Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 05-024230-00 | Concept One | KIT,RETRO,150mm,26 WFR.CASS. | New OEM | Contact Us | |
| 05-032200-04 | Concept One | EXTENDED PLATFORM,8" PLASTIC | New OEM | Contact Us | |
| 05-032627-00 | Concept One | KIT,RETRO,CASS.NEST SWITCH | New OEM | Contact Us | |
| 05-045724-00 | Concept One | KIT,RET,C1-200 DUAL HD EPD | New OEM | Contact Us | |
| 05-045725-00 | Concept One | KIT,RET,C1-150,DUAL HD EP DECT | New OEM | Contact Us | |
| 05-047249-00 | Concept One | KIT, UPGRADE, FROM A 386 TO A PENTIUM | New OEM | Contact Us | |
| 05-050169-00 | Concept One | C-1D AE 1.4KW LF GEN KIT | New OEM | Contact Us | |
| 05-10350-00 | Concept One | KIT,PIN LIFT SEAL | New OEM | Contact Us | |
| 05-110416-00 | Concept One | KIT, WINDOW, SAPPHIRE, SINGLEPORT | New OEM | Contact Us | |
| 05-110416-02 | KIT,WINDOW,SAPPHIRE DUAL EP | New OEM | Contact Us | ||
| 05-111184-00 | Concept One | KIT,FCO,CVDW,SPLIT BUSH UPGRAD | New OEM | Contact Us | |
| 05-111902-01 | Concept One | KIT, PM RF STRAP 2 BOLT | New OEM | Contact Us | |
| 05-113581-00 | Concept One | KIT,RETRO DUAL EPD C1-D-150 | New OEM | Contact Us | |
| 05-113897-00 | Concept One | FERROFLUIDIC SPINDLE UPGRADE KIT | New OEM | Contact Us | |
| 05-114025-00 | Concept One | KIT,PM,SHIMS,HEATER BLOCK | New OEM | Contact Us | |
| 05-116949-00 | Concept One | KIT,TERM PNL,UPGRD TO C1 NG | New OEM | Contact Us | |
| 05-117865-00 | Concept One | KIT,UPGRD,WOP SENSOR RED C1 | New OEM | Contact Us | |
| 05-119299-00 | Concept One | KIT, C1, LCD, UPGRADE FROM OLD MONOCHROME | New OEM | Contact Us | |
| 05-119299-02 | Concept One | KIT,C1,LCD UPGRD/WAS ZYNK VGA | New OEM | Contact Us | |
| 05-154194-00 | Concept One | KIT,RETROFIT,ROT DRIVE,C1 | New OEM | Contact Us | |
| 05-154195-00 | Concept One | KIT,RETROFIT,LIFT DRIVE,C1 | New OEM | Contact Us | |
| 05-161155-00 | GaSonics | KIT,RETROFIT,ENHANCED PLATEN,IRIDIA-DL | New OEM | Contact Us | |
| 05-162425-00 | GaSonics | KIT, MAGNETRON, 2 KW POWER HEAD, AIXCON, | New OEM | Contact Us | |
| 05-167431-00 | Concept One | KIT,PM,BI-ANUAL,C1-150,STMICR | New OEM | Contact Us | |
| 05-175653-00 | GaSonics | RETROFIT KIT,POWER CABLE, PCM AC,LEFT | New OEM | Contact Us | |
| 05-175654-00 | GaSonics | RETROFIT KIT,POWER CABLE,PCM AC, RIGHT | New OEM | Contact Us | |
| 05-2399 | GaSonics | WELDMENT, STR SECTION, ISO80, RECT CENTER | New OEM | Contact Us | |
| 05-2576 | GaSonics | WELDMENT, ISO VALVE XDUCER ASSY | New OEM | Contact Us | |
| 05-264548-00 | Concept One | RETROFIT KIT, C1, MEGAPAC UPGRADE, W/70V | New OEM | Contact Us | |
| 05-267137-00 | Concept One | RETROKIT, C1, EXT DREIVE, FIXED STRAIN RELIEF | New OEM | Contact Us | |
| 05-268596-00 | GaSonics | RETROFIT KIT,L3510/A3010,I/O BOARD | New OEM | Contact Us | |
| 05-2701 | GaSonics | WELDMENT ASSY, GAS INPUT | New OEM | Contact Us | |
| 05-2704 | GaSonics | WELDMENT, SPRT BRK,VAC | New OEM | Contact Us | |
| 05-2714 | GaSonics | WELDMENT, HEATER PLATEN | New OEM | Contact Us | |
| 05-2716 | GaSonics | BRACKET, SUPPORT VACUUM EXHAUST | New OEM | Contact Us | |
| 05-2733 | GaSonics | WELDMENT, GAS CAP GAS FEED | New OEM | Contact Us | |
| 05-274815-00 | Concept One | RETROFIT KIT, C1, MEGAPAC U | New OEM | Contact Us | |
| 05-274816-00 | Concept One | RETROKIT,C1,MEGAPAC UPGRD,W/90V,NO LINE FLTR | New OEM | Contact Us | |
| 05-2762 | GaSonics | WELDMENT, STR SECTION ISO-80,REACTOR CENTER | New OEM | Contact Us | |
| 05-2793 | GaSonics | ELBOW/REDUCER, 90 DEGREE, W/ SIDE PORT - WELDMENT | New OEM | Contact Us | |
| 05-2854 | GaSonics | ELECTRODE ASSY, SIX SPOKE WELDMENT | New OEM | Contact Us | |
| 05-2869 | GaSonics | GASLINE, GAS BOX TO PREFIRE, PEP 3010 | New OEM | Contact Us | |
| 05-289164-00 | Concept One | RETROKIT,C2SEQ-X,FORKS,STD,CERAMIC BOTTOM PLATE | New OEM | Contact Us | |
| 05-290438-00 | Concept One | RETROKIT,C2SEQ,AC & RF PWR NI FEEDTHRUS | New OEM | Contact Us | |
| 05-2905 | GaSonics | WELDMENT, ELECTRODE, SIX SPOKE | New OEM | Contact Us | |
| 05-290813-00 | CMP | RETROKIT,CLARUS CLEANER,ROTATION DETECTIon | New OEM | Contact Us | |
| 05-2911 | GaSonics | PLATE, TOP QUARTZ WELDMENT | New OEM | Contact Us | |
| 05-2967 | GaSonics | FITTING, NW50, 4 IN L, W/T NW40 1 IN L | New OEM | Contact Us | |
| 05-3005 | GaSonics | JUNCTION BOX | New OEM | Contact Us | |
| 05-3011 | GaSonics | WELDMENT ASSY, GAS INLET/PREFIRE | New OEM | Contact Us | |
| 05-3024 | GaSonics | TUBE, QUARTZ FUNNEL,1/2 OUTLET, | New OEM | Contact Us | |
| 05-304946-00 | GaSonics | RETROKIT,PEP 3010A LAMP CONTROLLER,SCR BOARD, OEM | New OEM | Contact Us | |
| 05-305055-00 | Concept One | RETROKIT,C1-D,CERAMIC BTM PLT | New OEM | Contact Us | |
| 05-3055 | GaSonics | BELLOWS, LIFT PIN,DDP, WELDMENT | New OEM | Contact Us | |
| 05-3059 | GaSonics | DOCK-PLATE, ENCL, RF | New OEM | Contact Us | |
| 05-306158-00 | Concept One | RETROKIT, C1-D,LL DOOR SHAFT | New OEM | Contact Us | |
| 05-313042-00 | Concept One | RETRO KIT CID WATLOW TEMPERATURE CONTROLLER | New OEM | Contact Us | |
| 05-3131 | GaSonics | COVER WELDMENT,CHAMBER, CLEAN-DL | New OEM | Contact Us | |
| 05-313390-00 | Concept One | RETROKIT,C1,OVERTEMP REPLACEMENT | New OEM | Contact Us | |
| 05-317075-00 | Concept One | C1, 15" LCD TOUCHSCREEN | New OEM | Contact Us | |
| 05-3173 | GaSonics | COVER, HOUSING, LAMP TRAY-4, DDP/DL | New OEM | Contact Us | |
| 05-317883-00 | GaSonics | EUROTHERM UPGRADE KIT | New OEM | Contact Us | |
| 05-319014-00 | Concept One | RETROKIT,INTFC BOX,PURGE PANEL | New OEM | Contact Us | |
| 05-323453-00 | Concept One | RETROKIT, AE MATCH, C1D 200MM | New OEM | Contact Us | |
| 05-323453-01 | Concept One | RETROKIT,AE MATCH,C1D 150MM,C1W | New OEM | Contact Us | |
| 05-3241 | GaSonics | ADAPTOR, NW40,PLASMA ENCLOSURE | New OEM | Contact Us | |
| 05-3332 | GaSonics | EXTENDER, TOP COVER,SAPPHIRE PLUG | New OEM | Contact Us | |
| 05-3333 | GaSonics | LAMP HOUSING,4-WINDOW (QUARTZ) IRIDIA | New OEM | Contact Us | |
| 05-3348 | GaSonics | HOUSING, SLIDE | New OEM | Contact Us | |
| 05-3349 | GaSonics | MOUNT, ACTUATOR | New OEM | Contact Us | |
| 05-3362 | GaSonics | WELDMENT,BELLOWS AND SHAFT,CLTC,ACTUATOR | New OEM | Contact Us | |
| 05-3366 | GaSonics | CAVITY, PLASMA SOURCE, IRIDIA-DL | New OEM | Contact Us | |
| 05-3370 | GaSonics | LAMP HOUSING,4-WINDOWS, IRIDIA-DL | New OEM | Contact Us | |
| 05-3389 | GaSonics | WELDMENT, HEATER PLATEN, PEP PLUS | New OEM | Contact Us | |
| 05-3391 | GaSonics | WELDMENT, GAS LINE ASSY, ADAPTER, FLEX,PEP PLUS | New OEM | Contact Us | |
| 05-3413 | GaSonics | WELDMENT ASSY, GAS INPUT, PEP PLUS | New OEM | Contact Us | |
| 05-346895-00 | Concept One | RETROKIT,PEND VLV,C1D EXT COLD_HOT TV,13.55 OR 13.25 TUBE | New OEM | Contact Us | |
| 05-346895-01 | Concept One | MFG KIT, VAT PENDLUM VALVE CID, HEATED | New OEM | Contact Us | |
| 05-346895-02 | Concept One | RETROKIT,C1D,PEND VLV INTERNAL COLD VLVS | New OEM | Contact Us | |
| 05-346895-03 | Concept One | RETROKIT,C1D,PEND VLV INTERNAL HOT VLVS | New OEM | Contact Us | |
| 05-347021-00 | Concept One | RETROKIT,C1 HOIST LOCK ASSEMBLY | New OEM | Contact Us | |
| 05-3499 | GaSonics | WELDMENT, GAS CAP,PLASMA SOURCE,IRIDIA | New OEM | Contact Us | |
| 05-3519 | GaSonics | WELDMENT, BELLOWS FLANGE, ROTATION | New OEM | Contact Us | |
| 05-352599-00 | Concept One | RETROKIT, HEATER FUSE REPLACEMENT WITH CIRCUIT BREAKERS | New OEM | Contact Us | |
| 05-355338-00 | Concept One | KIT, RETRO DUAL END RF, IMP | New OEM | Contact Us | |
| 05-355339-01 | Concept One | RETROKIT,TRACE-RITE W/TRAZAR,C2SEQ ALL | New OEM | Contact Us | |
| 05-355399-00 | Concept One | RETROKIT,TRACE-RITE W/AE MATCH C2SEQ ALL | New OEM | Contact Us | |
| 05-3606 | GaSonics | PROCESS CHAMBER,WELDMENT, IRIDIA-DL | New OEM | Contact Us | |
| 05-363177-00 | Concept One | RETROKIT,C1-D,GP 375 DIGITAL CTRL LL | New OEM | Contact Us | |
| 05-3636 | GaSonics | PLATEN, BRAZE,W/CLTC, 200MM,IRIDIA-DL | New OEM | Contact Us | |
| 05-384601-00 | CMP | RETROKIT,200MM,PC COMP. REPLACEMENT | New OEM | Contact Us | |
| 05-403148-00 | Concept One | RETROKIT,SSR FAN AND T-STAT,C1-D | New OEM | Contact Us | |
| 05-408056-00 | Concept One | RETROKIT, STD FORKS, CERAMIC BOT PLT, C2SEQ-X, CID-200MM | New OEM | Contact Us | |
| 05-408057-00 | Concept One | RETROKIT,THIN FORKS,CERAMIC BOT PLT,C2SEQ-X,C1D-200MM | New OEM | Contact Us | |
| 05-408058-00 | Concept One | RETROKIT,STD FORKS,150MM CERAMIC BOT PLT,C1-D | New OEM | Contact Us | |
| 05-420173-00 | Concept One | RETROKIT_CID_RF ENCLOSURE W/REMOVABLE PNLS | New OEM | Contact Us | |
| 05-460466-00 | GaSonics | RETROKIT,LAMP TRAY,IRIDIA | New OEM | Contact Us | |
| 05-50032-00 | Concept One | KIT,STRAP,RF PLATE TO NOZZLE | New OEM | Contact Us | |
| 05-50036-00 | Concept One | KIT,DOOR PARTS,LL | New OEM | Contact Us | |
| 05-50057-00 | Concept One | KIT,STRAPS,LF BIAS | New OEM | Contact Us |