Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 01-4076 | GaSonics | CLAMP, FEED-THRU | New OEM | Contact Us | |
| 01-4096 | GaSonics | STRAP, RF PEP DDP | New OEM | Contact Us | |
| 01-4122 | GaSonics | SUPPORT, SPOSUPPORT, SPOOL, | New OEM | Contact Us | |
| 01-4123 | GaSonics | CLAMP, SHIELD, RF, HOSE | New OEM | Contact Us | |
| 01-4282 | GaSonics | BASE, BRAZE PLATEN | New OEM | Contact Us | |
| 01-4323 | GaSonics | COVER TOP PLASMA SOURCE, CLEAN-DL | New OEM | Contact Us | |
| 01-4327 | GaSonics | CAVITY, PLASMA SOURCE, CLEAN-DL | New OEM | Contact Us | |
| 01-4334 | GaSonics | SHAFT, LIFT PIN,CLTC COMPATIBLE | New OEM | Contact Us | |
| 01-4336 | GaSonics | BLOCK, TRAVEL ADJUSTER | New OEM | Contact Us | |
| 01-4337 | GaSonics | PLATE, ACTUATOR,IRIDIA-DL | New OEM | Contact Us | |
| 01-4338 | GaSonics | NUT, ACTUATOR EXTENSION | New OEM | Contact Us | |
| 01-4339 | GaSonics | NUT, 3MM QUARTZ SEAL | New OEM | Contact Us | |
| 01-4340 | GaSonics | BRACKET VERTICAL SUPPORT | New OEM | Contact Us | |
| 01-4418 | GaSonics | RESTRICTOR, FLOW,CHAMBER, CLEAN-DL | New OEM | Contact Us | |
| 01-4425 | GaSonics | STOP, ADJUSTABLE,7/16 | New OEM | Contact Us | |
| 01-4488 | GaSonics | NUT, CAP, CLTC | New OEM | Contact Us | |
| 01-4491 | GaSonics | CAP, TOP, CLTC | New OEM | Contact Us | |
| 01-4500 | GaSonics | RING, LIFT, LOCKING | New OEM | Contact Us | |
| 01-4552 | GaSonics | BEARING, LINEAR | New OEM | Contact Us | |
| 01-4590 | GaSonics | RETAINER, LAMP TRAY,4 WINDOWS | New OEM | Contact Us | |
| 01-4611 | GaSonics | PLATE, MOUNTING ACTUATOR, IRIDIA | New OEM | Contact Us | |
| 01-4695 | GaSonics | PLATE, CONNECTOR | New OEM | Contact Us | |
| 01-4697 | GaSonics | PLATE, COUPLING | New OEM | Contact Us | |
| 01-4701 | GaSonics | BOLT, COUPLING PLATE | New OEM | Contact Us | |
| 01-4709 | GaSonics | FLANGE, CLTC FEED-THRU, CHAMBER,IRIDIA-D | New OEM | Contact Us | |
| 01-4713 | GaSonics | SPACER TUBE,URETHANE SPRING, PLASMA GAS | New OEM | Contact Us | |
| 01-4715 | GaSonics | BEZEL | New OEM | Contact Us | |
| 01-4738 | GaSonics | SHAFT, LIFT PIN,CLTC, IRIDIA-DL | New OEM | Contact Us | |
| 01-4765 | GaSonics | Clamp Lift Ring | New OEM | Contact Us | |
| 01-4780 | GaSonics | LOCATOR,WAFER,CERAMIC | New OEM | Contact Us | |
| 01-4781 | GaSonics | SUPPORT, SPOOL, PEP PLUS | New OEM | Contact Us | |
| 01-4812 | GaSonics | RETAINER, WINDOW,LAMP TRAY, IRIDIA-DL | New OEM | Contact Us | |
| 01-4867 | GaSonics | CLAMP, HEATER PLATEN, PEP PLUS | New OEM | Contact Us | |
| 01-4873 | GaSonics | RING, LIFT, PEP PLUS | New OEM | Contact Us | |
| 01-4926 | Gasonics | COVER, SEAL LL | New OEM | Contact Us | |
| 01-4928 | Gasonics | SEAL, FIRST, LL | New OEM | Contact Us | |
| 01-4929 | Gasonics | SEAL, SECOND, LL | New OEM | Contact Us | |
| 01-4938 | Gasonics | INSERT, CERAMIC, RF | New OEM | Contact Us | |
| 01-4951 | GaSonics | HOUSING, IDLER,BLADE | New OEM | Contact Us | |
| 01-4978 | GaSonics | SHAFT, ENCODER, ATM ROBOT | New OEM | Contact Us | |
| 01-4992 | GaSonics | CLAMP, PIN, RO | New OEM | Contact Us | |
| 01-4993 | GaSonics | PLUG, RF | New OEM | Contact Us | |
| 01-4997 | GaSonics | BAR, TENSIONER BLADE, ATM ROBOT | New OEM | Contact Us | |
| 01-4999 | GaSonics | PIN,OUTER,RIGHT,ROTATION | New OEM | Contact Us | |
| 01-5006 | GaSonics | PIN,OUTER,LEFT,ROTATION | New OEM | Contact Us | |
| 0150-109900 | CMP | MTR,PAD OSCILLATOR K32V | New OEM | Contact Us | |
| 0150-110931 | CMP | MTR, WAFER HEAD UPPER LEFT | New OEM | Contact Us | |
| 0150-110932 | CMP | MTR, WAFER HEAD UPPER RIGHT | New OEM | Contact Us | |
| 0150-110983 | CMP | MTR,DRIVE W/HUB 776 R1/R2 SM HOUSING | New OEM | Contact Us | |
| 0150-111665 | CMP | MTR,5PHASE STEPPER 60MM 10:1 | New OEM | Contact Us | |
| 0150-111717 | CMP | PWR SUPPLY,5VDC 4AMP | New OEM | Contact Us | |
| 0150-700182 | CMP | DRIVE,SLURRY MTR | New OEM | Contact Us | |
| 0150-700184 | CMP | DRIVER,STEP MTR PAD CONDITIONER | New OEM | Contact Us | |
| 0150-700280 | CMP | GENERATOR,VACUUM | New OEM | Contact Us | |
| 0150-701438 | CMP | MTR,PAD CONDITIONER STEPPER | New OEM | Contact Us | |
| 0150-727165 | CMP | MTR,MOD PUMP | New OEM | Contact Us | |
| 0150-737467 | CMP | MTR,AC SERVO UL SGM02U3B4L | New OEM | Contact Us | |
| 0150-737502 | CMP | MOTOR,STEPPER NEMA34 POWERPAC | New OEM | Contact Us | |
| 0150-737612 | CMP | DRIVER,SERVO BRUSHLESS B30A8 | New OEM | Contact Us | |
| 0150-739383 | CMP | DRIVE,SERVO 200VAC SPEED/TORQUE CE | New OEM | Contact Us | |
| 0150-770143 | CMP | MTR,EURO LOWER MP2 & 4 | New OEM | Contact Us | |
| 0150-770144 | CMP | MTR,EURO LOWER MP1 & 3 | New OEM | Contact Us | |
| 0150-770147 | CMP | MTR,EURO UPPER MP1 & 3 | New OEM | Contact Us | |
| 0150-770148 | CMP | MTR,EURO UPPER MP2 & 4 | New OEM | Contact Us | |
| 0150-770249 | CMP | GENERATOR,776 AV SERIES | New OEM | Contact Us | |
| 0150-770255 | CMP | PWR SUPPLY,776 24V/7.2A/ECASE | New OEM | Contact Us | |
| 01-5179 | GaSonics | STEM, BLADE MTG.,BLADE | New OEM | Contact Us | |
| 01-5184 | GaSonics | CTR, PAD C | New OEM | Contact Us | |
| 01-5323 | GaSonics | CTR, PAD A | New OEM | Contact Us | |
| 01-5346 | GaSonics | CTR, PAD, B | New OEM | Contact Us | |
| 01-5361 | GaSonics | PLATE,COOLING STATION,PEP | New OEM | Contact Us | |
| 01-5362 | GaSonics | HOLDER, TUBE, RF | New OEM | Contact Us | |
| 01-5369 | GaSonics | CASTING, IDLER,BLADE | New OEM | Contact Us | |
| 01-5376 | GaSonics | TENSIONER, BLADE | New OEM | Contact Us | |
| 01-5392 | GaSonics | STEM, ATM ROBOT | New OEM | Contact Us | |
| 01-5393 | GaSonics | BLADE, BASE, ATM ROBOT | New OEM | Contact Us | |
| 01-5394 | GaSonics | ROD, INDEX, ATM ROBOT | New OEM | Contact Us | |
| 01-5396 | Gasonics | SHOWER HEAD, GDP 200MM, | New OEM | Contact Us | |
| 01-5399 | GaSonics | VACUUM CUP,TITLE#2, ATM ROBOT | New OEM | Contact Us | |
| 01-5405 | GaSonics | BAR, HOLDING, ATM ROBOT | New OEM | Contact Us | |
| 01-5407 | GaSonics | PLATE, TOP, ATM ROBOT | New OEM | Contact Us | |
| 01-5417 | GaSonics | SHOWER HEAD | New OEM | Contact Us | |
| 01-5418 | GaSonics | BASE, SLIDER, ATM ROBOT | New OEM | Contact Us | |
| 01-5426 | GaSonics | ARM CAM | New OEM | Contact Us | |
| 01-5430 | GaSonics | BASE, MOTOR CENTERING | New OEM | Contact Us | |
| 01-5431 | GaSonics | CASE, LIP, SEAL | New OEM | Contact Us | |
| 01-5432 | GaSonics | PULLEY, I | New OEM | Contact Us | |
| 01-5435 | GaSonics | CLAMP, CENTERING | New OEM | Contact Us | |
| 01-5436 | GaSonics | PLATE, MOTOR | New OEM | Contact Us | |
| 01-5438 | GaSonics | HOLDER, LIP SEAL | New OEM | Contact Us | |
| 01-5441 | GaSonics | CUP, LIP SEAL | New OEM | Contact Us | |
| 01-5451 | Gasonics | FLEXURE | New OEM | Contact Us | |
| 01-5470 | GaSonics | SHAFT, MAIN CENTERING | New OEM | Contact Us | |
| 01-5477 | GaSonics | BAR, LEFT,CENTERING | New OEM | Contact Us | |
| 01-5553 | GaSonics | SET SCREW, M4X.25,ALUMINUM | New OEM | Contact Us | |
| 01-5813 | GaSonics | HOLDER, LIFT PIN,IRIDIA-DL | New OEM | Contact Us | |
| 01-5821 | GaSonics | WINDOW, V-PORT,TOP, TRANSFER CHAMBER, GAMMA 2100 | New OEM | Contact Us | |
| 01-5978 | GaSonics | SPACER, RING, SCOPE,IRIDIA-DL | New OEM | Contact Us | |
| 01-5986 | GaSonics | RING LIFT, PIN 200MM, IRIDIA-DL | New OEM | Contact Us | |
| 01-5988 | GaSonics | RETAINER, LIFT PIN,IRIDIA-DL | New OEM | Contact Us |