Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 04-264558-00 | Concept One | KIT,DC DIST PS SYS,W/ 70V SUPPLY | New OEM | Contact Us | |
| 04-265855-00 | Concept One | PM KIT,RF STRAP & CLAMP,3 BOLT | New OEM | Contact Us | |
| 04-266798-00 | GaSonics | KIT, S/W, L3510, V7.50, REL | New OEM | Contact Us | |
| 04-268489-00 | Gasonics | KIT,S/W,PEP,V4.50,EPROM SET | New OEM | Contact Us | |
| 04-270339-00 | Concept One | KIT,REPLACEMENT, PRESSURE SWITCH | New OEM | Contact Us | |
| 04-270790-00 | Concept One | KIT,REPLACEMENT, CONTACTOR,3 P,50 A,120V | New OEM | Contact Us | |
| 04-279926-00 | GaSonics | KIT,POWER SUPPLY REPLACEMENT,200W,5V,24V | New OEM | Contact Us | |
| 04-285223-00 | Concept One | PM KIT,C1D,SHOWERHEAD ASSY,FAIRCHILD,150 | New OEM | Contact Us | |
| 04-305036-00 | GaSonics | KIT,PEP SCR BOARD UPGRADE | New OEM | Contact Us | |
| 04-306658-00 | Concept One | PM KIT,VAT PEND VLV,STD KALREZ8085,C3VCTR | New OEM | Contact Us | |
| 04-306660-00 | Concept One | PM KIT,VAT PEND VLV,ACT SEALS,KALREZ8085,CE! | New OEM | Contact Us | |
| 04-321956-00 | GaSonics | KIT,WET IRIDIA SPRING DL | New OEM | Contact Us | |
| 04-321959-00 | GaSonics | KIT,STANDARD SPARES IRIDIA DL | New OEM | Contact Us | |
| 04-321972-00 | GaSonics | KIT,MAJOR QUARTZ PEP3510 | New OEM | Contact Us | |
| 04-326495-00 | CMP | KIT,SCRW,SKT,HEX,6-32 X .75IN,SST,INT SE | New OEM | Contact Us | |
| 04-327327-00 | CMP | KIT,REBUILD,SEALS & BEARING,ROTARY UNION | New OEM | Contact Us | |
| 04-328006-00 | CMP | KIT,EDGE GAP,NON-CONTACT,676/776 | New OEM | Contact Us | |
| 04-340270-00 | Concept One | KIT,C1D,KEEPER,LATCH | New OEM | Contact Us | |
| 04-343099-00 | CMP | KIT,SENSOR,BUFF,PRESSURE 0-100PSI 0-5VOL | New OEM | Contact Us | |
| 04-343709-00 | CMP | KIT,ONSERT INSTALL,O-RING,AEON | New OEM | Contact Us | |
| 04-351063-00 | CMP | KIT,INTEGRATION SFTW CNTRLS 472 AEON | New OEM | Contact Us | |
| 04-354359-00 | CMP | KIT,PIK,CLAMP,CAP,DRIVELINE COUPLING | New OEM | Contact Us | |
| 04-358890-00 | Concept One | KIT,QUARTZ WAFER SENSOR,C1D | New OEM | Contact Us | |
| 04-361326-00 | CMP | KIT,1/2HP,S11 DRIVE UPGD | New OEM | Contact Us | |
| 04-361558-00 | CMP | KIT,472 AEON APP1000 | New OEM | Contact Us | |
| 04-361601-00 | CMP | KIT,2HP,S11 DRIVE UPGD | New OEM | Contact Us | |
| 04-365069-00 | CMP | KIT,REMOVAL,ORBIT MTR,676,776,MV200 | New OEM | Contact Us | |
| 04-366835-00 | CMP | KIT,472 AEON STD WATER TRK SNSRS | New OEM | Contact Us | |
| 04-367341-00 | CMP | PM KIT,MV200,MOMENTUM HEAD REBUILD | New OEM | Contact Us | |
| 04-367356-00 | CMP | PM KIT,R2,776 POLISHER | New OEM | Contact Us | |
| 04-367357-00 | CMP | PM KIT, R1, 776 POLISHER | New OEM | Contact Us | |
| 04-369577-00 | Concept One | KIT,REPLACE CDL1106 MANOMETER AND CABLE | New OEM | Contact Us | |
| 04-370748-00 | Concept One | KIT,REPLACED MKS 223B,10 TORR,BY MANOMET | New OEM | Contact Us | |
| 04-370749-00 | Concept One | KIT,REPLACED MKS 223B,1 TORR BY DIFF CAP | New OEM | Contact Us | |
| 04-371039-00 | CMP | KIT, CYLINDER, SWITCH, MV200 | New OEM | Contact Us | |
| 04-375970-00 | GaSonics | KIT,SWITCH,HALL EFFECT,L3510 | New OEM | Contact Us | |
| 04-382310-00 | CMP | KIT,ENDPOINT,VERITY SYSTEM,ROHS | New OEM | Contact Us | |
| 04-383347-00 | CMP | KIT,PNEUMATICS ROBOT R1 | New OEM | Contact Us | |
| 04-383348-00 | CMP | KIT,ELECTRICAL ROBOT R1 | New OEM | Contact Us | |
| 04-383550-00 | CMP | KIT,SENTINEL,ETHERNET READY,MV200 | New OEM | Contact Us | |
| 04-383553-00 | CMP | KIT,CONV,ROHS FLASHLAMP,SPECTROGRAPH,MV | New OEM | Contact Us | |
| 04-388692-00 | Concept One | KIT,15" LCD,TOUCHSCREEN,POWER BRICK | New OEM | Contact Us | |
| 04-391755-00 | CMP | KIT,CYLINDER,UPPER BRUSH | New OEM | Contact Us | |
| 04-398415-00 | CMP | KIT,RELAY,1P,208V,125A,SSR,W/ COVER | New OEM | Contact Us | |
| 04-412392-00 | GaSonics | DISPLAY,OPEN FRAME LCD TOUCH,15",30W,100 | New OEM | Contact Us | |
| 04-414154-00 | CMP | KIT,CES COMPUTERS DUAL CORE MV200 | New OEM | Contact Us | |
| 04416-01 | GaSonics | MOTOR ASSY OUTPUT DRIVE | New OEM | Contact Us | |
| 04-421294-00 | CMP | KIT,POWER SUPPLY,AURIGA VISION POLISHER | New OEM | Contact Us | |
| 04-422768-00 | CMP | KIT,POWER SUPPLY,MV200 | New OEM | Contact Us | |
| 04-434085-00 | Concept One | KIT,PANEL,TEMP LIMIT REPLACEMENT,C1D | New OEM | Contact Us | |
| 04-439001-00 | CMP | KIT,ARM GUARD RELAY,372M | New OEM | Contact Us | |
| 04440-01 | GaSonics | CAPACITOR ASSY,AUTOMATCH OUTPUT | New OEM | Contact Us | |
| 04-444044-00 | CMP | KIT,UPPER BRUSH MOTOR MV200 | New OEM | Contact Us | |
| 04-446178-00 | CMP | KIT,ADAPTER,CYLINDER,AIR 1.5BORE .5 STRK | New OEM | Contact Us | |
| 04-451858-00 | CMP | KIT,MONITOR REPLACEMENT MV200 | New OEM | Contact Us | |
| 04-456482-00 | CMP | KIT,SHIP,TEMPLATE,V3,52M | New OEM | Contact Us | |
| 04-460619-00 | CMP | KIT,FTG,MOD SCRW,SLURRY DIAPHRAGM PM,776 | New OEM | Contact Us | |
| 04-460796-00 | GaSonics | KIT,LAMP TRAY,IRIDIA DL | New OEM | Contact Us | |
| 04-461905-00 | GaSonics | ASSY,LAMP HOLDER,IRIDIA-DL | New OEM | Contact Us | |
| 04-462997-00 | Concept One | PM KIT,RPC VLV,RPC NEXT,C2SEQ-X | New OEM | Contact Us | |
| 04-464279-00 | CMP | KIT,OPTIC FIBER TEMP. CNTRLR,OR4000T | New OEM | Contact Us | |
| 04-708357-01 | CMP | SHAFT ASSY, WFR LIFT | New OEM | Contact Us | |
| 04-709551-01 | CMP | VALVE, SOL, 24VDC, 3-PORT, 2-POS | New OEM | Contact Us | |
| 04-712161-01 | CMP | SHIELD, BELLY, CMAG II | New OEM | Contact Us | |
| 04-712186-01 | CMP | COLLAR,P/P RAM PAD | New OEM | Contact Us | |
| 04-719409-01 | GaSonics | SENSOR,FLOW,2.5GPM | New OEM | Contact Us | |
| 04-8004-01 | GaSonics | WET WRAP,1/4 IN T,2 FT X3 FT | New OEM | Contact Us | |
| 04-8005-00 | GaSonics | KAOWOOL,CERAMIC FIBRE(ISSUE 25 LB INCREM | New OEM | Contact Us | |
| 05-00003-03 | Concept One | NEW STYLE 150MM TOP PLATE UPGRADE | New OEM | Contact Us | |
| 05-00005-00 | Concept One | KIT,RETRO,1P HTR REPLACE | New OEM | Contact Us | |
| 05-00005-01 | Concept One | RF STRAP, KIT | New OEM | Contact Us | |
| 05-00007-00 | Concept One | PM KIT, REACTOR CHAMB | New OEM | Contact Us | |
| 05-00009-00 | Concept One | PM KIT, POU/SI FILTER | New OEM | Contact Us | |
| 05-00010-00 | Concept One | PM KIT, N2 FILTER | New OEM | Contact Us | |
| 05-00011-00 | Concept One | PM KIT, GAS FEED-THRU | New OEM | Contact Us | |
| 05-00013-00 | Concept One | PM KIT, SPINDLE OVERHAUL | New OEM | Contact Us | |
| 05-00023-00 | Concept One | PM KIT, SEMI-ANNUAL | New OEM | Contact Us | |
| 05-00024-00 | Concept One | PM KIT, HTR CONN DUAL FR | New OEM | Contact Us | |
| 05-00025-00 | Concept One | PM KIT, HTR CONN 1-PC | New OEM | Contact Us | |
| 05-00066-00 | Concept One | KIT,PM,REACT CHAMB 200MM | New OEM | Contact Us | |
| 05-00077-00 | Concept One | KIT,ONE ARM ROBOT SEALS | New OEM | Contact Us | |
| 05-00080-00 | Concept One | KIT,DUAL SHUNT FCO 42 | New OEM | Contact Us | |
| 05-00104-00 | Concept One | KIT,4"VLV INTLK | New OEM | Contact Us | |
| 05-00112-00 | Concept One | PM KIT, VALVE STACK SEALS | New OEM | Contact Us | |
| 05-00118-02 | Concept One | KIT,FCO#71 LL PRESS CONTROL | New OEM | Contact Us | |
| 05-00132-00 | Concept One | KIT,FCO 60 HEAT CURRENT MON | New OEM | Contact Us | |
| 05-00166-00 | Concept One | KIT,FCO,69 TRZAR MATCH,NTWK | New OEM | Contact Us | |
| 05-00184-00 | Concept One | KIT,FCO,R-F RAMP REMOTE AC | New OEM | Contact Us | |
| 05-00195-00 | Concept One | KIT,FCO #92 BACKFILL SOFTSTART | New OEM | Contact Us | |
| 05-00196-00 | Concept One | KIT,FCO #93 CASSETTE DOOR INLK | New OEM | Contact Us | |
| 05-00213-03 | Concept One | RETRO KIT, NON-CONTACT, 6" METAL CASSETTE | New OEM | Contact Us | |
| 05-00221-01 | Concept One | MICRO CONTAMINATION UPGRADE KIT FOR SN OVER 600 | New OEM | Contact Us | |
| 05-00228-00 | Concept One | KIT,LL,SEALS | New OEM | Contact Us | |
| 05-00229-00 | Concept One | COOL STATION UPGRADE KIT | New OEM | Contact Us | |
| 05-0127 | GaSonics | WELDMENT,ELECTRODE ASSY-L3500 | New OEM | Contact Us | |
| 05-0130 | GaSonics | WELDMENT,TEE,PRESSURE GUAGE | New OEM | Contact Us | |
| 05-0132 | GaSonics | WELDMENT,ADAPTER,BELLOWS,FLANGEE | New OEM | Contact Us | |
| 05-0153 | GaSonics | ASSY,DOOR,BEARING PLATE,TWO PIECE | New OEM | Contact Us | |
| 05-0234 | GaSonics | FLANGE, PLATEN FEEDTHRU, ALUM | New OEM | Contact Us | |
| 05-0236 | GaSonics | WELDMENT, EMI SHIELD | New OEM | Contact Us |