Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 0710-111474 | CMP | COUPLING,SHAFT 10MM HELICAL SST HDW | New OEM | Contact Us | |
| 0710-112384 | CMP | BELT,1/5 PITCH 83 GROOVE URETHANE | New OEM | Contact Us | |
| 0710-112385 | CMP | BELT,1/5 PITCH 60 GROOVE URETHANE | New OEM | Contact Us | |
| 0710-700035 | CMP | BELT,POLISH HEAD DRIVE | New OEM | Contact Us | |
| 0710-700328 | CMP | LATCH, FLUSH PULL | New OEM | Contact Us | |
| 0710-700329 | CMP | LATCH,WINDOW | New OEM | Contact Us | |
| 0710-700619 | CMP | SPRING,.343 OD 1-1/2L .062 WIRE SST | New OEM | Contact Us | |
| 0710-700620 | CMP | SPRING,OPPOSING SS | New OEM | Contact Us | |
| 0710-717013 | CMP | CLAMP,BEARING RING WAFER HEAD | New OEM | Contact Us | |
| 0710-717018 | CMP | PULLEY,MOD WAVE GENERATOR 48T | New OEM | Contact Us | |
| 0710-717023 | CMP | SPOOL,BOTTOM DRIVE | New OEM | Contact Us | |
| 0710-717026 | CMP | CLAMP,V-BAND UPPER RING | New OEM | Contact Us | |
| 0710-717027 | CMP | CLAMP,V-BAND LOWER RING | New OEM | Contact Us | |
| 0710-717058 | CMP | KEY,DRIVE COLLAR WAFER HEAD | New OEM | Contact Us | |
| 0710-717390 | CMP | PIN,DELRIN DRIVE PIN | New OEM | Contact Us | |
| 0710-717682 | CMP | PULLEY,WAVE GENERATOR MODIFIED | New OEM | Contact Us | |
| 0710-717992 | CMP | STRAINER,SLURRY DRAIN (SHORT/NEW) | New OEM | Contact Us | |
| 0710-722029 | CMP | MESH,SLURRY DETAIL | New OEM | Contact Us | |
| 0710-727028 | CMP | STOP,CASSETTE | New OEM | Contact Us | |
| 0710-727158 | CMP | RING,CONN SLRY SHIELD | New OEM | Contact Us | |
| 0710-727354 | CMP | STRAINER,BETA DRAIN SLRY BASIN (OLD | New OEM | Contact Us | |
| 0710-727369 | CMP | FUNNEL,HOSE | New OEM | Contact Us | |
| 0710-728073 | CMP | KEY,NYLATRON DRIVESHAFT WAFER HEAD | New OEM | Contact Us | |
| 0710-730008 | CMP | WEDGE,HOME STOP PAD CONDITIONER | New OEM | Contact Us | |
| 0710-730009 | CMP | WEDGE,LIMIT STOP PAD CONDITIONER | New OEM | Contact Us | |
| 0710-737381 | CMP | GEAR,ROTARY ACTUATOR | New OEM | Contact Us | |
| 0710-737382 | CMP | CLAMP,CONN SHAFT | New OEM | Contact Us | |
| 0710-737522 | CMP | PULLEY,1/5 PITCH 20 GROOVES | New OEM | Contact Us | |
| 0710-737581 | CMP | COUPLING, 3/8ID X 1/2ID X 1-1/8OD | New OEM | Contact Us | |
| 0710-737583 | CMP | CLAMP,SPLINE SHAFT | New OEM | Contact Us | |
| 0710-737700 | CMP | CLAMP, V-BAND LWR RING-SST | New OEM | Contact Us | |
| 0710-737704 | CMP | PULLEY,20 GROOVE GEARBOX | New OEM | Contact Us | |
| 0710-737711 | CMP | BELT,1/5 PITCH 60 GROOVE URETHANE | New OEM | Contact Us | |
| 0710-738070 | CMP | CHAIN,ENERGY SERIES 07 15 LINKS | New OEM | Contact Us | |
| 0710-738578 | CMP | BELT,TIMING 3/8PITCH 1/2"W 36TOOTH | New OEM | Contact Us | |
| 0710-738581 | CMP | BELT,TIMING 3/8PITCH 1/2"WD 44TOOTH | New OEM | Contact Us | |
| 0710-738669 | CMP | JUMPER, STRIP CERAMIC WEAR RING 150M | New OEM | Contact Us | |
| 0710-738674 | CMP | PULLEY,FLANGED INTERNAL UPPER ARM | New OEM | Contact Us | |
| 0710-738675 | CMP | PULLEY,FLANGED LOWER PLATEN | New OEM | Contact Us | |
| 0710-738677 | CMP | PULLEY, UPPER ARM BALL SPLINE | New OEM | Contact Us | |
| 0710-738716 | CMP | PULLEY,INTERNAL UPPER ARM | New OEM | Contact Us | |
| 0710-738902 | CMP | BAND,SCRUBBER BOX URETHANE TALL | New OEM | Contact Us | |
| 0710-738904 | CMP | ROLLER,SCRUBBER 1.700 OD TALL | New OEM | Contact Us | |
| 0710-738939 | CMP | BELT,TIMING 3/8PITCH X 1/2WD 46TTH | New OEM | Contact Us | |
| 0710-739270 | CMP | GEARHEAD,PLANETARY INLINE 10:1 | New OEM | Contact Us | |
| 0710-739462 | CMP | BELT,960MM PITCH HI SPEED | New OEM | Contact Us | |
| 0710-739471 | CMP | PULLEY, W/2 FLATS UPPER BRUSH | New OEM | Contact Us | |
| 0710-739691 | CMP | KEY,SQUARE PARALLEL 1/8 X 1/8 | New OEM | Contact Us | |
| 0710-739742 | CMP | PULLEY,8MM X 64 TOOTH | New OEM | Contact Us | |
| 0710-739996 | CMP | COUPLING,HELICAL 1"X2.2"X10MMX10MM | New OEM | Contact Us | |
| 0710-740535 | Concept One | COUPLING,PAD COND UPR SHAFT SPECIAL | New OEM | Contact Us | |
| 0710-771033 | CMP | HANDLE,SYSTEM STANDARD | New OEM | Contact Us | |
| 0710-771034 | CMP | INSERT,LOCK PUSH BUTTON | New OEM | Contact Us | |
| 0710-772061 | CMP | COUPLING,1/2 X 1/2 W/KEY | New OEM | Contact Us | |
| 0720-109071 | CMP | RING,CENTER CONTACT WAND | New OEM | Contact Us | |
| 0720-109381 | CMP | MOUNT,NOSE BLOCK | New OEM | Contact Us | |
| 0720-110256 | CMP | RING,GIMBAL SST | New OEM | Contact Us | |
| 0720-111531 | CMP | BRKT,WAFER MAPPING COMB OUTSIDE | New OEM | Contact Us | |
| 0720-111532 | CMP | BRKT,WAFER MAPPING COMB INSIDE | New OEM | Contact Us | |
| 0720-700483 | CMP | RAIL,SLIDE SST | New OEM | Contact Us | |
| 0720-700983 | CMP | RING,LIFTING SLURRY SHIELD | New OEM | Contact Us | |
| 0720-717012 | CMP | BELL,WAFER HEAD | New OEM | Contact Us | |
| 0720-717764 | CMP | CLIP, PAD COND TURRET MOUNTING LRG | New OEM | Contact Us | |
| 0720-717767 | CMP | CLIP,PAD COND TURRET MOUNTING SMALL | New OEM | Contact Us | |
| 0720-718327 | CMP | RING,STRP BUMPER ALUMINA WEAR 200MM | New OEM | Contact Us | |
| 0720-727325 | CMP | SUPPORT,LEGS SPRAY BOX | New OEM | Contact Us | |
| 0720-727373 | CMP | BELL,MOD POLISH | New OEM | Contact Us | |
| 0720-727459 | CMP | SUPPORT,TAIL END EFFECTOR | New OEM | Contact Us | |
| 0720-730015 | CMP | MOUNT, CYLINDER NOSE PAD CONDITIONER | New OEM | Contact Us | |
| 0720-737507 | CMP | MOUNT, CYLINDER LWR BRUSH | New OEM | Contact Us | |
| 0720-737666 | CMP | MOUNT, GEARHEAD | New OEM | Contact Us | |
| 0720-737791 | CMP | MOUNT,WAFER CARRIER 316 SST | New OEM | Contact Us | |
| 0720-738198 | CMP | STANDOFF,WAFER HOLDER | New OEM | Contact Us | |
| 0720-738591 | CMP | LEG,LF BRKT UPPER ARM BALL SPLNE | New OEM | Contact Us | |
| 0720-738592 | CMP | LEG,RT BRKT UPPER ARM BALL SPLNE | New OEM | Contact Us | |
| 0720-738906 | CMP | RING, MOUNTING ROLLER 200MM/FLATS | New OEM | Contact Us | |
| 0720-739665 | CMP | MOUNT,SNSR PAD COND MODIFIED | New OEM | Contact Us | |
| 0720-739671 | CMP | MOUNT,BOTTOM BRUSH 200MM | New OEM | Contact Us | |
| 0720-770043 | CMP | MOUNT,DWO SNSR | New OEM | Contact Us | |
| 0720-7700443 | CMP | MOUNT,DWO SNSR | New OEM | Contact Us | |
| 0720-770450 | CMP | BUTTON,EDGE | New OEM | Contact Us | |
| 0720-770451 | CMP | BUTTON,776 CENTER | New OEM | Contact Us | |
| 0720-770459 | CMP | MOUNT,WAND R2 | New OEM | Contact Us | |
| 0725-730010 | CMP | Cap, Pad conditioner, 676/776/MV | New OEM | Contact Us | |
| 0725-738892 | CMP | STRIP,RUBBER PAD COND BLADDERLESS | New OEM | Contact Us | |
| 0725-790219 | CMP | CAP,WHITE | New OEM | Contact Us | |
| 0730-110224 | CMP | BUSHING,FLG 5/16ID 3/8OD 3/8LG T500 | New OEM | Contact Us | |
| 0730-727009 | CMP | BUSHING,SPACER | New OEM | Contact Us | |
| 0730-727318 | CMP | SPACER,SM PNEUMATIC PANEL | New OEM | Contact Us | |
| 0730-737736 | CMP | INSERT,WAFER HD SST MYLAR | New OEM | Contact Us | |
| 0730-738977 | CMP | BUSHING,FLANGED 1/4 X 3/8 | New OEM | Contact Us | |
| 0730-739743 | CMP | BUSHING,QD SK 1"BORE NICKEL PLATED | New OEM | Contact Us | |
| 0735-111651 | CMP | DIAPHRAGM,SLURRY EPDM | New OEM | Contact Us | |
| 0735-717016 | CMP | DIAPHRAGM,WAFER HEAD FAIRPRENE | New OEM | Contact Us | |
| 0735-718650 | CMP | DIAPHRAGM,WAFER HEAD 150MM | New OEM | Contact Us | |
| 0740-100199 | CMP | BEARING,RADIAL 35 OD X 16 ID X 11 | New OEM | Contact Us | |
| 0740-111269 | CMP | ROLLER,WAFER LARGE DIAMETER | New OEM | Contact Us | |
| 0740-111382 | CMP | ROLLER, TYPE A | New OEM | Contact Us | |
| 0740-700030 | CMP | BEARING,CROSS ROLLER | New OEM | Contact Us | |
| 0740-700034 | CMP | BEARING,RULON 3/8 X 5/8 X 3/4 LG | New OEM | Contact Us |