Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 05-50059-00 | Concept One | KIT,LEADS,DF,AC | New OEM | Contact Us | |
| 05-50072-00 | Concept One | KIT,SPDL,SEALS | New OEM | Contact Us | |
| 05-5142-02 | GaSonics | HEAT BAND, 6 IN | New OEM | Contact Us | |
| 05-60213-00 | Concept One | SPINDLE REDUCTION KIT - 150MM | New OEM | Contact Us | |
| 06-0091 | GaSonics | CHAMBER,PLASMA,QUARTZ,4MM | New OEM | Contact Us | |
| 06-0109 | GaSonics | CHAMBER,LOWER PROCESS-VHP | New OEM | Contact Us | |
| 06-0121 | GaSonics | BOILER, EXTERNAL,VHP | New OEM | Contact Us | |
| 06-0142 | GaSonics | QUARTZ,MIDDLE SHOWER HEAD PLATE | New OEM | Contact Us | |
| 06-0152 | GaSonics | QTZ,SHOWER HEAD,BOTTOM,6 IN GRID | New OEM | Contact Us | |
| 06-0153 | GaSonics | QTZ,SHOWER HEAD,BOTTOM,5 IN GRID | New OEM | Contact Us | |
| 06-2431 | GaSonics | PIN, QTZ, COOL STA,.030 HEAD, 1.25LG | New OEM | Contact Us | |
| 06-2447 | GaSonics | PIN, QTZ MUSHROOM HD - COOLING STATION | New OEM | Contact Us | |
| 06-2475 | GaSonics | BALL, SAPPHIRE, 2MM (.0787) | New OEM | Contact Us | |
| 06-2509 | Gasonics | SPACER, TOP, QUARTZ | New OEM | Contact Us | |
| 06-2516 | GaSonics | PLATE, TOP, QUARTZ | New OEM | Contact Us | |
| 06-2521 | GaSonics | PLATE, QUARTZ, 4.08 OD X 1.25 ID | New OEM | Contact Us | |
| 06-2567 | GaSonics | ISOLATING PLATE,RING CARRIER | New OEM | Contact Us | |
| 06-2568 | GaSonics | CENTERING RING, 200MM PLATEN WALL ISOLA | New OEM | Contact Us | |
| 06-2592 | GaSonics | SHOWERHEAD, 1.83 ID,CLEAN-DL | New OEM | Contact Us | |
| 06-2593 | GaSonics | CENTERING RING,150MM, PLATEN WALL ISOLATION | New OEM | Contact Us | |
| 06-2598 | GaSonics | PIN, LIFT | New OEM | Contact Us | |
| 06-2599 | GaSonics | PLATE, QTZ 4.08 OD 1.75 ID | New OEM | Contact Us | |
| 06-2605 | GaSonics | KEY, ISOLATING PLATE TO CENTERING RING, ALUMINA | New OEM | Contact Us | |
| 06-2612 | GaSonics | KEY, ISOLATING PLATE TO CENTERING RING | New OEM | Contact Us | |
| 06-2614 | GaSonics | PIN, ALIGNMENT 3/16 DIA X .35 L ALUMINA | New OEM | Contact Us | |
| 06-2619 | GaSonics | PLATE, QUARTZ,TRI, ADAPTOR | New OEM | Contact Us | |
| 06-2620 | GaSonics | PIN, PLUG, QUARTZ | New OEM | Contact Us | |
| 06-2624 | GaSonics | PLATE, TOP, UPPER | New OEM | Contact Us | |
| 06-2625 | GaSonics | PLATE, BOTTOM SAPPHIRE | New OEM | Contact Us | |
| 06-2626 | GaSonics | PLATE, TOP SAPPHIRE | New OEM | Contact Us | |
| 06-2629 | GaSonics | PLATE, MIDDLE,SAPPHIRE | New OEM | Contact Us | |
| 06-2632 | GaSonics | CAP, ISOLATOR, QUARTZ | New OEM | Contact Us | |
| 06-2640 | GaSonics | SPOOL, PLASMA,PRTRSN .50 LG,3510A | New OEM | Contact Us | |
| 06-2654 | GaSonics | ORIFICE, BOTTOM SAPPHIRE, ASTEX SAPPHIRE | New OEM | Contact Us | |
| 06-2657 | GaSonics | ISOLATING PLATE,RING CARRIER | New OEM | Contact Us | |
| 06-2679 | GaSonics | SPOOL, QUARTZ,PLASMA, SHORT, PEP PLUS | New OEM | Contact Us | |
| 06-2694 | GaSonics | CHAMBER, PLASMA,QUARTZ, PEP PLUS | New OEM | Contact Us | |
| 06-2696 | GaSonics | WINDOW, SAPPHIRE,1.25 OD X .04 THK | New OEM | Contact Us | |
| 06-2697 | GaSonics | WINDOW, SAPPHIRE,LAMP TRAY, IRIDIA-DL | New OEM | Contact Us | |
| 06-2705 | GaSonics | RING, LINER, QUARTZ,ASTEX, IRIDIA-DL | New OEM | Contact Us | |
| 06-2706 | GaSonics | COLLAR, QUARTZ,PEP PLUS | New OEM | Contact Us | |
| 06-2707 | GaSonics | INSERT, SAPPHIRE,ASTEX | New OEM | Contact Us | |
| 06-2725 | GaSonics | SHOWER HEAD, TUBE 1.83 ID, SAPPHIRE,IRID | New OEM | Contact Us | |
| 06-2726 | GaSonics | SHOWER HEAD, BOTTOM,SAPPHIRE, IRIDIA-DL | New OEM | Contact Us | |
| 06-2735 | GaSonics | TUBE, QUARTZ W/FLANGE | New OEM | Contact Us | |
| 06-2751 | GaSonics | SHOWERHHEAD,HEMISPHERICAL,150MM,IRIDIA-DL | New OEM | Contact Us | |
| 06-2753 | GaSonics | SAPPHIRE EOP WINDOW PEP-IRIDIA | New OEM | Contact Us | |
| 06-2767 | GaSonics | ORIFICE, BOTTOM,.375 I.D. SAPPHIRE ASTEX | New OEM | Contact Us | |
| 06-2768 | GaSonics | TUBE, 1.615 L,SAPPHIRE, ASTEX | New OEM | Contact Us | |
| 06-2773 | Gasonics | QUARTZ DISTRIBUITON PLATE | New OEM | Contact Us | |
| 06-2783 | GaSonics | SHOWERHEAD,HEMISPHERICAL,SAPPHIRE,SIERRA | New OEM | Contact Us | |
| 06-2792 | Gasonics | QUARTZ,SLEEVE,REMOVABLE,VHP,LG NECK | New OEM | Contact Us | |
| 06-2793 | GaSonics | WINDOW,QUARTZ,LAMP TRAY,IRIDIA-DL | New OEM | Contact Us | |
| 06-2802 | GaSonics | PIN, LIFT, SAPPHIRE,3.27L, IRIDIA-DL | New OEM | Contact Us | |
| 0700-102280 | CMP | SEAL,EPDM.765ID 1"OD .125THK | New OEM | Contact Us | |
| 0700-108450 | CMP | SEAL,SINGLE LIP 7/8OD SHAFT #8624 | New OEM | Contact Us | |
| 0700-109584 | CMP | O-RING,VITON 3.37ID .12THK 75DUR | New OEM | Contact Us | |
| 0700-109585 | CMP | O-RING,VITON 11.0ID .12THK 75DUR | New OEM | Contact Us | |
| 0700-111198 | CMP | SEAL,FACE ETHYLENE-PROPYLENE | New OEM | Contact Us | |
| 0700-111878 | CMP | O-RING,VITON .984ID X .139W | New OEM | Contact Us | |
| 0700-111879 | CMP | O-RING,VITON 8.45ID X .210W | New OEM | Contact Us | |
| 0700-111880 | CMP | O-RING,VITON 8.737ID X .103W | New OEM | Contact Us | |
| 0700-700339 | CMP | LOCKRING,SEALING 1/2" YELLOW | New OEM | Contact Us | |
| 0700-700401 | CMP | O-RING, | New OEM | Contact Us | |
| 0700-700402 | CMP | O-RING, 2-263 N70 | New OEM | Contact Us | |
| 0700-700404 | CMP | O-RING,2-271 N70 | New OEM | Contact Us | |
| 0700-700406 | CMP | O-RING,DIAPHRAGM | New OEM | Contact Us | |
| 0700-700407 | CMP | O-RING,DRIVE SHAFT | New OEM | Contact Us | |
| 0700-700408 | CMP | O-RING,DRIVELINE ADPTR | New OEM | Contact Us | |
| 0700-700409 | CMP | O-RING,2-133 N70 | New OEM | Contact Us | |
| 0700-700412 | CMP | O-RING,PAD ASSY | New OEM | Contact Us | |
| 0700-700414 | CMP | O-RING,SUMP FILTER | New OEM | Contact Us | |
| 0700-700415 | CMP | O-RING,8.737ID 8.943 OD | New OEM | Contact Us | |
| 0700-700416 | CMP | O-RING,WAFER CARRIER RING | New OEM | Contact Us | |
| 0700-700417 | CMP | O-RING,WRIST ASSEMBLY 2-118 | New OEM | Contact Us | |
| 0700-701152 | CMP | SEAL,LIP R1 SIL 3/4 O-RING 50D | New OEM | Contact Us | |
| 0700-717773 | CMP | SEAL,PAD COND SLINGER | New OEM | Contact Us | |
| 0700-718019 | CMP | O-RING,2-164 N70 | New OEM | Contact Us | |
| 0700-718487 | CMP | RING,GAARD.560 GROOVED | New OEM | Contact Us | |
| 0700-718764 | CMP | GASKET,CERAMIC WAND | New OEM | Contact Us | |
| 0700-718765 | CMP | TAPE,CERAMIC WAND UHMW | New OEM | Contact Us | |
| 0700-718869 | CMP | O-RING,VITON 2-008 | New OEM | Contact Us | |
| 0700-727372 | CMP | SEAL,SLINGER (TOP CLAMP RING) | New OEM | Contact Us | |
| 0700-737430 | CMP | SEAL,TUBE | New OEM | Contact Us | |
| 0700-737694 | CMP | SEAL,WSHR | New OEM | Contact Us | |
| 0700-737696 | CMP | GASKET,VITON | New OEM | Contact Us | |
| 0700-737699 | CMP | PLUG,HEX M5 | New OEM | Contact Us | |
| 0700-739482 | CMP | PLUG,ROTARY UNION 3/8-16 | New OEM | Contact Us | |
| 0700-739690 | CMP | PLUG,PRESSURE DRYSEAL 1/8-27 BRASS | New OEM | Contact Us | |
| 0700-739705 | CMP | SEAL,OIL PAD COND SPECIAL | New OEM | Contact Us | |
| 0700-770448 | CMP | RING,CONTACT WAND | New OEM | Contact Us | |
| 0700-770456 | CMP | RING,SUCTION | New OEM | Contact Us | |
| 0700-770479 | CMP | KICKER,CERAMIC WAND | New OEM | Contact Us | |
| 0700-770673 | CMP | O-RING,NITRILE .176 ID .316 OD | New OEM | Contact Us | |
| 0701-101741 | CMP | RING, RPC2 ENCODER SUPPORT | New OEM | Contact Us | |
| 0710-100248 | CMP | BELT,TIMING 10MM W 5MM P 300MM L | New OEM | Contact Us | |
| 0710-102665 | CMP | COUPLING,OLDHAM MOD SRD MTR/SHAF | New OEM | Contact Us | |
| 0710-104204 | CMP | ROLLER,STEPPED 5/8OD X 1/4W 1/4ID | New OEM | Contact Us | |
| 0710-109403 | CMP | WELDMENT,CLAMP V-BAND REINF LATCH | New OEM | Contact Us | |
| 0710-110959 | GaSonics | BAND,ROLLER 86 DUROMETER | New OEM | Contact Us |