULTRA-TORR, PLASMA ENCLOSURE | New OEM | Contact Us | |
| 01-2719 | GaSonics | NUT, ULTRA-TORR,PLASMA ENCLOSURE | New OEM | Contact Us | |
| 01-2757 | GaSonics | HOLDER, LAMP,PLASMA ENCLOSURE | New OEM | Contact Us | |
| 01-2830 | GaSonics | HOLDER, SPRING | New OEM | Contact Us | |
| 01-2831 | GaSonics | ROD CLEVIS | New OEM | Contact Us | |
| 01-2832 | GaSonics | HOLDER, PISTON | New OEM | Contact Us | |
| 01-2835 | GaSonics | PIN, DOWEL, .187 DIA X .75 L, W/4-40 X .25 DP | New OEM | Contact Us | |
| 01-2837 | GaSonics | SHOCK ABSORBER,.827 DIA, .40 ID,GREEN | New OEM | Contact Us | |
| 01-2838 | Gasonics | SHOCK ABSORBER,I.D., .50 | New OEM | Contact Us | |
| 01-2839 | GaSonics | PIN, 1.38 LG | New OEM | Contact Us | |
| 01-2841 | GaSonics | PIN, .187 DIA X 2.484 LG, SST | New OEM | Contact Us | |
| 01-2842 | GaSonics | PIN, O-RING | New OEM | Contact Us | |
| 01-2843 | GaSonics | PIN, .187 DIA X 1.453 L, SS | New OEM | Contact Us | |
| 01-2844 | GaSonics | PIN, SPRING | New OEM | Contact Us | |
| 01-2845 | GaSonics | PIN, BEARING | New OEM | Contact Us | |
| 01-2847 | GaSonics | CAM, BEARING | New OEM | Contact Us | |
| 01-2851 | GaSonics | DISC, BEARING SHAFT | New OEM | Contact Us | |
| 01-2852 | GaSonics | SHAFT, BEARING .50 DIA X 5.715 L, SS | New OEM | Contact Us | |
| 01-2853 | GaSonics | HOUSING, BEARING | New OEM | Contact Us | |
| 01-2857 | GaSonics | BASE, SPRING | New OEM | Contact Us | |
| 01-2858 | Gasonics | HOLDER, PISTON BOTTOM | New OEM | Contact Us | |
| 01-2859 | GaSonics | SUPPORT, SHAFT | New OEM | Contact Us | |
| 01-2871 | GaSonics | DOOR, PROCESS CHAMBER, 3510A | New OEM | Contact Us | |
| 01-2881 | GaSonics | SHIELD, EMI, LAMP HOLDER, UV LAMP | New OEM | Contact Us | |
| 01-2895 | GaSonics | LIFTER ARM, RIGHT REAR | New OEM | Contact Us | |
| 01-2897 | GaSonics | LIFTER ARM, LEFT REAR | New OEM | Contact Us | |
| 01-3047 | GaSonics | SPOOL, CLAMP | New OEM | Contact Us | |
| 01-3048 | GaSonics | HOUSING, SPOOL | New OEM | Contact Us | |
| 01-3049 | GaSonics | SPOOL | New OEM | Contact Us | |
| 01-3065 | GaSonics | PIN PUSH LIFT ALIGNMENT PLATE | New OEM | Contact Us | |
| 01-3066 | GaSonics | ROD ACTUATING ALIGNMENT PLATE | New OEM | Contact Us | |
| 01-3107 | GaSonics | ADAPTER PLATE,PRESSURE RELIEF | New OEM | Contact Us | |
| 01-3112 | GaSonics | LOCATOR, WAFER SHARP ANGLE | New OEM | Contact Us | |
| 01-3113 | GaSonics | LOCATOR, WAFER, 8 IN SHARP ANGLE, PLATEN | New OEM | Contact Us | |
| 01-3188 | GaSonics | WASHER PLATE, SPOOL | New OEM | Contact Us | |
| 01-3241 | GaSonics | LOCATOR, CASSETTE ALIGN, REAR,PA182-60MC-06XX | New OEM | Contact Us | |
| 01-3242 | Gasonics | LOCATOR,CASSETTE ALIGN, FRONT, MTG | New OEM | Contact Us | |
| 01-3316 | GaSonics | VIEW PORT DOOR | New OEM | Contact Us | |
| 01-3394 | GaSonics | PIN, LIFT, COOLING STATION | New OEM | Contact Us | |
| 01-3457 | GaSonics | TRAVEL LINK, LIFT TILT | New OEM | Contact Us | |
| 01-3458 | GaSonics | BASE, LIFT/TILT | New OEM | Contact Us | |
| 01-3461 | GaSonics | CAM ARM, LIFT TILT | New OEM | Contact Us | |
| 01-3462 | GaSonics | SHAFT, CAM | New OEM | Contact Us | |
| 01-3464 | GaSonics | SHAFT, SUPPORT CAM,MECHANISM | New OEM | Contact Us | |
| 01-3667 | GaSonics | HOLDER, PLASMA DETECTOR, CLEAN-DL | New OEM | Contact Us | |
| 01-3802 | GaSonics | BLOCK, LOCK | New OEM | Contact Us | |
| 01-3806 | GaSonics | CLAMP, GAS-INLET | New OEM | Contact Us | |
| 01-3831 | GaSonics | FASTENER .25 CLAMP | New OEM | Contact Us | |
| 01-3924 | GaSonics | WAFER SUPPORT 8 IN | New OEM | Contact Us | |
| 01-3943 | GaSonics | PLATE, ADAPTOR, AL | New OEM | Contact Us | |
| 01-3944 | GaSonics | FLANGE, AL, PRESSURE PROCESS CHAMBER | New OEM | Contact Us | |
| 01-3999 | GaSonics | PLATE, SUPPORT | New OEM | Contact Us | |
| 01-4001 | GaSonics | CHAMBER, BOTTOM, DDP, PEP | New OEM | Contact Us | |
| 01-4012 | GaSonics | BLOCK, INSULATING, 2 POSITION | New OEM | Contact Us | |
| 01-4016 | GaSonics | COVER, 2 POSITION, BLOCK, BOTTOM | New OEM | Contact Us | |
| 01-4043 | GaSonics | CLAMP, NUT | New OEM | Contact Us | |
| 01-4044 | GaSonics | SPACER,NUT, MATCHED SET | New OEM | Contact Us | |
| 01-4058 | GaSonics | FLANGE | New OEM | Contact Us | |
| 01-4060 | GaSonics | ADAPTOR LIFT PIN, DDP | New OEM | Contact Us | |
| 01-4068 | GaSonics | GUIDE BUSHING | New OEM | Contact Us | |
| 01-4075 | GaSonics | HOLLOW PIN-RETAINER | New OEM | Contact Us |