Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 0225-771372 | CMP | RELAY,24VDC 4 POLE | New OEM | Contact Us | |
| 02-257924-00 | Concept One | ASSY,FEEDTHRU,RF PWR,SEQUEL | New OEM | Contact Us | |
| 02-2585 | GaSonics | PLATE, COVER, DOCKING PANEL | New OEM | Contact Us | |
| 02-260589-00 | GaSonics | ASSY, LAMP CONTROLLER | New OEM | Contact Us | |
| 02-2649 | Gasonics | PIN LIFT, SENSOR FLAG | New OEM | Contact Us | |
| 02-269278-00 | GaSonics | ASSY,UNIFIED PLASMA TUBE | New OEM | Contact Us | |
| 02-2708 | GaSonics | BRACKET, LIFT SENSOR, 6 IN PLATEN | New OEM | Contact Us | |
| 02-2872 | GaSonics | PANEL, ACCESS,UPPER-PROCESSOR FRAME | New OEM | Contact Us | |
| 02-2873 | GaSonics | PNL ACCESS LOWER PROCESSOR | New OEM | Contact Us | |
| 02-2880 | GaSonics | PANEL,ACCESS DOOR | New OEM | Contact Us | |
| 02-289943-00 | ASSEMBLY, FEED-THRU/NOVELLUS | New OEM | Contact Us | ||
| 02-289945-00 | Concept One | ASSY, NI FEEDTHRU, PWR SHORT | New OEM | Contact Us | |
| 02-2902 | GaSonics | SPACER, SCREW | New OEM | Contact Us | |
| 02-293065-00 | CMP | ASSY,DISPLAY,EDGE GAP MEASUREMENT | New OEM | Contact Us | |
| 02-2972 | GaSonics | BRACKET, SPRT, WATER-LINE, 3510A | New OEM | Contact Us | |
| 02-297366-00 | GaSonics | ASSY,TOP CAP, CLTC | New OEM | Contact Us | |
| 02-297394-00 | GaSonics | ASSY,CLTC,IRIDIA | New OEM | Contact Us | |
| 02-3019 | GaSonics | PANEL LEFT BRUSHED | New OEM | Contact Us | |
| 02-3036 | GaSonics | COVER, PRESSURE RELIEF, PROCESS CHAMBER | New OEM | Contact Us | |
| 02-311919-00 | CMP | ASSY,PARTICLE CATCH TRAY,MV | New OEM | Contact Us | |
| 02-323520-00 | GaSonics | ASSY,WAFER NEST, PROCESS CHAMBER, 8" | New OEM | Contact Us | |
| 02-3244 | GaSonics | REFLECTOR, LAMP TRAY - GOLD PLATED | New OEM | Contact Us | |
| 02-3311 | GaSonics | BRACKET, HEATER HOLDER | New OEM | Contact Us | |
| 02-347706-00 | Concept One | ASSY, C1, C2 PENDULUM VALVE INTERFACE BOX | New OEM | Contact Us | |
| 02-352037-00 | GaSonics | ASSY,TC MODULE,TYPE K,200MM | New OEM | Contact Us | |
| 02-352037-00/RW | GaSonics | ASSY,TC MODULE,TYPE K,200MM - Customer Core Required | New OEM | Contact Us | |
| 02-352472-00 | CMP | ASSY,PAD BACKER,16 HOLES | New OEM | Contact Us | |
| 02-3567 | GaSonics | COVER, JUNCTION BOX | New OEM | Contact Us | |
| 02-3573 | GaSonics | PLATE, JUNCTION BOX, GROMMENT | New OEM | Contact Us | |
| 02-3574 | GaSonics | BRACKET, JUNCTION BOX | New OEM | Contact Us | |
| 02-3659 | GaSonics | COVER, SPOOL, RIGHT TAB, INTERLOCK | New OEM | Contact Us | |
| 02-3660 | GaSonics | COVER, SPOOL, LEFT TAB, INTERLOCK | New OEM | Contact Us | |
| 02-3696 | GaSonics | PANEL, PLASMA RIGHT CHAMBER, ACCESS | New OEM | Contact Us | |
| 02-3697 | GaSonics | COVER, REAR ACCESS GAS INPUT BUBBLER | New OEM | Contact Us | |
| 02-3706 | GaSonics | PANEL PLASMA,LEFT CHAMBER ACCESS | New OEM | Contact Us | |
| 02-377012-00 | GaSonics | ASSY,150MM CLTC MODULE,.005TC,TYPE K,A1 | New OEM | Contact Us | |
| 02-377012-00/RW | GaSonics | ASSY,150MM CLTC MODULE,.005"TC,TYPE K,A1-RW CUSTOMER CORE | New OEM | Contact Us | |
| 02-377013-00 | Concept One | PED ASSY,200MM,STD,D.3,C2ALT | New OEM | Contact Us | |
| 02-381217-00 | CMP | ASSY,SOLID PLATEN,29 HOLE,LP,SST INSERT | New OEM | Contact Us | |
| 02-383160-00 | Concept One | ASSY,FEEDTHRU,PWR,LONG,SEQUEL | New OEM | Contact Us | |
| 02-383161-00 | Concept One | ASSY,FEEDTHRU,PWR,SHORT,SEQUEL | New OEM | Contact Us | |
| 02-3949 | GaSonics | SUPPORT, SPOOL, LEFT PLASMA ENCLOSURE | New OEM | Contact Us | |
| 02-3994 | GaSonics | REFLECTOR,LAMP TRAY,IRIDIA-DL | New OEM | Contact Us | |
| 02-3995 | GaSonics | SHIELD, LAMP TRAY | New OEM | Contact Us | |
| 02-4124 | GaSonics | REFLECTOR, W/THERMOSTAT MOUNT LAMP TRAY | New OEM | Contact Us | |
| 02-4172 | GaSonics | INSERT, ALUM, ASTEX APPLICATOR | New OEM | Contact Us | |
| 02-4281 | GaSonics | BLADE, ATM ROBOT | New OEM | Contact Us | |
| 02-4282 | GaSonics | COVER, TUBE | New OEM | Contact Us | |
| 02-4286 | GaSonics | COVER, ATM ROBOT | New OEM | Contact Us | |
| 02-4483 | GaSonics | STRAP, RF, 150MM,IRIDIA-DL | New OEM | Contact Us | |
| 02-460636-00 | CMP | ASSY,PAD BACKING RIVETED,ADHESIVE MOD | New OEM | Contact Us | |
| 02-460637-00 | CMP | ASSY,PAD BKR RIVET,16HOLE,CTR PLUG,ADHES | New OEM | Contact Us | |
| 02-460845-00 | CMP | ASSY,PAD BKR,RIVETED,15 HOLES,ADHESIVE M | New OEM | Contact Us | |
| 02-460847-00 | CMP | ASSY,PAD BACKER,16 HOLES,ADHESIVE MOD | New OEM | Contact Us | |
| 02-460848-00 | CMP | ASSY,PAD BACKER,RIVETED,FLAT,ADHESIVE MOD | New OEM | Contact Us | |
| 02-462284-00 | CMP | ASSY,PAD BACKER,RIVETED,25 HOLES,ADHESIV | New OEM | Contact Us | |
| 02-462400-00 | CMP | ASSY,PAD BACKER,RIVET,16 HOLE,CTR PLUG,SLOTTED,ADHESIVE MOD | New OEM | Contact Us | |
| 02-4763 | GaSonics | BRKT,MOUNTING,MFC | New OEM | Contact Us | |
| 0250-111774 | CMP | SWITCH,EMERGENCY OFF | New OEM | Contact Us | |
| 0250-700639 | CMP | SWITCH,PROXIMITY | New OEM | Contact Us | |
| 0250-700640 | CMP | SWITCH, PROXIMITY | New OEM | Contact Us | |
| 0250-700641 | CMP | SWITCH,SMC VACUUM | New OEM | Contact Us | |
| 0250-717242 | CMP | BUTTON,ILLUM PUSH | New OEM | Contact Us | |
| 0250-718799 | CMP | SWITCH,MICRO CE CERTIFIED | New OEM | Contact Us | |
| 0250-737505 | CMP | SWITCH,PRESSURE DIGITAL 0-142 PSI | New OEM | Contact Us | |
| 0250-737599 | CMP | SWITCH,DISCONNECT 3POLE ROTARY 20A | New OEM | Contact Us | |
| 0250-738366 | CMP | SWITCH,SERVSWITCH 8CH VGA/KEY/MOUSE | New OEM | Contact Us | |
| 0250-770284 | CMP | CONTACT,BLOC LMP INCNDSCNT 24VAC/DC | New OEM | Contact Us | |
| 0250-770286 | CMP | CONTACT,BLOCK SGL W/SCRW TERM 1N/O | New OEM | Contact Us | |
| 0250-770288 | CMP | CONTACT,BLOCK SGL W/SCRW TERM 1NC | New OEM | Contact Us | |
| 0250-770290 | CMP | OPERATOR,PUSH SQ ILLUM WHT FLUSH DIFFUSE | New OEM | Contact Us | |
| 0250-770291 | CMP | OPERATOR,PUSH BTN RECESSED SQ BLUE | New OEM | Contact Us | |
| 0250-772816 | CMP | SWITCH,LOCAL/REMOTE ELECTRONIC | New OEM | Contact Us | |
| 02-5323-02 | CMP | SPRING,BALL PIVOT,6 IN CAP | New OEM | Contact Us | |
| 0275-104048 | CMP | SNSR,FLUID LEVEL HEAT EXCHANGER | New OEM | Contact Us | |
| 0275-110003 | CMP | SNSR,PRESSURE 0-100PSI 0-5VOLT | New OEM | Contact Us | |
| 0275-110985 | CMP | SNSR,PRESSURE 0-15PSIG 1-5V OUT | New OEM | Contact Us | |
| 0275-111659 | CMP | SNSR,PROXIMITY M14 5-8MM SHIELDED | New OEM | Contact Us | |
| 0275-111660 | CMP | SNSR, INDUCTIVE PROX 3MM NON-SHLD | New OEM | Contact Us | |
| 0275-700597 | CMP | SNSR,CYLINDER | New OEM | Contact Us | |
| 0275-701360 | CMP | SNSR,FIBER UNIT FU 6F | New OEM | Contact Us | |
| 0275-727375 | CMP | WAND,4 PORT END EFFECTOR | New OEM | Contact Us | |
| 0275-737838 | CMP | XDCR,0-10 PSIG 4-20MA | New OEM | Contact Us | |
| 0275-738042 | CMP | SNSR,PROX SWITCH INDUCTIVE | New OEM | Contact Us | |
| 0275-738229 | CMP | LOAD CELL,COMPRESSION MINI | New OEM | Contact Us | |
| 0275-738525 | CMP | SNSR, MAGNETIC AIR CYL NPN | New OEM | Contact Us | |
| 0275-739165 | CMP | SNSR,GRIPPER | New OEM | Contact Us | |
| 0275-739183 | CMP | SNSR, PROX 12MM DIA CAPT NONSHIELD | New OEM | Contact Us | |
| 0275-739375 | CMP | SNSR,HALL NPN OMNI PIGTAIL 39 | New OEM | Contact Us | |
| 0275-770236 | CMP | SNSR,KEYENCE FS-T2 | New OEM | Contact Us | |
| 03-00022-03 | Concept One | CBL ASSY,CA18 | New OEM | Contact Us | |
| 03-00022-04 | Concept One | CABLE ASSY CA23 | New OEM | Contact Us | |
| 03-00022-09 | Concept One | CABLE ASSY,CA283 | New OEM | Contact Us | |
| 03-00026-00 | Concept One | CABLE ASSY,CA54 | New OEM | Contact Us | |
| 03-00029-02 | Concept One | CABLE ASSY,CA48 | New OEM | Contact Us | |
| 03-00031-00 | Concept One | CABLE ASSY, CA42 | New OEM | Contact Us | |
| 03-00032-00 | Concept One | CBL ASSY,CA40 | New OEM | Contact Us | |
| 03-00033-03 | Concept One | CABLE ASSY,CA51 | New OEM | Contact Us | |
| 03-00034-00 | Concept One | CABLE ASSY,CA36 | New OEM | Contact Us | |
| 03-00035-00 | Concept One | CA 41 CABLE | New OEM | Contact Us |